MKS 1579A, Инструкция по эксплуатации

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1579A/579A Chapter 5: Operation (Analog Units)
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Chapter 5: Operation (Analog Units)
Start Up the Mass Flow Controller/Meter
1. After you have successfully checked all mechanical and electrical connections and when
you are certain that there is no gas leakage, then power can be applied to the mass flow
controller or to the flow meter, respectively.
The first start up should be done preferably using non-critical gas. This could be for
example nitrogen or dry air (if there are no reactive residuals in the plumbing system) or
any inert gas.
2. Switch on the power supply.
When power is first applied, the output signal jumps to + 7,5 V.
The unit performs automatically a reset, indicated by the red / green blinking status LED
STS. Finally the LED changes to green light which indicates that the unit is ready for use.
You can monitor the flow output signal as the instrument stabilizes and the output
approaches zero. Approximately 30 minutes after power up the signal should be stable
within some millivolts close to zero.
Note
Do not use dangerous gases for the first start up. Use a non-critical gas,
for example the gas which serves for purging.
Note
If the instrument is being used to control dangerous gases, be sure that
the system is fully warmed
up before applying gases to the system. You
may choose to install a positive shutoff valve to prevent inadvertent gas
flow during the warm-up period.
Once the instrument is completely warmed up, you can proceed to zero the unit as
required.