Instruction Manual MIT-SCAN-T3
Version 02/2021
Page 39
The functionality test according to TP D-StB 12 is considered as passed
if the difference between layer thickness measurement result without
wheeled spacer and the result of the measurement with spacer,
subtracted by the spacer distance of 35 mm, is not more than the
specified accuracy of the device plus 1 mm.
6
It is important to note that the device itself has a measurement
tolerance of ± (0.5 % of the measured value + 1 mm).
If the device does not pass the functionality check, it must be sent to
the manufacturer for validation.
4
Warnings and error messages
MIT-SCAN-T3 is equipped with a comprehensive error detection
function. During measurement, the measurement signal is checked for
possible deficiencies and influences. If an error will be detected, this is
displayed subsequently to the measurement (s. example in adjacent
Fig. 34 and Fig. 35).
The following error messages may occur (Overview table on the next
pages):
6
Source: TP D-StB 12, sec. 2.2.6 Measurement
Fig. 35 Several warnings
Hint:
Perform the functionality test
on thinner layers to decrease
the influence of measurement
tolerance.
Fig. 34 Example for single
warning
