PP-18
Piezo Positioner Stage
3
Rev: 1.3
MICRONIX USA,LLC
www.micronixusa.com
Reference Manual
1.2
Recommended Controllers
The following controller that is available from MICRONIX USA for piezo stages:
▪
MMC-10
1.3
Technical Data
Motor
PM-002
Speed Max. (mm/sec)
2
Resolution Typical
(nm)
40 (digital encoder),
Bi-directional Repeatability
(nm)
± 200 (digital encoder)
Uni-directional Repeatability
(nm)
200 (digital encoder)
1.4
Load Characteristics
Load Characteristics
Fx
(N)
Fy
(N)
Fz
(N)
Mx
(Nm)
My
(Nm)
Mz
(Nm)
k
ax
(µrad/Nm)
k
ay
(µrad/Nm)
PM-002
1.5
5
5
0.1
0.1
0.1
-
-
