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Micronix ES-50 Series, Справочное руководство

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ES-

50

 

Elevation Stage

 

 

 

 

 

 

Rev: 3.05 

 

5  

Reference Manual 

MICRONIX USA,LLC 

  

www.micronixusa.com 

 
 

 
 
 
 
 
 
 

2.

 

Model Configurations 

 

2.1

 

ES-50 Order Numbers 

 

                             

 

  
 

 

 

 
 
 
  
 
 
 
 
 
 
 
   
 
 

 

 

* Other resolutions available upon request.  

 

 

 

Contact MICRONIX USA for custom versions and stacking configurations. 

 

 

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 

Order No.              

ES-50-

 

1  1   

1 

 

SM-001

 

 

 

 

 

 

1 

 
10 mm

  

 

 

 

 

 

1 

 
Open Loop

   

 

 

 

 

0 

Analog(1Vpp), 50nm*

 

 

 

 

2 

Digital(RS-422),  50nm*

 

 

 

 

3 

Digital Low Cost(RS-422), 

   

 

 

4 

 
Mechanical Limits

   

 

 

 

1 

 
Non-vacuum

  

 

 

 

 

0 

Vacuum prepared, 10

-6

 mbar

 

 

 

6 

 

  

 

Содержание ES-50 Series

Страница 1: ...S e r i e s Reference Manual Elevation Stage Open and Closed Loop Versions ES 50 USA...

Страница 2: ...ES 50 Elevation Stage Reference Manual Rev 3 05 MICRONIX USA LLC Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa com...

Страница 3: ...onments 8 5 1 1 Open Loop Installation 8 5 1 2 Closed Loop Installation Wiring Diagram 8 5 2 Vacuum Environments 9 5 2 1 Handling and Preparation 9 5 2 2 Open loop Installation Wiring Diagram 9 5 2 3...

Страница 4: ...Reference Manual MICRONIX USA LLC www micronixusa com 6 3 Dimensions 15 6 3 1 ES 50 10mm 15 7 Stacking Configurations 16 7 1 Possible Configurations 16 8 Supplementary Information 17 8 1 Maintenance...

Страница 5: ...up to 10 mm The ES 50 allows for a highly rigid XZ or XYZ setup without the need for adapter brackets when combined with the VT 50 series of linear stages Versions capable of operation in vacuum 10 6...

Страница 6: ...001 Pitch rad 300 Speed Max mm sec 5 Resolution Typical m 0 5 Open Loop 0 05 Closed Loop 0 5 Low Cost Closed Loop Bi directional Repeatability m 2 Open Loop 0 2 Closed Loop 1 Low Cost Closed Loop Uni...

Страница 7: ...1 ES 50 Order Numbers Other resolutions available upon request Contact MICRONIX USA for custom versions and stacking configurations Order No ES 50 1 1 1 SM 001 1 10 mm 1 Open Loop 0 Analog 1Vpp 50nm...

Страница 8: ...at 20 C 5 C Be sure to use the stage under the following conditions Mount to a clean and flat surface which is free of debris burrs or dings An indoor atmosphere free of corrosive gasses and condensa...

Страница 9: ...cap screws for mounting and M1 5 x 5mm dowel pins for precision alignment It may be necessary to move the carriage via the controller in order to access the base mounting holes Additional brackets ma...

Страница 10: ...5 1 1 Open Loop Installation Connecting the ES 50 in an open loop only requires that the motor cable be connected to a compatible controller No other cables or components are needed 5 1 2 Closed Loop...

Страница 11: ...etc when handling the stage as to avoid any contaminants The connectors that ship with the stage are for testing use only and should be replaced with permanent connectors prior to installation 5 2 2...

Страница 12: ...termediate feed through connector at the vacuum chamber wall that can accommodate both the motor cable and the encoder cable Important Match wire colors when connecting the Encoder Head vacuum side to...

Страница 13: ...t manually adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders 5 3 1 Encoder Module Overview 5 3 2 Encoder Module Pinout Note Proprietary pins reserved for m...

Страница 14: ...ww micronixusa com 5 3 3 Operating and Electrical Specifications 5 3 4 Output Signals Note The index pulse may be aligned with A or B at some interpolation values Power Supply 5VDC 5 330mA 30mA for se...

Страница 15: ...ple Purple Limit Switch away from base 8 Not used Not Used 9 Not used Not Used For vacuum prepared wiring blue may be substituted for green white and black for red white Limit Switch Common pin 5 is c...

Страница 16: ...themselves A hard stop is designed into the ES 50 body which will prevent the carriage from running away should the limit switches fail The limit switches are factory calibrated to ensure advertised t...

Страница 17: ...ES 50 Elevation Stage Rev 3 05 15 Reference Manual MICRONIX USA LLC www micronixusa com 6 3 Dimensions 6 3 1 ES 50 10mm ES 50 shown in retracted position Grey parts for closed loop version only...

Страница 18: ...onixusa com 7 Stacking Configurations 7 1 Possible Configurations Using the ES 50 Elevation Stage and VT 50 Linear Stage X Z 55x10 mm X Y Z 55x55x10 mm X Y Z 100x100x10 mm Using the ES 50 Elevation St...

Страница 19: ...l injury Follow the Installation Preparation requirements and use proper cable management to ensure a clean and safe operating environment Properly wire the feedback to the controller before powering...

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