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6 Operation and maintenance
872 Extension Module IC Pump
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49
1
2
3
5
6
7
8
9
10
9
8
7
10
5
4
6
Figure 33
Components of the inlet valve and outlet valve
1
Inlet valve 6.2824.170
2
Outlet valve 6.2824.160
3
Inlet valve housing
4
Outlet valve housing
5
Sealing ring (black)
6
Sleeve
7
Sapphire sleeve
The shiny side must point to ruby ball.
8
Ruby ball
9
Ceramic holder for ruby ball
10
Seal
The larger opening must point outwards.
4 Clean the components of the valve
Rinse the valve components with ultra pure water and/or acetone
and dry with a lint-free cloth.
5 Reassemble the valve
Reassemble valve components
according to figure 33, page 49
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Insert the seal with the larger opening faced downwards into the
recess of the tool.
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Lay the other valve components above another in the correct
sequence