LN0573E2111A0
Heat Exchanger
Instruction Manual
HX-0100C, HX-0300C Series
Safety precautions
Incorrect handling may cause death or injury
.
(1) Before connecting with the fittings, check if no damage or problems are found on
the fittings. Connect properly and make sure that leak test is conducted before
actual operation to prevent fluid from leaking into the atmosphere
(Hereinafter,
the fluid used is referred as "gas" or "fluid").
(2)
DO NOT
apply any fluids corrosive to
materials exposed to gas. Corrosion
may cause fluid to leak into the atmosphere. Please confirm the physical
properties of
fluid before using.
(3) This device is not designed as an explosion-proof structure.
DO NOT
use this device in a place where explosion-proof structure are required.
Doing so may cause fire or explosion.
(4) Prepare temperature controller unit when operating Vaporizer/Heat
Exchanger and do not set the temperature over than maximum operating
temperature. Wring temperature setting may cause fire or destruction of the
device. It is recommended to add abnormal overheating detector if
necessary.
(5) This device must be earthed before use. Otherwise, there is the risk of
electric shock.
(6) Thermal switch is equipped in Vaporizer/Heat Exchanger to prevent
overheating. However, the operating temperature of thermal switch would
vary due to operating conditions and ambient temperature.
(7) Attach/remove connector and terminals, please make sure that power supply
turning off. It may cause fire or shock hazard.
Incorrect handling can cause medium or
slight injury or
may cause
damage to, or loss of, facilities or equipment.
(1) Observe the listed in the WARNING (above).
(2) Use out-of-spec power supply will cause electric shock, fire, and
malfunction of device.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may
cause fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. Modification may result in fire or failure of
the device.
(5) A warm-up period of 60 minutes is recommended after reaching the set
temperature. Otherwise, the output gas temperature will be low.
(6) This device is a precious device, please handle it carefully. Dropping down
or handing it carelessly will cause damage. Please use assist instrument
while moving or setting the device.
(7) The surface of device gets high temperature while heating up. Please wrap
up the device to prevent careless touch. Please be careful to deal with the
device while it is working because of the risk of burning from high
temperature. Please conduct replacement after checking that the device has
cooled down.
1. Introduction
This manual explains basic operation of the HX-0100C, HX-0300C Series
(Hereinafter referred as "HX"). Please read through this manual carefully to
familiarize yourself with the features of HX.
.
2. Summary
HX is an ultra-clean high efficiency fluid heat exchanger unit employing Lintec’s
high efficiency liquid vaporization technology with maximum operating
temperature up to HX-0100C:300°C, HX-0300C:250°C and maximum heat
exchange rate up to HX-0100C:N2 100SLM, HX-0300C:N2 300SLM. This
apparatus is employed over a wide range of applications from semiconductor
industries to other major manufacturing sectors.
3. Features
RoHS compliant.
4. Specification/ Dimensions
(1) Specification
Product name
Heat Exchanger
Model
HX-0100C
HX-0300C
Flow rate (N2)
100SLM
300SLM
Pressure loss(N2)
9.8kPa(100SLM)
30kPa(300SLM)
Withstand pressure
(Gauge pressure)
1 MPa(G)
Leak integrity
Less than 1×10
-11
Pa·m
3
/sec (He)
Operating condition
Continuous operation
Operating temperature
15 to 50ºC (Without dew condensation)
Maximum
operating temperature
300 ºC Max
250 ºC Max
Recommended
temperature control
method
PID control
Material exposed to gas
Stainless steel 316L
Fitting
Inlet: 12.7mm (1/2”) VCR male
Outlet: 12.7mm (1/2”) VCR female
Heater
D05
Outer block:
120V 400W
Inner block:
120V 300W
D06
Outer block:
240V 1200W
Inner block:
240V 900W
D06
Outer block:
240V 500W
Inner block:
240V 375W
Power source
D05
AC100 to 120V
D06
AC200 to 240V
D06
AC200 to 240V
Thermocouple
K type 2pcs
Thermal switch
Specification (Note1)
350 ºC ± 9ºC OPEN
Mounting position
Free
Weight
Approx.5.5kg
Standard accessories
Heater/Thermal switch connector: SRCN6A16-7S (JAE)
Thermocouple connector: CMP01-K (RKC)
Note1)
In actual operation, there may be a difference between the temperature at the
temperature control point and the temperature at which the thermal switch operates.
(2) Dimensions
