LEYBOLD TURBOLAB 250 Скачать руководство пользователя

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Содержание TURBOLAB 250

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...01592Vxxxxxxxx TURBOLAB TURBOLAB 80 90 250 350 450 Turbomolecular Pump Systems Operating Instructions 300554859_002_C0 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www art...

Страница 3: ...Transport and Storing 24 3 Installation 25 3 1 Placement 25 3 2 Conforming Use 27 3 3 Ambient Conditions 27 3 4 Installing the Backing Pump 28 3 5 High Vacuum Connection 30 3 5 1 Removing the TURBOVAC...

Страница 4: ...e Operation Conditions 60 4 5 Shut down 60 4 6 Venting 61 4 7 Bakeout 62 4 8 Webserver 63 4 9 Data Viewer 72 5 Maintenance 75 5 1 Cleaning 75 5 2 Oil of the Rotary Vane Pump 76 5 3 Removing the Backin...

Страница 5: ...rsonnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or maintenance questions to our nearest office DANGER in...

Страница 6: ...connected it to the corre sponding piping first 8 The turbomolecular pump must when removed from the pump sys tem always be firmly attached to a vacuum chamber If the mounting is not sturdy enough pu...

Страница 7: ...f dusty aggressive or corrosive media 2 The pump system must only be detached from the vacuum chamber and moved provided the pump has been allowed to run down com pletely and is at a full standstill 3...

Страница 8: ...2_C0 11 2016 Leybold Fig 1 1 Turbomolecular pump systems TURBOLAB TURBOLAB 80 TURBOLAB 350 450 TURBOLAB 350 450 Cart TURBOLAB 80 Cart Artisan Technology Group Quality Instrumentation Guaranteed 888 88...

Страница 9: ...02_C0 11 2016 Leybold Fig 1 2 Turbomolecular pump systems TURBOLAB TURBOLAB 90 Cart TURBOLAB 90 TURBOLAB 90 Cart without backing pump Artisan Technology Group Quality Instrumentation Guaranteed 888 88...

Страница 10: ..._C0 11 2016 Leybold Fig 1 3 Turbomolecular pump systems TURBOLAB TURBOLAB 250 Cart TURBOLAB 250 TURBOLAB 250 Cart without backing pump Artisan Technology Group Quality Instrumentation Guaranteed 888 8...

Страница 11: ...last valve and an exhaust fil ter oil return circuit are integrated functional elements of the SOGEVAC The SCROLLVAC pumps are dry compressing scroll pumps The DIVAC pumps are two to four stage oil fr...

Страница 12: ...e requires an approval from Leybold 1 2 Standard Specification The following are supplied with the pump system Transport lock at the high vacuum flange by way of a Plexiglas disc Covering caps for the...

Страница 13: ...Exhaust filter Equipment with accessories TPU not shown Fig 1 4 Schematic diagram of the turbomolecular pump systems TURBOLAB Shut off valve Venting valve or purge gas valve or purge gas and venting v...

Страница 14: ...peed l s 1 65 65 90 90 225 225 Ultimate pressure mbar 8 10 8 5 10 10 8 10 8 5 10 10 8 10 8 5 10 10 Mains Supply 50 60Hz V AC 110 10 230 10 TURBOLAB 350 TURBOLAB 450 Inlet flange DN 100 ISO K 100 CF 16...

Страница 15: ...280 275 371 Fig 1 5 Dimensional drawing TURBOLAB 80 dimensions in mm 1240 985 480 390 611 580 465 480 371 144 105 Fig 1 6 Dimensional drawing TURBOLAB 80 Cart dimensions in mm Artisan Technology Group...

Страница 16: ...X20 184 Fig 1 7 Dimensional drawing TURBOLAB 90 dimensions in mm 95 DN 63 ISO K DN 16 KF MAINS X20 DN 25 KF 238 1089 1285 104 480 580 238 133 Fig 1 8 Dimensional drawing TURBOLAB 90 Cart dimensions i...

Страница 17: ...16 KF MAINS X20 184 Fig 1 9 Dimensional drawing TURBOLAB 250 dimensions in mm 480 104 1089 1297 238 130 DN 100 ISO K DN 16 KF MAINS X20 580 238 133 Fig 1 10 Dimensional drawing TURBOLAB 250 Cart dimen...

Страница 18: ...360 723 Fig 1 11 Dimensional drawing TURBOLAB 350 450 dimensions in mm 1091 440 480 120 990 580 611 480 390 667 Fig 1 12 Dimensional drawing TURBOLAB 350 450 Cart dimensions in mm Artisan Technology G...

Страница 19: ...cking pump DN 63 ISO K Table 501592V02200000 DN 63 CF 501592V03200000 DN 63 ISO K Cart 501592V02210000 DN 63 CF 501592V03210000 Pump System TURBOVAC Frequency converter Backing Pump High Vacuum Connec...

Страница 20: ...CF 501592V09040000 501592V09050000 SCROLLVAC SC 30 D DN 100 ISO K 501592V08060000 501592V08070000 DN 100 CF 501592V09060000 501592V09070000 TRIVAC D 4 B DN 100 ISO K 501592V08120000 501592V08080000 D...

Страница 21: ...F 501592V05200000 DN 100 ISO K Cart 501592V04210000 DN 100 CF 501592V05210000 Pump System TURBOVAC Frequency converter Backing Pump High Vacuum Connection Frame Part No 230 V 50 60 Hz Part No 110 V 50...

Страница 22: ...cable TURBOLAB M8 M8 air cooling valve connection 2 m 0 3 m 5 m 800110V0016 800103V0001 800103V0003 Accessory cable TURBOLAB M12 M12 DIVAC 0 8 3 0 5 m 800103V0005 Accessory cable TURBOLAB C14 NEMA SCR...

Страница 23: ...hose nipples G 1 8 Outer 8 mm for water hose 2 sealing rings approx 10x4x1 screws 800135V0001 Air cooler for TURBOVAC SL 80 4 screws M4x10 DIN 912 800136V0001 For TURBOVAC i Venting valve 24 V DC G 1...

Страница 24: ...137V0006 800137V0007 800137V0008 Vibration absorber DN 100 ISO K other flange sizes 800131V1100 on request Centering ring with coarse inlet screen 3 2 mm DN 63 ISO K DN 100 ISO K DN 160 ISO K 800133V0...

Страница 25: ...n level and smooth surfaces After having moved the pump system lock the front castors The pump system may be tilted by 10 maximum When lifting and setting down the pump system do not reach under it ha...

Страница 26: ...ooth surface lock the front castors Cart Pump Systems with TRIVAC Connect TRIVAC pump with the included power cable The connection to the pumping system is already given The cable is hanging loosely n...

Страница 27: ...place regularly as to escaping oil so as to reduce the risk of slipping Do not move the pump system without first switching it off and allowing the turbo pump and backing pump to come to a complete st...

Страница 28: ...mp system must not be too strong For this refer to the Operating Instructions of the turbomolecular pump The ambient temperature should be between 12 C and 35 C Places of installation up to 1000 m abo...

Страница 29: ...ngle 10 However depending on the construction on the TURBOLAB that value can change Connecting backing pump with 110 V AC or 230 V AC Connection at output of TURBOLAB X211 FV AC See Figure 3 14 and 3...

Страница 30: ...th an 8 AT fuse F4 FV DC The required current for the backing pump may not exceed 6 A Check cable length and cross section of the connection line The laying of the connection line must comply with gen...

Страница 31: ...The TURBOVAC must only be operated after it has been connected to a vacuum chamber or piping or after it has been firmly blanked off with a blank flange If after the installation there remains the ri...

Страница 32: ...oved in either direction by turning the Allen screws without lifting at the pump All pump systems Pay attention to maximum cleanliness when connecting The TURBOVAC generates little noise or vibration...

Страница 33: ...panel see fig 3 7 Fit in the mounting panel to the pump system to a tightening torque of 5 Nm 5 m long wiring between the removed pump and the TURBOLAB pump sys tem is available See Section Accessorie...

Страница 34: ...ation 33 300554859_002_C0 11 2016 Leybold Fig 3 7 Removing the mounting panel TURBOLAB 90 drawn TURBOLAB 80 similar Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisa...

Страница 35: ...e exhaust lines should be laid so that they drop down and away thereby preventing condensate from flowing back into the pumps If within the system toxic substances or gases are being used then the ope...

Страница 36: ...d solids Moreover we recommend compliance with the following limit values Appearance Clear free of oils and greases Suspended matter 250 mg l Particle size 150 m Electrical conductivity 700 S cm pH va...

Страница 37: ...er connection Water cooling option Fig 3 10 Connections at the TURBOVAC 90 i TURBOVAC 250 i is similar High vacuum flange Purge gas connection G1 8 Mounting surface for water cooling Venting connectio...

Страница 38: ...from the venting con nection of the TURBOVAC Screw in the venting valve and the gasket into the vent connection then plug in the corresponding control cable into the X203 accessories connection on th...

Страница 39: ...g a suitable backing pump We recommend a purge gas flow of 0 4 mbar l s 24 sccm with Nitrogen The pressure in the pump must not exceed atmospheric pressure Observe Safety Information 0 1 2 to 0 1 5 Th...

Страница 40: ...To change the venting valve function code go to Menu Accessory Purge via the TPU inter face Connect the purge gas supply at the valve s inlet G1 8 Purge gas connection with purge gas throttle Unscrew...

Страница 41: ...ge heater to the TURBOLAB at X208 It can be switched on manually at the switch above Information on baking out is also given in Section 4 7 Fig 3 14 Electric connections fuses and switches bottom view...

Страница 42: ...TURBOLAB PTR90 TTR91 TTR101 Use gauge ports X101 X102 for connecting gauges 3 12 Connect a PC Mobile Device Use the RJ 45 Comm port to connect a PC and use the web server inter face In order to be ab...

Страница 43: ...After having provided the electrical connection check to ensure that the overcurrent circuit breaker is operating properly A mains power disconnecting device must be easily accessible and located bet...

Страница 44: ...es which will not cause corrosion or pitting in aluminium and steel and which in connection with process deposits in the pump will not cause cor rosion or sticking For venting and as the purge gas we...

Страница 45: ...lt always off X203 Vent Connection for venting valve default active frequency dependent after Stop command X206 FC Connection for 24VDC backing pump default active for start command X205 Fan Connectio...

Страница 46: ...2 13 Analog Ausgang Steuerung Frequenz wandler Start Stop input Pin 10 0 V no Standby operation 24 V Standby operation Pin 11 0 V no function 24 V Cooling or valve is activated Pin 10 Contact open no...

Страница 47: ...an entry by operating the red button the old value persists Function keys assignment Arrow button Down Function keys Functions of the analog output Pressure Gauge 2 Pressure Gauge 1 Input voltage Fre...

Страница 48: ...start command Configure X1 Relay normal operation Relay normal operation Change configuration Relay function Relay switches at normal operation Selection for the venting valve output function X203 Sel...

Страница 49: ...he setting is carried over to the main screen Display of type measured value unit of measurement status Through Off F3 the vacuum gauge head may be deenergised The gas correction factor must be set up...

Страница 50: ...flash and be shown underlined Thereafter you are queried whether the parameter shall be saved permanently When confirming this message the changed value is maintained even after power cycling When no...

Страница 51: ...lay the QR link Factory defaults F3 reset to factory defaults Resets all parameter changes to factory defaults Here you can define from where the pump can be operated display X1 Ethernet Setting the s...

Страница 52: ...e lower limit the output is reset again adjustable parameter upper limit adjustable parameter lower limit 30 bearing temperature dependent The output is set when the bearing temperature exceeds the up...

Страница 53: ...ustandsdiagramm f r Funktionscode 18 27 31 33 34 Status Steuerwort Bit Zubeh ranschluss State diagram Start command 33 Es kann zus tzlich eine Ein Ausschaltverz gerungszeit eingestellt werden Die Verz...

Страница 54: ...supply voltage and while the pump is coming up to speed Situation 1 Power cut drop in voltage If the power supply fails power supply warning code error code 103 the vent outlet X203 is switched off b...

Страница 55: ...ff delay time can be set up The delay time is entered in milliseconds Status control word bit Accessory connection Status control word bit Accessory connection Switch on delay time 0 Switch off delay...

Страница 56: ...parameter frequency limit high Adjustable parameter frequency limit low When the pressure exceeds the pressure level then the backing pump will start and will stop again when the turbomolecular pump h...

Страница 57: ...pressure has dropped below the limit Adjustable parameter frequency limit Revoking the start command stops the turbomolecular pump This function is suited for triggering on the forevacuum pressure The...

Страница 58: ...ency limit low Remark this is a normally open valve i e when the voltage is switched off the output goes to 0 when the pump running the output is 1 State diagram power failure venting see Section abov...

Страница 59: ...west permissible nominal frequency 20 Minimum frequency level When the pump is accelerating this frequency must be reached within the maxi mum passing time P183 At the end of run up Switch off thresho...

Страница 60: ...of the frequency converter 150 Standby Frequency Standby operation frequency setpoint 171 0 253 Error Code Memory Indexed parameter for storing the most recent 40 error codes The individual error memo...

Страница 61: ...to atmospheric pressure it may take up to one minute During the time the pump is running down the green LED will flash indicating that the rotor has not yet arrived at standstill When shutting down b...

Страница 62: ...failure venting valve or a venting screw Cautious venting of the pump is possible from the high vacuum side since here the bearing forces will be lowest When doing so no free jet of gas must be allow...

Страница 63: ...Protect the rotor against intensive direct heat radiation The temperature of the high vacuum flange must not exceed 100 C When baking out at the forevacuum side at a sorption trap for example ensure...

Страница 64: ...dress through Menu System Network Info or at Menu System QR Link In order to be able to operate the pump system through the Ethernet inter face the control hierarchy in the display must be changed to...

Страница 65: ...ontrol Function keys for the accessories Start Screen Through the start screen you may start your pump system stop it and switch to standby operation Moreover the accessories can be controlled through...

Страница 66: ...erver Error Memory The error memory holds the errors of the turbo pump in chronological order The operating time at the point of time the error has occurred is also indicat ed By clicking on the corre...

Страница 67: ...p LoggingCycle this can take more or less time When initialising the LoggingCycle we recommend setting it to 1 second Through the corresponding checkmarks the measurement data can be selected The quer...

Страница 68: ...r through sliders Operating SET sets the value The subsequent saving dialogue permanently saves by operating SAVE a value which has been set Triggering the saving procedure results in all previous cha...

Страница 69: ...TMP Here you may select between two options The turbomolecular pump starts upon issuing the start command Here the entered pressure values are disregarded The turbomolecular pump starts depending on...

Страница 70: ...ddress as well as the DHCP sta tus All these data can be changed through the entry field and the drop down list DHCP on automatic address assignment via DHCP e g a router or com pany network DHCP off...

Страница 71: ...by clicking on this field FILE UPLOAD loads the select ed file into the device However if this file is already present in the device it needs to be removed first A dialogue is displayed indicating th...

Страница 72: ...ig 4 14 Webserver views Navigation Fig 4 15 Webserver views Accessory setting You may also operate the web server on a smart phone then the menus will look slightly different see above Artisan Technol...

Страница 73: ...by way of a graph as well as in a table Establishing the Link To establish a link with the device enter the IP address of the device into the entry field IP Address Then confirm the IP address throug...

Страница 74: ...file Exporting a downloaded log file to the Excel CSV file format Trend Display Here the measured trend data is displayed in a graph Through the red slid ers the selection window may be moved to a ce...

Страница 75: ...able of recording data refer to the following formula The log file has a size of 3264512 bytes 3264512 32 102016 entries in the log file 102016 entries x 1 second LoggingCycle 102016 seconds From this...

Страница 76: ...he surfaces using a moist piece of cloth only to prevent the creation of any sparks Cleaning the frequency converter internally The frequency converter is basically maintenance free since it does not...

Страница 77: ...ee nuts The nut accessible from above is bonded to the bolt the two nuts accessible from below are counter tightened To remove the backing pump un screw the counter tightened nuts beneath the base pla...

Страница 78: ...e of the backing pump and install a bigger backing pump if req Seal leak check process Replace fan Switch on water cooling 4 Short circuit error 5 Converter temperature error Overtemperature at the po...

Страница 79: ...revacuum pressure too high Gas flow too high Check the ultimate pressure of the backing pump and install a bigger backing pump if req Seal leak check process 117 Motor current error start up error Mot...

Страница 80: ...us although communica tion and power supply have been plugged in correctly fuse F3 has blown Establish the correct hardware configuration or run a software update Check fuse F3 10 A slow blow and repl...

Страница 81: ...Leybold Service Disposal of Waste Oil Owners of waste oil are entirely self responsible for proper disposal of this waste Waste oil from vacuum pumps must not be mixed with other substances or materi...

Страница 82: ...81 300554859_002_C0 11 2016 Leybold EC Declaration of Conformity Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 83: ...82 300554859_002_C0 11 2016 Leybold Notes Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 84: ...of the equipment No1 Yes No Contamination No1 Yes 1 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged explosive 2 If yes...

Страница 85: ...E 08940 Cornell de Llobregat Barcelona Sales T 34 93 666 43 11 F 34 93 666 43 70 sales ba leybold com Service T 34 93 666 46 11 F 34 93 685 43 70 service ba leybold com America USA Leybold USA Inc 570...

Страница 86: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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