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300544652_002_C1 - 11/2016 - © Leybold

THERMOVAC Transmitter

TTR 91 N, TTR 91 N S, TTR 96 N S and TTR 96 N SC

Operating Manual 300544652_002_C1

Part Numbers:

230035V02

230036V02

230037V02

230038V02

230040V02

230043V02

230045V02

230047V02

Содержание 230035V02

Страница 1: ..._C1 11 2016 Leybold THERMOVAC Transmitter TTR 91 N TTR 91 N S TTR 96 N S and TTR 96 N SC Operating Manual 300544652_002_C1 Part Numbers 230035V02 230036V02 230037V02 230038V02 230040V02 230043V02 2300...

Страница 2: ...n conforming utilization 11 Process compatibility 11 Vacuum connections 12 Pressure range 12 Transmitter Installation Electrical 13 Input Output Wiring 14 Setpoint relays 15 Operations 16 Pressure out...

Страница 3: ...able regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum componen...

Страница 4: ...ion of the vacuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages CE marking The transmitter complies with European standards for CE marki...

Страница 5: ...formation in this document use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the pro...

Страница 6: ...notify the carrier immediately Please be sure that your transmitter package contains these items 1 pcs TTR 91 N or TTR 96 N THERMOVAC Transmitter 1 pcs English short form manual P N 300544666_002 1 pc...

Страница 7: ...hin the cavity and consequently the sensor is insensitive to mounting position Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured The sensor el...

Страница 8: ...nt relay contact endurance 100 000 cycles min 30 VDC 1 A load Setpoint relay contact endurance 2 000 000 cycles min 30 VDC 0 2 A load Internal volume P N 230035V02 230040V02 230045V02 KF16 2 80 cm3 P...

Страница 9: ...9 300544652_002_C1 11 2016 Leybold Dimensions mm P N 230035V02 to 230047V02 Flanges KF 16 CF 16 CF 16 bakeable NPT 1 8...

Страница 10: ...0680V01 Graphix Two 230681V01 Graphix Three 230682V01 Cables Type A 5 Meter 12426 Cables Type A 10 Meter 230012 Cables Type A 15 Meter 12427 Cables Type A 20 Meter 12428 Cables Type A 30 Meter 12429 C...

Страница 11: ...environments like a semiconductor etch process chamber where aggressive gases like fluorine are used The Parylene HT coated sensors P N 230045V02 230047V02 offer improved corrosion resistance The Par...

Страница 12: ...oil Vibrations and instant air inrush The sensor element is extremely robust to mechanical forces like vibration and G forces The sensor element cannot be damaged by fast and repeated pressure cycles...

Страница 13: ...housing 18 V overvoltage protection The power supply input is 9 to 30 VDC The power supply input is protected by an internal thermal fuse The fuse is self recoverable do not replace it Damage may occ...

Страница 14: ...2 to 230038V02 I O Connector 8 pin RJ45 FCC68 PIN Description 1 Power 9 30 VDC 5 Analog Output 2 Power return GND 6 Not Connected 3 Analog Output 7 Not Connected 4 ID Resistor 27 k 1 8 Not Connected P...

Страница 15: ...amperes E is DC or ACpeak source voltage in volts a 1 50 E Note that Rmin 0 5 and Cmin 1 10 9 F D is a fast transient suppression diode Setpoint functionality The set point relays can be activated eit...

Страница 16: ...th the sensor signal and cause noise on the signal The low measuring range is most sensitive to measuring noise due to low signal levels When designing external pressure control loops make sure that e...

Страница 17: ...0E 00 6 9172 6 00E 02 9 7157 1 20E 04 1 1008 3 00E 02 4 1846 5 00E 00 7 0419 7 00E 02 9 8018 2 00E 04 1 3861 4 00E 02 4 3452 6 00E 00 7 1437 8 00E 02 9 8764 3 00E 04 1 6126 5 00E 02 4 4699 7 00E 00 7...

Страница 18: ...s than nitrogen calibration gas are present the readings can deviate from the true pressure In the range below 1 mbar the pressure indication is linear For gases other than air the pressure can be det...

Страница 19: ...will indicate the status of the transmitter by showing a certain color code LED ring LED Transmitter status Solid green Normal operation 2 sec red Power on sequence 2 sec red User switch disabled Con...

Страница 20: ...perform vacuum zero full scale adjustments of the MEMS Pirani sensor by using the user switch See chapter 6 3 To obtain best measuring performance it is recommended that the transmitter is evacuated t...

Страница 21: ...of the LED ring LED will indicate the status of the transmitter during user switch adjustments Transmitter status LED ring LED color Normal operation Solid green Vacuum zero Full scale adjustment Puls...

Страница 22: ...am Setpoint 1 Adjustment see next page Setpoint 2 Adjustment see next page Green flash Red flash Solid green Zero FS adjustment see next page Normal operation Off Off Off Button down for 1 second Butt...

Страница 23: ...operation Output current setpoint value Ramp up down voltage setpoint value Fine tune voltage by 10 mV New setpoint value is stored Button released Button down for 5 seconds Button released 5 seconds...

Страница 24: ...lease button to keep current voltage output threshold to Analog output and return to Normal operation Ramp up down voltage setpoint value Release button to keep current voltage output threshold to Ana...

Страница 25: ...facing upwards to avoid contamination like particulates or liquids from entering the device Q Can the transmitter withstand instant ventilation A Yes The sensor element is extremely robust to mechani...

Страница 26: ...e has been connected to power supply input Is the transmitter damaged A Not likely The transmitter power supply circuit has reverse voltage and over voltage protection however Leybold cannot guarantee...

Страница 27: ...eat or cooling air stream Perform a zero adjustment Incorrect pressure value at high pressure Contaminated sensor Corroded sensor Incorrect atmospheric adjustment has been executed Other gas or gas tr...

Страница 28: ...ed the contractor is to be informed about any possible contamination of the compressor vacuum pump or component sent in for servicing Based on this information the contractor will be able to take the...

Страница 29: ...29 300544652_002_C1 11 2016 Leybold...

Страница 30: ...30 300544652_002_C1 11 2016 Leybold Declaration of Conformity...

Страница 31: ...31 300544652_002_C1 11 2016 Leybold Notes...

Страница 32: ...32 300544652_002_C1 11 2016 Leybold Sales and Service...

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