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APPENDIX

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Appendix

12.1

Implemented Pressure Sensors

The following Leybold pressure sensors can be directly connected to the CMOVE 1250 by
means of a sensor cable.

The pressure readings of these sensors are displayed in mbar, Torr, or Pa.
Pin assignment and further details see chapter «4.2.4 Pressure Sensor», chapter «5.2.9
Pressure Sensor» and



[3] … [12].

Leybold pressure sensors

Sensor Type

Connector Min

Max

Pressure sensor

lin.

CTR1000T

CTR 100T

CTR 10T

CTR 1T

CTR 0.1T

X4-FCC68

1.33E+00

1.33E-01

1.33E-02

1.33E-03

1.33E-04

1.33E+03

1.33E+02

1.33E+01

1.33E+00

1.33E-01

CTR 90 / 91 / 100 / 101

0-10V lin

X5-D-Sub,
15-pin

0...+10000

other linear pressure sensors

og.

ITR 9X

ITR 10X

ITR 20X

X5-D-Sub,
15-pin

5.01E-10

1.00E-10

5.01E-10

1.00E+03

1.05E-01

1.00E+03

ITR 90
ITR 100
ITR 200 S / SL

PTR 9X

PTR 2XX

TTR 9X

TTR 10X

TTR 21X

X4-FCC68

5.01E-09

1.00E-09

5.00E-04

1.00E+03

1.00E-02

1.00E+03

1.43E+03

1.00E+03

PTR 90
PTR 225 / 225 S / 237
TTR 90 / 90 S / 91 / 91 S / 96 S
TTR 100 / 100 S2
TTR 211 S / 216 S

Table 12-1

As the products of Leybold are subject to continual development, new pressure sensors may have been

implemented in your CMOVE 1250 Controller.

In [mbar]. Editing the measurement unit setting see chapter «5.2.2 Measurement Unit of the Pressure».

In [mV].

Содержание 230 200

Страница 1: ...LEYCON User manual 17200234_002_C1 2016 Controller CMOVE 1250 Part number 230 200...

Страница 2: ...y photocopies microfilms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from Leybold Offenders are liable to...

Страница 3: ...esign and Function 16 3 1 Design 16 3 2 Operating Modes 17 4 Installation 21 4 1 Unpacking 21 4 2 Installation into the system 22 4 2 1 Rack Installation 22 4 2 2 Mains Power Connection 23 4 2 3 Valve...

Страница 4: ...re Version 79 5 5 6 Actual Value 80 5 5 7 Measurement Unit 80 5 5 8 Language 81 5 5 9 Pressure Sensor 81 5 5 10 Valve 81 5 5 11 Controller Parameters 83 5 5 12 Digital Inputs Outputs 85 6 Maintenance...

Страница 5: ...e product directly or by means of an identification plate Figure 1 1 PN Part number SN Fabrication number In all communications with Leybold please specify the information on the product nameplate 1 3...

Страница 6: ...in switch On the rear of the CMOVE 1250 Controller Controller types Auto PI adjustable 1 99 1 slow 99 fast PID adjustable Gain Kp 0 1 100 0 Reset time Tn 0 0 3600 0 s Derivative time Tv 0 0 3600 0 s C...

Страница 7: ...Analog inputs 3 2 channels AI 1 Pressure setpoint nominal value AI 2 Flow setpoint nominal value AI 3 Not used AI 4 Not used Voltage range VDC 0 10 Internal resistance k 40 2 For information on wirin...

Страница 8: ...ls AO 1 Pressure sensor signal AO 2 7 Valve signal 0 10 VDC AO 3 Valve position MOVE 1250 AO 4 10 VDC reference voltage 10 mA Voltage range VDC 0 10 Load resistance k 2 4 For information on wiring see...

Страница 9: ...mperature C Operation 5 50 Storage 40 60 Relative humidity 80 up to 31 C decreasing to 50 at 40 C Use Indoors only Max altitude 2000 m NN Pollution degree 2 EN 61010 1 Degree of protection IP 30 EN 60...

Страница 10: ...play Display range mbar ITR 90 ITR 9X 5 01E 10 1 00E 03 ITR 100 ITR 10X 1 00E 10 1 05E 01 ITR 200 S ITR 200 SL ITR 20X 5 01E 10 1 00E 03 PTR 90 PTR 9X 5 01E 09 1 00E 03 PTR 225 PTR 225 S PTR 237 PTR 2...

Страница 11: ...ay Display range MOVE 1250 MOVE1250 Closed 5 00E 06 1 25E 03 mbar l s MOVE X MOVE X Closed 0 1 100 Other control valve 11 AO 2 0 10000 mV Table 1 4 Dimensions mm Figure 1 2 11 The 0 10 VDC analog outp...

Страница 12: ...f the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use th...

Страница 13: ...manual This user manual is an integral part of a comprehensive documentation belonging to a complete technical system It must be stored together with the other documentation and accessible for anybod...

Страница 14: ...ermitted use applies as adverse use 2 4 Obligations area of responsibility 2 4 1 Manufacturer Leybold GmbH as manufacturer is responsible for supplying the product with its user manual and original ac...

Страница 15: ...for all work you are going to do and consider the safety instructions in this document DANGER Mains voltage Contact with live parts is extremely hazardous when any objects are introduced or any liquid...

Страница 16: ...tting or returning to the previous display d Edit key for modifying settings e Arrow keys for modifying values f Metal housing g Digital inputs outputs h Analog inputs outputs i Serial interface j Mai...

Страница 17: ...C to the CMOVE 1250 The CMOVE 1250 compares the pressure signal actual value with the nominal pressure and controls the control valve in a way which compensates for the dynamic characteristics of the...

Страница 18: ...OVE 1250 features two controller types Auto Auto is a PI proportional integral controller type working with control speeds 1 99 1 slow 99 fast This controller type is used for fast optimization of the...

Страница 19: ...d for this mode Figure 3 4 The gas flow setting is made on the CMOVE 1250 and results in a corresponding gas flow rate through the control valve used at a pressure difference p of 1 bar The flow rate...

Страница 20: ...a flow rate curve mean values 500 sccm F S at a pressure difference p 1 bar Figure 3 6 1E 6 1E 5 1E 4 1E 3 1E 2 1E 1 1 10 100 1000 0 1 2 3 4 5 6 7 8 9 10 Gas flow mbar l s Valve control voltage V Curr...

Страница 21: ...y out the described work 4 1 Unpacking Before unpacking check whether the packaging shows transport damages and the goods could be damaged Check whether the goods are complete and in impeccable condit...

Страница 22: ...CE Wrong voltage If the product is installed in a rack it is likely to lower the protection category of the rack protection against foreign bodies and water e g the EN 60204 1 regulations for switch c...

Страница 23: ...n cable without protective ground NOTICE Wrong voltage Electrical components may get damaged Make sure that the mains voltage is in conformity with the voltage specified on the controller see chapter...

Страница 24: ...er than the MOVE 1250 and MOVE X the 0 10 VDC analog output AO 2 must be used Pin assignment see chapter 4 2 6 Analog Inputs Outputs MOVE 1250 Connect the MOVE 1250 Control Valve to the X9 valve recep...

Страница 25: ...5 102 MOVE X Connect the MOVE X Control Valve to the X9 valve receptacle MOVE X and connection cable see chapter 11 Spare parts and accessories Figure 4 4 X9 VALVE Signal Pin SIO 1 not used GND 2 not...

Страница 26: ...trol output Emission ON 13 24 VDC 4 Supply common GND 5 Not connected 6 Degas ON control output 24 VDC 7 Supply 24 VDC 8 Not connected 9 Not connected 10 Not connected 11 Signal common GND 12 Not conn...

Страница 27: ...on ON HV ON 14 24 VDC 8 Table 4 4 Connector pin assingment DIN receptacle X2 sensor Designation 12 Signal Pin Identification 1 Supply common GND 2 Signal input 0 10 VDC 3 Signal common GND 4 Shielding...

Страница 28: ...nd Use signal lines 25 m The signal lines should be shielded and connected to ground at only one end Run the signal lines physically separated from the feeder and control lines Wire the enclosed 25 pi...

Страница 29: ...ow increase 24 VDC 2 5 mA 23 DI 3 External CLOSE 24 VDC 2 5 mA 10 DI 4 External OPEN 24 VDC 2 5 mA 22 DI 5 Flow mode 24 VDC 2 5 mA 9 DI 6 Pressure mode 24 VDC 2 5 mA 21 DI 7 Emission ON HV ON 24 VDC 2...

Страница 30: ...DO 3 Valve in position 24 VDC 100 mA 15 DO 4 Valve error 24 VDC 100 mA 3 DO 5 Sensor error 24 VDC 100 mA 16 DO 6 ready 24 VDC 100 mA 4 DO 7 Emission ON HV ON 24 VDC 100 mA 17 DO 8 Sensor status 24 VD...

Страница 31: ...nd only Run the signal lines physically separated from the feeder and control lines Wire the enclosed 15 pin male D Sub cable connector in accordance with the pin assignment plug it in and secure it w...

Страница 32: ...0 10 VDC 10 mA 8 AO 2 Valve signal 15 0 10 VDC 10 mA 7 AO 3 Valve position MOVE 1250 0 10 VDC 10 mA 6 AO 4 Reference voltage 10 VDC 10 mA 5 Table 4 9 GND analog inputs outputs Designation Description...

Страница 33: ...ace cable Interface cable RS232 25 m Interface cable RS485 100 m The interface line should be shielded and connected to ground at only one end Run the interface line physically separated from the supp...

Страница 34: ...ransmitted data 3 Not to be used 4 SIO GND 5 Not to be used 6 Not to be used 7 Not to be used 8 Not to be used 9 Table 4 11 Pin assignment RS485 Designation Pin Not to be used 1 Not to be used 2 Not t...

Страница 35: ...ied measurement range it may be damaged or severely contaminated Turn the CMOVE 1250 on only when the pressure in the vacuum system is within the measurement range of the connected pressure sensor Mak...

Страница 36: ...yed Figure 5 3 5 Upon the first power on the MOVE 1250 Control Valve is identified if connected the CMOVE 1250 starts operating in the Pressure control mode and with the default parameter settings aft...

Страница 37: ...conds if the Autoboot setting is OFF see chapter 5 2 4 Automatic Booting Function the CMOVE 1250 keeps displaying the Configuration menu until the command key is pressed Only then it starts operating...

Страница 38: ...e Automatic booting function See chapter 5 2 4 Automatic Booting Function Automatic reset function See chapter 5 2 5 Automatic Reset Function Operating mode See chapter 5 2 6 Operating Mode Valve See...

Страница 39: ...ws the current settings of the operating mode valve type pressure sensor and nominal value setpoint with source I internal E external to return to the Operating level Pressure or Flow mode Pressure mo...

Страница 40: ...uts Outputs General settings LCD Contrast 30 Measure mbar Language english Autoboot on Autoreset off GEN DI DO AI AO SERIAL SENSOR I O VALVE DI5 8 DI 1 Flow decrease DI 2 Flow increase DI 3 External C...

Страница 41: ...nit of the pressure language automatic booting and automatic reset function Press to edit the LCD contrast setting to return to the Configuration display The Edit symbol is displayed in the LCD Contra...

Страница 42: ...ral settings display shows the LCD contrast measurement unit of the pressure language automatic booting and automatic reset function Press 2x to edit the measurement unit setting to return to the Conf...

Страница 43: ...ressure language automatic booting and automatic reset function Press 3x to edit the Language setting to get to the Configuration display The Edit symbol is displayed in the Language line Press to sel...

Страница 44: ...guration display and not start working until the control process is reinitiated by pressing the command key This allows for analyzing the cause of the power failure and taking the appropriate measures...

Страница 45: ...he Autoboot line Press to set the automatic booting function to on or off to save the new setting and return to the Configuration display 5 2 5 Automatic Reset Function This function is only effective...

Страница 46: ...get to the General settings display The General settings display shows the LCD contrast measurement unit of the pressure language automatic booting and automatic reset function Press 5x to edit the se...

Страница 47: ...nal Press to edit the operating mode setting The Edit symbol is displayed in the Mode line Press to select among Pressure and Flow In the Nom line the nominal value setpoint for the currently selected...

Страница 48: ...source I internal E external Press to get to the Setup Valve display The Setup Valve display shows the valve type and control mode to edit the valve type setting to return to the Configuration display...

Страница 49: ...iguration display shows the current settings of the operating mode valve type pressure sensor and nominal value setpoint with source I internal E ex ternal Press to get to the Setup Valve display The...

Страница 50: ...E external Press to get to the Sensor settings display The Sensor settings display shows the sensor type receptacle and the measurement range with its upper and lower limit Press to edit the sensor s...

Страница 51: ...ponding signal is active Operation via inputs and outputs see chapter 5 4 Operation Via Inputs and Outputs The Configuration display shows the current settings of the operating mode valve type pressur...

Страница 52: ...es not allow making any settings except for DO 3 If there is a black square at the right end of a line the corresponding signal is active Operation via inputs and outputs see chapter 5 4 Operation Via...

Страница 53: ...uts 1 to 4 Press to get to the Digital Outputs 5 to 8 display to get to the DO 3 Deviation display to return to the Inputs Outputs display The Digital Outputs display shows the assignment of digital o...

Страница 54: ...atically to 10 of the F S full scale when an implemented pressure sensor see 3 12 is connected and selected in the configuration menu The Digital Outputs display shows the assignment of digital output...

Страница 55: ...Inputs Outputs The CMOVE 1250 has two analog inputs and four analog outputs This menu informs on the assignment of the analog inputs and outputs but it does not allow to make any settings Operation vi...

Страница 56: ...play shows the assignment of analog inputs 1 and 2 Press to get to the Analog Outputs display to return to the Inputs Outputs display The Analog Outputs display shows the assignment of analog outputs...

Страница 57: ...atus Off n is not transmitted Detailed information regarding PR status for both interfaces see chapter 5 5 6 Actual Value The Configuration display shows the current settings of the operating mode val...

Страница 58: ...rn to the Inputs Outputs display The Edit symbol is displayed in the Type line Press Choose from RS 232 PRI Status On RS 485 PRI Status Off RS 232 PRI Status On RS 485 PRI Status Off or operation with...

Страница 59: ...arameter settings in effect before it was switched off Current operating mode The currently active operating mode is displayed in the status line Pressure control Gas flow adjustment Changing from the...

Страница 60: ...setpoint nominal value set the source to external see page 62 The Min and Max settings are made automatically when an implemented pressure sensor see chapter 12 1 Implemented Pressure Sensors is conne...

Страница 61: ...ff see chapter 5 4 DE 7 Sensor error The Parameter Pressure display shows the actual value nominal value setpoint and Min Max setpoint limits Press 2x 3x to edit the nominal value Nom to edit the Min...

Страница 62: ...ode can be defined internally via keys or externally with a corresponding setpoint signal 0 10 VDC fed via analog input AI 1 The Pressure display shows the actual value pressure reading and the nomina...

Страница 63: ...ntroller Auto is best suited for fast process optimization the PID controller type is used when good control to a setpoint nominal value combined with a fast response is required Auto controller Auto...

Страница 64: ...ine Press to change the controller type setting from PID to Auto 1 to 99 if required to increase the Auto setting decrease the Auto setting If you press this key when the setting is Auto 1 the control...

Страница 65: ...ll oscillate Now modify the nominal value or introduce a disturbance and observe the actual value If it overshoots increase Tn If it approximates the nominal value only very slowly decrease Tn If requ...

Страница 66: ...1 to 99 to PID if required You may first have to keep pressing this key for a countdown to Auto 1 to adjust the gain Kp to adjust the reset time Tn to adjust the derivative time Tv to save the new se...

Страница 67: ...tual value OFF Overrange Underrange Emission off see chapter 5 4 DE 7 to adjust the gas flow to the predefined nominal value setpoint to completely open the valve maximum gas flow to completely close...

Страница 68: ...alue setpoint and the setpoint source definition for the Flow mode Press to edit the nominal value setpoint to save the current setting and return to the Flow display to return to the Flow display wit...

Страница 69: ...l Flow display The Source Nom val Flow display shows the nominal value setpoint and the setpoint source definition for the Flow mode Press 2x to select the setpoint source to save the new setting and...

Страница 70: ...eading The nominal value setpoint can be adjusted via the NOM OPEN and CLOSE softkey If the external AI 2 setpoint source was selected the Flow display shows the current gas flow and pressure reading...

Страница 71: ...DI 4 External OPEN As long as the signal at DI 4 is active the valve plate moves in opening di rection When the signal drops off the CMOVE 1250 continues controlling in the previously selected mode t...

Страница 72: ...DO 7 Emission ON HV ON The Emission function is activated see DI 7 if the connected pressure sensor offers this function See instructions of the corresponding pressure sensor for further details see...

Страница 73: ...put AO 2 Valve signal In the Pressure control mode this output can be used for control valves other than the MOVE 1250 and MOVE X AO 3 Valve position MOVE 1250 The valve position signal of the MOVE 12...

Страница 74: ...mitter The transmission parameters of the control system PC PLC must agree with the above transmission parameters Waiting time between sending and receiving a string must be 50 ms Communication Only A...

Страница 75: ...ponses _ underline for a space for a negative sign Positive numbers are entered output without sign Only the negative sign has to be entered is output The sign directly precedes the number i e possibl...

Страница 76: ...09999 PRS _9999mV Inquiry PRS PRS x xxEsxx Unit PRS xxxxxmV Examples PRS PRS 1 00E 03mbar PRS PRS _9999mV Table 5 2 Gas flow adjustment Command Response Entry FLO x xxEsxx 17 FLO x xxEsxx Unit l s FLO...

Страница 77: ...E 1250 depending on the pressure unit FLO 4 99E 06 20 FLO 4 99E 06mbarl s FLO 4 99E 04 21 FLO 4 99E 04Pal s FLO 3 74E 06 22 FLO 3 74E 06Torrl s Entry MOVE X FLO 000 0 FLO _ _0 0 Entry AO2 FLO 00000 FL...

Страница 78: ...in the selected mode check that the corresponding nominal value setting is correct MOD W means that the controller stops at the current position Pressure control Command Response Entry MOD P MOD PRES...

Страница 79: ...50 is turned on the keys are automatically enabled Locking the keys Command Response Entry TAS D TAS DISABLE TAS DISABLE 24 Inquiry TAS TAS DISABLE Table 5 8 Enabling the keys Command Response Entry T...

Страница 80: ...on PRI _1 05E 02mbar If PRI Status off PRI 1 05E 02mbar PRI PRI _1234mV Table 5 11 n is only transmitted or suppressed with pressure unit mbar Pa Torr If mV is set the underline symbol _ is transmitte...

Страница 81: ...Response Inquiry RTP RTP Sensortyp Examples RTP RTP CTR1000T RTP RTP 0 10V_LIN Table 5 14 5 5 10 Valve In response to the valve type inquiry a corresponding identifier number is output Valve type Comm...

Страница 82: ...temperature status and version see 1 Position Command Response Inquiry VAP VAP hhhh Examples VAP VAP 1a00 Table 5 16 Temperature Command Response Inquiry VAT VAT hhh Examples VAT VAT 0BC Table 5 17 St...

Страница 83: ...the controller type For deciding which controller type is best suited to your control task and information on the controller parameter settings see Selecting the controller type page 63 Auto controll...

Страница 84: ...RSP _20 0 Table 5 22 Reset time Tn Select a reset time between 0 0 and 3600 0 s Command Response Entry RSI xxxx x RSI xxxx x Example RSI 0030 3 RSI _ _30 3 Inquiry RSI RSI xxxx x Example RSI RSI _ _30...

Страница 85: ...al Inputs Outputs Digital inputs The hexadecimal number representing the digital input must be converted into a binary number The first digit from the right indicates the status of DI 1 the last one t...

Страница 86: ...I 1 EMI 1 Table 5 28 Digital outputs The hexadecimal number representing the digital output must be converted into a binary number The first digit from the right indicates the status of DO 1 the last...

Страница 87: ...allowed to carry out the described work DANGER Electric shock Parts being under voltage will result in serious injury or death Disconnect the product from the mains Cleaning the outside of the CMOVE 1...

Страница 88: ...egular intervals Carefully blow out the dust with dry compressed air WARNING Compressed Air Unprofessionally handling compressed air can cause physical injury Adhere to the relevant regulations and ta...

Страница 89: ...t by qualified personnel We recommend having this work carried out by one of our service centers You will find the addresses of the service centers on the backside of the document When contacting us p...

Страница 90: ...t in serious injury or death Disconnect the product from the mains 1 Disconnect power supply 2 Disconnect any connected tools e g valve pressur sensor respectively from the different connectors 3 Loos...

Страница 91: ...ropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care 9 1 Packaging When returning the CMOVE 12...

Страница 92: ...er disassembling the product separate its components according to the following criteria Contaminated components Contaminated components radioactive toxic caustic microbiological hazard etc must be de...

Страница 93: ...to the product Use original spare parts from Leybold only When ordering accessories always indicate all information on the product nameplate description and ordering number according to the accessorie...

Страница 94: ...C1 2016 Leybold 602494EA DOCX Connection cable CMOVE 1250 control valve Type Length Part No MOVE 1250 3 230 220 5 230 221 10 230 222 15 230 223 20 230 224 25 230 225 MOVE X 3 230 210 5 230 211 10 230...

Страница 95: ...E 02 1 33E 03 1 33E 04 1 33E 03 1 33E 02 1 33E 01 1 33E 00 1 33E 01 CTR 90 91 100 101 0 10V lin X5 D Sub 15 pin 0 10000 27 other linear pressure sensors log ITR 9X ITR 10X ITR 20X X5 D Sub 15 pin 5 01...

Страница 96: ...gnal in error range See Operating Manual of the sensor Receptacles X4 X5 defective Check the controller replace it Valve error MOVE 1250 only Valve cable defective or not correctly connected Check the...

Страница 97: ...E 02 1 33 1 Table 12 3 Flow Pa m3 s mbar l s Torr l s Pa m3 s 1 10 7 5 mbar l s 0 1 1 0 75 Torr l s 0 133 1 33 1 Table 12 4 Dimensions cm inch ft cm 1 0 394 0 033 inch 2 54 1 0 083 ft 30 48 12 1 Table...

Страница 98: ...Cologne www leybold com Operating Manual IONIVAC ITR 90 GA 09 420 1 02 Leybold GmbH D 50968 Cologne 4 10 www leybold com Operating Manual CERAVAC CTR 91 GA 09 041 1 02 Leybold GmbH D 50968 Cologne www...

Страница 99: ...APPENDIX 602494EA DOCX 17200234_002_C1 2016 Leybold 99 102 12 5 Declaration of incorporation...

Страница 100: ...APPENDIX 100 102 17200234_002_C1 2016 Leybold 602494EA DOCX Notes...

Страница 101: ...valod sazinieties ar savu Leybold p rst vi Lietuvi 031 Prie io produkto pridedamos naudotojo instrukcijos paprastai pateikiamos dviejomis kalbomis vokie i ir angl D l instrukcijos j s valstybine kalb...

Страница 102: ...43 11 F 34 93 666 43 70 sales ba leybold com Service T 34 93 666 46 11 F 34 93 685 43 70 service ba leybold com America USA Leybold USA Inc 5700 Mellon Road USA Export PA 15632 T 1 724 327 5700 F 1 7...

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