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Содержание 051-032

Страница 1: ...Vacuum Technology Part Number 074 201 Measuring and Analytical Technology O LEYBOLD TRANSPECTOR Gas Analysis System MANUAL Vacuum Process Engineering LEYBOLD INFICON INC...

Страница 2: ...chnology Measuring and Analytical Technology LEYBOLD INFICON INC Part Number 074 201 TRANSPECTOR Gas Analysis System MANUAL JUNE 1996 LEYBO LD Two Technology Place East Syracuse NY 13057 9714 Telephon...

Страница 3: ...3 5 3 4 1 Scanning Charactcristbr 3 g 3 1 2 Thc Zcro Blaet 3 9 3 5 Thc lon Dctcctor 3 10 3 5 1 Thc Fanday Cup FC Dctccror 3 10 3 5 2 The Elcctron Multiplicr EM Dctcctor 3 11 3 5 3 The channctElccrron...

Страница 4: ...soltware is purchased please relcrerenca yutr soft are package lor IPN O74 Z1S soltware inetruc ion rnan ual Sectlon 7 Operatlng the llulllplerlng QX Ll0 end the Slngle 0X SOX Software lt MO USOX soft...

Страница 5: ...he Zero Blast 3 9 An FC Detector 3 10 A CEI UFC D toclor 3 12 An MCP FC Detec1or g 14 A Mass Spectrum 4 z A Nitrogen Fragrnantation Pa am 44 Eleclron Energy Ett cts 4 7 Transpector Block Diagram 5 z C...

Страница 6: ...1 1 2 lnventory 1 1 1 3 Setup And lrstallation Hardware 1 3 1 3 1 Sensorlrstallation 1 3 1 3 1 1 ConFlat Flanges 1 3 1 3 1 2 Assembling ConFlat Flanges 1 4 1 3 1 3 Attachlng the Sersor to the Vacuum...

Страница 7: ...taken inventory and completed the check procedures d Now that the unit is unpacked and inspecled you are ready to take inventory Make sure that you have received all of the parts that belong to your...

Страница 8: ...Fuse 2A 250V O74 2O1 Manual Power Supply optional 91 1 039 Gl Power supply Kit 90 260 vAc 4 ft standard cable 12oV 911 039 G2 Power supply Kit 90 260 vAc 4 ft standard cabte 230V 600 1008 P15 Power Su...

Страница 9: ...Flanges The sensor is installed on your vacuum system with a 2Tt O D ConFlat f lange Con Flat f langes and similar compatible types made by other manufacturers are widely used for attaching devices to...

Страница 10: ...gasket between the two flanges Figure 1 1 ALWAyS USE A NEW GASKET Do not attempt to use gaskets more than once Fkrnge r t Copper Gosket Flor1gre Flgure 1 1 Gasket and Flange Assembly Bring the two fl...

Страница 11: ...tts of the flange After the bolts have been f inger tightened and the f lange faces are parallel tighten the bolts gradually and evenly in a criss cross pattem untilthe flange faces are broughl into c...

Страница 12: ...existing in the vacuum chamber lf materials are evaporated or coatings are deposited in the vacuum chamber you must protect the sensor against the deposition of these materials on its surfaces by ins...

Страница 13: ...ISOR TO THE VACUUM SYSTEM MIJST BE ORIEMED wrIH THE II READS AWAY FROM IHE TRAIISPECTOR OIHEA 4SE IHERE tvtAY BE AN IT fIERF RENCE BEMEEN THE IRANPECTOR MOUNNNG NW AND 8OLTS Flgurr 13 Sentor end Tnnrp...

Страница 14: ...est performance will be achieved if the unit is not located close to major heat sources where it is subjected to wide temperature variations CAUTI0N The sensor output contact for the Transpector unit...

Страница 15: ...sensor feed through and mating notch in the Transpector mounting connector Carefully align the pin and notch and slide the Transpector onto the sensor Make sure the Transpector module slides on all t...

Страница 16: ...the other end of the communications interface cable to the proper serial channel on the host compuler e 9 COM1 or COM2 NOTE The application sottware is configurable lorwhich COM channel is used forcom...

Страница 17: ...the female end of the RS485 interface cable lPN 600 1002 P to the male end of lhe Y cable lf this is a single Transpector installalion plug the Terminator Plug lPN 911 041 P1 onto the remaining femal...

Страница 18: ...ashes see Section 8 Troubleshooting to determine the problem Now turn to the appropriate section Section 6 for MasterQuad or Section 7 for MQX and SQX to run or install the specific application softwa...

Страница 19: ...v a Ct 6 q tJ o u z U o rl I tt ll L_l Z C H F __t I i a Z H t a a l a i U o U 1U i U rZ r 0 s rs a tr o F o wZ z toui OZ tsZ otr tor F J U F o z 1 d x lu Y tr t F z o o t tr U JU 3i 3t UJ g U o o tr...

Страница 20: ...HHHM Section 2 lnput Output Features LFYBOLD INFICON INC 2 t...

Страница 21: ...are two modes of RS232 communication an ASCII Diagnostic Mode and a Primary Mode The mode of operation is selected by configuration switch 8 2 2 1 Diagnostic Link SW8 OFF When switch 8 is OFF the RS2...

Страница 22: ...l l l ol I ol l l 9 6 I ol tO lo I l ol sllo I C l I ol cc lo I I Ot lo I l l l l l lffil l l lml l l l l Io I l NIO I Y l ol Crllo I nl ol crlo I I Ot lo l I Ot lo lcr l olLU l lB l lR I ol z o t q...

Страница 23: ...ts a ninth bit protocolallowing a single computerto operate up to thirty one Transpector modules This link is full duplex meets EIA 485 standards and operates at 57600 baud The frame size is 11 bits w...

Страница 24: ...l l ld lEl l l ilH t ta td l j t4l rl lE E tq t t J l r r lt rl il rl a s8 5 arati E I fl 8 E iirEl Elg i I uH ss f sE r F El 3 E E tl E 5 i l F36iHF s il sEHsEg T I I 3 o E o I E Flgure 2 2 Swltch S...

Страница 25: ...ss between 1 and 31 selected by configuration switches 1 5 Refer to Figure 2 1 lor address selection N0TE ADDRESS 0 is reserved Address 0 is used as a GLOBAL address by the application program NOTE lt...

Страница 26: ...ed to maintain ground isolation Emission ON PIN 11 high to low transition Emission OFF PIN 10 levelACT VE LOW GND PIN 9 2 4 2 1 Status Relay Output This relay is active closed when the emission is on...

Страница 27: ...er Supply 20 30 Volts DC 24 watts Pins 1 2 3 24 volt return 6 7 8 24 volts NOTE input is isolated kom ground intemallyfused 2amps PIN 14 PIN 15 PIN 12 PIN 13 ANALOG ANALOG ANALOG ANALOG INPUT 1 INPUT...

Страница 28: ...pole Mass Filter 3 5 3 4 1 Scanning Characteristics 3 g 3 4 2 The Zero 81ast 3 9 3 5 The lon Detector 3 10 3 5 1 The Faraday Cup FC Detector 3 10 3 5 2 The Electron Multiplier EM DeteAor 3 11 3 5 3 Th...

Страница 29: ...her information on partial pressure analyzers see Partial Pressure Analyzers and Analysis M J Drinkwine and D Lichtman American Vacuum Society Monograph Series or A lJser s Guide to Vacuum Technology...

Страница 30: ...ressures higher than those at which the sensor itself can operate lt can then be used as a medical instrument an air pollution monitor a chemical process monitor or a leak detector The Transpector sen...

Страница 31: ...utficient utility to justity the considerable added complexity and cost Once a molecule is charged or ionized electric fields can be used to manipulate it EIICTRON RIPEI IIR HlAli EM CAIHooB A IOD OVT...

Страница 32: ...nt and the anode determines the kinetic energy usually called the electron energy of the emitted electrons The electron energy in turn determines how gas molecules will ionize when struck by the elect...

Страница 33: ...s hance the term mass filtef The mass filter consists of four parallel rods or poles in a square array The rods and the insulators in which they are mounted form an extremely precise mechanical assemb...

Страница 34: ...deflects the high mass ions toward the negative poles opposing the focusing effects of the RF field Eventually these high mass ions strike the negative rods and are neutralized By a suitable choice of...

Страница 35: ...e the dc voltage musl also be increased to maintain the high mass rejection properlies of the filler A mass spectrum can therefore be oblained by sweeping the RF amplitude along with the dc voltage Th...

Страница 36: ...approached the width is def ined at the point where lhe ion current falls to some specified fraction usually 112 or 1 10 of the maximum value The width of the pass band is determined by the dc to RF...

Страница 37: ...rs can interfere with the observation of masses 1 and 2 when significant quantities of higher mass ions are present ln some instruments the magnitude of the zero blast is concealed by preventing the v...

Страница 38: ...rode on which the ion beam impinges lons strike the detector and are neulralized thus drawing a current from the circuitry connected to the electrode Usually the current flow lhat results is exactly e...

Страница 39: ...or is positive for positive ions while an EM detector puts out a negative signal The ratio of the electron output current lo the incident ion cunent is known as the EM gain The gain primarily depends...

Страница 40: ...specialtype of glass ratherthan the traditionaldiscrete dynode EM which is made from a copper beryllium alloy The principal advantage of the CEM is that its performance does not degrade when exposed...

Страница 41: ...amps either decrease the high voltage or il possible decrease the pressure Use the minimum CEM voltage required to obtain the necessary peak amplitudes and or signal to noise ratio Operating at higher...

Страница 42: ...in advantage of the MCP over the CEM is its smaller size Sensor models using the MCP FC detector are considerably shorter than those using the CEIvVFC approximately 4 112 from ion source to vacuum sea...

Страница 43: ...ents in excess of 1xl06 amps either decrease the high voltage or it possible decrease the pressure Use the minimum MCP voltage required to obtain the necessary peak amplitudes and or signal to noise r...

Страница 44: ...ope Ratios 4 5 4 2 3 ElEctron Energy Effects 4 z 4 2 4 A Qualitative lnterpretation Guide 4 g 4 3 Quantitative lnterpretation ol Mass Spectra Calculating Partial pressures 4 10 4 4 Additional lnformat...

Страница 45: ...kages for the Transpector family of instruments generally include routines which serve as aids in the interpretation of spectra and the calculation of partial pressures and relative concentrations For...

Страница 46: ...f the ionizer mass f ilter and detector not to mention the manner in which the sample is introduced into the mass spectrometer all influence lhe speclrum thal is produced Rarely will a mass sp clrum b...

Страница 47: ...on two electrons are removed from the gas molecule resulting a doubly charged ion Triply or even more highly charged ions are also possible provided the incident electron has enough energy Reactions 3...

Страница 48: ...composed of two atoms of the same element the typical partial pressure analyzer cannot distinguish between the singly charged one alom fragment ion and the doubly charged two atom molecular ion which...

Страница 49: ...mass 126 1 927o mass 128 26 440 o mass 129 4 08o o mass 130 21 18 mass 131 26 890 mass 132 10 44o mass 134 and 8 87Y mass 136 lsotope ratios like fragmentation patterns are a very useful aid in recog...

Страница 50: ...4 15 16 17 18 19 20 21 22 23 27 2g 29 30 31 32 33 34 36 35 37 36 38 40 99 985 0 015 0 00013 100 0 19 78 80 22 98 892 1 108 99 63 0 37 99 759 0 0374 0 2039 100 0 90 92 0 257 e 82 100 0 100 0 92 27 4 68...

Страница 51: ...med per alectron per torr at 0oC yorsus elactron 6nergy The appearance potential i e the minimum electron energy required to produce a specific ion for Ar is 15 7 eV The number of argon ions produced...

Страница 52: ...neral relatively easy to interpret and will yield useful identifications The analysis of complicated mixtures of substances is much more ditficult Table 4 3 following is intended as a spectrum interpr...

Страница 53: ...ol Ethane P Nitic Oxide Orygen Methanol P Suttur Hydrogpn Sulfide F Hydrogen Sulfide P Sultur isotope Chlodne isotop S e Not 2 Hydrochloric acid Argon isotope Chlorinc i top See Note 2 Hydrochloric ac...

Страница 54: ...The substance dependent part is called the material factor M r The lnstrument dependent part is called the analyzer factor Ao and depends primarily on the ion mass b The original equation above can t...

Страница 55: ...and mass tilter tuming For best accuracy measure fragnentation lactors with the same instrument used for the analysis under the same tuning conditions Table 4 4 Typical Fragmentation Factors lor the...

Страница 56: ...omethane Cycloherylene Deuterium Dichlorodifluormethane Dichloromethane Dintrobenzene Ehane Ethanol Ethylene oxide Helium Hexane Hydrogen cH3 rco NH Ar c H c6HscooH BR C H o CO cs co ccl c6Hscl c2H3cl...

Страница 57: ...rwise identicalconditions The multiplier gain is a strong function of the high voltage applied The overall relalion between partial pressure and ion ourrent given in the following equation is quite ge...

Страница 58: ...detector sensitivily of inslrumenl to nitrogen the ion currenl at 28 AMU per unil of nitrogen partial pressure usually in ampvtorr ion current of mass Peak b resulling from subslance e in amps assume...

Страница 59: ...vironment which can have a significant effect on lhe detected gas composition First the analyzer itself is a source of gas molecules because of outgassing from its surfaces Usually the outgassing leve...

Страница 60: ...ctron stimulated desorption ESD or sometimes as electron induced desorption ElD When lhe sensor has been exposed to fluorine containing substances such as sulfur hexafluoride chlorofluorocarbons perfl...

Страница 61: ...e mass f ilter across the mass spectrum lf the adjustments are not made properly the ratios of peak heighls across the mass range will not be correct 4 4 3 Fragmentation Factors The fragmentation fact...

Страница 62: ...HHHM Section 5 Electronic Circuitry Contents LEYBOLD INFICON INC 5 i...

Страница 63: ...itions The configuration switch on the back panelallows the user to select a communication interface and baud rate Two green LEDs on the back panel display the status of the Transpector module The CPU...

Страница 64: ...H cFo tt runl tt F D o z or YO J tltv o 0 no cOF F OYruJ o r oJo oo croct CF r rtr lFz o ozo tr cou oct Fo OOt Z At o ovz2 trjtrJt ofo O o J oH O H OFFiut G F C I Olrl lrjO J FJ H H g tsOO l OZOt H HO...

Страница 65: ...e RS485 drivers are isolated from the system ground by opto isolators The CPU card communicates measurement commands to and results from the amplifier card through the second serial port on the DUART...

Страница 66: ...utc FF tt trc oo oo clt OO JH oot J F Y trj l uJ lJ o0 o0 FFFF dOJOrt oooo HHHH o oO ZO 7fu o xO xN OO z 3 o 6 c c O6 F 6a o FO HN of on NOJ o ool l l cr l tr o N OJ a ct o I o o o F J o o IJ l o o I...

Страница 67: ...d and preregulated to 1 I volts by a stepdown switching regulator This preregulated voltage then is used as the primary voltage on the switching transformer The primary push pull drive is generated by...

Страница 68: ...transistor biases the filament drive circuitry to the set voltage while also providing the return and sense path for the emission current The high voltages needed to run the compact sensor microchanne...

Страница 69: ...UJO J 0 0 l a F z IJJ J HO L0 t IJJ FV JO o o HV z F o tr F cr 0_ tr I to lF Fl o o 8dr ogN zL N o t0 o o CJ o trJ 6F lrJ lJ F l z lrl lJl oI F U OtsF zJl oo3 l U c o F J f o t G I t c IL o o o o o F...

Страница 70: ...erd Block Dlagram o J t 1r ru O o OJ o o z z f F o u o U o J o o qN t J o o Itr c 3 a ts c Y z F o l r L o I go F x Ot I J l Zts x L l 3 o q c l lt J o o o o J U z tr l l o r c Lr 0 t o F o r r i l o...

Страница 71: ...The microcontrollercalculatesthecurrentfromthis information When the integrator outpul reaches its rail the microcontroller resets it through lhe reset circuilry ln the l V mode the microcontroller co...

Страница 72: ...ction 5 Electronic Clrcurtry o z o O z l tr g U I 0 c o o t 0 o z cr F q F o CJ r z o o o l J r IJ o I o gU Orl o E l z c o f Transpector Gas Analysis System Flgure 5 5 Ampllller Card Block Dlegram 5...

Страница 73: ...32 Serial Port 8 6 8 4 Bakeout of Quadrupole Sensor 8 11 8 5 Sensor Spare Parts List 8 13 8 5 1 H100 H200 H300 Models 8 1 3 8 5 2 C100F C200M Models 8 1 3 8 6 Filament Replacement for all RGA source s...

Страница 74: ...n Section 8 4 describes vacuum bakeout requirements for contaminated sensors Section 8 5 conlains a list of field replaceable spare parts lor quadrupole sensors Section 8 6 explains how lo replace the...

Страница 75: ...ace CPU card X Power Supply card lailure Replace Power Supply card X CPU LED flashes 1 flash 2llashes 3 flashes 4 f lashes 5 llashes lnvalid interrupt possible CPU fauh REset Transpector lf problem pe...

Страница 76: ...ace card in computer Def ectivE sensor f ilament open shorted Check sensor with OHM meter See Figs 8 2 8 3 and 8 4 for pin out information Replace sensor or lilament Power Supply card defective Replac...

Страница 77: ...p 50oC Verily that there are no heat sourcss in local proximity CPU card malfunction Replace CPU card X Emission is OFF Turn Emission ON Degas is ON Turn Degas OFF EM is ON when operating an FC sensor...

Страница 78: ...Replace sensor Poor peak shape Ssnsor contaminated Degas s6nsor Bake out sensor Service sensor System prsssu16 too high Verify pressure less lhan 1E 4 Mass calibration required Perlorm Mass calibratio...

Страница 79: ...cable is available f rom Leybold lnficon as part number 600 1001 P15 1S length or 600 1001 P30 30 length You can also make your own cable by using the following drawing CAAE IURK N PAIOUIT I POI4 f R...

Страница 80: ...usly with the RS4B5 link A typical Transpector slatus and diagnostic information display is shown below Transpector Ver 1 00 C C Ver 1 00 Meas Rev 1 01 i SENSOR t Type compact Range 100 AMU DeEecLor F...

Страница 81: ...nt focus voltage set point 0 100v 27 nominal ION ENERGY Current ion energy set point COMPACT 8V nominal HIGH Pedormance 10V nominal ELECTRON ENERGY Current electron energy set point 102 volts nominal...

Страница 82: ...C DAC limit exceeded bits 3 0 reserved 0 EMISSION bit 7 low emission control integrator vottage less than 0 5 volts bit 6 high emission control integrator voltage greater than 3 0 volts bit 5 coH star...

Страница 83: ...shooting and Maintenance MISC GROUP This group displays the read value of the configu ration switches Remote l O inputs and diagnostic information on each of the three serial ports 8 10 Transpector Ga...

Страница 84: ...e electronics unit and the signal contact lPN 904 048 must be removed from the sensor lnficon offers several heating jackets to help in baking a sensor These jackets are sized for the appropriate sens...

Страница 85: ...SENSOR WITH UNPROTECTED FINGERS 4 USE CLEAN TOOLS FOR SENSOR DISASSEMBLY AND ASSEMSLY lf the routine procedures oullined above do not solve the problem contact the appropriate Leybold lnficon Service...

Страница 86: ...ire high perform only Center contact high performance only Electron Multiplier Channeltron Qty used per s nsor 1 1 approx 4 approx 2 1 1 FC Sensor Only H100F H200R Ei UFC Sensor Only H100M H200M 6 7 L...

Страница 87: ...ree pan head screws which are holding the old filament assembly onto the three posts 5 Carefully remove the filament assembly 6 Remove the three screws which are holding the new filament assembly onto...

Страница 88: ...nnectors and the screws in the lead connectors Pull the electrical leads away from the sensor Remove the four hex head screws 2 56 around the bottom of the ion source assembly They hold the ion source...

Страница 89: ...on the higlr voitage electrical lead ltem 19 on Figure 8 4 to the EM ceramic houslng This lead is spot welded to a screw near the top of the EM 4 Flernove tha two 2 56 AlNen head screws ttem 16 holdin...

Страница 90: ...e the two 0 split lock washers lf the hex posts havo started lo loosen retighten thcm now 4 Remove the three 2 26 X 188 long pan head screws that fasten the sensor assembly to the feedthrough flange G...

Страница 91: ...lnsert the two f ilarnent leads lnto the banel connectors at the lop of lhe ion source lf the leads da not go in allthe way loosen the two set screws a bit When the cerarnic tubes are flush with the...

Страница 92: ...Section 8 Troubleshooting Maintenance l r i ii t I ryIRASTOR O TOTAL PRESSJRE PIN SIDE Figure 8 2 Vlew of G100F t 4 Sensor Flange Transpector Gas Analysis System 8 1 9...

Страница 93: ...Metagraphics Software Corporation Copyright Metagraphics Software Corporation Scotts Valley CA 95066 1985 1986 1991 Copyright Microsoft Corp 1984 1989 All Rights Reserved Copyright Application Techniq...

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