Page 74 Leica EM TIC 3X Operating Manual 07/17
5.
Maintenance and service
5.1
General
The purpose of these activities is to
•
Maintain the optimal operating conditions of the Leica EM TIC 3X;
•
Minimize or reduce downtime;
•
Provide standard maintenance schedule.
•
Deal with malfunctions
Malfunctions during operation of the Leica EM TIC 3X Triple Ion Beam Cutter system
are reported in an information window. A clear text error message provides
information about the cause of the malfunction and its remedy.
Some causes of malfunctions can be corrected using the instructions in 6.2.
Malfunction.
For further questions regarding malfunctions and how to correct them, please contact
Technical Service from Leica representative.
5.2
Safety measures during maintenance and service
Caution!
Danger may be caused by servicing and cleaning the system incorrectly.
This may cause personal injury and damage to the system.
Maintenance operations on the Leica EM TIC 3X Triple Ion Beam Cutter system
must not be performed except by the specially trained administrator or a
technician designated by the manufacturer!
5.3
General instructions for maintenance and cleaning
There is danger from external elements (dust, dirt, etc.)
Contamination, particularly of the interior (pressurized) surfaces, may cause
the vacuum system to malfunction.
When working on the interior of the Leica EM TIC 3X Triple Ion Beam Cutter
system, it is therefore essential to observe the principles of vacuum hygiene.
Gloves must be worn when disassembling and assembling assemblies and
components in the vacuum area, and also for all adjustment work.
All work must be carried out in a clean, dust-free environment.
