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The ring light surrounds the end of the microscope with light from the source which
illuminates the sample from all directions. The light scatters as it reflects off of
textured or uneven surfaces, giving images contrast and the appearance of a third
dimension. FIGURE 2-19 (left) is an image of a surface mount device illuminated with
a ring light. The natural appearance of the sample is preferred by many operators.
FIGURE 2-19 (right) is the same device illuminated with a coaxial light. Its flat, two
dimensional appearance and low contrast result from all of the light coming from the
microscope axis. It would be difficult to properly land a probe using this image.
2.3.7 Turbo Pumping
System (TPS-FRG) and
Pumping Kit (PS-TP-KIT)
A turbo pumping system is required to properly evacuate the probe station’s vacuum
chamber. Chamber vacuum <10
-3
Torr at room temperature is required for the
Model CRX-6.5K to operate within specifications. Lake Shore offers turbo pumping
systems as the Model TPS FRG option for the Model CRX-6.5K. The components and
specifications for the pumping station is listed in TABLE 2-2. The PS-TP-KIT option
contains the necessary connections and adapters for connecting the Model TPS FRG
to the probe station.
Pumping systems can also be sourced locally. Turbo pumps with similar base pressure
and pumping speed to those listed in TABLE 2-2 are recommended. A vacuum line and
fittings to adapt the pump system to the Model CRX-6.5K probe station’s NW 40
vacuum isolation valve must also be provided, or you may order the PS-PKIT option.
We recommend using a turbo pump controller with safety interlocks to improve
usability of the probe station and prevent accidental damage to the probe station and
pump.
FIGURE 2-19
Left: Uneven surface through a Zoom 70 with a coaxial light; Right: Uneven surface through a Zoom 70 with a ring light
TPS FRG
Turbo pump
Model and type
Agilent TV84M turbo pump and controller
Base pressure
4 × 10
-9
Torr
(blanked off spec), 10
-7
Torr (typical in a TPS FRG configuration)
Pumping speed
50 L/s (NW 40 flange)
Fore pump
Model and type
Agilent IDP3 dry scroll pump
Pumping speed
60 L/min
Base pressure
2.5 × 10
-1
Torr
Chamber gauge
Model
Agilent FRG 700
Type
Vacuum gauge
Range
Atmosphere to 10
-9
Torr
Gauge readout
Model
Integrated
Capacity
One-vacuum gauge
General
Size
447 mm (17.7 in) w × 311 mm (12 in) d × 253 mm (11 in) h
Weight
16.7 kg (36.8 lb)
Power
100/120 V or 220/230/240 V
TABLE 2-2
Vacuum option components
Содержание CRX-6.5K
Страница 4: ...Model CRX 6 5K Probe Station ...
Страница 52: ...42 CHAPTER 2 System Overview Model CRX 6 5K Probe Station ...
Страница 92: ...82 CHAPTER 3 Installation and Setup Model CRX 6 5K Probe Station ...
Страница 162: ...152 CHAPTER 6 Maintenance and Troubleshooting Model CRX 6 5K Probe Station ...
Страница 166: ...156 INDEX Model CRX 6 5K Probe Station ...