MJ400010H1
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3-3. Cautions for Wiring Connection
CAUTION
:
The flow setting input of this instrument Model 3660 Series is
ordinarily a differential input. Pin 8 is not connected to other COM line
in the MFC interior. When operating the setting input signal on the
signal end for the purpose other than the use of the appliance, be
sure to connect Pin 8 with other common line (Pin 4 or 7).
CAUTION
:
The flow signal output from this instrument Model 3660 Series
r15V DC near the power voltage during valve full
opening. So the circuit to be connected shall be
its-point-considered.
CAUTION
:
The pin arrangement of this instrument Model 3660 Series is in
conformity with the SEMI standards. Our old types (models 3650 and
3750) and other corporations’ types exist, which have connectors on
the same D-sub 9 pin standards, but do not conform to the SEMI
standards. As the erroneous connection causes a critical malfunction,
please check for it.
4. Installation and Piping
For design and piping construction of the instrument and piping of the system including the mass flow
controller, fully read the following matters and perform job with particular attention being paid.
4-1. Storage and Application Environments
Applying this instrument near the equipment such as high frequency induction furnace or in the place in
which various power systems are concentrated may easily intrude noise into the Mass Flow Controller,
thereby interfering normal operation.
Eliminate the noise and prevent its intrusion before application. Avoid application in a place having a
difficulty in maintaining such normal operation.
Avoid storage or application outdoor in direct contact with wind-rain or dusts.
Avoid application under the environment in which drops of water directly fall, or dusts has been
accumulated, or in the atmosphere having a high temperature or corrosive gases. The application in these
places may deteriorate or corrode the electronic parts or cause a connection fault of the cable connection
unit.
Avoid storage or application in a place in which the ambient temperature exceeds 60
℃
or vibrations occur.
When using the controller with gas being actually flowed, the gas temperature and ambient temperature
must be
within 10 – 50
℃
.
Application out of this range may cause damages of the performance. So pay particular attention to it.
CAUTION
:
When installing this instrument, avoid the environment in which an
ambient noise generating source exists, and drops of water or dusts
have accumulated, or the atmosphere in which a high temperature
and corrosive gas exist. Ignoring it may cause a critical malfunction.
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