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Keithley 7072, Инструкция по эксплуатации

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7072 8

×

12 Semiconductor Matrix Card

LOW-CURRENT

GENERAL-PURPOSE

C-V

(ROWS A - B)

(ROWS C - F)

(ROWS G - H)

CROSSPOINT

2-pole Form A

2-pole Form A

1-pole Form A,

CONFIGURATION:

Common Guard

OFFSET CURRENT:

a<1 pA

<20 pA 

<20 pA

PATH ISOLATION:

Resistance:

>10

13

Ω

>10

12

Ω

>10

12

Ω

Capacitance (nominal):

0.4 pF

1 pF

0.6 pF

CROSSTALK

1 MHz, 50

Ω

load (typical):

<–50 dB

<–40 dB

<–50 dB

3dB BANDWIDTH (typical),
50

Ω

Load:

15 MHz

8 MHz

5 MHz

RELAY DRIVE CURRENT

(per crosspoint):

40 mA

60 mA

80 mA

MATRIX CONFIGURATION:

8 rows by 12

columns.

CONNECTOR TYPE:

3-lug triaxial (Signal,

Guard, Chassis).

MAXIMUM SIGNAL LEVEL:

200V, 1A

carry/0.5A switched, 10VA peak (resistive
load).

COMMON MODE VOLTAGE:

200V maxi-

mum between any 2 pins or chassis.

CONTACT LIFE: Cold Switching:

10

7 

clo-

sures. 

At Maximum Signal Level:

10

5

clo-

sures.

PATH RESISTANCE (per conductor):

<1

Ω

initial, <3.5

Ω

at end of contact life.

CONTACT POTENTIAL:

<40µV per cross-

point (Signal to Guard).

RELAY SETTLING TIME:

<15ms.

INSERTION LOSS (1MHz, 50

Ω

source, 50

Ω

load):

0.1dB typical.

EMC:

Conforms to European Union Directive

89/336/EEC.

SAFETY:

Conforms to European Union Directive

73/23/EEC (meets EN61010-1/IEC 1010).

ENVIRONMENT:

OFFSET CURRENT and PATH ISOLA-

TION Specifications:

23°C, <60% R.H.

Operating:

0° to 50°C, up to 35°C at 70%

R.H.

Storage:

–25° to +65°C.

ACCESSORIES SUPPLIED:

Instruction

manual and four SMB expansion cables
(C54-1).

ACCESSORIES AVAILABLE:

7078-TRX-BNC: 3-Lug Triax to BNC 

Adapter

7078-TRX-T: 

3-Lug Triax Tee Adapter

7078-TRX-3: 3-Lug 

Triax Cable,

0.9m (3 ft)

7078-TRX-10:

3-Lug Triax Cable,
3m (10 ft)

7078-TBC:

3-Lug Female Triax Bulk
head Connector with 
Cap

7078-CSHP:

Cable Set to connect 
7072 to HP 4145

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H G C

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H

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H

G
C

Low I
Paths

General
Purpose
Paths

C-V
Paths

User

connections

and backplane

expansion

Содержание 7072

Страница 1: ...Instruction Manual Model 7072 Semiconductor Matrix Card Contains Operating and Servicing Information ...

Страница 2: ...nty also does not apply to fuses software non rechargeahlc battcrics damage from battery leak age or prohlcms arising from normal wear or failure to follow instructions THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE THE REMEDIES PROVIDED HEREIN ARE BUYER S SOLE AND EXCLUSIVE REMEDIES NEITHER KE...

Страница 3: ...Model 7072 Semiconductor Matrix Card Instruction Manual 01988 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Third Printing April 2000 Document Number 7072 901 01 Rev C ...

Страница 4: ...te immcdiatcly into the manual Addenda arc numbcrcd sequentially When a new Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of this print history page Revision A Document Numbcr 7072 901 01 February lY88 Revision B Document Number 7072 901 01 April I988 Addendum B Docu...

Страница 5: ...nt A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring Users of this product must bc protected from electric shock at all times The responsible body must ensure that users are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product users in these circumstance...

Страница 6: ... before performing the indicated procedure The CAUTION heading in a manual explains hazards that could damage the instmmcnt Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replaccmcnt components in mains circuits...

Страница 7: ...is to expect that hazardous voltage is present in any unknown circuit before measuring Do not exceed 200V between any two pins or between any pin and earth ground Inspect the connecting cables and test leads for possible wear cracks or breaks before each use For maximum safety do not touch the test cables or any instruments while power is applied to the circuit under test Turn off the power and di...

Страница 8: ...an Union Directive 89 336 EEC SAFETY Conforms to European Union Directive 73 23 EEC meets EN61010 1 IEC 1010 ENVIRONMENT OFFSET CURRENT and PATH ISOLA TION Specifications 23 C 60 R H Operating 0 to 50 C up to 35 C at 70 R H Storage 25 to 65 C ACCESSORIES SUPPLIED Instruction manual and four SMB expansion cables C54 1 ACCESSORIES AVAILABLE 7078 TRX BNC 3 Lug Triax to BNC Adapter 7078 TRX T 3 Lug Tr...

Страница 9: ...cal applications for the Model 7072 in cluding combined quasistatic and high frequency CV measurements semiconductor switching matrix van der Pauw resistivity measurements and semiconduc tor parameter analysis SECTION 3 Applications Contains performance verification procedures trouble shooting information and principles of operation for the matrix card SECTION 4 Service Information Lists replaceme...

Страница 10: ... ACCESS l 2 2 Operation INTRODUCTION 2 l HANDLING PRECAUTIONS 2 I ENVIRONMENTAL CONSIDERATIONS 2 I CARD INSTALLATION AND REMOVAL 2 l CONNECTIONS 2 3 Card Connectors 2 3 Recommended Cables and Adapters 2 4 Triaxial to Banana Plug Adapter Preparation 2 4 General Instrument Connections 2 5 Keithley Instrument Connections 2 11 Typical Test Fixture Connections 2 17 MATRIX CONFIGURATION 2 18 Switching M...

Страница 11: ...Test Configuration 3 9 Test Procedure 3 9 Resistivity Calculations 3 9 SEMICONDUCTOR PARAMETER ANALYSIS 3 12 System Configuration 3 12 Cable Connections 3 I3 SPA Mcasuremcnt Considerations 3 I 5 Typical Test Proccdurc 3 15 4 Service Information INTRODUCTION 4 I HANDLING AND CLEANING PRECAUTIONS 4 I PERFORMANCE VERIFICATION 4 1 Environmental Conditions 4 l Recommended Test Equipment 4 l Relay Testi...

Страница 12: ...5 Replaceable Parts INTRODUCTION 5 I PARTS LISTS 5 I ORDERING INFORMATION 5 I FACTORY SERVICE 5 I COMPONENT LAYOUT AND SCHEMATIC DIAGRAM 5 1 111 ...

Страница 13: ... 6 Typical JFET Plot 3 17 Figure 3 1 Figure 3 2 Figure 3 3 Figure 3 4 Figure 3 S Figure 3 6 Figure 3 7 Figure 3 8 Figure 3 9 Figure 3 10 Figure 3 l I Figure 3 12 Figure 3 13 Operation Model 7072 Installation 2 2 Card Connectors 2 3 Triax Connector Configuration 2 4 Triaxial Cable Preparation 2 5 General Instrument Connections 2 6 Model 617 Electrometer Connections 2 1 1 Model 196 DMM Connections 2...

Страница 14: ...for Path Isolation Verification 4 h Triaxial Cable Preparation 4 7 Connections for Path Resistance Verification 4 X Shorting Measurement Paths Using Triax Tee Adapter 4 9 ID Data Timing 4 I I Model 7072 Block Diagram 4 12 Model 7072 Rear Shield 4 14 Model 7072 Component Location Drawing Dwg No 7072 100 5 5 Model 7072 Schematic Diagram Dwg No 7072 106 1 of 4 S 7 Model 7072 Schematic Diagram Dwg No ...

Страница 15: ...ation Table 4 I Recommended Vcritication Equipment 4 2 Tahlc 4 2 Recommended Troubleshooting Equipment 4 10 Tahlc 4 3 Troubleshooting Procedure 4 I I 5 Replaceable Parts Table 5 l Model 7072 Electrical Parts List _ __ 5 3 Table 5 2 Model 7072 Mechanical Parts List _ _ _ 5 4 List of Tables Operation Recommended Cables and Adapters 2 4 Parts for Special Triaxial Cable 2 S Column Numhcring by Slot an...

Страница 16: ...ual 1 2 FEATURES Key features of the Model 7072 Semiconductor Matrix Card include The symbol on an instrument shows that high voltage may be present on the terminal s Use standard safety precautions to avoid personal contact with these voltages l 8 x 12 eight row by 12 column switching matrix l Two rows A and B with low current offset for low current measurements l Two dedicated rows G and H for C...

Страница 17: ...REPAIR DEPARTMENT on the ship ping label l Fill out and include the service form located at the back of this manual 1 9 OPTIONAL ACCESSORIES The following accessories are available to make connec tions to the Model 7072 Model 61713 slot Male to 2 lug Female Triaxial Adapters The Model 6l7I allows male 2 lug triaxial cables to be con nected to the Model 7072 Model 7078 TRX T 3 Lug Trim Tee Adapter ...

Страница 18: ... the Teflon insulators To avoid any possible contamination always grasp the card by the handle or the card edges Do not touch board surfaces components or card edge connectors Dirt build up over a period of time is another possible source of contamination To avoid this problem operate the mainframe and matrix card only in a clean environ ment If contamination is suspected clean the card as discuss...

Страница 19: ...OPERATION CARDHANDLE MOUNTING SCREWS Figure 2 1 Model 7072 InstallatiOt I 2 2 I ...

Страница 20: ...e tween the card and the mainframe Failure to properly secure this ground connection may result in personal injury or death due to elec tric shock 4 To remove a card first turn off the power and discon nect the line cord from the mainframe Disconnect all external and internal cables internal cables can be reached through the access door Loosen the mounting screws then pull the card out of the main...

Страница 21: ...adapter 6167 Applications Connect 2 slot triax cable to 7072 7072 input output connections 7072 input output connections Daisy chain 7072 columns or rows Connect BNC cables to 7072 For custom 7072 connections Guarded current source Model 6171 adapter required to connect these cables to Model 7072 6167 requires modification by disconnecting input LO internally 2 5 3 Triaxial to Banana Plug Adapter ...

Страница 22: ...eral instrument connections for the discussions below Note that DUT guarding or shielding are not indicated here see Figures 2 21 and 2 24 for shielding and guarding information Also 2 pole switching for rows A F is shown in the figures GUARD is not switched on rows G and H As shown all figures assume instruments are connected to rows and the DUT is connected to columns DMM Connections General DMM...

Страница 23: ...ons for a Source Connections source measure unit SMLJ In this instance a remote sensing type of a SMU is shown requiring a total of four Voltage and current source connections are shown in signal pathways to the DUT For critial measurements both Figures 2 5 H through J The HI and LO paths of the source and sense HI pathways would be guarded as voltage source H are routed through two jacks with bot...

Страница 24: ...OPERATION ROWS COLUMNS DUT C DMM 4 Wire L l 7072 ROWS COLUMNS r i HI LO I DUT Electrometer D Electrometer Unguarded Volts 7072 Figure 2 5 General Instrument Connections C D 2 7 I ...

Страница 25: ...UMNS l i IIY I DUT E Electrometer Guarded Volts 7072 ROWS i r c 0LUMNS L A F Electrometer Fast Current 7072 ROWS DUT Electrometer G Electrometer Resistance Guarded 7072 Figure 2 5 General Instrument Connections E G 2 8 I ...

Страница 26: ...OPERATION L l H Voltage Source 7072 ROWS COLUMNS L J I Current Source Unguarded 7072 ROWS COLUMNS DUT 7072 Figure 2 5 General instrument Connections HJ 2 9 I ...

Страница 27: ... J F L A 7072 K Sourca Measure Unit Notes 1 DUT shielding guarding not shown See figures 2 21 and2 24 2 2 P switching for rows A F shown GUARD is not switched on rows G and Ii Figure 2 5 General Instrument Connections K Z 10 1 ...

Страница 28: ...as long as their input output con fieurations are the same Instrument connections covered Model 617 Electrometer Connections include l Model 617 Electrometer Source l Model 196 DMM Connections for the Model 617 Electrometer are shown in Figure 2 6 The electrometer INPUT should be connected only to row A and B for currents less than 2nA otherwise current offset will affect measurement accuracy ir I...

Страница 29: ... same type of cables NOTE For low level voltage measurements connect the inner shield of the HI cable to VOLT OHMS Lo to minimize noise Model 230 Voltage Source Connections Connect the Model 230 OUTPUT and COMMON ter minals to the desired rows using the prepared triaxibanana plug cables as shown in Figure 2 8 For remote sensing applications the SENSE OUTl UT and SENSE COMMON connectors can be rout...

Страница 30: ...OPERATION 196 DMM LL Inner Shield Connect to LO I for Low Level Measurements 7072 Matrix Card Figure 2 7 Model 196 DMM Connectlons z 13 I ...

Страница 31: ...I OPERATION Triax Banana Cables See Figure 2 4 Common 230 Voltage Source 7072 Matrix Card Figure 2 6 Model 230 Voltage Source Connections 2 14 I ...

Страница 32: ...OPERATION Note Connect CV Analyzer to Rows G and H or any column use G and H pathways for optimum performance Adapters 7072 Matrix Card Figure 2 9 Model 590 CV Analyzer Connections z 15 I ...

Страница 33: ...PERATION Guarded Adapter A Connect GUARD 220 Current Source 7078 TRX Trim Use Row A or Bfor Source High when Sourcing 2nA L P E I c c 7072 M lx Card Figure 2 10 Model 220 Current Source Connections 2 16 ...

Страница 34: ...ered to them In some cases the test fixture will PUT terminal of the adapter be equipped with triax connectors for those types 4 Connect the triax end of a triaxlbanana cable to the Keithley Model 7078 TRX 3 or 10 cables can be used as desired row on the Model 7072 shown in Figure Z 11 5 Connect the banana olue end of the triaxibanana cable to the OUTPUT CO vfGON jack of the Model 220 or run cable...

Страница 35: ...oaxial probes are to be used connect GUARD to the probe shield if the probe shield is insulated from the fixture shield Triax Cable km 7072 Zard Ground L _ _ _ Test Fixture Chassis Figure 2 12 Equivalent Circuit of Test Fixture Connections Usually the chassis ground terminal of the trim connec tor will automatically make contact with the fixture shield by virtue of the mounting method However grou...

Страница 36: ...OPERATION Columns Crosspolnt Switching for Rows A F Columns 1 12 Columns 1 12 Figure 2 13 Model 7072 Matrix Organization 2 19 ...

Страница 37: ...nt purposes Rows A and B are designated low current mws rows C through F are general purpose rows and rows G and H are CV rows Many of the specifications for the card differ among row types For example the offset current for the low current rows is lpA but the general purpose and CV rows have a higher offset current of 2OpA Thus A and B would be the rows of choice for low current measurements Also...

Страница 38: ... B G and H are not jumpered through the backplane Instead you must install the supplied coaxial jumpers between ap propriate connectors on Model 7072cards for critical signal paths rows can be isolated from other cards by not install ing these cables Each card has two SMB coaxial connec tors for each row allowing daisy chaining of card rows These connectors can be reached by lifting the access doo...

Страница 39: ...I OPERATION Figure 2 16 Three Cards in Daisy Chain Configuration 2 22 ...

Страница 40: ...ly custom length triax cables umns of cards installed in different mainframes An ex should be used to avoid the cable jungle that would oc ample of such an expanded matrix is shown in Figure 2 17 cur with longer standard length cables Here six cards are configured as a 16 x 36 matrix Since the rows are internally jumpered only columns must be jumpered externally in this configuration Note that the...

Страница 41: ...f the conductor has suffi cient length even weak magnetic fields lie those of the earth can create sufficient signals to affect low level measurements Two ways to reduce these effects are 1 reduce the lengths of the test leads and 2 minimize the exposed circuit area In extreme cases magnetic shielding may be required Special metal with high permeability at low flux densities such as mu metal are e...

Страница 42: ...roublesome signal Many instruments incorporate internal filtering that may help to reduce RF1 effects in some situations In some cases external filtering may also be required Such filtering however may have detrimental effects on the desired signal 2 7 3 Ground Loops When two or more instruments are connected together care must be taken to avoid unwanted signals caused by ground loops Ground loops...

Страница 43: ...nsion or contraction Tie down offending cables securely to avoid movement and isolate or remove vibration sources such as motors or pumps 2 7 6 Shielding Proper shielding of all unguarded signal paths and devices under test is important to minimize noise pickup in vir tually any switching matrix system Otherwise inter ference from such noise sources as line frequency and RF fields can seriously co...

Страница 44: ...nner Shield of HI Trim Connected to LO I COLUMNS r Inner Shield Connected to r 1 Trim 7072 Card Flgure 2 21 Shielding Example r i L _ _ _ AC Outer Shield Chassis Ground Flgure 2 22 Dual Shield Test Fixture 2 27 I ...

Страница 45: ...ity gain amplifier as shown in Figure 2 23 Since the amplifier has a high input im pedance it minimizes loading on the high impedance signal lead Also the low output impedance ensures that the shield remains at signal potential so that virtually no leakage current flows through the leakage resistance R Leakage between inner and outer shields may be con siderable but that leakage is of little conse...

Страница 46: ...rds together will degrade system performance specifications other types of cards do not affect the specifications because they use different pathways in the mainframe backplane The extent depends on how many cards are used as well as the amount of cabling used to connect them together With internal row expansion isolation among rows is decreased and offset current is increased although the isolato...

Страница 47: ...te important semiconductor parameters such as doping pro file band bending and mobile ion concentration 3 2 1 Stand Alone System Configuration The stand alone system shown in Figure 3 l can be used to make CV measurements without the aid of a computer System components perform the following functions Model 590 CV Analyzer Measures CV data at lOOkHz and lMHz and sends the resulting data to the plot...

Страница 48: ...er Test Note Rows C F can be used for this signal path 7072 Matrix Card L J 707 Switching Matrix Model 590 CV Analyzer Note Connect plotter to only one instument at a time Figure 3 1 Stand Alone CV System Configuration 3 2 I ...

Страница 49: ...ws C F can be used for this signal path 7072 Matrix Card 707 Switching Matrix IEEE 499 Bus Note Remove jumpers to other 7072 cards if installed to optimize Model 595 measurement accuracy Figure 3 2 Computerized CV System Configuration 3 3 I ...

Страница 50: ... the HP GL plotter to the IEEE 488 bus con nector of the Model 595 only 2 Set up the Model 595 for the expected CV sweep 3 Close the crosspoints necessary to connect the Model 595 to the device under test as summarized in Table 3 l For example to test device l close Al and 82 4 Place the probes down on the wafer test dots 5 Run a quasistatic sweep on the selected device and generate a CV curve 6 O...

Страница 51: ...APPLICATIONS 0 6E 10 0 4E 10 005 00 005 00 KEITHLEY 595 Figure 3 3 Typical Quasistatic CV Curve Generated by Model 595 3 5 I ...

Страница 52: ...re the ability to connect a variety instruments to the device purpose semiconductor test matrix Instruments in the or devices under test as well as the ability to connect any system perform the following functions instrument terminal to any device test node The follow ing paragraphs discuss a typical semiconductor matrix test system and how to use that system to perform a typical test common sourc...

Страница 53: ...ce Under Test SGSG SGSG SGSG ___ SGSG ___ SGSGSGSGSG SGSGSGSGSG _ ___ _ ___ 1 2 3 4 5 6 7 6 9 10 11 12 7072 Matrix 7072 Matrix Card Card 707 Switching 707 Switching Matrix Matrix Figure 3 5 Semiconductor Test Matrix 3 7 I ...

Страница 54: ...to test a variety of characteristics including Iass Lqm L m Ls and Vos To demonstrate a practical use for the system we will show how it can be used to generate common source characteristic curves of a particular JFET In order to generate these curves the instruments must be connected to the JFET under test as shown in Figure 3 6 The advantage of using the matrix is of course that it is a simple m...

Страница 55: ...1 1331 fA t V v v V 1 pa I The Model 7072 Semiconductor Matrix card can be usec in conjunction with a Model 220 Current Source and a Model 196 DMM to perform resistivity measurements on semiconductors Such measurements can yield such im 1 1331 fB ts V v v V portant information as doping concentration pB I 3 4 1 Test Configuration Figure 3 8 shows the basic test configuration to make resistivity me...

Страница 56: ...GSGSGSGSGSGSGS SGSGSGSGSGSGSGSGSGSGSGSG 220 Current Source Sources Current through Sample 196 DMM Measures Voltage Across Sample 7072 Matrix Card 707 Switching Matrix Figure 3 8 Resistivity Test Configuration 3 10 I ...

Страница 57: ...APPLICATIONS 6 IT 0 VI3 1 2 4 3 t Figure 3 8 Resistivlty Measurement Conventions 3 11 I ...

Страница 58: ...System Configuration Figure 3 10 shows the general configuration of the SPA switching system The components of the system perform the following functions HP 4145B Has four SMUs Source Measure Units two voltage sources and two voltage measurement ports The unit can automatically run a variety of tests on semiconductors and plot data on a built in CRT Model 707 Switching Matrix Controls the matrix c...

Страница 59: ...078 CSHP cable set Figure 3 10 Semiconductor Parameter Analysis Switching System 3 5 2 Cable Connections triax cables 707 TRX IO while the two voltage source and voltage measurement ports Vs and Vm are to be con Figure 3 11 shows how to connect the HP 4145B to the netted using BNC cables 705 l 10 and triax BNC adapters Model 7072 using the optional Keithley Model 7078 CSHP 7078 TRX BNC Typically t...

Страница 60: ...APPLICATIONS i IT LIUI HP 4145 Semiconductor Parameter Analvzer Triax Cables Coax Cables 7072 Matrix Card Triax BNC Adapiers Figure 3 11 SPA Connections 3 14 I ...

Страница 61: ...t of the applications package supplied with the HP 41458 System Configuration Figure 3 12 shows the configuration and connections for this example Only three of the four SMLJs are required for the test as indicated in the figure A total of four FETs can be connected to a single card as shown on the dia gram In all cases triax cabling should be used The cross points to close to test a specific FET ...

Страница 62: ...APPLICATIONS FETs Under Test IF IG IH I I I I I I I I I I I I II I 1 2 3 4 5 8 7 8 9 to 1 12 I I 7072 Matrix Card I L J 707 Switching Matrix Figure 3 12 System Configuration for JFET Test 3 16 I ...

Страница 63: ...IONS ID W 35 00 3 500 div VDS l OOO div V Variable 1 VDS ChZ Linear sweep Stan oooov SQ to 000 S P IWO Variable 2 G Ch3 Start oooov stop t ooca SbP 2500 constant VS Chl OOOOV Figure 3 13 Typical JFET Plot 3 w I ...

Страница 64: ...ents Inc Cleveland 1987 Nicollian E H and Brews J R MOS Physics and Technology Wiley New York 1982 Sze S M msics of Semiconductor Devices 2nd edition Wiley New York 1985 Van der Pauw L J A Method of Measuring Specific Resistivity and Hall Effects of Discs of Arbitrary Shape F_hm Rec Rep 1958 13 1 Operation and Service Manual Model 4145A Semiconductor Parameter Anaiys Yokogawa Hewlett Packard Ltd T...

Страница 65: ...hould it become necessary to use solder on the circuit board remove the flux from the work areas when the repair has been completed Use Freon8 TMS or TE or the equivalent along with clean cotton swabs or a clean soft brush to remove the flux Take care not to spread the flux to other areas of the circuit board Once the flux has been removed swab only the repaired area with methanol then blow dry th...

Страница 66: ...nt l Model 707 Switchim Matrix l Unterminated 3 slot ax cables 2 made by cutting one TRX 7078 10 cable in half l Relay test software supplied with Model 707 l IBM PC compatible or Hewlett Packard Series 200 or 300 computer l Relay test connector supplied with Model 707 Connections The test cable should be prepared using the information shown in Figure 4 l The center conductor of the unter minated ...

Страница 67: ...le triaxial adapter vise you as to which relay or group of relays if any fail to p s the test Test Connections 4 3 4 Offset Current Verification Figure 4 3 shows the test connections for offset current verification The Model 7072 row being tested is to be con nected to the Model 617 Electrome input through the triaxial cable and the triaxial adapter Note that the elec trometer ground strap is to b...

Страница 68: ...on and the 2pA range on the Model 637 Zero cor rect the instrument and then select autoranging 4 Connect the Model 617 to row A of the Model 7072 as shown in Figure 4 3 5 Close crosspoint Al by using the Model 707front panel controls 6 Disable zero check on the Model 617 and allow the reading to settle 7 Verify that the offset current reading is lpA 8 Enable zero check on the Model 617 and open cr...

Страница 69: ...is shown in Figure 4 5 Note that both the inner shield and the center conductor are to be connected to the banana plug as shown COM and the LO terminal of the electrometer voltage source must be connected together as shown Also the ground link between COM and chassis must be removed and the Model 617 guard must be turned off for current measurements Procedure WARNING Hazardous voltage from the ele...

Страница 70: ...7 and 8 9 and lo and 11 and 12 The complete procedure outlined in steps 7 through 11should be repeated for each cross point pair Each resistance measurement for rows E through H should be lTR lo 7 l 7078 TRX 3 Triax Cable 3 Guard off User Prepared Triax Cable See Figure 4 5 617 Electrometer Warning Hazardous voltage from a the electrometer source H may be present on terminals QQ Is 7072 Matrix Car...

Страница 71: ...y or relays for that particular crosspoint is probably defective See the schematic diagram at the end of Section 5 to deter mine which relay is defective Recommended Equipment l Model 196 DMM l 7078 TRX T triax tee adapters 3 l Unterminated 3 slot triax cables 4 made from two 7078 TRX 10 triax cables l Banana plugs 4 Keithley part number BG 10 Z Connections Figure 4 6 shows the connections for the...

Страница 72: ...7 5 Select the ohms function 3000 range and 6 digit resolution on the Model 196 6 After the reading settles enable zero on the Model 196 DMM Leave zero enabled for the remainder of the tests 7 Disconnect the two triax tee adapters from the short ing adapter and connect the two adapters with the cable to the row A and column 1 connectors on the Model 7072 see Figure 4 6 8 Close crosspoint Al and al...

Страница 73: ...oint to close is the one correspon X3 Repeat steps 8 through 10 for row B The crosspoints ding to the row and column connections at that time of interest here are Bl through 812 Also the row In all cases the measured resistance should be 3 5n adapter must be connected to the row being tested To 196 Figure 4 7 Shorting Measurement Paths Using Triax Tee Adapter 4 9 I ...

Страница 74: ... 4 5 1 Recommended Equipment Table 4 2 summarizes the recommended equipment for general troubleshooting Table 4 2 Recommended Troubleshooting Equipment Description Manufacturer and Model Application 5 Digit DMM Keithley 199 Measure DC voltages Oscilloscope TEK 2243 View logic waveforms Extender card Keithley 7070 Allow circuit access 4 5 2 Using the Extender Card In order to gain access to the tes...

Страница 75: ... ID data pulses Power up only Fig 4 8 7 TP7 STROBE pulse End of relay data sequence 8 TP8 Relay data 128 bits Present when updating relays 9 Tl 9 CLK pulses Present during relay data or ID data 10 TPlO High on power up until first Power on safe guard STROBE sets low 11 U30 U45 pins lo 18 Low with relay energized high Relay driver outputs with relay de energized CARDSELl CLRADDR TP5 l l NEXTADDR TP...

Страница 76: ...uffer U46 ID data cir matrix card may be found in drawing number 7072 106 cuits U14 U27 and U47 relay drivers U30 U45 and four sheets located at the end of Section 5 relays Kl KIB and power on safe guard U29 The ma jor elements are discussed below Address Counter u14 ROM P 3l AO All DO D7 to Serial CCXWWter u27 u47 Suffer IDDATA Relay Relays TO CLK _ Drivers Mainframe RELAYDATA Kl K128 Power On Sa...

Страница 77: ... of that register to the next IC down the chain Once all I6 bytes have been shifted into each card in the mainframe the STROBE line is set high to latch the relay information into the Q outputs of the relay drivers and the appropriate relays are energized assuming the driver otlt puts arc enabled as discussed below Logic convention is such that the corresponding relay driver output must be low to ...

Страница 78: ... eight standoffs align with the large clearance holes in the shield and remove the shield 3 To reinstall the shield reverse the above procedure Make sure the metal side of the shield is facing outward CAUTION Failure to observe the following precautions could result in damage not covered by the warranty 1 The shield must be installed such that the metal side is facing away from the matrix card Bac...

Страница 79: ... be sure to include the following information 1 Matrix card model number 7072 2 Card serial number 3 Part description 4 Circuit designation if applicable 5 Keithley part number 5 4 FACTORY SERVICE If the matrix card is to be returned to Keithley Instruments for repair perform the following 1 Complete the service form located at the back of this manual and include it with the unit 2 Carefully pack ...

Страница 80: ...ES IOK 5 1 4W COMPOSITION OR FILM RES 120K 5 1 4W COMPOSITION OR FILM RES 680 5 1 4W COMPOSlTION OR FILM RES llK 5 1 4W COMPOSITION OR FILM RES 200 5 1 4W COMPOSITION OR FILM TEl TE17 TE19 TE51 TPl TPlO TERMINAL TEFLON CONN TEST POINT u14 U27 U29 u3o u45 U46 u47 IC 12 STAGE BINARY COUNTER 74HCT4040 IC 64K EPROM 2764 PROGRAMMED IC QUAD 2 INPUT NAND 74HCTOO IC 8 BIT SERIAL IN LTCH DRIVE UCN 5841A IC...

Страница 81: ...N PART NO CABLE CLAMP STANDOFFS ASSEMBLYREAR PANEL CABLE ASSEMBLY CAP PROTECTIVE FASTENER HANDLE SHIELD REAR SHlELD ROW A SHIELQROW B STANDOFF SOCKET FOR U27 CC 38 4 ST 137 l 7072 302 CA 54 l CAP 30 l FA 154 l HH 33 l 7071 311 7072 305 7072 306 7071 310 SO 69 5 4 ...

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Страница 87: ...Unstable Will not read applied input Overload Calibration only CertiÞcate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether power is turned on or not Also describe signal source Where is the measurement being performed factory controlled laboratory out of doors etc What power l...

Страница 88: ...H Landsberger Strasse 65 D 82110 Germering 089 84 93 07 40 Fax 089 84 93 07 34 GREAT BRITAIN Keithley Instruments Ltd The Minster 58 Portman Road Reading Berkshire RG30 1EA 0118 9 57 56 66 Fax 0118 9 59 64 69 INDIA Keithley Instruments GmbH Flat 2B WILLOCRISSA 14 Rest House Crescent Bangalore 560 001 91 80 509 1320 21 Fax 91 80 509 1322 ITALY Keithley Instruments s r l Viale San Gimignano 38 20146...

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