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Model 6220/6221 Reference Manual

Applications

E-3

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Appendix topics

Resistivity measurements

Certain semiconductor materials such as silicon have high resistivities. The mea-
surement of their resistivity can be a difficult measurement. To aid in the measure-
ment, special probes of a hard metal such as tungsten are used. Because contact
resistance is so high, a four point probe is usually employed. The outer two con-
tacts supply a constant current, and the inner two contacts measure the voltage
drop across a portion of the sample. With the geometry of the probe and wafer
known, resistivity can then be calculated.

The current source used must be stable and accurate. The Model 622x is ideal for
this application. The accurate and stable current along with compliance voltage
can be easily programmed before making the voltage measurement.

The electrometer requires a high impedance to overcome lead resistance prob-
lems. The Keithley Model 6514 Electrometer has the high input impedance
(>200T

Ω

in parallel with 20pF) required to make the measurement accurately. A

simple test system to measure resistivity is shown in

.

For most wafers the resistivity is calculated from: P = ktV/ I

Where: k is a constant based on the geometry of the wafer and probe.

t is the sample thickness.
V is the measured voltage.
I is the current in the sample.

Figure E-1

Resistivity measurement test system

622x

Current Source

6514

Electrometer

t

Sample

Input

Output

Hi

Hi

Lo

Lo

Test Equipment Depot - 800.517.8431 - 99 Washington Street Melrose, MA 02176 - TestEquipmentDepot.com

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Содержание 6220

Страница 1: ...01 Rev B June 2005 A G R E A T E R M E A S U R E O F C O N F I D E N C E Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com 99 Washington Street Melrose MA...

Страница 2: ...ers 28775AuroraRoad Cleveland Ohio44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY 534 8453 www keithley com 12 04 WARRANTY Keithley Instruments Inc warrants this product to be free from defects in...

Страница 3: ...Model 6220 DC Current Source Model 6221 AC and DC Current Source Reference Manual Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 4: ...ally When a new Revision is created all Addenda associ ated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of t...

Страница 5: ...high transient over voltages Measurement Category II connections require protection for high transient over voltages often as sociated with local AC mains connections Assume all measurement control a...

Страница 6: ...minal to the equipment frame The WARNING heading in a manual explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the...

Страница 7: ...vents 1 12 Power up 1 14 Line power connection 1 14 Power up sequence 1 15 Beeper and keyclick 1 16 Source preset 1 17 Disabling the front panel 1 17 Menus 1 18 CONFIG menus 1 18 Direct access menus 1...

Страница 8: ...Jack Guard connections 2 19 Floating current source connections 2 19 Using a test fixture 2 20 Custom built test fixture 2 20 3 DC Current Source Operation Current source output capabilities 3 2 Sour...

Страница 9: ...ep commands 4 22 Sweep status model events 4 23 5 Delta Pulse Delta and Differential Conductance Part 1 5 2 Overview 5 2 Section overview 5 2 Operation overview 5 2 Test systems 5 4 Keithley instrumen...

Страница 10: ...5 51 Model 622x measurement process 5 51 Configuration settings 5 55 Arming process 5 56 Triggering sequence 5 58 Operation 5 59 Setup commands 5 64 6 Averaging Filter Math and Buffer Averaging filte...

Страница 11: ...19 Using the external trigger mode 7 20 Remote wave function operation 7 21 Programming sine waves 7 22 Programming square waves 7 23 Programming ramp waveforms 7 24 Programming arbitrary waveforms 7...

Страница 12: ...0 2 Interfaces 10 2 Languages 10 3 Interface selection and configuration 10 3 Programming syntax 10 12 Command words 10 12 Program messages 10 15 Response messages 10 17 GPIB interface reference 10 19...

Страница 13: ...Output queue 11 20 Error queue 11 20 12 Common Commands Common commands 12 2 13 DISPlay FORMat and SYSTem Key Press Codes DISPlay subsystem 13 2 FORMat subsystem 13 4 FORMat type length 13 4 FORMat EL...

Страница 14: ...3 Warm up period 17 3 Line power 17 3 Recommended calibration equipment 17 4 Calibration equipment connections 17 4 Restoring factory defaults 17 4 Calibration summary and considerations 17 5 Calibrat...

Страница 15: ...nterface function codes C 15 D IEEE 488 and SCPI Conformance Information Introduction D 2 E Applications Calibration source E 2 Resistivity measurements E 3 Diode characterization E 4 Transistor chara...

Страница 16: ...Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 17: ...oating the Model 622x current source 2 14 Figure 2 11 Basic connections to DUT 2 16 Figure 2 12 Noise shield 2 17 Figure 2 13 Safety shield 2 17 Figure 2 14 Cable Guard connections triax inner shield...

Страница 18: ...ce measurement process 5 52 Figure 5 15 Differential Conductance triggering sequence 5 59 6 Averaging Filter Math and Buffer Figure 6 1 Digital filter types moving and repeating 6 5 Figure 6 2 Filter...

Страница 19: ...ion setup wizard 10 37 Figure 10 13 Typical virtual front panel 10 38 11 Status Structure Figure 11 1 Model 622x status mode structure 11 3 Figure 11 2 16 bit status register 11 5 Figure 11 3 Status b...

Страница 20: ...s Overview Figure C 1 IEEE 488 bus configuration C 4 Figure C 2 IEEE 488 handshake sequence C 6 E Applications Figure E 1 Resistivity measurement test system E 3 Figure E 2 Diode characterization test...

Страница 21: ...it commands 5 17 Table 5 2 Error status codes and messages 5 18 Table 5 3 Delta commands 5 31 Table 5 4 Pulse Delta commands 5 49 Table 5 5 Differential Conductance commands 5 64 6 Averaging Filter Ma...

Страница 22: ...mmon and SCPI commands condition registers 11 17 Table 11 5 Common and SCPI commands event registers 11 18 Table 11 6 Common and SCPI commands event enable registers 11 19 Table 11 7 SCPI commands err...

Страница 23: ...ranges 17 22 Table 17 8 Calibration errors 17 23 Table 17 9 CAL PROT GUAR command parameter ranges 17 23 B Error and Status Messages Table B 1 Status and error messages B 2 C IEEE 488 Bus Overview Tab...

Страница 24: ...Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 25: ...rface selection page 1 22 Additional references page 1 7 GPIB and language page 1 23 RS 232 page 1 23 Front and rear panel familiarization page 1 7 Ethernet Model 6221 only page 1 23 Front panel summa...

Страница 26: ...ncel the effects of thermal EMFs Pulse Delta 6221 and 2182A only Provides a pulse output and a 3 point or 2 point measurement algorithm for testing of temperature sensitive DUT Differential Conductanc...

Страница 27: ...nline at www keithley com Safety symbols and terms The following symbols and terms may be found on the instrument or used in this manual If a screw is present connect it to safety earth ground using t...

Страница 28: ...emoving the Model 622x from its anti static bag inspect it for any obvious signs of physical damage Report any such damage to the shipping agent immediately When the Model 622x is not installed and co...

Страница 29: ...rminated at both ends with 3 slot male triax con nectors The 3 model is 3 ft 0 9m in length the 10 model is 10 ft 3m in length and the 20 model is 20 ft 6m in length Model 7078 TRX TBC Connector This...

Страница 30: ...r link cables Connects the Model 62xx to other instruments with Trigger Link connectors e g Model 2182 2182A Model 8501 1 is 1m long Model 8501 2 is 2m long Model 8502 trigger link adapter Lets you co...

Страница 31: ...ctive low current low voltage and high impedance measurements Refer to www keithley com for more details Front and rear panel familiarization Front panel summaries The front panels of the Models 6220...

Страница 32: ...SETUP TRIAX AVG 6 7 2 3 4 5 8 9 COND OUTPUT ON OFF 1 2 3 4 P U S H T O E D I T E NTER PU S H T O E D I T E N T E R 6221 DC AND AC CURRENT SOURCE RANGE EDIT LOCAL CONFIG POWER RANGE AUTO CURSOR EXIT EN...

Страница 33: ...ode Press CONFIG WAVE to configure Wave Middle Row COMM Configures communications GPIB RS 232 or Ethernet 6221 Can also press CONFIG COMM to configure communications ADDR Sets GPIB address DISP Turns...

Страница 34: ...tput response for the Model 6221 LED indicator Turns on when output is on Blinks if source goes into compliance 5 Rotary knob and CURSOR keys Model 6221 When in source edit use CURSOR keys for cursor...

Страница 35: ...for Start of Test SOT trigger and one for external voltage VEXT input 5 RS 232 Female DB 9 connector For RS 232 operation use a straight through not null modem DB 9 shielded cable for connection to th...

Страница 36: ...vents The Model 622x uses a heat sink and three cooling vents to dissipate heat The right side of the case is cut out to expose the black finned heat sink Cooling vents are provided on both sides of...

Страница 37: ...ty 1 75 of spacing is required The feet of the Model 622x only provide 0 625 5 8 of spacing Rack mounting requires 1U of vertical spacing at the top and bottom of the Model 622x 1U is a standard verti...

Страница 38: ...O position 2 Connect the female end of the supplied power cord to the AC receptacle on the rear panel Connect the other end of the power cord to a grounded AC outlet WARNING The power cord supplied wi...

Страница 39: ...module CAUTION For continued protection against fire or instrument damage only replace fuse with the type and rating listed If the instru ment repeatedly blows fuses locate and correct the cause of th...

Страница 40: ...d when a front panel key is pressed For the Model 6221 a short beep is also issued when the rotary knob is turned or pressed When an error occurs a slightly longer beep is issued A longer beep is issu...

Страница 41: ...ation Source preset The PRES key can be used to set the source to a preset value When the PRES key is pressed the source will set to the preset value PRES message dis played When the PRES key is press...

Страница 42: ...ing may jitter as much as 1ms This jitter can be eliminated by disabling the front panel as previ ously explained If the display is disabled while a Sweep Delta or Differential Conductance test is run...

Страница 43: ...Section 3 RECALL opens menu for stored readings and statistics Section 6 SAVE opens SAVED SETUP MENU page 1 25 SETUP opens RESTORE SETUP menu page 1 25 TRIAX opens CONFIGURE TRIAX menu Section 2 MENU...

Страница 44: ...wn For the first digit a segment line is scrolled left to right All digits are sequentially displayed left to right The segments of each digit are sequentially displayed When finished abort the displa...

Страница 45: ...ty of a value press the numeric entry key Value adjust method 1 Use the Cursor Keys to place the blinking cursor on the digit to be edited 2 Use the Value Adjust Keys to increment or decrement the val...

Страница 46: ...left With a value displayed value adjust can be performed using the Rotary Knob Turn it clockwise to increment a digit and turn it counter clockwise to decrement a digit Pressing the ROTARY KNOB perf...

Страница 47: ...6221 only 1 Press COMM to open the COMMUNICATIONS SETUP menu 2 Select the ETHERNET interface 3 For the ETHERNET set the MAC address IP GATEWAY and SUBNET Also enable ON or disable OFF DHCP control NOT...

Страница 48: ...in Table 1 1 For front panel operation PRESET and RST defaults are the same For remote operations the defaults are included in the SCPI table see Section 14 The instrument will power up to the default...

Страница 49: ...setups The SAV and RCL commands are used to save and recall user setups Restoring PRESet or RST default setups The SYSTem PRESet command returns Model 622x to the PRESET defaults and the RST command...

Страница 50: ...Amplitude AMPL 1 0mA Averaging Filter AVG Type Count Disabled Moving 10 Beeper Enabled Communications COMM See Section 10 for details No effect GPIB and address 12 set at factory DELTA I High I Low D...

Страница 51: ...110ms Infinite Best 0 016ms 5 PLC No 2 lows per pulse RANGE 100mA range fixed Sweep SWP Type Start Stop Step Delay Sweep Count Source Ranging Compliance Abort Unarmed Stair 0mA 100mA 10mA 1s Finite 1...

Страница 52: ...ource Delay Immediate 2 Off Off Immediate 2 Off Off UNITS Volts WAVE Type Offset Phase Marker Duration Ranging External triggering Mode Trigger link line Ignore mode Inactive value Unarmed Sine 0mA Of...

Страница 53: ...ets is optional and need not be included in the program message Query commands Most command words have a query form A query command is identified by the question mark that follows the command word A q...

Страница 54: ...1 30 Getting Started Model 6220 6221 Reference Manual Return to Section 1 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 55: ...erview page 2 8 Triax Cable Guard page 2 9 Banana Jack Guard page 2 12 Floating the current source page 2 13 Connections to DUT page 2 15 Supplied triax cable page 2 15 Basic connections page 2 15 Shi...

Страница 56: ...ield of the triax connector can be connected to Output Low or Cable Guard See Triax inner shield on page 2 7 for details on the inner OUTPUT FVR Earth Ground Chassis 622x Earth Ground Chassis EARTH GR...

Страница 57: ...ions to external circuitry is Earth Ground Earth Ground is the outer shield of the triax connector and is isolated from the Chassis by the FVR Keep in mind that the Chassis should never be used as a g...

Страница 58: ...inter lock switch The interlock switch is to mounted on a test fixture such that the switch will open disable the OUTPUT when the test fixture lid is opened The switch will close enable the OUTPUT wh...

Страница 59: ...nana jack and is disconnected from Earth Ground Floating see Figure 2 5B Using the Model 622x with the triax inner shield connected to Output Low makes it compatible with the Keithley Model 220 curren...

Страница 60: ...lack Earth Ground green 622x OUTPUT FVR Chassis Earth Ground 105V Max Output High red Output Low black Earth Ground green 622x 1 1 1 1 1 1 2 2 OUTPUT FVR Chassis Earth Ground OUTPUT FVR 250Vpk Max 105...

Страница 61: ...normal display state Remote programming triax inner shield Changing the inner shield connection can only be done with the current source OUTPUT OFF Otherwise error 403 Not allowed with output on will...

Страница 62: ...details on Triax Cable Guard refer to page 2 9 Banana Jack Guard This guard is similar to cable guard in it provides a voltage that is essentially the same potential as Output High 1mV accuracy typic...

Страница 63: ...insulation resistance and capacitance between its conductors A typical triax cable could typically have 1T ft of insulation resistance and 100pF ft of cable capacitance Unguarded triax cable example i...

Страница 64: ...capacitor CL1 This makes the voltage drop across the capacitor 0V Therefore the capacitor does not charge and is effectively removed from the test circuit The response at the DUT is much faster and is...

Страница 65: ...ance in an unguarded triax cable and slows down response increases settling time For a high impedance DUT 10M significant leakage current may occur through the terminal post insulators The current thr...

Страница 66: ...tage reading of 50V instead of the expected 100V A higher impedance DUT results in even more error while a lower impedance DUT results in less error A technique to eliminate the loading factor is to m...

Страница 67: ...Low of the voltage source is connected to earth ground NOTE For the Keithley Model 2182 2182A Nanovoltmeter the input impedance for the 100V range is 10M Therefore for higher impedance DUT voltage sh...

Страница 68: ...utput Low of the Model 622x and Chassis The chassis of the Model 622x must be connected to Earth Ground Use the chassis ground screw on the rear panel for connection to a known safety Earth Ground The...

Страница 69: ...d voltages when used in certain applications This triax cable is intended for use only by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid...

Страница 70: ...ed to Output Low Safety shield connections A safety shield must be used whenever hazardous voltages 30Vrms 42Vpeak will be present The metal safety shield must completely surround DUT test circuitry a...

Страница 71: ...Output Metal noise shield High Low DUT Output Metal noise shield 622x 622x red black red green Boot color for alligator clip if using supplied triax cable A Inner shield connected to Output Low B Inne...

Страница 72: ...w DUT Output 622x Guard Plate Cable Guard black Triax Cable Output Low connected to earth ground red green Boot color for alligator clip if using supplied triax cable Earth Ground High Low DUT Output...

Страница 73: ...ource in the test circuit it may be necessary to float the Model 622x off Earth Ground see Figure 2 17 Details on Floating the current source are provided on page 2 13 WARNING To prevent electric shoc...

Страница 74: ...ion scheme covered in this section The internal wiring to the DUT will of course depend on the connection scheme used High Low Output High Banana Plug Cable Output 622x 622x Test circuit LO Test circu...

Страница 75: ...talled such that when the lid of the test fixture is opened the switch will open and when the lid is closed the switch will close When the test fixture lid is opened the output of the Model 622x will...

Страница 76: ...inding posts 5 way copper binding posts will accommodate cables termi nated with banana plugs or spade lugs The cable supplied with the Model 2182 2182A is terminated with copper spade lugs A clean co...

Страница 77: ...sive leakage currents Contaminants on DUT and test circuit components can cre ate a leakage path The leakage currents may be large enough to corrupt low level measurements Handling tips Do not touch...

Страница 78: ...2 24 Output Connections Model 6220 6221 Reference Manual Return to Section 2 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 79: ...liance page 3 9 Source and compliance editing page 3 9 Sourcing current page 3 14 Remote programming source output commands page 3 16 NOTE Supplied example software allows you to control a Model 622x...

Страница 80: ...e range that will accommodate the output current For example if sourcing 12mA select the 20mA range Autorange For front panel operation the AUTO key is a single action control When pressed the best ra...

Страница 81: ...output voltage within the settling time specification for the selected range see Output response on page 3 5 If the compliance voltage is set too close to the expected output voltage the over shoot c...

Страница 82: ...to the external test circuit When the external voltage is decreased to 30V as shown in Figure 3 1B the Model 622x instead operates as a sink The Model 622x dissipates 200mW of power 10mA x 20V 200mW F...

Страница 83: ...output response For a high impedance load the analog filter reduces overshoot excessive noise and instability oscillation Analog filter The Model 622x has an analog filter that when enabled will slow...

Страница 84: ...e of the filtered out put can significantly reduce overshoot noise and instability oscillation With the analog filter disabled the output capacitance of the Model 622x is 10pF If not sure about using...

Страница 85: ...for the FAST and SLOW response speed settings Note that the SLOW setting of the Model 6221 has the same response as the Model 6220 Enabling the analog filter may or may not significantly increase sett...

Страница 86: ...uarded triax cable Cable Guard can significantly reduce the effects of cable capacitance but will not eliminate it For details see Triax Cable Guard on page 2 9 Another typical source of capacitance a...

Страница 87: ...in the procedure for Sourcing current on page 3 14 Source and compliance editing Figure 3 3 shows how to set source and compliance values for the Model 6220 Figure 3 4 shows the source and compliance...

Страница 88: ...e key DC Select I source field or V compliance field EDIT annunciator turns on Value Adjust Method a Use Cursor Keys to place blinking cursor on digit to be edited b Use Value Adjust Keys to increment...

Страница 89: ...iting 5 The unit will exit the editing mode if an editing action is not performed within six seconds To re enter the edit mode do one of the following For the Model 6220 press a Value Adjust Key or a...

Страница 90: ...e 2 6 7 8 Use the Value Adjust Method or Numeric Entry Method to edit values Use these editing tech niques for both methods To set the I source value to zero or set the V compliance value to 0 10V min...

Страница 91: ...ange is active For example assume autorange is enabled and the source is presently set for 1mA on the 1mA range When the source value is changed to 5mA the range will automatically uprange to the 10mA...

Страница 92: ...ld connected to Output Low Cable Guard is not available Inner shield connected to Cable Guard with Output Low connected to the outer shield Earth Ground of the triax connector 2 Set the source and com...

Страница 93: ...le the filter again press the FILT key FILT annunciator turns off Response speed setting 6221 The response speed can only be changed while the output is off Response speed is set as follows a Press th...

Страница 94: ...nce This indicates that the set current is not being delivered to the load See Compliance on page 3 3 for details Remote programming source output commands Table 3 2 lists the commands to configure an...

Страница 95: ...Table 3 2 DC output commands Command Description Default CLEar Turns output off and sets output level to zero CURRent RANGe n Sets current source range amps 1 2 n 105e 3 to 105e 3 100e 3 CURRent RANGe...

Страница 96: ...3 18 DC Current Source Operation Model 6220 6221 Reference Manual Return to Section 3 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 97: ...ogarithmic staircase sweeps page 4 5 Sweep status model events page 4 23 Custom sweeps page 4 6 Setting sweep parameters page 4 8 Custom sweep editing page 4 8 Using auto copy with custom sweeps page...

Страница 98: ...ent in 1mA steps The bias current is the fixed current setting just prior to the start of the sweep The current output will remain at the last point in the sweep after completion Logarithmic staircase...

Страница 99: ...art 5mA Stop Bias Start Stop 0 1mA 1mA 10mA 100mA Bias First Point Last Point A Linear Staircase Sweep B Logarithmic Staircase Sweep Logarithmic scale shown for staircase steps C Custom Sweep 1mA 2mA...

Страница 100: ...til the stop current level is reached The current output remains at the last point when the sweep is done The sweep delay parameter determines the time duration of each sweep step For linear staircase...

Страница 101: ...1mA to 10mA The sweep delay parameter deter mines the time period for each step As with the linear staircase sweep the sweep delay period is the same for all steps Figure 4 3 Logarithmic staircase sw...

Страница 102: ...ation at each step is determined by the sweep delay Custom sweeps This sweep type lets you configure a customized sweep Programmable parame ters include the number of measurement points steps in the s...

Страница 103: ...The unit cycles through the sweep points in the programmed order The current output remains at the last step when the sweep is done Note that the sweep delay period is different for each step Figure...

Страница 104: ...e the left arrow keys to freely move back and forth between the different values until you have adjusted the source level delay and compliance to their desired values If however you change the point n...

Страница 105: ...he source will output the maximum level for that range For example if the source is on the 2mA range when the sweep is started it will remain on the 2mA range for the entire sweep If the configured sw...

Страница 106: ...YPE STAIR LOG CUSTOM Select sweep type Set START STOP STEP DELAY Set START STOP NO OF POINTS DELAY Set POINTS ADJUST POINTS AUTO COPY SWEEP COUNT FINITE INFINITE Choose sweep count Enter desired of sw...

Страница 107: ...e desired START STOP STEP and DELAY values e From the CONFIGURE SWEEPS menu select SWEEP COUNT press ENTER and then choose FINITE or INFINITE as desired f Again from the CONFIGURE SWEEPS menu choose S...

Страница 108: ...desired START STOP NO OF POINTS and DELAY values e From the CONFIGURE SWEEPS menu select SWEEP COUNT press ENTER and then choose FINITE or INFINITE as desired f Again from the CONFIGURE SWEEPS menu ch...

Страница 109: ...e current value and if not using auto copy compliance and delay for each remaining sweep point h From the CONFIGURE SWEEPS menu select SWEEP COUNT press ENTER and then choose FINITE or INFINITE as des...

Страница 110: ...wed with mode armed Table 4 3 Sweep example parameters Sweep type Parameters for sweep examples Linear staircase sweep page 4 15 Start current 1mA Stop current 10mA Step current 1mA Delay 1s Source ra...

Страница 111: ...the sweep is done turn the source output off with this command OUTP OFF RST Restore 622x defaults SOUR CURR 1e 4 Set bias current to 100 A SOUR CURR COMP 10 Set compliance to 10V SOUR SWE SPAC LIN Sel...

Страница 112: ...sweep 4 When the sweep is done turn the source output off with this command OUTP OFF RST Restore 622x defaults SOUR CURR 1e 5 Set bias current to 10 A SOUR CURR COMP 5 Set compliance to 5V SOUR SWE S...

Страница 113: ...ommand OUTP OFF RST Restore 622x defaults SOUR CURR 5e 5 Set bias current to 50 A SOUR SWE SPAC LIST Select custom sweep SOUR SWE RANG AUTO Select auto source range SOUR LIST CURR 3e 3 1e 3 4e 3 5e 3...

Страница 114: ...1 CURRent CENTer n Sets center current 2 n 0 105 to 0 105 A 0 SOURce 1 CURRent SPAN n Sets span current 2 n 2e 13 to 0 210 A 0 1 SOURce 1 DELay n Sets source delay 3 n 0 001 to 999999 999 s 1 SOURce 1...

Страница 115: ...from high value to low value only by using the STARt and STOP commands to set the higher value as the STARt point For example if the center current is 50mA and the span is 100mA the sweep will range f...

Страница 116: ...SOUR SWE SPAC name Select sweep type This command chooses the LINear staircase LOGarithmic staircase or LIST custom sweep type See Table 4 5 and following notes for details on custom sweep commands 7...

Страница 117: ...se commands create a compliance list and add compliance values to an existing list Compliance values match up one for one with the current source values above in the current list Table 4 5 Custom list...

Страница 118: ...ameters also changes others The following is a list of coupled commands When SPAN or CENTer changes SPAN SPAN CENTer CENTer STOP CENTer SPAN 2 STARt CENTer SPAN 2 SWEep POINts SWEep POINts STEP SPAN S...

Страница 119: ...t because the first query cleared it and the bit will not be reset until the next point in the sweep The Sweep Aborted event occurs whenever a sweep is aborted before being allowed to finish and the S...

Страница 120: ...4 24 Sweeps Model 6220 6221 Reference Manual Return to Section 4 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 121: ...s page 5 11 Model 6221 measurement process page 5 32 Interlock page 5 13 Pulse Delta outputs page 5 35 Configuration settings page 5 39 Data flow and read commands page 5 13 Arming process page 5 42 D...

Страница 122: ...h high and low out put level A 3 point moving average algorithm is used to calculate Delta readings As shown in Figure 5 1A the first three Model 2182 2182A A D conversions mea surements yields the fi...

Страница 123: ...Delta Cycle 2nd Pulse Delta Cycle Pulse Delta Reading Nth 2182A A D Pulse Delta Reading 2nd A Delta measurements B Pulse Delta measurements C Differential Conductance measurements DELTA Reading 3rd DE...

Страница 124: ...ne front panel operation is shown in Figure 5 2A The RS 232 interface for the Model 2182 2182A must be enabled on and the selected interface for the Model 622x must be the GPIB or the Ethernet Model 6...

Страница 125: ...er to perform Delta Pulse Delta or Differential Conductance measure ments the Model 622x must communicate to the Model 2182 2182A over the serial RS 232 interface With serial communications properly c...

Страница 126: ...tem System connections for this configuration are shown in Figure 5 3 RS 232 The Model 622x communicates with the Model 2182 2182A via the RS 232 interface The Model 622x sends setup commands to the M...

Страница 127: ...is configuration are shown in Figure 5 4 RS 232 and Trigger Link This system configuration uses the same RS 232 and Trigger Link connections that are used for stand alone operation See Connec tions st...

Страница 128: ...the absence of guard leakage and cable capacitance can adversely affect the performance of the Model 622x Guarding can be used for all DUT testing and is most effective when sourcing low current and o...

Страница 129: ...OUTPUT connector to the driven guard OUTPut ISHield GUARd Safety test fixture To prevent electric shock an earth grounded test fixture should be used to prevent inadvertent contact with live circuitry...

Страница 130: ...182 2182A see Interface selection and configuration on page 10 3 DUT High Low HI LO OUTPUT connector Keithley 622x Current Source Inner shield set as Guard Channel 1 Guard Test Fixture Connect test fi...

Страница 131: ...the COMM key and then select GPIB or ETHERNET 6221 only from the communications setup menu GPIB Set the IEEE 488 address 0 to 30 Ethernet 6221 Set the IP Gateway Subnet and DHCP After configuring the...

Страница 132: ...m speed On the Model 2182 2182A the REM remote annunciator turns on and all front panel controls are locked out while Differential Conductance is armed or running Internal sweep table During the armin...

Страница 133: ...S reading See page 5 16 for details on Measurement units The reading can then be filtered and or modified by a built in math calculation An averaging filter can be used to stabilize noisy readings see...

Страница 134: ...Filter 622x Math 622x Display 622x Buffer TRACe FEED SENS1 TRACe FEED CALC1 CALC1 DATA CALC1 DATA FRESh SENSe DATA LATest SENSe DATA FRESh Recall Recall TRACe DATA TRACe DATA SELected start count CAL...

Страница 135: ...r stale will occur B Post math readings CALCulate 1 DATA LATest CALCulate 1 DATA FRESh While Delta Pulse Delta or Differential Conductance is running and Math is enabled the CALC1 DATA command can be...

Страница 136: ...s ohms power or conductance The readings from the Model 2182 2182A for Delta Pulse Delta or Differential Conductance are sent to the Model 622x as voltage readings These readings can be displayed by t...

Страница 137: ...6 S D Cond Differential Conductance Siemens reading 1 23456 mWp Pulse Pulse Delta peak power Watts reading 1 2 3 1 23456 mW Pulse Pulse Delta average power Watts reading 1 2 3 1 Pulse Delta power can...

Страница 138: ...o not send an ARM command while a sweep or delta test is already running Occurs when attempting to start Pulse Delta while on a FIXED range that is too low Select a higher source range 225 Out of Memo...

Страница 139: ...ource uprange has occurred during the arming process 416 Step size too small Differential Conductance Occurs if the step size is so small it rounds down to zero An actual step size of zero would resul...

Страница 140: ...ffectively be cancelled out of the delta reading For example assume the DUT is exactly 0 1 and the test current is 1mA Ideally the voltage across the DUT would measure exactly 100 V However assume tha...

Страница 141: ...ions are performed to yield a single Delta reading When Delta starts three Model 2182 2182A A Ds A B and C are performed and the Delta reading is calculated After the 1st Delta cycle the moving averag...

Страница 142: ...1st Delta reading n Delta Cycle Number 1 21 1 20 Therefore DELTA Reading 1st 622x I Source 0 time 1st Delta Cycle 2nd Delta Cycle I High I Low 3rd Delta Cycle 4th Delta Cycle A 2B C DELTA Reading 2nd...

Страница 143: ...re wave output of the Model 622x is set to 10mA high and 10mA low and the fol lowing Model 2182 2182A measurement conversions A Ds are made for the first Delta cycle A D A 10 01mV A D B 9 99mV A D C 1...

Страница 144: ...be set to a finite number 1 to 65 536 or Infinity can be selected With an infinite count selected the Delta runs continuously The default count setting is Infinity The separate sweep count parameter c...

Страница 145: ...be aborted by pressing the EXIT key or sending the SOUR SWE ABOR command Triggering sequence The Trigger Link is used to synchronize source measure triggering operations of the Models 622x and 2182 2...

Страница 146: ...Model 622x The Model 2182 2182A outputs a trigger pulse to the Model 622x to start the next Delta cycle if Delta count is 1 Other wise Delta will stop Figure 5 6 shows the data reading flow process fr...

Страница 147: ...ese settings see Configura tion settings on page 5 24 a Set I HIGH I LOW DELAY COUNT and COMPLIANCE ABORT b When finished use the EXIT key to back out of the menu structure 5 Set the measurement units...

Страница 148: ...x as explained in Configuring communications on page 5 10 3 On the Model 2182 2182A select the desired measurement range and integration rate These Model 2182 2182A settings can be made from the front...

Страница 149: ...readings After the specified finite num ber of Delta readings are performed Delta will stop running At this point another initiate command will re start Delta New Delta readings will over write the o...

Страница 150: ...l stored Delta readings Model 2182A Delta readings were sent to the buffer of the Model 622x Send the following read command to read the buffer Setup commands Delta setup and arm commands Commands to...

Страница 151: ...0 indicates that Delta is not armed If the Model 6221 is already armed for a another action e g Differential Conductance or Pulse Delta the Delta arm command will un arm the other action and arm Delta...

Страница 152: ...or a low pulse a high pulse and another low pulse The Model 6221 outputs the pulses and the Model 2182A performs the A D measurements As shown in Figure 5 9 every three pulses yields a single Pulse De...

Страница 153: ...ocess will reduce DUT heating and eliminate the effects of thermal EMFs Assume the Model 6221 is configured to output 10mA and 0mA pulses Due to a to a 10 V thermal EMF in the test leads the following...

Страница 154: ...d a Pulse Delta reading can be expressed and dis played as a Peak power reading or an Average power reading Peak power is the default setting Figure 5 9 shows how Pulse Delta voltage is calculated Pea...

Страница 155: ...l be in question For example on the 2mA source range the set low pulse I Low level must be 0nA 600nA The Model 6221 will report the questionable power reading but will not generate any front panel err...

Страница 156: ...pulses low high and low are generated on the posi tive going edges of the first three power line cycles For the remaining power line cycles in the interval the output remains at the I Low level Figur...

Страница 157: ...tput The sweep is configured to start high pulses at 2mA and staircase to 10mA in 2mA steps The low pulse level for this sweep is 0mA Logarithmic sweep Figure 5 11B shows an example of a logarithmic S...

Страница 158: ...Step Log Step Log Step Step Step Step Step Low 0mA 8mA 16mA Linear Scale 4mA 2mA 1mA One Pulse Delta Cycle Sweep Delay LO HI LO LO HI LO LO HI LO LO HI LO LO HI LO LO HI LO LO HI LO LO HI LO LO HI LO...

Страница 159: ...riod for each Pulse Delta cycle is the same as the sweep delay time that is set by the user when configuring the sweep Fixed output The Pulse Delta cycle interval is expressed as the number of power l...

Страница 160: ...e measure speed of the Model 2182A Integration rate is automatically set when Pulse Delta is armed Count The Pulse Delta count specifies the number of Pulse Delta intervals to perform Each pulse inter...

Страница 161: ...instead be used when pulse high may cause DUT heating For the 2 point measurement technique the voltage measurement for the second low pulse is not performed Sweep output settings The following settin...

Страница 162: ...to arm Pulse Delta Pulse Delta using a Sweep output Only the moving average filter can be used if enabled If the repeating average filter is enabled the filter type will change to moving when Pulse D...

Страница 163: ...rforms a measurement conversion A D 1 and an output trigger is sent back to the Model 6221 Model 6221 At the start of the next line cycle the Model 6221 outputs the programmed high I High current puls...

Страница 164: ...s 2182A and 6221 as explained in Configuring communications on page 5 10 3 On the Model 2182A select the desired measurement range using the RANGE keys NOTE Pulse Delta readings from the Model 2182A w...

Страница 165: ...t and configure the sweep including the sweep delay and use the SOURCE RANGING menu item to select ranging BEST FIXED or AUTO When finished use the EXIT key to return to the normal display state 5 Set...

Страница 166: ...5 page 5 10 Test connections 2 Configure communications for the Models 2182A and 6221 as explained in Configuring communications on page 5 10 3 On the Model 2182A select the desired measurement range...

Страница 167: ...Pulse Delta New Pulse Delta readings will overwrite the old Pulse Delta readings in the Model 6221 buffer If the INFinity count is set Pulse Delta will run continuously If the buffer fills Pulse Delt...

Страница 168: ...e Delta readings Model 2182A Pulse Delta readings were sent to the buffer of the Model 6221 Send the following read com mand to read the buffer NOTE If a read command is sent when Pulse Delta is not r...

Страница 169: ...a RANGing name Selects fixed pulse range 2 4 name BEST or FIXed BEST SOURce 1 SWEep RANGing name Selects pulse sweep range 2 4 name AUTO BEST or FIXed BEST SOURce 1 PDELta COUNt NRf Sets the number of...

Страница 170: ...ime in seconds See Section 4 for details on sweeps 4 When using a Fixed output use the SOUR PDEL RANG command to set the source range When using a Sweep output use the SOUR SWE RANG com mand to set ra...

Страница 171: ...2182 2182A with the Model 622x a more sophisticated process is used to perform differential measurements The delta measurement process is used to eliminate the effects of thermal EMFs and a 3 point m...

Страница 172: ...3 C to E dV Calc 4 D to F dV Calc 5 E to G dV Calc 6 F to H dV Calc 1 A to C dV Calculations The following equations are used by the 622x to calculate differential voltage dV To calculate dV points A...

Страница 173: ...ding Number 1 Example Calculate the 21st dV reading X Y and Z are the three A D measurements for the 21st dV reading n Reading Number 1 21 1 20 Therefore The 1 n term in the dV calculation is used for...

Страница 174: ...Average Voltage is the average bias voltage that was present across the device when the corresponding Differential Conductance reading was taken For remote operation the Average Voltage reading for D...

Страница 175: ...op interval the step size will be readjusted to provide a 100 point Differential Conductance sweep Step is a magnitude and is therefore always set as a positive value Step can be set from 0 to 105mA T...

Страница 176: ...e arming process the Model 622x establishes communications with the Model 2182 2182A and performs a series of operations Communications setup commands sweep table and repeating filter The Model 622x p...

Страница 177: ...ero value from the Model 2182 2182A and will factor it into the calculations for Differential Conductance voltage This technique effectively compensates for Model 2182 2182A offset voltage During V ze...

Страница 178: ...vel After the Differential Conductance Delay expires an output trigger pulse is sent to the Model 2182 2182A to start its operations Model 2182 2182A After its Trigger Delay expires the Model 2182 218...

Страница 179: ...ration for front panel stand alone operation is shown in Figure 5 2A on page 5 5 NOTE Differential Conductance readings from the Mod el 2182 2182A will be unfiltered Noisy readings can be filtered by...

Страница 180: ...ntial Conductance reading is in volts which is the default setting However it can instead be expressed and displayed as an Ohms Watts or Siemens reading See Measurement units on page 5 16 for details...

Страница 181: ...ge To set the integration rate use the RATE key Commands from the PC to control the Model 2182 2182A are addressed to the Model 622x Each command is then routed through the Model 622x out the serial p...

Страница 182: ...formed Differential Conductance will stop running At this point another initiate command will re start Differ ential Conductance New Differential Conductance readings will overwrite the old Differenti...

Страница 183: ...following read command to read the buffer NOTE If a read command is sent when Differential Con ductance is not running error 221 Settings Con flict will occur See Table 5 2 for details on errors assoc...

Страница 184: ...STARt STEP STOP DELTa DELay and CABort Table 5 5 Differential Conductance commands Command Description Default SOURce 1 DCONductance NVPResent Queries if 2182 2182A is con nected 1 1 yes 0 no SOURce 1...

Страница 185: ...rm for the arm command SOUR DCON ARM is used deter mine if Differential Conductance is armed A returned 1 indicates that Differ ential Conductance is armed A 0 indicates that Differential Conductance...

Страница 186: ...6 Delta Pulse Delta and Differential Conductance Model 6220 6221 Reference Manual Return to Section 5 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot...

Страница 187: ...and controlling mX b and m X b page 6 9 Remote programming Math page 6 10 Buffer page 6 11 Buffer characteristics page 6 12 Storing readings page 6 14 Recall page 6 14 Remote programming Buffer page...

Страница 188: ...f the moving average filter is enabled when Differential Conductance is armed the filter type will change to repeating 2 If the repeating average filter is enabled when Pulse Delta Sweep output is arm...

Страница 189: ...er indicates if the reading is settled or not The bit will set 1 when the first settled filtered reading occurs For details on status structure see Section 11 Delta and Pulse Delta As shown in Table 6...

Страница 190: ...and starts over The filter stack must be filled with delta readings and then averaged to yield and store one filtered delta reading The stack is emptied and the fill and average process is repeated t...

Страница 191: ...ed window the reading is based on the average of the reading conversions If the noise does exceed the selected win dow the reading is a single reading conversion and new averaging starts from this poi...

Страница 192: ...t B A D conversion Filter example Filter Type Moving Filter Window 0 01 of range Filter Count 10 Ten readings fill the stack to yield a filtered reading Assume the next reading which is the 11th is ou...

Страница 193: ...A2 A2 A2 A2 A2 A2 A3 A4 A4 A4 A4 A4 A4 A4 B4 B4 B4 B4 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A6 A6 A6 A2 A3 A3 A3 A3 A3 B3 B3 B3 B3 B3 B3 A1 Reading 1 Conversion Conversion Conversio...

Страница 194: ...lay state Remote programming Averaging filter The commands for averaging filter setup and control are listed in Table 6 2 A pro gramming example follows the table Programming example Repeating average...

Страница 195: ...r the math configuration menu 2 From the math menu use the edit controls to select NONE no math MX B or M X B Selecting NONE exits the menu structure 3 After selecting a math calculation the present s...

Страница 196: ...new fresh reading is not available when CALC1 DATA FRESh is sent error 230 Data corrupt or stale will occur For more information on these read commands see Data flow and read commands on page 5 13 Tab...

Страница 197: ...m average mean standard deviation and peak to peak see Buffer statistics on page 6 12 For front panel operation the buffer is always active enabled Post math delta readings are automatically stored in...

Страница 198: ...0 delta readings Buffer data elements Data elements are stored along with each delta reading The data elements for front panel operation are shown in Figure 6 3 These include reading number timestamp...

Страница 199: ...el operation the absolute timestamp is used for every buffer reading For remote programming the timestamp can be set for absolute or delta The delta timestamp indicates the time between readings Buffe...

Страница 200: ...ent source value and the timestamp 2 As shown in Figure 6 3 use the edit keys to navigate through the buffer to view stored readings 3 To view buffer statistics use the EDIT LOCAL key Each press of th...

Страница 201: ...ed in Table 6 4 TRACe DATA Request all stored delta readings CALC2 FORMat MEAN Select the mean buffer calculation CALC2 STATe ON Enable buffer calculation CALC2 IMMediate Perform the mean calculation...

Страница 202: ...uffer 5 TRACe DATA TYPE Query type of readings stored in buffer 5 Returns NONE DELT DCON or PULS TRACe DATA SELected start count Request list of stored readings 5 Requires a start value and count valu...

Страница 203: ...arameters SENS1 Pre math delta readings are stored in the buffer CALC1 Post math delta readings These are the results of the mX b or m X b see Math on page 6 9 for details NONE Disables the buffer 3 T...

Страница 204: ...st one element must in the list Elements not listed will not be included in response message for TRACe DATA As an alternative to listing the data elements the DEFault or ALL parameter can be used DEFa...

Страница 205: ...CPI commands wave functions page 7 27 Amplitude and offset editing page 7 4 Amplitude page 7 5 Frequency page 7 6 Offset page 7 6 Duty cycle page 7 7 Amplitude units page 7 7 Phase marker page 7 9 Dur...

Страница 206: ...ve forms The amplitude range for all functions is from 1pA to 105mA peak 210mA peak to peak Waveform types include Sine function The Model 6221 can generate sine wave currents with a fre quency range...

Страница 207: ...ncy 1mHz to 100kHz page 7 5 Amplitude 1pA to 105mA peak page 7 5 Range 2nA to 100mA page 7 5 Offset 0 to 105mA page 7 6 Duty cycle 0 to 100 page 7 7 Phase marker 0 to 360 page 7 9 Duration 100ns to 99...

Страница 208: ...menu formatting will be the same as the last Amplitude range The offset menu formatting cannot be changed with the range arrows It is locked to be on the same range format as you had for setting the...

Страница 209: ...eform will be generated on the current range set at the time the wave is armed after error checking is performed If using this option be sure that range is high enough for the selected amplitude and o...

Страница 210: ...5 Ranging FIXED Amplitude 1mA Offset 0mA ARB values range from 1 to 1 Current range 20mA These settings will generate a waveform with a peak to peak value of 2mA on the 20mA range Note that if BEST w...

Страница 211: ...l allows setting wave amplitude in either RMS or peak units The default is peak The RMS selection will only apply for sine wave RMS 0 70710678 x peak or triangle wave RMS 0 57735027 x peak and be igno...

Страница 212: ...to Section 7 topics Figure 7 2 Duty cycle Duty Cycle Setting A Square Wave Duty Cycle 100 Duty Cycle Setting B Ramp Wave Duty Cycle 0 Duty Cycle Setting 50 Duty Cycle Setting Test Equipment Depot 800...

Страница 213: ...h trigger output line is used for the phase marker pulse default is line 3 but you cannot use the same line used for the external trigger output default is 2 or the waveform external trigger input lin...

Страница 214: ...of cycles is desired at the new fre quency the wave function should be aborted and then re armed to force the recal culation of waveform execution time Arbitrary waveforms A total of five arbitrary wa...

Страница 215: ...e is detailed in Using the external trigger mode on page 7 20 Remote external trigger control Remote commands to control the external trigger mode are listed in Table 7 4 on page 7 27 and a program ex...

Страница 216: ...n external trigger Before and after triggered waveforms the inactive value will con trol the current output It can be set to any value between 1 00 and 1 00 The value is interpreted the same as data v...

Страница 217: ...ing Output Waveform Trigger Pulses B Waveform Completes in Ignore Mode Trigger Ignored Waveform Completes Output Waveform Trigger Pulses A Waveform Aborts in Restart Mode Default Trigger Accepted Wave...

Страница 218: ...functions press CONFIG then WAVE then make your selec tions from Table 7 2 See the detailed procedures for each wave function type NOTE User setups cannot be saved or recalled while wave is armed or r...

Страница 219: ...Select best range based on wave amplitude Stay on fixed range when waveform is armed MORE Expand to show additional menu items TRIG MODE MAN BUS NONE TLNK 1 2 3 4 5 6 Configure low jitter external wa...

Страница 220: ...NFIGURE WAVEFORM menu choose RANGING press ENTER then select BEST FIXED or FIXED as desired g From the CONFIGURE WAVEFORM menu select DURATION then set the desired waveform duration h From the CONFIGU...

Страница 221: ...E to ON use OUTPUT POINT to set the phase setting and OUTPUT LINE to set the trigger line g Again from the CONFIGURE WAVEFORM menu choose RANGING press ENTER then select BEST FIXED or FIXED as desired...

Страница 222: ...nd OUTPUT LINE to set the trigger line g Again from the CONFIGURE WAVEFORM menu choose RANGING press ENTER then select BEST FIXED or FIXED as desired h From the CONFIGURE WAVEFORM menu select DURATION...

Страница 223: ...ONFIGURE WAVEFORM menu choose RANGING press ENTER then select BEST FIXED or FIXED as desired g From the CONFIGURE WAVEFORM menu select DURATION then set the desired waveform duration h Press EXIT to r...

Страница 224: ...RE TRIG b Select IGNORE TRIG to ignore retrigger attempts and allow the run ning waveforms to complete c If RESTART IMMEDIATELY is selected another trigger will cause the waveform to restart immediate...

Страница 225: ...ed or running The SAV and RCL commands will generate error 413 Not al lowed with mode armed Table 7 3 Waveform example parameters Waveform Parameters for waveform examples Sine wave page 7 22 Frequenc...

Страница 226: ...d turn the source output off before the duration elapses send this command SOUR WAVE FUNC SIN Select sine wave SOUR WAVE FREQ 1e3 Set frequency to 1kHz SOUR WAVE AMPL 1e 2 Set amplitude to 10mA SOUR W...

Страница 227: ...ion elapses send this command SOUR WAVE FUNC SQU Select square wave SOUR WAVE FREQ 1e4 Set frequency to 10kHz SOUR WAVE AMPL 1e 3 Set amplitude to 1mA SOUR WAVE OFFS 0 Set offset to 0 SOUR WAVE DCYC 5...

Страница 228: ...ion elapses send this command SOUR WAVE FUNC RAMP Select ramp wave SOUR WAVE FREQ 5e4 Set frequency to 50kHz SOUR WAVE AMPL 5e 3 Set amplitude to 5mA SOUR WAVE OFFS 0 Set offset to 0mA SOUR WAVE DCYC...

Страница 229: ...pses send this command SOUR WAVE ARB DATA 0 5 0 25 0 0 3 0 4 Define arbitrary data points in location 0 SOUR WAVE ARB COPY 1 Copy points to location 1 SOUR WAVE FUNC ARB1 Select arb wave location 1 SO...

Страница 230: ...veform In between waveforms the unit will output zero current 4 Arm and trigger the waveform to enable the output The Model 6221 will wait for an external trigger pulse on the specified trigger link l...

Страница 231: ...OURce 1 WAVE OFFset NRf Sets offset 5 NRf 0 105 to 0 105 A 0 SOURce 1 WAVE RANGing name Selects ranging mode 6 name BEST or FIXed BEST SOURce 1 WAVE PMARk NRf Sets marker phase 7 NRf 0 to 360 deg 180...

Страница 232: ...o so the WAVE function will be changed to SINE default this error will be generated and the save will then proceed normally SOURce 1 WAVE ARM Arms 6221 for waveform output 12 SOURce 1 WAVE INITiate St...

Страница 233: ...d ranging the offset plus amplitude cannot exceed the selected range 6 SOUR WAVE RANG name Set range mode Selects whether to use the best fixed range or whether to use a fixed range If best range is s...

Страница 234: ...mand above 11 SOUR WAVE ARB POIN Query points in arbitrary waveform This command queries the number of points in the arbitrary waveform 12 SOUR WAVE ARM Arm waveform function This command arms the 622...

Страница 235: ...th Wave Armed 17 SOUR WAVE EXTR b Enable disable external triggering Firmware version A03 and greater supports an external trigger mode to trig ger the arbitrary waveform generator using the Model 622...

Страница 236: ...ill start the waveform genera tor output If the ignore mode is ON every other trigger will be ignored since it occurs while the waveform output is in progress This will produce a continu ous sine wave...

Страница 237: ...on menu page 8 7 Configuring triggering page 8 8 Remote trigger operation page 8 9 Programming triggering page 8 9 SCPI commands triggering page 8 10 External triggering page 8 13 External trigger con...

Страница 238: ...In Source Immediate GPIB Timer Manual TLink STest STest STest Arm Event Detector Trigger Event Detector Device Action No Yes Idle Another Arm Another Trigger Yes No Arm Layer Trigger Layer Trigger In...

Страница 239: ...SOURce BUS ARM SOURce TIMer ARM SOURce MANual ARM SOURce TLINk ARM SOURce NSTest ARM SOURce PSTest ARM SOURce BSTest TRIGger DIRection SOURce ACCeptor TRIGger OUTPut SOURce DELay NONE ARM OUTPut TEXi...

Страница 240: ...te command is required to take the instrument out of idle The following command performs an initiate operation INITiate Once taken out of idle operation cycles through the arm layer once for each swee...

Страница 241: ...yer is satisfied by pressing the TRIG key The Model 622x must be in the local mode for it to respond to the TRIG key Press LOCAL to place the Model 622x in local TLINK ARM SOURce TLINk Event detection...

Страница 242: ...on for each subsequent pass is satisfied by an input trigger The bypass resets when the Model 622x leaves the trigger layer TRIGger SIGNal remote only Used as a one time bypass for the TRIGGER layer c...

Страница 243: ...triggering on page 8 8 Table 8 1 Trigger configuration menu Menu selection Description ARM LAYER ARM IN TIMER TLINK EVENT DETECT BYPASS ARM OUT LINE EVENTS TRIG LAYER EXIT TL ENTER Configure arm layer...

Страница 244: ...t TIMER interval if using timer TLINK line 1 6 and EVENT DETECT BYPASS ONCE or NEVER b ARM OUT Set the LINE 1 6 and EVENTS TRIG LAYER EXIT ON or OFF TL ENTER ON or OFF 3 From the main trigger configur...

Страница 245: ...s the trigger layer 3 Configure the trigger layer Examples The following commands configure the trigger link as the trigger input source select line 2 on the trigger link for input select line 4 as ou...

Страница 246: ...e SOURce or ACCeptor ACC ARM ILINe NRf Set ARM layer input signal line 1 6 7 1 ARM OLINe NRf Set ARM layer output signal line 1 6 8 2 ARM OUTPut name Enable disable ARM layer output trigger 9 name TEN...

Страница 247: ...ion 6 ARM DIR name Set ARM source bypass This command enables SOURce or disables ACCeptor the ARM source bypass 7 ARM ILIN NRf Set ARM layer trigger input line This command selects the ARM layer input...

Страница 248: ...command selects the TRIG layer input signal line 1 2 3 4 5 or 6 Note that for the Model 6221 only the TRIG output line and phase marker SOUR WAVE PMAR OLIN lines cannot be the same or a 221 Settings C...

Страница 249: ...ction The connector pinout is shown in Figure 8 4 Figure 8 4 Trigger link connection operation Input trigger requirements An input trigger is used to satisfy event detection for a trigger model layer...

Страница 250: ...or exits the trigger layer of the trigger model The output trigger provides a TTL compati ble output pulse that can be used to trigger other instruments The specifications for this trigger pulse are...

Страница 251: ...N FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING MADE IN U S A INTERNAL...

Страница 252: ...s are sequentially scanned Details of this testing process are explained in the following paragraphs and are referenced to the operation model shown in Figure 8 9 Figure 8 9 Operation model for trigge...

Страница 253: ...e and opera tion loops back to point B where it waits for an input trigger E F With the Model 622x at point A the output trigger pulse from Model 7001 7002 triggers a measurement of DUT 1 point E Afte...

Страница 254: ...8 18 Triggering Model 6220 6221 Reference Manual Return to Section 8 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 255: ...page 9 5 Digital I O connector page 9 5 5V output page 9 5 SOT line page 9 6 Simplified schematic page 9 6 Sink mode controlling external devices page 9 6 Source mode logic control page 9 8 Setting d...

Страница 256: ...Programming limit testing The example below shows how to enable limit testing and set a failure pattern of 9 1001 The FAIL query is also used to determine if the limit test has passed or failed With t...

Страница 257: ...urce goes into compliance When not in compliance all lines will be off output pattern of 0 unless otherwise con trolled by the CALCulate3 FORCe STATe command discussed on page 9 9 Digital I O port fai...

Страница 258: ...ttern values Value Out 4 Out 3 Out 2 Out 1 0 L L L L 1 L L L H 2 L L H L 3 L L H H 4 L H L L 5 L H L H 6 L H H L 7 L H H H 8 H L L L 9 H L L H 10 H L H L 11 H L H H 12 H H L L 13 H H L H 14 H H H L 15...

Страница 259: ...urrent for this line is 500mA This line is protected by a self resetting fuse one hour recovery time WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERN...

Страница 260: ...the external device being driven The high current sink capacity of the output driver allows direct control of relays solenoids and lamps no additional circuitry needed As shown in Figure 9 3 each of...

Страница 261: ...device When the output line is set LO 0V the output transistor sinks current through the external device In the HI state the output transistor is off transistor switch open This interrupts current fl...

Страница 262: ...sult a low logic output 0V is provided at the output If the second input B of the NAND gate is connected to another output line of the port the output of the NAND gate will go to logic 0 when both dig...

Страница 263: ...e STATe the FORCe PATTern supersedes any results from the compliance limit described in Limit test on page 9 2 2 CALC3 FORC PATT NRf Set I O pattern Pattern to be forced on the digital output connecto...

Страница 264: ...rt values Value Out 4 Out 3 Out 2 Out 1 0 L L L L 1 L L L H 2 L L H L 3 L L H H 4 L H L L 5 L H L H 6 L H H L 7 L H H H 8 H L L L 9 H L L H 10 H L H L 11 H L H H 12 H H L L 13 H H L H 14 H H H L 15 H...

Страница 265: ...rence page 10 29 Command words page 10 12 Ethernet standards page 10 29 Program messages page 10 15 Typical Ethernet systems page 10 29 Response messages page 10 17 Ethernet connections page 10 31 Eth...

Страница 266: ...dress assigned to other instruments in the system You can use either the SCPI or KI 220 DDC Model 220 DDC emulation language to program the instrument RS 232 interface When using the Model 622x RS 232...

Страница 267: ...sing the COMM key while in local Select the desired interface RS 232 GPIB or ETHERNET for the 6221 by placing the cursor on your selection Press ENTER to save the change You can also select the interf...

Страница 268: ...00 4800 9600 19 2K 38 4K 57 6K or 115 2K Select terminator CR CR LF LF or LF CR Select flow control NONE or XON XOFF ETHERNET MAC IP GATEWAY SUBNET DHCP Select configure Model 6221 Ethernet interface...

Страница 269: ...TER 2 If you are changing to the ETHERNET interface from a different interface the Model 622x will perform a power on reset and you must re enter the COMM menu 3 Select DHCP then press ENTER to set th...

Страница 270: ...ion in the communications menu see Table 10 1 as follows 1 Press the COMM key select PASSWORD and press ENTER 2 To clear the password select YES then press ENTER The PASSWORD CLEARED message will be d...

Страница 271: ...IBFull RFR or OFF SYSTem COMMunicate SERial PACE name Sets flow control 4 name XON or OFF SYSTem COMMunicate SERial TERMinator name Sets output terminator 5 name CR LF CRLF or LFCR SYSTem COMMunicate...

Страница 272: ...ets subnet mask of 6221 11 string n n n n SYSTem COMMunicate ETHernet GATeway string Sets Ethernet gateway of 6221 12 string n n n n SYSTem COMMunicate ETHernet DHCP b Enables disables DHCP 13 b ON or...

Страница 273: ...a Reads data from another instrument through the serial port 9 SYST LOC Take unit out of remote SYST REM Put unit in remote SYST RWL b Enable disable local lockout These three commands work with the R...

Страница 274: ...SYST COMM ETH SAVE com mand is sent or the next time the Model 6221 is power cycled 16 SYST PASS CEN string Enable protected commands This command enables protected commands Commands that are not pro...

Страница 275: ...ASCII and non ASCII characters from 1 to 255 It must be enclosed in quotes For example to change the password to PASSWORD send this command SYST PASS NEW PASSWORD Note that the password and command p...

Страница 276: ...ckets Some command words are enclosed in brackets These brackets are used to denote an optional command word that does not need to be included in the program message For example INITiate IMMediate The...

Страница 277: ...f the following name parameters DEFault MINimum or MAXimum When the DEFault parameter is used the instrument is pro grammed to the RST default value When the MINimum parameter is used the instrument i...

Страница 278: ...n commands and SCPI commands are not case sensitive You can use upper or lower case and any case combination Examples RST rst SYSTem PRESet system preset Long form and short form versions A SCPI comma...

Страница 279: ...sent by the com puter to the instrument Each common command is a three letter acronym pre ceded by an asterisk The following SCPI commands from the STATus subsystem are used to help explain how comma...

Страница 280: ...com mand level in the structure Since enab is also on the third level it can be entered without repeating the entire path name Notice that the leading colon for enab is not included in the program me...

Страница 281: ...lid command generates an error and is not executed Valid commands that precede an invalid command in a multiple command program message are executed Valid commands that follow an invalid command in a...

Страница 282: ...item query commands 0 1 1 0 Response Message Terminator RMT Each response is terminated with an LF line feed and EOI end or identify The following example shows how a multiple response message is term...

Страница 283: ...the state of the instrument and a group of common commands The standard below defines a command language protocol It goes one step fur ther than IEEE 488 2 1992 and defines a standard set of commands...

Страница 284: ...88 bus follow these steps 1 Line up the cable connector with the connector located on the rear panel The connector is designed so it will fit only one way Figure 10 3 shows the location of the IEEE 48...

Страница 285: ...d in the controller s programming language To make sure the unit s interface is prop erly selected and configured or to check or change the setting see Interface selection and configuration on page 10...

Страница 286: ...N is inoperative in remote You can restore normal front panel operation by pressing the LOCAL key IFC interface clear The IFC command is sent by the controller to place all instruments on the bus in t...

Страница 287: ...evice command A DCL does not affect instrument settings and stored data SDC selective device clear The SDC command is an addressed command that performs essentially the same function as the DCL comman...

Страница 288: ...e Place the unit in the talk state by addressing it to talk with the correct MTA My Talk Address command TALK is off when the unit is in the talker idle state Place the unit in the talker idle state b...

Страница 289: ...4800 2400 1200 600 or 300 The default is 19 2k Make sure the programming terminal that you are connecting to the Model 622x can support the baud rate you selected Both the Model 622x and the other de...

Страница 290: ...he CR character is received from the controller If NONE is the selected flow control then there will be no signal handshaking between the controller and the Model 622x Data will be lost if transmitted...

Страница 291: ...the rear panel is shown in Figure 10 3 Figure 10 4 RS 232 interface connector If your computer uses a DB 25 connector for the RS 232 interface you will need a cable or adapter with a DB 25 connector...

Страница 292: ...ata carrier detect 1 8 RXD receive data 2 3 TXD transmit data 3 2 DTR data terminal ready 4 20 GND signal ground 5 7 DSR data set ready 6 6 RTS ready to send 7 4 CTS clear to send 8 5 RI ring indicato...

Страница 293: ...PC WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION...

Страница 294: ...et Cables 3 RJ 45 male male RJ 45 Outlet WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL...

Страница 295: ...L ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINU...

Страница 296: ...WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGA...

Страница 297: ...settings addresses if the connection is made to a LAN If the network will be isolated from the LAN the connection can be made without a Network Administrator Refer to Manual IP configuration on page...

Страница 298: ...s Gateway addresses are typically the device address 1 for example 145 90 120 1 Networks are commonly grouped into three classes based on the first byte of the address shown in Table 10 7 Address rest...

Страница 299: ...le software allows you to control a Model 6220 6221 from any PC using simple mouse clicks through a virtual front panel as well as perform delta mode differential conductance pulsed IV measurements an...

Страница 300: ...erations Model 6220 6221 Reference Manual Return to Section 10 topics Figure 10 11 Example software typical main screen Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEqui...

Страница 301: ...ference Manual Remote Operations 10 37 Return to Section 10 topics Figure 10 12 Typical instrument connection setup wizard Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestE...

Страница 302: ...te Operations Model 6220 6221 Reference Manual Return to Section 10 topics Figure 10 13 Typical virtual front panel Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmen...

Страница 303: ...and service request SRQ page 11 7 Status byte register page 11 7 Service request enable register page 11 8 Serial polling and SRQ page 11 9 Status byte and service request commands page 11 9 Status re...

Страница 304: ...will set to indicate that an SRQ has occurred Status register sets A typical status register set is made up of a condition reg ister an event register and an event enable register A condition register...

Страница 305: ...Filt Arm Filt Questionable Event Registers Event Enable Standard Event Registers Event Enable Measurement Event Registers Event Enable Operation Event Registers Sweeping Interlock Asserted Int Int In...

Страница 306: ...em ERRor CLEar Reset all bits of the following event registers to 0 Standard event register Operation event register Measurement event register Questionable event register STATus subsystem Reset all b...

Страница 307: ...value would be 11010 where B4 1 B3 1 B1 1 and all other bits are 0 When you use one of the other formats convert the binary number to its decimal hexadecimal or octal equivalent Binary 11010 Decimal 2...

Страница 308: ...ts in the register are set That value if not already binary must be converted to its binary equivalent For example for a binary value of 100101 bits B5 B2 and B0 are set The returned value can be in t...

Страница 309: ...ot latch and their states 0 or 1 are solely dependent on the summary messages 0 or 1 For example if the standard event register is Status Summary Messages 6 OSB B7 RQS B6 MSS ESB MAV B4 QSB B3 EAV B2...

Страница 310: ...ing the serial poll sequence of the Model 622x to obtain the status byte also known as serial poll byte B6 is the RQS bit See Serial polling and SRQ on page 11 9 for details on using the serial poll s...

Страница 311: ...nt serial polls to monitor bit B6 for an SRQ occurrence generated by other event types After a serial poll the same event can cause another SRQ even if the event register that caused the first SRQ has...

Страница 312: ...error or status event occurs a coded message is briefly displayed and placed in the Error Queue The occurrence of an error status event also sets a status register bit The coded error status messages...

Страница 313: ...0 900 Bit B4 Execution Error EXE Set bit indicates that the Model 622x detected an error while trying to execute a command Error status codes 260 through 220 401 through 420 Bit B5 Command Error CME S...

Страница 314: ...122 Bit B2 Sweep Aborted SwpA Set bit indicates that a sweep Delta Differential Conductance or a pulse sweep for Pulse Delta has been aborted Error status code 123 ESR PON B7 URQ B6 CME B5 EXE B4 DDE...

Страница 315: ...event to occur Error status code 172 Bit B7 Wave Stopped WStop Set bit indicates that the Wave mode has been aborted Error status code 126 Bit B8 Filter Settled Filt Arming one of the delta tests wil...

Страница 316: ...B10 B9 B8 B7 B6 Trig B5 B4 B3 B2 B1 B0 Operation Event Enable Register To Operation Summary Bit OSB of Status Byte Register B15 B12 Idle B10 B9 B8 B7 B6 Trig B5 B4 B3 B2 B1 B0 Operation Condition Reg...

Страница 317: ...n the buffer Error status code 308 Bit B8 Buffer Half Full BHF Set bit indicates that the buffer if half full Keep in mind that buffer size is set by the programmed number of sweep points or delta mea...

Страница 318: ...l 622x Error status code 610 B15 B14 B3QF B13 BQF B12 B11 B10 BFL B9 BHF B8 BAV B7 TN B6 RAV B5 B4 Comp B3 Temp B2 Int B1 ROF B0 OR To Measurement Summary Bit MSB of Status Byte Register Logical AND O...

Страница 319: ...isters are listed in Table 11 4 For details on reading registers see Reading registers on page 11 6 Table 11 4 Common and SCPI commands condition registers Command Description STATus OPERation CONDiti...

Страница 320: ...et as programmed by the user the output summary of the register will set to 1 which in turn sets the summary bit of the status byte register The commands to program and read the event enable registers...

Страница 321: ...ister STATus subsystem Operation event enable register Program enable register see Parameters below Read enable register Measurement event enable register Program enable register see Parameters below...

Страница 322: ...r queue When a message is placed in the error queue the error available EAV bit in the status byte register is set An error status message is cleared from the error queue when it is read The error que...

Страница 323: ...following command reads the error queue Table 11 7 SCPI commands error queue Command Description Default STATus QUEue NEXT ENABle list ENABle DISable list DISable CLEar SYSTem ERRor CLEar STATus subsy...

Страница 324: ...11 22 Status Structure Model 6220 6221 Reference Manual Return to Section 11 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 325: ...12 Common Commands Section 12 topics Common commands page 12 2 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 326: ...te command Set the operation complete bit in the standard event register after all pending commands have been executed B OPC Operation complete query Places an ASCII 1 into the output queue when all p...

Страница 327: ...after the INITiate command The INITiate command is used to take the instrument out of idle in order to perform measurements While operating within the trigger model layers all sent com mands except D...

Страница 328: ...ogramming example D RST reset Return Model 622x to RST defaults When the RST command is sent the Model 622x performs the following opera tions 1 Returns Model 622x to the RST default conditions see De...

Страница 329: ...test failed G WAI wait to continue Wait until previous commands are completed Effectively the WAI command is a No Op no operation for the Model 622x and thus does not need to be used Two types of devi...

Страница 330: ...12 6 Common Commands Model 6220 6221 Reference Manual Return to Section 12 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 331: ...YSTem Key Press Codes Section 13 topics DISPlay subsystem page 13 2 FORMat subsystem page 13 4 SYSTem key press codes page 13 9 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176...

Страница 332: ...able 13 1 Display commands Command Description Default DISPlay ENABle b Enable disable display and controls 1 b ON or OFF Note DISPlay TEXT a Define top line ASCII message a 2 Up to 20 characters Note...

Страница 333: ...of executed 3 When the text message mode is enabled a defined message is displayed When disabled the message is removed from the display GPIB operation A user defined message remains displayed only a...

Страница 334: ...less of the selected format Over the RS 232 interface only the ASCII format is allowed Table 13 2 Format commands Command Description Default FORMat type length Specify data format type ASCii REAL 32...

Страница 335: ...ding con version is made up of three 4 byte data blocks Note that the data string for each reading conversion is preceded by a 2 byte header that is the binary equivalent of an ASCII sign and 0 Figure...

Страница 336: ...f fraction bits 23 Normal byte order shown For swapped byte order bytes sent in reverse order Header Byte 4 Byte 3 Byte 2 Byte 1 The Header is only sent once for each measurement conversion A Single...

Страница 337: ...ied data element has invalid data associated with it NAN Not A Number will be the response NAN is returned as 9 9E37 Timestamp TST Timestamp references the returned data string to a point in time The...

Страница 338: ...state will always be returned for each reading string Average voltage AVOL A Differential Conductance reading can also be returned as an average voltage reading See Section 5 for details on how averag...

Страница 339: ...8 LOCAL 9 AUTO 9 AUTO 10 Cursor right arrow 10 FREQ 2 11 EXIT 11 EXIT 12 COND 12 COND 13 TRIG 13 TRIG 14 TRIAX 14 TRIAX 15 FILT 15 FILT 16 CONFIG 16 CONFIG 17 Range down arrow 17 Range down arrow 18...

Страница 340: ...codes for the Model 6220 are also shown in Figure 13 3 The keypress codes for the Model 6220 are also shown in Figure 13 4 The queue for the KEY query command can only hold one key press When KEY is s...

Страница 341: ...C CURRENT SOURCE RANGE EDIT LOCAL CONFIG POWER RANGE AUTO CURSOR EXIT ENTER MATH MENU RECALL UNITS ADDR COMM DISP TRIG FILT DC PRES SWP MODE DELTA PULSE 0 1 0000 SAVE SETUP TRIAX AVG 6 7 2 3 4 5 8 9 F...

Страница 342: ...12 DISPlay FORMat and SYSTem Key Press Codes Model 6220 6221 Reference Manual Return to Section 13 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot co...

Страница 343: ...ommand summary page 14 6 Sense command summary page 14 7 Source command summary page 14 8 Status command summary page 14 13 System command summary page 14 14 Trace command summary page 14 16 Trigger c...

Страница 344: ...adings Command and Description Lists and briefly explains each unabridged SCPI command word and its parameters Default Listed parameters are both the RST and SYSTem PRESet defaults unless noted otherw...

Страница 345: ...ulation 9 99999e20 to 9 99999e20 0 0 MBFactor Query b factor MA0Factor NRf Set b for mX b and m X b calculation same as MMFactor 0 0 MA0Factor Query b factor STATe b Enable or disable CALC1 calculatio...

Страница 346: ...rn 0 to 15 15 1111 SOURce2 Query limit test fail pattern FAIL Query limit test pass fail 0 pass 1 fail FORCe Output force commands OFF STATe b Enable or disable I O pattern force state STATe Query sta...

Страница 347: ...ry attributes of message characters Blinking 1 or not blinking 0 WINDow2 Bottom line display characters TEXT Text message DATA a Define ASCII message a up to 32 characters Note DATA Read text message...

Страница 348: ...ster Query format for reading status registers Note RST default is NORMal SYSTem PRESet default is SWAPped Table 14 4 Output command summary Command Description Default Sec SCPI OUTPut 1 Source output...

Страница 349: ...t the reading can only be returned once AVERage Averaging filter 6 TCONtrol name Select filter control MOVing or REPeat MOV TCONtrol Query filter control WINDow NRf Set filter window as of range 0 to...

Страница 350: ...or disable analog filter STATe Query state of analog filter OFF STARt n Set start current amps 105e 3 to 105e 3 0 4 STARt Query start current STOP n Set stop current amps 105e 3 to 105e 3 100e 3 4 ST...

Страница 351: ...lues to existing list POINts Query number of delay values in list DELay Query list of delay values COMPliance NRf NRf NRf Define list of compliance values volts 1e 3 to 105 APPend NRf NRf NRf Add comp...

Страница 352: ...ELay NRf Set source delay seconds 16e 6 to 11 966e 3 16e 6 SDELay Query source delay COUNt NRf Set number of Pulse Delta readings to perform 1 to 65636 or INFinity INF COUNt Query Pulse Delta count RA...

Страница 353: ...ce ARM Query arm 1 armed 0 not armed WAVE Wave function operation 7 FUNCtion name Select wave function SINusoid SQUare RAMP or ARBitraryX where X 0 to 4 SIN FUNCtion Query selected wave function DCYCl...

Страница 354: ...n cycles 1e 3 to 99999999900 or INFinity INFinity CYCLes Query waveform duration in cycles ARM Arm waveform function INITiate Start waveform output ABORt Abort waveform output EXTRig Waveform external...

Страница 355: ...the most recent error message Note 4 ENABle list Specify error and status messages for error queue 999 to 999 Note 5 ENABle Read the enabled messages DISable list Specify error and status messages not...

Страница 356: ...aud rate 300 600 1200 2400 4800 9600 19 2k 38 4k 57 6k or 115 2k BAUD Query baud rate SEND data Send data via RS 232 ENTer Reads data from serial port LOCal RS 232 only Take 622x out of remote REMote...

Страница 357: ...eading number to zero VERSion Query revision level of SCPI standard ABOard Analog board 1 SNUMber Query serial number of analog board REVision Query revision level of analog board DBOard Digital board...

Страница 358: ...ct source feed for buffer readings SENS1 CALC1 or NONE CALC1 CONTrol name Set buffer control NEXT or NEVer NEV CONTrol Query buffer control FEED Query buffer feed TSTamp Timestamp for buffer readings...

Страница 359: ...IRection Query ARM source bypass ASYNchronous ILINe NRf Set ARM input signal line 1 to 6 1 ILINe Query ARM input signal line OLINe NRf Set ARM output signal line 1 to 6 2 OLINe Query ARM output signal...

Страница 360: ...Delta and Differential Conductance 5 VOLT Volts readings are sent from 2182 2182A to 622x DC name Specify reading units V OHMS W or SIEMens V DC Query reading units POWer Power reading type for Pulse...

Страница 361: ...15 KI 220 Language Section 15 topics Introduction page 15 2 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 362: ...KI 220 language are provided in Section 10 Table 15 1 DDC emulation commands Mode Command Description Note Display D0 D3 These display commands are accepted but do not do any thing since the Model 62...

Страница 363: ...on Talk Stop on Talk Start on GET Stop on GET Start on X Stop on X Start on External Trigger Stop on External Trigger Terminator Y0 Y1 Y2 Y3 Y4 CR LF LF CR CR LF None Note 11 Inputs I V W B L Current...

Страница 364: ...e display You can use the CONFIG SWP CUSTOM ADJUST POINTS menu to adjust sweep point locations The front panel will display the mem ory location selected by the L command see note 10 below 8 Unlike th...

Страница 365: ...Program Command set to Continuous or Single P1 or P0 the Model 622x TRIG key will behave like the Model 220 Start Stop key e g one push starts the sweep the next pauses etc 13 The Model 220 has only...

Страница 366: ...15 6 KI 220 Language Model 6220 6221 Reference Manual Return to Section 15 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 367: ...ts page 16 4 Example limit calculation page 16 4 Restoring factory defaults page 16 5 Test summary and considerations page 16 5 Test summary page 16 5 Test considerations page 16 5 Verification proced...

Страница 368: ...for measurement uncertainties that arise from test equipment tolerances Before proceeding the laboratory should characterize the components used with the testing process in order to correct for test e...

Страница 369: ...0 unless otherwise noted Warm up period Allow the Model 622x to warm up for at least one hour before conducting the pro cedures If the instrument has been subjected to temperature extremes those outsi...

Страница 370: ...lar measurement falls slightly outside the allowable range recalculate the new limits based on both Model 622x specifications and pertinent calibration equipment specifications Example limit calculati...

Страница 371: ...curacy Model 6220 and 6221 page 16 8 Waveform function amplitude and frequency accuracy Model 6221 only page 16 9 Test considerations When performing the procedures Be sure to restore factory defaults...

Страница 372: ...nction and enable auto range 3 Set the Model 6220 6221 output current to 100 000mA and turn on the out put See Section 3 for details on setting output current and range 4 Verify that the output curren...

Страница 373: ...00mA 100 000mA 99 850 to 100 150mA 20mA 20 000mA 19 980 to 20 020mA 2mA 2 0000mA 1 9980 to 2 0020mA 200 A 200 00 A 199 80 to 200 20 A 20 A 20 000 A 19 980 to 20 020 A 2 A 2 0000 A 1 9970 to 2 0030 A 2...

Страница 374: ...to 10mA and the compliance to 10 000V and turn on the output See Section 3 for details on setting the output current compliance and range 4 Verify that the DMM reading is within the following range 9...

Страница 375: ...L and frequency FREQ to 100mA at 1kHz and turn on the output 5 Note the DMM reading at 1kHz If your DMM has a dB reference function set the present reading to 0dB 6 Set the Model 6221 frequency to 100...

Страница 376: ...the WAVE key 4 Set the Model 6221 amplitude AMPL to 20mA on the 20mA range and set the frequency FREQ to 1kHz Turn on the output 5 Verify that the counter frequency reading is between 0 9999kHz and 1...

Страница 377: ...ions page 17 5 Calibration summary page 17 5 Calibration considerations page 17 5 Calibration procedures page 17 5 Front panel calibration page 17 5 Using the calibration menu page 17 5 Front panel ca...

Страница 378: ...urement uncertainties that arise from test equipment tol erances Before proceeding the laboratory should characterize the components used with the testing process in order to correct for test equipmen...

Страница 379: ...unless otherwise noted Warm up period Allow the Model 622x to warm up for at least one hour before performing calibra tion If the instrument has been subjected to temperature extremes those outside t...

Страница 380: ...only actual signal lines are shown in equipment connection drawings in this section To ensure calibration integrity be sure to use appropriate triax cables or where appropriate coax cables for all si...

Страница 381: ...d to the INTERLOCK connec tor or you will not be able to turn on the output for calibration See Section 2 for details on the interlock Make sure the test equipment and Model 622x calibration settings...

Страница 382: ...e instrument will display the fol lowing PASSWORD Use ENTER or EXIT c Enter the password at the prompt The default Model 6220 password is 006220 and the default Model 6221 password is 006221 d Press E...

Страница 383: ...play to agree with that value 8 Press ENTER The display will prompt I CAL Press ENTER to Output 000 00mA 9 Press ENTER to output the zero value for the present range The following prompt will be displ...

Страница 384: ...17 1 Connections for current source calibration 200nA to 100mA ranges Table 17 3 Front panel current calibration summary Range Current values 100mA 100mA 0mA 100mA 20mA 20mA 0mA 20mA 2mA 2mA 0mA 2mA 2...

Страница 385: ...COMPLIANCE CAL Press ENTER to Output 2 0000mA 4 Press ENTER to output 2mA for 20V compliance calibration The instru ment will prompt as follows DMM RDG 020 0000V Use ENTER or EXIT 5 Note the DMM readi...

Страница 386: ...el 6220 6221 display to agree with that value 15 Press ENTER The display will prompt 100V COMPLIANCE CAL Press ENTER to Output 2 0000mA 16 Press ENTER to output 2mA for 100V compliance calibration The...

Страница 387: ...odel 6220 6221 display to agree with that value 27 Press ENTER to complete compliance calibration Figure 17 3 Connections for compliance calibration Step 4 Calibrate guard circuit 1 Connect the digita...

Страница 388: ...value 6 Press ENTER The display will prompt NEGATIVE GUARD CAL Press ENTER to Output 020 00uA 7 Press ENTER to output 20 A for negative guard calibration The instru ment will prompt as follows DMM RD...

Страница 389: ...ate and press ENTER The unit displays CALIBRATION COMPLETE ENTER to save EXIT to abort 4 Select ENTER to save calibration constants or press EXIT to abort calibra tion without saving constants then pr...

Страница 390: ...DMM DC current function with auto range enabled 2 Send these commands in order to calibrate the 100mA current source range using the DMM_Reading parameter actual digital multimeter reading for each st...

Страница 391: ...for each step For the 2nA and 20nA ranges use the picoammeter with connections shown in Figure 17 2 Substitute the picoammeter reading for the DMM reading in the command listings Be sure to turn the...

Страница 392: ...2mA 2mA 0mA 2mA SOUR CURR RANG 2e 3 SOUR CURR 2e 3 CAL PROT SOUR FS_DMM_Reading SOUR CURR 0 CAL PROT SOUR 0_DMM_Reading SOUR CURR 2e 3 CAL PROT SOUR FS_DMM_Reading 200 A 200 A 0 A 200 A SOUR CURR RANG...

Страница 393: ...OFF 20nA 20nA 0nA 20nA OUTP ON SOUR CURR RANG 2e 8 SOUR CURR 2e 8 CAL PROT SOUR FS_DMM_Reading SOUR CURR 0 CAL PROT SOUR 0_DMM_Reading SOUR CURR 2e 8 CAL PROT SOUR FS_DMM_Reading 2nA 2nA 0nA 2nA SOUR...

Страница 394: ...S DMM_Reading Calibrate 0 1V using reading SOUR CURR 2e 3 Output 2mA for cal SOUR CURR COMP 20 Set compliance to 20V CAL PROT SENS DMM_Reading Calibrate 20V using reading SOUR CURR COMP 0 1 Set compli...

Страница 395: ...put calibration Send these command to send dates save calibration constants and dates and then finally lock out calibration SOUR CURR RANG 2e 4 Set current range to 200 A SOUR CURR 2e 5 Set current so...

Страница 396: ...commands Command Description CALibration PROTected CODE string Enters calibration code password 1 string 8 character password 6220 default KI006220 6221 default KI006221 CALibration PROTected LOCK Lo...

Страница 397: ...Table 17 6 page 17 22 summarizes allowed ranges for each parameter Note that Parameter steps for each range may be per formed in any order but all three parameter steps for each range must be complete...

Страница 398: ...y order but all three parameter steps for each range must be completed Table 17 7 CAL PROT SENS command parameter ranges Sense range First parameter Second parameter Third parameter Fourth parameter 2...

Страница 399: ...T before being run Table 17 9 Calibration errors Number Description 500 Date of calibration not set 501 Next date of calibration not set 502 Calibration data invalid 503 DAC calibration overflow 504 D...

Страница 400: ...t To view calibration dates and count via remote send these queries For the dates the instrument will return a string of characters with the year day and month delimited by commas Changing the calibra...

Страница 401: ...ion when finished Remote password To change the password via remote send these queries first with the old pass word then the new password Note that you will not be able to unlock calibration from the...

Страница 402: ...17 26 Calibration Model 6220 6221 Reference Manual Return to Section 17 topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 403: ...A Specifications Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 404: ...20V 0 1 20mV accuracy for 20V to 105V 0 1 100mV MAX OUTPUT POWER 11W four quadrant source or sink operation GUARD OUTPUT Maximum Load Capacitance 10nF Maximum Load Current 1mA for rated accuracy Accur...

Страница 405: ...OCK Maximum 10 external circuit impedance POWER SUPPLY 100V to 240V rms 50 60Hz POWER CONSUMPTION 120VA WARRANTY 1 Year ENVIRONMENT For Indoor Use Only Maximum 2000m above Sea Level Operating 0 50 C 7...

Страница 406: ...A 20nA range LOAD IMPEDANCE Stable into 10 H typical 100 H with Output Response SLOW CURRENT REGULATION Line 0 01 of range Load 0 01 of range VOLTAGE LIMIT Compliance Bipolar voltage limit set with si...

Страница 407: ...guaranteed by design 4 These Specifications are only valid for the 20mA range and a 50 load 5 These characteristics for informational purposes only 6 Typical values are non warranted apply at 23 C re...

Страница 408: ...B Error and Status Messages Appendix B topics Introduction page B 2 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 409: ...nd the Questionable Event Register Table B 1 also lists the register bit that is set by the error status event The status structure is covered in Section 11 NOTE Error status events 950 through 962 pe...

Страница 410: ...144 Character data too long Standard B5 page 11 11 141 Invalid character data Standard B5 page 11 11 140 Character data error Standard B5 page 11 11 124 Too many digits Standard B5 page 11 11 123 Expo...

Страница 411: ...6 page 11 14 308 Buffer available Measurement B7 page 11 14 309 Buffer half full Measurement B8 page 11 14 310 Buffer full Measurement B9 page 11 14 312 Buffer one quarter full Measurement B12 page 11...

Страница 412: ...ed Standard B3 page 11 11 510 Not permitted with cal un locked Standard B3 page 11 11 511 GPIB address lost Standard B3 page 11 11 512 Power on state lost Standard B3 page 11 11 513 Guard offset data...

Страница 413: ...ration B11 page 11 12 805 Invalid system comm setting Operation B11 page 11 12 808 RS 232 INVALID FORMAT ERR Operation B11 page 11 12 809 Not allowed with RS 232 Operation B11 page 11 12 900 Internal...

Страница 414: ...ds page C 9 Universal multiline commands page C 9 Addressed multiline commands page C 10 Address commands page C 10 Unaddress commands page C 11 Common commands page C 11 SCPI commands page C 11 Comma...

Страница 415: ...referred to as an active listener Devices that do not need to listen are instructed to unlisten The reason for the unlisten instruction is to optimize the speed of bus information transfer since the...

Страница 416: ...uding the controller Thus any number of talkers and listeners up to that limit may be present on the bus at one time Although several devices may be commanded to listen simultaneously the bus can have...

Страница 417: ...d operation takes place Each bus line is active low with approximately zero volts representing a logic 1 true The following paragraphs describe the operation of these lines Device 1 able to talk liste...

Страница 418: ...devices when they require service from the controller Handshake lines The bus handshake lines operate in an interlocked sequence This method ensures reliable data transmission regardless of the trans...

Страница 419: ...NRFD will then go low and NDAC will go high once all devices have accepted the data Each device will release NDAC at its own rate but NDAC will not be released to go high until all devices have accep...

Страница 420: ...terface Clear ATN Attention SRQ LLO Local Lockout DCL Device Clear SPE Serial Enable SPD Serial Poll Disable SDC Selective Device Clear GTL Go To Local UNL Unlisten UNT Untalk X X X Low X Low Low Low...

Страница 421: ...UB ESC FS GS RS US LLO DCL PPU SPE SPD 1 B 2 A SP _ 2 B 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 3 A 0 1 2 3 4 5 6 7 8 9 3 B 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 UNL 4 A A B C D E F G H I J K L M...

Страница 422: ...r the interface and return all devices to the talker and listener idle states ATN Attention The controller sends ATN while transmitting addresses or mul tiline commands SRQ Service Request SRQ is asse...

Страница 423: ...LO command GET Group Execute Trigger The GET command is used to trigger devices to perform a specific action that depends on device configuration for example take a reading Although GET is an addresse...

Страница 424: ...or more ASCII characters that tell the device to perform a common operation such as reset The IEEE 488 bus treats these commands as data in that ATN is false when the commands are transmit ted SCPI co...

Страница 425: ...dress must be sent to the instrument before it will respond to addressed commands Table C 4 lists a typical bus sequence for sending the addressed multiline commands In this instance the SDC command i...

Страница 426: ...ble C 4 Typical bus sequence Step Com mand ATN state Data bus ASCII Hex Decimal 1 2 3 4 UNL LAG SDC Set low Stays low Stays low Returns high EOT 3F 2C 04 63 44 4 Assumes primary address 12 Table C 5 T...

Страница 427: ...ATN ATTENTION DCL DEVICE CLEAR IFC INTERFACE CLEAR REN REMOTE ENABLE SPD SERIAL POLL DISABLE SPE SERIAL POLL ENABLE ADDRESS COMMAND GROUP LISTEN TALK LAG LISTEN ADDRESS GROUP MLA MY LISTEN ADDRESS UNL...

Страница 428: ...nt talker capabilities T5 exist only after the instrument has been addressed to talk L Listener Function The ability for the instrument to receive device depen dent data over the bus from other device...

Страница 429: ...e remote or local modes E Bus Driver Type The instrument has open collector bus drivers E1 TE Extended Talker Function The instrument does not have extended talker capabilities TE0 LE Extended Listene...

Страница 430: ...D IEEE 488andSCPI ConformanceInformation Appendix topics Introduction page D 2 Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 431: ...lid address is entered Address changes and bus resets 4 Power On Setup Conditions Determine by SYST POS Section 14 5 a b c d e Message Exchange Options Input buffer size Queries that return more than...

Страница 432: ...RCL and SAV See Common Commands in Section 12 20 TST information See Common Commands in Section 12 21 Status register structure See Status Structure in Section 11 22 Sequential or overlapped commands...

Страница 433: ...D 4 IEEE 488 and SCPI Conformance Information Model 6220 6221 Reference Manual Return to Appendix topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 434: ...y measurements page E 3 Diode characterization page E 4 Transistor characterization page E 5 External user supplied filter page E 7 Compliance overshoot prevention page E 11 Test Equipment Depot 800 5...

Страница 435: ...ce output Each press of the TRIG key will out put the next sweep point For an automated calibration system the program can control the current source output using GET or TRG commands Each time a GET o...

Страница 436: ...Model 622x is ideal for this application The accurate and stable current along with compliance voltage can be easily programmed before making the voltage measurement The electrometer requires a high i...

Страница 437: ...everal examples of diodes whose curves have been plotted using the test system shown in Figure E 2 Figure E 2 Diode characterization test system NOTE A standard DMM cannot be used to accurately measur...

Страница 438: ...ts to synchronize the testing process When the test is started the Model 622x will output the first base current and send a trigger pulse to the SourceMeter to start its operations The SourceMeter wil...

Страница 439: ...sweep point Details on Sweep are provided in Section 4 and details on Triggering are pro vided in Section 8 The same information for the Model 24xx SourceMeter is provided in the Model 2400 Series Us...

Страница 440: ...in the 1MHz to 20MHz range and higher The filter circuitry is to be wired into a metal box that has two triax connectors mounted on it for input and output An example of such a filter box is shown Fig...

Страница 441: ...inner shield of the triax connector Figure E 7B shows a typi cal filter circuit when using the Model 622x with Cable Guard connected to the inner shield of the triax connector Cable Guard is routed t...

Страница 442: ...lowing single pole low pass filter response F3db 1 2 RC Again the only real limitation is the maximum settling time response that can be tolerated which in this case would be approximately five RC tim...

Страница 443: ...sed for non guarded configura tions where high impedances are not used Use the Keithley Model 7078 TRX GND triax to BNC adapter to use this enclosure with the Model 622x Triax connectors Keithley Mode...

Страница 444: ...ally occur depends on the change in output current relative to the full scale current of the presently selected source range The following calculations for overshoot are approximations It is assumed t...

Страница 445: ...increase by several microseconds Preventing compliance overshoot There are three options that can be considered to prevent or minimize compliance overshoot Set compliance 2V above the operating voltag...

Страница 446: ...hout any significant overshoot into the compliance region The slew rate dv dt is calculated as follows dv dt I C Where I is the output current C is capacitance placed across the output For example ass...

Страница 447: ...E 14 Applications Model 6220 6221 Reference Manual Return to Appendix topics Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 448: ...tion C 4 Bus description C 3 Byte order 13 8 C Cable capacitance 2 9 Cable Guard 2 8 Connections 2 17 Capabilities 1 2 Carrying case 1 6 Case sensitivity 10 14 Cleaning test fixtures 2 23 Clearing reg...

Страница 449: ...18 F Features 1 2 Floating connections 2 19 Floating the current source 2 13 Flow control RS 232 signal handshaking 10 26 Frequency variable resistor FVR 2 3 Front panel GPIB operation 10 24 Front pan...

Страница 450: ...FIG 1 18 Direct access 1 19 Multiple command messages 10 16 Multiple response messages 10 18 N NAND 9 8 Network Interface Card 10 30 O Operating boundaries 3 4 Operation event status 11 12 Optional co...

Страница 451: ...ompliance editing 3 9 Source output commands 3 15 Source preset 1 17 3 12 Source ranges 3 2 Sourcing current 3 13 SPE SPD serial polling 10 23 11 9 SRQ 11 7 Standard event status 11 11 Status byte and...

Страница 452: ...triggering 7 10 Front panel control 7 11 Inactive value 7 12 Programming 7 26 Remote control 7 11 Retriggering behavior 7 12 Using 7 12 7 20 Test Equipment Depot 800 517 8431 99 Washington Street Melr...

Страница 453: ...Test Equipment Depot 800 517 8431 99 Washington Street Melrose MA 02176 TestEquipmentDepot com...

Страница 454: ...6168 1 888 KEITHLEY 534 8453 www keithley com 12 04 Specifications are subject to change without notice All Keithley trademarks and trade names are the property of Keithley Instruments Inc All other...

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