3
6. Restore the scan speed
to the
FAST
to save the image data on the MO disk.
Notice: If the scan speed is not restored to the
FAST,
the data cannot be saved.
7. Press the
INS
key, and type the file name in the space following the
SAVE|A:
.
Press the
RETURN
key to save the image data on the MO disk.
*To confirm the detail of the image capturing, refer to the manufactures instructions.
The axis adjustment
①
The adjustment of the movable diaphragm of the objective lens, and the processing.
1. Set the
magnification to 10,000 times
, and move the marker object on the center of the CRT
screen.
2. Focus the SEM on the marker object, and press the
WOBBLER
button.
3. To minimize the shaking of the marker object on the CRT, adjust the movable diaphragm
using the fine adjustment knob (X, Y).
②
The correction of the astigmatism
1. Minimize the blur in the image, using the
FOCUS
knob.
2. Minimize the blur in the image, using the
STIGMATOR(X)
knob.
3. Minimize the blur in the image, using the
STIGMATOR(Y)
knob.
If the blurry in the image (the astigmatism) is not corrected, repeat the process mentioned
above (1-3).
③
The adjustment of the beam axis
1. Press the
EOS
ー
MODE
button once to select the
SEM1
mode.
Set the magnification to 1,000,000 times using the
MAGNIFICATION
knob.
2. While the ( ) value of the
CL COARSE
(
EOS
menu,
EOS-1
,
OPTICS
) is increased
from
3
×
10
-12
to 6
×
10
-10
using the
PROBE CURRENT
knob, maximize the image brightness,
using the
GUN ALIGNMENT (X, Y)
knobs.
3. Set the magnification to 6,000 times, and repeat the operations mentioned above (2).
4. While the ( ) value of the
CL COARSE
(
EOS
menu,
EOS-1
,
OPTICS
)
from 3
×
10
-12
to
6
×
10
-10
is increased using the
PROBE CURRENT
knob, minimize the moving of the
central object, using the
GUN ALIGNMENT
(X, Y)
knobs. (When the current is increased,
center the moved objects.)
5. Set the value of the
CL COARSE
to
1
×
10
-11
, using the
PROBE CURRENT
knob, and then
perform the adjustments of the movable diaphragm of the objective lens, mentioned above,
①
.
