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Jandel RM3000, Инструкция по эксплуатации

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Jandel

  

RM3000

 

Calibration

  

 

 

 

Introduction

 

 

The

 

Jandel

 

RM3000

 

combines

 

a

 

constant

 

current

 

source

 

with

 

a

 

DVM.

 

The

 

system

 

is

 

micro

‐

processor

 

controlled

 

and

 

can

 

be

 

operated

 

via

 

the

 

front

 

keypad

 

and

 

LCD

 

or

 

via

 

the

 

serial

 

or

 

USB

 

port.

 

 
 
 
 
 
 
 

 
 
 
 
 
 
 
 

Required

 

Equipment

 

 

o

 

Bench

 

top

 

DVM

 

with

 

5

 

decimal

 

places

 

resolution

 

o

 

1M,

 

1K

 

and

 

100R

 

Test

 

Resistors

 

in

 

plugs

 

0.1%

 

accuracy

 

(refer

 

to

 

separate

 

document

 

:

 

JL21070602.pdf

 

for

 

test

 

plug

 

details)

 

o

 

A

 

PC

 

with

 

USB,

 

RM3000

 

Drivers

 

and

 

a

 

Serial

 

Terminal

 

Emulator

 

(such

 

as

 

HyperTerminal)

 

 
 
 

Procedure

 

 

1.

 

Connect

 

the

 

USB

 

and

 

power

 

on

 

the

 

RM3000.

 

Connect

 

the

 

Serial

 

Terminal

 

Emulator

 

with

 

setting

 

9600,n,8,1.

 

Check

 

communications

 

by

 

sending

 

a

 

‘

g

’

 

–

 

the

 

unit

 

should

 

respond

 

with

 

an

 

LCD

 

dump.

 

Now

 

send

 

the

 

unit

 

a

 

‘

*

’

 

to

 

put

 

it

 

into

 

factory

 

mode.

 

 
 
 

 

Содержание RM3000

Страница 1: ...t Unit Instructions Page 1 RM3000 Test Unit Software Instructions Page 11 RM3000 USB RS232 Command Reference Sheet Page 17 RM3000 Status Output Word Page 18 RM3000 Calibration Page 19 RM3000 Test DIN Plug Page 22 ...

Страница 2: ...on of volume resistivity it is possible to input wafer thickness or probe spacing as required Unpacking When you unpack the RM3000 you should find 1 A Jandel RM3000 Test Unit 2 A power lead 3 A 100 ohm test resistor 4 A green case key which can be used to open the RM3000 cabinet not recommended 5 A copy of the RM3000 software for computer control and exporting of results 6 A USB lead Getting to kn...

Страница 3: ...ual are listed here To the left on the front of the unit you will find Numeric Keypad Current level buttons Ohm button To the right of these there are four more buttons Forward button Standby Auto button Reverse button Zero button There are four preset buttons marked A D ...

Страница 4: ...stored in positions A to D When the required current has been dialled in pressing and holding one of the buttons will store the current in that location Successful storing is demonstrated by the unit beeping Retrieving the currents is done by simply pressing the relevant letter Displaying ohms square ohm cm or mV values Pressing the ohms button toggles the display between giving measurement result...

Страница 5: ...it in standby so that no current is flowing Pressing the standby button while the unit is already in standby will begin the autorange feature which is discussed later in this manual Pressing the reverse button will pass the selected current through the probe head in a reverse direction and should yield a negative voltage reading of equal or similar magnitude to the forward reading High Resolution ...

Страница 6: ...ng Store Displayed voltages will be shown having been multiplied by the correction factor and if this is the case an asterisk will be shown on the display to indicate that the voltage has been adjusted The correction can be removed by setting the correction to 1 00 by setting the unit to its default settings or by switching the unit off and on 2 Wafer thickness Here the thickness of wafers being m...

Страница 7: ...t defaults This it to reset the unit to its default modes To reset it is necessary to type in the code 222 and press store this is to prevent someone accidentally resetting the unit Default modes are as follows V Correction 1 00 resets to this when unit is switched off Wafer thickness 0 0650cm non volatile Probe spacing 0 100cm non volatile Set time current set time non volatile Set date current s...

Страница 8: ... measurement is sheet resistance This is measured in ohms per square As the size of the square is not relevant to the measurement there are no units such as square centimetre or square metre The formula for sheet resistance is quite complicated but can be resolved to 4 5324 x V I When using a 100 ohm resistor you can expect the reading to be approximately 453 24 ohms square Press the Ω button agai...

Страница 9: ...is made At this time it will stop and display the voltage It is not necessary to use only the current given for the measurements but it indicates the level around which optimum results can be achieved Example Plug in the 100 ohm test resistor and while the unit is in standby press the Standby Auto button The unit will begin to autorange and should stop at 100uA current yielding 10mV reading Where ...

Страница 10: ...in built DVM Reduce the current or the sensitivity of the internal DVM or use an external DVM Contact Limit indicates that the automatic compliance voltage has been reached due to contact resistance or too much current try reducing the current Illegal Current indicates that the set current is outside the normal 10nA to 99 999mA range Set a new current Calibration Error indicates an error in the fa...

Страница 11: ...ohms square Bulk Resistivity for a wafer sheet resistance wafer thickness in cm units ohm cm Bulk Resistivity 2 π s V I where s is the probe spacing in cm units ohm cm Siemens are the SI unit of electric conductance and represent the reciprocal of electrical resistance Correction Factors Probing close to the edge of a sample or on unusual intermediate shapes and sizes of sample can mean that corre...

Страница 12: ...displayed in the green area of the software FIGURE 1 Note that the LED s are also represented In figure 1 the unit is in standby and so the LED next to the standby button is illuminated The RM3000 can be controlled via the software by clicking on the display buttons as if pressing the unit s buttons Please refer to the RM3000 instruction manual for how to use the unit ...

Страница 13: ...list Scroll through the readings so that the reading to be deleted is on display and click on the reading to highlight it If you now right click the reading will be erased It is not possible to recover deleted readings Pop up menu Right clicking on the software screen will give a pop up menu as shown in Figure 2 FIGURE 2 There are a number of options and these can be used as follows Connect if the...

Страница 14: ...al memory of the RM3000 While downloading readings you will see an information window showing progress Figure 3 This only takes a few seconds and it is necessary to wait until the process is complete at which time there is an option to clear the stored results from the RM3000 memory FIGURE 3 About this gives software version and copywrite information RM3000 State this gives the pop up shown in Fig...

Страница 15: ...00 software program Exporting Measurements By right clicking and selecting Save Readings you can export readings to a spreadsheet in one of several formats FIGURE 5 In the Save Readings window clicking on the down arrow by Select Export Type will give you 4 saving options Figure 5 These can be used as follows Current Voltage only outputs the current setting and voltage measurement only for each st...

Страница 16: ...ed where the bulk resistivity of a large piece of material is required typically samples 5x probe spacing It outputs the current setting and voltage measurement along with the calculated Bulk Resistivity For this type of measurement it is necessary to input the probe spacing in centimetres on the right in Figure 6 I e for a typical probes spacing of 1 00mm the spacing is 0 1cm When you have chosen...

Страница 17: ...computer keyboard The remote control commands simply mimic the operation of the keypad The keyboard controls are 1 to 9 and to set the current Terminate in m u or n m for mA u for uA n for nA e will erase the current setting If entering a current sending f sets the forward current r sets the reverse current s puts the RM3000 in standy mode z zeros the reading h sets high resistivity mode either 2 ...

Страница 18: ...emory position STORE 21 Erase ALL stored readings from memory STORE 3D Return free memory N A o 6F Output data in text format Current Voltage R Sq N A l 6C Enter Low sensitivity mode LOW h 68 Enter High sensitivity mode HI m 6D Represents milliamps when entering a current mA n 6E Represents nanoamps when entering a current nA u 75 Represents microamps when entering a current uA e 65 Erase current ...

Страница 19: ...e BUZZER 2 7 State of the FWD REV Relay 6 Current Range 10nA 5 Current Range 100nA 4 Current Range 1uA 3 Current Range 10uA 2 Current Range 100uA 1 Current Range 1mA 0 Current Range 10mA 3 7 A valid reading e g No Errors 6 Sensitivity Mode Set High mode 5 Impedance mode Clear Voltage mode 4 Auto Ranging 3 Memory Full 2 Downloading 1 In the Maths Setting Menu 0 Mid Current Entry 4 7 Zeroing 6 Calib...

Страница 20: ... decimal places resolution o 1M 1K and 100R Test Resistors in plugs 0 1 accuracy refer to separate document JL21070602 pdf for test plug details o A PC with USB RM3000 Drivers and a Serial Terminal Emulator such as HyperTerminal Procedure 1 Connect the USB and power on the RM3000 Connect the Serial Terminal Emulator with setting 9600 n 8 1 Check communications by sending a g the unit should respon...

Страница 21: ... failed if the calculated factor is out of range the 1v ref was out 5 The unit now changes its range to 100uA although the LCD is not updated The reading on the external DVM should now be adjusted to 100mV using VR2 It should be possible to trim this in to within 10uV 6 Send another x The unit s reply is as follows Factor xxxxx This time if the calculated factor is too far out the unit will refuse...

Страница 22: ... of between 127 and 128 This arbitrary value will cause a small adjustment in the current output and the result can be seen on the LCD voltage reading The adjustment is non accumulative so keep sending followed by a value until the display reads 1000mV The acceptable error is 999 8 1000 2 14 Send z ensure the reading is still in the acceptable error range after a zero If not repeat 13 15 Remove th...

Страница 23: ...ASSYRM3ARTP 190000001 104311101 106400006 NEW PART NUMBERS CC 27 10 08 2 ...

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