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Description of the Menu
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6.6.5.3
Leak rate filter
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The kind of the leak rate filter can be chosen. The default value is I•CAL.
I•CAL stands for Intelligent Calculation Algorithm of leak rates. It makes sure that the
signals are averaged in optimized time intervals, based on the leak rate intensity.
I•CAL also eliminates noise peaks which are not related to leak rate signals and
provides unexpected short response times for low leak rate signals.
The algorithm used provide excellent sensitivity and response time and is there for
the recommended setting.
6.6.5.4
Mains Frequency
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The mains frequency takes the different pumping speed of the scroll pump into
account. The frequency of the mains power supply can be selected. The default
setting is 50 Hz for 230 V and 60 Hz for 115 V.
6.6.5.5
Service interval exhaust filter
Here you can enter the service intervall of the exhaust filter.
Softkey 3:
Fixed
A filter with a fixed time constant will be used.
Softkey 5:
?
Help
Softkey 7:
I•CAL
I•CAL makes sure that the averaging time is optimal based on the leak rate level.
Softkey 3:
50 Hz
The UL1000 and UL1000 Fab will be run at a mains frequency of 50 Hz.
Softkey 6:
60 Hz
The UL1000 and UL1000 Fab will be run at a mains frequency of 60 Hz.
Softkey 3:
Down
Decrease of the service intervall steps of within 500 hours.
Softkey 5:
?
Help
Softkey 7:
Up
Increase of the service intervall within steps of 500 hours. The limit is 4000 hours.
