Inficon SQM-160, Руководство по эксплуатации

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SQM-160 Operating Manual
6
Option Connections
If you have purchased the optional four sensor card, connect the four additional
sensors to these four inputs.
7
Power On
Move the rear panel power switch to the On (|) position. The SQM-160 will
briefly display its software and hardware versions, then go to normal operating
mode.
2.3 Front Panel
Figure 2-1 SQM-160 Front Panel
Display 1
Displays rate/thickness or frequency in normal operation. If multiple sensors are
being used and Display shows Time, this is the average of those sensors. Turn the
Control Knob right to display each individual sensor's readings. Displays the setup
parameter name in program mode.
Display 2
Displays deposition time, or the sensor # displayed on Display 1 when scrolling
through sensor readings. Displays setup parameter values in program mode.
Control Section
Push-button to zero the thickness reading.
Push-button to toggle display between Crystal Life and Rate/Thickness readings.
Push-button to Open/Close shutter relay.
Two LED shutter relay status display.
Control Configuration
Crystal Status
Rate A/s Thickness kA
Time
Zero
Next Prev Clear Program
Xtal Life Shutter
Open
Closed
Time SP
Thk SP
Final Thk
1
3
5
2
4
6
Display 1
Display 2
Crystal
Status
LEDs
Control
Knob
Control
Section
Setpoint
LEDs
Configuration
Section