1 - 2
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
1.1.1 Related Manuals
Sensors are covered in separate manuals. PDF files of these manuals are
contained in the 074-5000-G1 CD, part of the Ship Kit.
074-154 - Bakeable Sensor
074-156 - Front Load Sensor, Single/Dual
074-157 - Sputtering Sensor
147-800 - Cool Drawer Sensor, Single/Dual
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS and
WARNINGS found throughout. For the purposes of this manual they are defined as
follows:
NOTE:
Pertinent information that is useful in achieving maximum SQM-160
efficiency when followed.
CAUTION
Failure to heed these messages could result in damage
to the SQM-160.
WARNING
Failure to heed these messages could result in personal
injury.
WARNING - Risk Of Electric Shock
Dangerous voltages are present which could result in
personal injury.
Содержание SQM-160
Страница 1: ...O P E R A T I N G M A N U A L SQM 1 60 Multi Film Rate Thickness Monitor IPN 074 511 P1C ...
Страница 2: ......
Страница 5: ......
Страница 6: ......
Страница 8: ......
Страница 22: ...1 10 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 30: ...2 8 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 60: ...4 12 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 76: ...5 16 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 98: ...6 22 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 110: ...8 8 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 120: ...A 10 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...