manualshive.com logo in svg

Inficon PSG550, Руководство по эксплуатации

Inficon PSG550 - высокоточный газоанализатор для индустрии полупроводников. Операционный мануал доступен для загрузки бесплатно на нашем веб-сайте. Получите подробное руководство по эксплуатации и обслуживанию, чтобы использовать устройство эффективно и безопасно. Не упустите возможность загрузить его сейчас с manualshive.com.

Поделиться
Скачать
background image

 

30

 

tina60e1-a     (2011-04)

 

 

3.2.3 

D-Sub, 15-pin HD Connector 

If no sensor cable is available, make one according to the 
following diagram. Connect the sensor cable. 

 

Electrical connection
Pin 1,2 

Gauge identification

Pin 2 

N.C.

Pin 3 

Supply

Pin 4 

Supply common

Pin 5 

Measurement signal

Pin 6 

Signal common

Pin 7,8,9  N.C
Pin 10 

Relay SP1, N.O.

Pin 11 

Relay SP2, N.O.

Pin 12 

Relay SP2

 

Common contact (com)

Pin 13 

RS232, TxD

Pin 14 

RS232, RxD

Pin 15 

Relay SP1

 

Common contact (com)

D-Sub

15-pin HD

female

soldering

side

15

5

11

1

10

6

11
15

5
6

3
4

12

14

+
–

+
–

10

k

+24V

10

nF

10

RxD

13

TxD

SP2

SP1

1

4.7

Ω

4.7

Ω

18V

Supply

Ident

Measurement

signal

 

 
 

Содержание PSG550

Страница 1: ...tina60e1 a 2011 04 1 Pirani Standard Gauge PSG550 PSG552 PSG554 Operating Manual Incl EC Declaration of Conformity ...

Страница 2: ...ntification In all communications with INFICON please specify the infor mation given on the product nameplate For convenient refer ence copy that information into the space provided below Model PN SN V W LPS INFICON AG LI 9496 Balzers ...

Страница 3: ...nt as defined in the corresponding ordering information Flange 1 DN 16 ISO KF 2 DN 16 ISO KF long tube 4 DN 16 CF F 5 DN 16 CF R long tube 6 DN 25 ISO KF D 4 VCR female E 8 VCR female F 1 8 NPT K Flange 29 29 mm M 4 VCR 90 female N 7 16 20 UNF male 0 mbar 1 Torr 2 Pa 3 micron Unit 1 Tungsten 2 Nickel 3 Al2O3 coated 6 Tungsten galvanically isolated 7 Nickel galvanically isolated 8 Al2O3 coated galv...

Страница 4: ...lid state relays Mechanical relays Display Switching function 0 FCC 1 D Sub 9 pin 2 D Sub 15 pin HD 4 D Sub 15 pin HD RS485 INF The part number PN can be taken from the product nameplate If not indicated otherwise in the legends the illustrations in this document correspond to gauges with the DN 16 ISO KF vacuum connection and display They apply to gauges with other vacuum connections by analogy W...

Страница 5: ...n mixtures containing oxidants e g atmospheric oxygen within the explosion range The gauge is intended for operation in connection with an INFICON Vacuum Gauge Controller VCG401 402 403 or with another suitable controller Trademark VCR Swagelok Marketing Co Patents EP 0689669 B1 0689670 B1 US Patent 5608168 Scope of Delivery 1 gauge 1 pin for adjusting settings via buttons 1 Operating Manual Engli...

Страница 6: ...pe Dependence 23 3 Installation 24 3 1 Vacuum Connection 24 3 2 Power Connection 27 3 2 1 FCC 68 8 pin Connector 28 3 2 2 D Sub 9 pin Connector 29 3 2 3 D Sub 15 pin HD Connector 30 3 2 4 D Sub 15 pin HD RS485 INF Connector 31 3 2 5 DeviceNet Connector 32 3 2 6 Profibus Connector 33 4 Operation 34 4 1 Status Indication and Displays 34 4 2 Gas Type Dependence 38 4 3 Switching Functions SP1 SP2 38 4...

Страница 7: ...hooting 54 7 Returning the Product 55 8 Disposal 56 9 Accessories 57 10 Spare Parts 58 Further Information 61 ETL Certification 62 EC Declaration of Conformity 63 For cross references within this document the symbol XY is used for cross references to further documents listed under Further Information the symbol Z ...

Страница 8: ...tal damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice Labeling 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end user of the product ...

Страница 9: ...ontaminated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind o...

Страница 10: ...on at 1000 mbar 0 15 of reading Repeatability N2 1 10 3 100 mbar 2 of reading Output signal measurement signal Voltage range 3PIx 0xx xxx0 0 10 V 3PIx 0xx xxx1 0 8 5 V 3PIx 0xx xxx2 0 5 529 V 3PIx 0xx xxx3 0 8 875 V Measurement range 3PIx 0xx xxx0 0 61 10 V 3PIx 0xx xxx1 1 2 8 5 V 3PIx 0xx xxx2 0 375 5 529 V 3PIx 0xx xxx3 1 57 8 875 V Error signal 0 0 05 V Voltage vs pressure 3PIx 0xx xxx0 1 286 V...

Страница 11: ...ting 30 VAC DC 0 3 A resistive closed LED lit solid open LED off Switching time 30 ms Mechanical relays switching functions SP1 SP2 ATM Setting range N2 5 0 10 5 1000 mbar Hysteresis 1 10 of threshold Switching characteristics 1 Low Trip Point Type 1 floating contact n o per switching function Contact rating 30 VAC DC 1 A resistive closed LED lit solid open LED off Switching time 30 ms Diagnostic ...

Страница 12: ... Class 2 LPS 15 30 VDC Ripple 1 Vpp Power consumption without fieldbus DeviceNet Profibus 2 5 W 3 W 3 W Fuse to be connected 2 1 AT Electrical connection 3PIx 0xx x0xx FCC 68 3PIx 0xx x1xx D Sub 9 pin male 3PIx 0xx x2xx D Sub 15 pin HD male 3PIx 0xx x4xx D Sub 15 pin HD RS485 INF male Sensor cable shielded 0 14 mm2 conductor Cable length RS232C operation 100 m 30 m Grounding concept Power Connecti...

Страница 13: ...nterface physical CAN bus Data rate adjustable via RATE switch 125 kBaud 250 kBaud 500 kBaud default P 125 kBaud 250 kBaud 500 kBaud programmable via DeviceNet 4 Node address MAC ID Adjustable via ADDRESS MSD LSD switches 0 63dec 63dec default P 0 63 programmable via DeviceNet 4 DeviceNet connector Micro Style 5 pin male Cable shielded special DeviceNet cable 5 conductors 32 7 Cable length system ...

Страница 14: ...Chex 00 7Dhex 0 125dec Profibus connection D Sub 9 pin female Cable shielded special Profibus cable 33 9 Cable length system wiring according to Profibus speci fications 8 9 For further information on the Profibus interface 5 Materials exposed to vacuum Vacuum connection Filament 3PI1 6 0xx xxxx 3PI2 7 0xx xxxx 3PI3 8 0xx xxxx Feedthrough Orifice 3 Further materials stainless steel 1 4435 W Ni cer...

Страница 15: ...re absolute 10 bar Permissible temperatures Operation Vacuum connection 4 long tube 4 Filament Storage 10 C 50 C 80 C 250 C 160 C 20 C 65 C Relative humidity Year s mean During 60 days 65 no condensation 85 no condensation Mounting orientation any Use indoors only altitude up to 2000 m NN Degree of protection IP 40 Weight without fieldbus interface with fieldbus interface 115 g 130 g 230 g 250 g 4...

Страница 16: ...011 04 Dimensions mm DN 16 ISO KF DN 16 ISO KF long 130 8 14 5 1 8 NPT 36 21 5 31 5 24 4 36 5 34 79 5 65 DN 16 CF F DN 16 CF R long 130 2 30 9 42 7 46 3 4 VCR 8 VCR 45 28 DN 25 ISO KF 29 2 29 2 mm 7 16 20 UNF 4 VCR 90 ...

Страница 17: ...67 56 LSD MSD ADDRESS SP1 SP2 ST I O DIA ADJ BUS RATE STATUS NET MOD 10 8 4 2 6 0 8 E A C LSD MSD ADDRESS 4 2 6 0 8 E A C BUS SP1 SP2 ST I O DIA ADJ 67 56 RS485 A E 6 2 LSD MSD ADDRESS RATE SP1 SP2 ST DIA BUS ADJ 3 2 1 ON A E 6 2 A E 6 2 67 56 ...

Страница 18: ... 5 0 4 5 6 0 5 5 7 0 6 5 8 0 7 5 9 0 8 5 10 0 9 5 10 5 1E 05 1E 04 1E 03 1E 02 1E 01 1E 00 1E 01 1E 02 1E 03 1E 04 1E 06 1E 05 p 10 0 778 U c U c 1 286log10 p valid in the range 5 10 5 mbar p 1000 mbar U p c U p c V mbar 6 143 V micron 2 448 V µbar 2 287 V Pa 3 572 V Torr 6 304 V kPa 7 429 V mTorr 2 448 where p pressure U output signal c constant pressure unit dependent ...

Страница 19: ... 5 5 5 6 5 7 5 8 5 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 1 2 mbar Pa Torr 1E 03 1E 02 1E 01 1E 00 1E 01 1E 02 Error p 10 U c U c log10 p valid in the range 5 10 5 mbar p 1000 mbar U p c U p c V mbar 5 5 V micron 2 625 V µbar 2 5 V Pa 3 5 V Torr 5 625 V kPa 6 5 V mTorr 2 625 where p pressure U output signal c constant pressure unit dependent ...

Страница 20: ...6661184 6 6661184 0 0500 0 876 0 133322368 13 3322368 0 1000 1 155 0 266644736 26 6644736 0 2000 1 683 0 66661184 66 661184 0 5000 2 217 1 33322368 133 322368 1 0000 2 842 2 66644736 266 644736 2 0000 3 675 6 6661184 666 61184 5 0000 4 206 13 3322368 1333 22368 10 0000 4 577 26 6644736 2666 44736 20 0000 4 846 66 661184 6666 1184 50 0000 4 945 133 322368 13332 2368 100 0000 5 019 266 644736 26664 ...

Страница 21: ... a b c d e f constant U output signal Valid in the range 2 842 4 945 V a cU eU 2 p 1 bU dU 2 fU 3 a 0 1031 c 0 02322 e 0 07229 b 0 3986 d 0 07438 f 0 006866 where p pressure in Torr a b c d e f constant U output signal Valid in the range 4 945 5 529 V a cU p 1 bU dU 2 a 100 624 c 20 5623 b 0 37679 d 0 0348656 where p pressure in Torr a b c d constant U output signal ...

Страница 22: ... 1E 05 0 0 0 5 1 0 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 1 57 8 875 9 5 mbar Pa Torr Error p 10 U c U c log10 p valid in the range 5 10 5 mbar p 1000 mbar U p c U p c V mbar 5 8751 V micron 3 V µbar 2 8751 V Pa 3 8751 V Torr 6 V kPa 6 8751 V mTorr 3 where p pressure U output signal c constant pressure unit dependent ...

Страница 23: ...6 10 2 2 4 6 10 1 2 4 6 100 2 4 6 101 2 4 6 102 H2 He Ne Xe Kr Ar CO2 Freon 12 Air O2 CO N2 p mbar peff mbar Water vapor Calibration factors valid for Pirani pressure range below 1 mbar peff C indicated pressure Gas type Calibration factor C Gas type Calibration factor C He Ne Ar Kr Xe 0 8 1 4 1 7 2 4 3 0 H2 air O2 CO N2 CO2 water vapor Freon 12 0 5 1 0 0 9 0 5 0 7 ...

Страница 24: ...opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibly damage your health Use O rings provided with an outer c...

Страница 25: ...ment For gauges with a KF flange use a conductive metallic clamping ring For gauges with a tube and a 29 29 mm flange take appropriate measures to fulfill this requirement Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive a...

Страница 26: ...horizontal to upright posi tion and consider using a seal with centering ring and filter If adjustment should be possible after the gauge has been installed be sure to install it so that the but tons can be accessed with a pin Remove the protective lid and connect the product to the vacuum system or Clamp Seal with centering ring Seal with centering ring and filter Protective lid Keep the protecti...

Страница 27: ...ops differences of potential or EMC problems may affect the measurement signal For optimum signal quality please do observe the following notes Connect the cable shield to ground on one side via the connector housing Do not connect the other side of the shield Connect the supply common with protective ground directly at the power supply Use differential measurement input signal common and supply c...

Страница 28: ... Electrical connection Pin 1 Supply Pin 2 Supply common GND Pin 3 Measurement signal or threshold SP1 SP2 Pin 4 Gauge identification Pin 5 Signal common Pin 6 8 Relay SP2 Common closing contact com Pin 7 8 Relay SP1 Common closing contact com 1 8 8 pin FCC 68 connector 8 7 3 5 1 2 6 4 Ident 10k 18V 24V 10nF Supply SP2 SP1 4 7Ω 4 7Ω Measurement signal ...

Страница 29: ...lay SP1 closing contact Pin 2 Gauge identification Pin 3 Supply Pin 4 Supply common GND Pin 5 Measurement signal or thresholds SP1 SP2 Pin 6 Relay SP1 Common contact com Pin 7 Relay SP2 Common contact com Pin 8 Signal common Pin 9 Relay SP2 closing contact 6 9 5 1 D Sub 9 pin female soldering side 6 7 5 8 3 4 1 2 Ident 24V 10nF 9 Supply SP2 SP1 10k 18V 4 7Ω 4 7Ω Measurement signal ...

Страница 30: ... Pin 2 N C Pin 3 Supply Pin 4 Supply common Pin 5 Measurement signal Pin 6 Signal common Pin 7 8 9 N C Pin 10 Relay SP1 N O Pin 11 Relay SP2 N O Pin 12 Relay SP2 Common contact com Pin 13 RS232 TxD Pin 14 RS232 RxD Pin 15 Relay SP1 Common contact com D Sub 15 pin HD female soldering side 15 5 11 1 10 6 11 15 5 6 3 4 12 14 10k 24V 10nF 10 RxD 13 TxD SP2 SP1 1 4 7Ω 4 7Ω 18V Supply Ident Measurement ...

Страница 31: ...Measurement signal Pin 6 Signal common Pin 7 Reserved Pin 8 RS485 GND Pin 9 Reserved Pin 10 Relay SP1 N O Pin 11 Relay SP2 N O Pin 12 Relay SP2 common contact com Pin 13 Relay SP2 N C Pin 14 Relay SP1 N C Pin 15 Relay SP1 common contact com 15 5 11 1 10 6 D Sub 15 pin HD female soldering side 11 15 5 6 3 4 12 14 24V 10nF 10 13 SP1 SP2 4 7Ω 4 7Ω 10k 18V 8 2 1 RS 485 10Ω 470Ω 120Ω 2 Termination 3 Fa...

Страница 32: ...viceNet cable is available make one according to the following diagram Connect the DeviceNet cable 3 1 4 2 5 Micro Style 5 pin DeviceNet female soldering side Pin 1 Drain Pin 2 Supply 15 30 VDC Pin 3 Supply common GND Pin 4 CAN_H Pin 5 CAN_L DeviceNet cable ...

Страница 33: ...the Profibus cable 1 5 6 9 D Sub 9 pin male soldering side Pin 1 2 Do not connect Pin 6 VP 2 Pin 3 RxD TxD P Pin 7 9 Not connected Pin 4 Pin 5 CNTR P 1 DGND 2 Pin 8 RxD TxD N 1 Only to be connected if an optical link module is used 2 Only required as line termination for devices at both ends of bus cable 9 Profibus cable Sensor cable ...

Страница 34: ...pressure The gauge is factory calibrated Due to long time operation or contamination a zero drift could occur Periodically check the zero and adjust it if necessary adjusting the gauge 51 4 1 Status Indication and Displays Light emitting diodes LEDs SP1 SP2 ADJ ST DIA Status LED State Meaning ST off no supply voltage lit green measurement mode lit red error SP1 lit green Relay SP 1 closed off Rela...

Страница 35: ... LCD Meaning off no supply voltage lit green measurement parameter mode lit red error The display can be rotated by 180 via the diagnostic port Put the gauge into operation When the supply voltage is applied the software version is briefly dis played ...

Страница 36: ...ode Status of Relay 1 Setpoint open Pirani closed open closed Setpoint Measurement principle Status of Relay 2 Unit Millibar Torr Pascal Micron Counts no display Underrange Overrange no display Within range Output signal Relay 2 Relay 1 ...

Страница 37: ...r mode Threshold Switching functions S When the SP1 or SP2 button is pushed the corresponding threshold is displayed and the corresponding relay flashes Error display trouble shooting 54 Pirani sensor error EEPROM error Sensor error ...

Страница 38: ... solid state relay is provided for each switching function The current threshold setting can be read written via the diagnostic port is output at the measurement signal output instead of the pressure signal can be measured with a voltmeter and is displayed on the LCD display after the SP1 or SP2 button is pressed can be read written via the DeviceNet Profibus and RS485 interface Switching characte...

Страница 39: ...ctory set to the lower measurement range limit and therefore do not switch High Trip Point If the pressure in the vacuum system is higher than the setpoint the corresponding LED SP1 or SP2 is lit solid and the corresponding relay is closed Time t Off On Off Setpoint Measurement value Measurement signal Pressure p Threshold value Hysteresis 10 of threshold Threshold value ...

Страница 40: ...s closed If the pressure in the vacuum system is lower than the defined Low Trip Point threshold the correspoinding LED SP1 or SP2 is lit and the corresponding relay is closed Setpoint High Trip Point Time t Off On Off Off On Setpoint Low Trip Point Measurement signal Pressure p Hysteresis 10 of threshold Threshold value Hysteresis 10 of threshold Threshold value The setpoints can only be programm...

Страница 41: ...eNet Profibus and RS485 interface 3 4 5 If both a High Trip Point and a Low Trip Point are assigned to a setpoint Low Trip Point only can be adjusted via the corresponding button on the gauge DANGER DANGER malfunction If processes are controlled via the signal output keep in mind that by pushing an SP button the measurement signal is suppressed and the cor responding threshold value is output inst...

Страница 42: ...old setting is increased towards the upper limit until the button is released or the limit is reached Keep the button depressed o Push the SP1 button again Fine adjustment within 0 1 s the threshold value changes by one unit Change of direction within 2 3 s the threshold adjustment changes its direction p The SP1 button is released for more than 5 s the threshold value is saved and the gauge retur...

Страница 43: ...etting of the corresponding hysteresis 10 is reactivated Programming setpoint SP1 Programmable parameters 3 4 5 Low Trip Point Low Trip Enable Low Trip Point Hysteresis High Trip Point High Trip Enable High Trip Point Hysteresis Setpoint Mode Adjusting setpoint SP2 The adjustment procedure is the same as for setpoint SP1 ...

Страница 44: ... tina60e1 a 2011 04 4 4 Diagnostic Port RS232C Interface The diagnostic port DIA permits to output the pressure read ing and all status information and to enter all settings at the same time 3 Accessories ...

Страница 45: ... device specific EDS Electronic Data Sheet file are required for this purpose This software can be downloaded from our website Node Address Setting Set the node address 0 63dec via the ADDRESS MSD and LSD switches default 63dec The node address is polled by the firmware when the gauge is switched on If the setting deviates from the stored value the new value is taken over into the NVRAM If a setti...

Страница 46: ...P position the data rate is programmable via the DeviceNet 4 Status LED Two LEDs on the gauge inform on the gauge status and the current DeviceNet status STATUS MOD gauge status LED Meaning off No supply blinking green red Selftest lit solid green Normal operation lit solid red Non recoverable error blinking red Recoverable error e g missing DeviceNet power supply ...

Страница 47: ...concluded but no communica tion to other nodes established Gauge not assigned to any master lit solid green Gauge online necessary connections established blinking red One or several input output connections in time out status lit solid red Communication error The gauge has de tected an error that impedes communica tion via the network e g two identical node addresses MAC IC or Bus off ...

Страница 48: ...n vironment a node address is required 4 2 6 0 8 E A C LSD MSD ADDRESS 4 2 6 0 8 E A C Node address 0 125dec The node address is set in hexadecimal form 00 7Dhex via the MSD and LSD switches It can not be defined via Profibus Node address 7Dhex 125dec The gauge starts with the node address 126dec The address can now be set via Profibus Set slave address 5 Addi tionally via the attribute NO_ADD_CHG...

Страница 49: ...handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools w...

Страница 50: ...50 tina60e1 a 2011 04 p Untighten the fastening screw s and disconnect the sensor cable q Remove gauge from the vacuum system and install the protective lid Protective lid ...

Страница 51: ...ination a zero drift could occur Periodically check the zero and adjust it if necessary For adjusting the zero operate the gauge under the same con stant ambient conditions and in the same mounting orientation as normally The gauge is adjusted to default values However it can also be adjusted to other pressure values if the exact pressure value is known reference measurement n If you are using a s...

Страница 52: ...acuum system to p 10 5 mbar and wait at least 2 minutes r Press the ADJ button with a pin and the HV adjustment is carried out The gauge is adjusted to 5 10 5 mbar default HV adjustment to another pressure 3 If the pressure value 4 99 10 5 mbar is output at the measurement value output or on the LCD display the adjustment has been successful Otherwise repeat the adjustment procedure ...

Страница 53: ... of severe contamination or a malfunction the sensor can be replaced Precondition Gauge deinstalled 49 n Unscrew the hexagon socket screws and remove the sensor without twisting it 2 mm o Place the new sensor without twisting it and lock it with the screws ...

Страница 54: ...e No supply voltage Turn on the power supply Error Remedy the error Gauge in an undefined status Turn the gauge off and on again after 5 s reset FAIL PIR1 Pirani sensor defective Replace the sensor 53 Electronics unit not correctly mounted on sensor Check the connections electronics sensor FAIL EEPROM EEPROM error Turn the gauge off and on again after 5 s reset Replace the gauge FAIL SENSOR Electr...

Страница 55: ... preferably be free of harmful substances Adhere to the forward ing regulations of all involved countries and for warding companies and enclose a duly completed declaration of contamination Form under www inficon com Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declaration of con...

Страница 56: ...nd electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminate...

Страница 57: ...0e1 a 2011 04 57 9 Accessories Ordering No Centering ring with fine filter DN 16 ISO KF 211 097 Communication adapter 2 m 6 303 333 6 The diagnostic software Windows NT XP can be downloaded from our website ...

Страница 58: ... DN 16 ISO KF long tube 355 926 3PI1 0x4 xxxx 3PI6 0x4 xxxx DN 16 CF F 355 927 3PI1 0x5 xxxx 3PI6 0x5 xxxx DN 16 CF R long tube 355 928 3PI1 0x6 xxxx 3PI6 0x6 xxxx DN 25 ISO KF 355 929 3PI1 0xD xxxx 3PI6 0xD xxxx 4 VCR female 355 932 3PI1 0xE xxxx 3PI6 0xE xxxx 8 VCR female 355 931 3PI1 0xF xxxx 3PI6 0xF xxxx 1 8 NPT 355 930 3PI1 0xK xxxx 3PI6 0xK xxxx 29 29 mm 355 934 3PI1 0xM xxxx 3PI6 0xM xxxx ...

Страница 59: ... CF F 355 938 3PI2 0x5 xxxx 3PI7 0x5 xxxx DN 16 CF R long tube 355 939 3PI2 0x6 xxxx 3PI7 0x6 xxxx DN 25 ISO KF 355 940 3PI2 0xD xxxx 3PI7 0xD xxxx 4 VCR female 355 943 3PI2 0xE xxxx 3PI7 0xE xxxx 8 VCR female 355 942 3PI2 0xF xxxx 3PI7 0xF xxxx 1 8 NPT 355 941 3PI2 0xK xxxx 3PI7 0xK xxxx 29 29 mm 355 945 3PI2 0xM xxxx 3PI7 0xM xxxx 4 VCR 90 female 355 946 3PI2 0xN xxxx PCG552 3PI7 0xN xxxx 7 16 2...

Страница 60: ...6 CF F 355 949 3PI3 0x5 xxxx 3PI8 0x5 xxxx DN 16 CF R long tube 355 950 3PI3 0x6 xxxx 3PI8 0x6 xxxx DN 25 ISO KF 355 951 3PI3 0xD xxxx 3PI8 0xD xxxx 4 VCR female 355 954 3PI3 0xE xxxx 3PI8 0xE xxxx 8 VCR female 355 953 3PI3 0xF xxxx 3PI8 0xF xxxx 1 8 NPT 355 952 3PI3 0xK xxxx 3PI8 0xK xxxx 29 29 mm 355 956 3PI3 0xM xxxx 3PI8 0xM xxxx 4 VCR 90 female 355 957 3PI3 0xN xxxx PCG554 3PI8 0xN xxxx 7 16 ...

Страница 61: ... Communication Protocol Serial Interface RS232C RS485C PCG55x PSG55x tira59d1 German tira59e1 English INFICON AG LI 9496 Balzers Liechtenstein 4 www inficon com Communication Protocol DeviceNet PCG55x PSG55x tira58e1 English INFICON AG LI 9496 Balzers Liechtenstein 5 www inficon com Communication Protocol Profibus PCG55x PSG55x tira56e1 English INFICON AG LI 9496 Balzers Liechtenstein 6 Common Ind...

Страница 62: ...4 Industrial communication networks Fieldbus profiles 9 www profibus com Profibus user organization ETL Certification 3103457 ETL LISTED The product PSG55x complies with the requirements of the following standards ANSI UL 61010 1 Issued 2004 07 12 Ed 2 Rev 2008 10 28 CAN CSA C22 2 61010 1 Issued 2004 07 12 Ed 2 R2009 ...

Страница 63: ... standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 EMC generic emission standard EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2006 EMC requirements for electrical equipment for measurement control and laboratory use Manufacturer Signatures INFICON AG Alte Landstrasse 6 LI 9496 Balzer...

Страница 64: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original German tina60d1 a 2011 04 reachus inficon com t i na60e1 a www inficon com ...

Отзывы:

Нет отзывов

Похожие инструкции для PSG550

rainforest EMU Quick Start Manual preview
EMU
Бренд: rainforest Страницы: 2
Kane 3500 Manual preview
3500
Бренд: Kane Страницы: 20
AccuEnergy Acuvim-L Series User Manual preview
Acuvim-L Series
Бренд: AccuEnergy Страницы: 83
YOSensi YO Meter Pulse User Manual preview
YO Meter Pulse
Бренд: YOSensi Страницы: 27
OHAUS MB45 Instruction Manual preview
MB45
Бренд: OHAUS Страницы: 71
Omega DPG1001AD Instruction Sheet preview
DPG1001AD
Бренд: Omega Страницы: 4
Dakota Digital VHX systems Installation And Operation Manual preview
VHX systems
Бренд: Dakota Digital Страницы: 34
Value WT26 Series Manual preview
WT26 Series
Бренд: Value Страницы: 20
Vanguard Instruments TRM-20 User Manual preview
TRM-20
Бренд: Vanguard Instruments Страницы: 85
Hanna Instruments HI 93727 Instruction Manual preview
HI 93727
Бренд: Hanna Instruments Страницы: 2
Integra Ri3 Installation And Operating Instructions Manual preview
Ri3
Бренд: Integra Страницы: 32
VECTECH 492EP Operation Manual preview
492EP
Бренд: VECTECH Страницы: 10
XS Instruments 60 VioLab Series Instruction Manual preview
60 VioLab Series
Бренд: XS Instruments Страницы: 41
Toner OLS1315A User Manual preview
OLS1315A
Бренд: Toner Страницы: 7
Factair Safe-Air F8100 Operating Manual preview
Safe-Air F8100
Бренд: Factair Страницы: 38
A&D HP-04 Instruction Manual preview
HP-04
Бренд: A&D Страницы: 23
B meters HYDRODIGIT Operating Instructions Manual preview
HYDRODIGIT
Бренд: B meters Страницы: 30
Techcomp UV 2600 Instruction Manual preview
UV 2600
Бренд: Techcomp Страницы: 51

Бренды по названию

Популярные бренды

Загрузить еще бренды