10 - 8
IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
Response Error Code
= 1 byte ASCII
A = Illegal Command
B = Illegal parameter value
D= Illegal ID
E = Data not available
F = Cannot do now (some commands require the IC6 to be in Ready/Stop).
L = Length Error, must be greater than 0 and equal to or less than 65,500 bytes.
P = Prior command failed (if one command of a multiple command packet fails,
none of the following commands will be done, and this error code will be
returned).
Packet Error Code
= 1 byte ASCII.
C = invalid checksum
F = illegal format (The command could not be processed because a byte in the
command packet did not fit the recognized format)
I = invalid message (Unrecognized command in the packet)
M = too many commands (Only 100 allowed)
O = Response length is larger than response buffer
10.3.1.3 Timeouts
If more than 3 seconds pass between characters of a command packet, the IC6 will
time out. No response packet is sent, the IC6 will clear its buffers and assume any
future characters are the beginning of a new packet.
10.3.2 Data Type Codes
All parameters are stored internally as four byte words. The data type codes
indicate how individual parameters are represented in the four bytes (and how they
need to be passed via remote communications).
Table 10-1 Format code
Format Code Displays the value as
REAL_3F20
X.XX or XX.X or XXX
REAL_3X1
XX.X
REAL_4F21
XX.XX or XXX.X
REAL_4F31
X.XXX or XX.XX or XXX.X
REAL_4X1
XXX.X
REAL_4X2
XX.XX
REAL_4X3
X.XXX
REAL_5F32
XX.XXX or XXX.XX
REAL_5X2
XXX.XX
Содержание IC6
Страница 1: ...O P E R A T I N G M A N U A L IC6 Thin Film Deposition Controller IPN 074 505 P1E Cover Page ...
Страница 2: ......
Страница 8: ......
Страница 20: ...TOC 12 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 42: ...1 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 134: ...6 6 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 148: ...8 4 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 170: ...9 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 236: ...11 2 IPN 074 505 P1E IC6 Operating Manual Figure 11 1 The essential advantage of multi point deposition sensing ...
Страница 268: ...13 2 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 312: ...15 40 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 338: ...A 10 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...
Страница 342: ...1 4 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...