Inficon Fab UL6000 Fab, Руководство по эксплуатации

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6 | Operation INFICON
76 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-02-(2207)
6.3.17.2 External calibration
ü
Operator or Supervisor rights
1 Mount the calibration leak on the inlet of the device.
2 > Setup > Measurement > Calibration leak
3 Adjust the leak rate of the calibration leak used, see also “Set external
calibration leak [
}
68]”.
4 Place the device in the state "Standby" or "Measure".
5 Press .
6 Select the calibration “External”.
7 Press .
8 Follow the instructions on the screen.
6.3.17.3 Check calibration
The calibration can also be checked without changing calibration factor. This tells you
whether a new calibration is necessary.
ü User rights
ü
The device is in "Standby" or "Measure" mode.
1 Press .
2 Select “Proof“.
ð The check is started and the calibration factor is recalculated.
ð
The newly calculated calibration factor is displayed.
ð
If the newly calculated calibration factor deviates considerably from the stored
calibration factor, a prompt for new calibration is displayed.
6.3.17.4 Measure internal calibration leak
ü
User rights
ü The device is in "Standby" or "Measure" mode.
1 Press .
2 Select "Measure internal calibration leak".
3 Press .
ð The calibration leak is opened, the measured leak rate is displayed and
compared with the target value.
Matching of the measured value of the internal calibration leak and the default value of
the internal calibration leak does not mean that the measuring system is absolutely
accurate if the internal calibration leak was used for calibrating the leak detector. See
also "Setting the machine factor [
}
68]".