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32

 

 

tira68e1     (2013-05)     CDGxxxD.cp

 

 

Appendix 

 

 

 [1] 

www.inficon.com 
Operating Manual 
CDG045D 
tina51d1  (German) 
tina51e1  (English) 
INFICON AG, LI–9496 Balzers, Liechtenstein 

 [2] 

www.inficon.com 
Operating Manual 
CDG100D 
tina52d1  (German) 
tina52e1  (English) 
INFICON AG, LI–9496 Balzers, Liechtenstein 

 [3] 

www.inficon.com 
Operating Manual 
CDG160D, CDG200D 
tina53d1  (German) 
tina53e1  (English) 
INFICON AG, LI–9496 Balzers, Liechtenstein 

 [4] 

ETG.1000.2: Physical Layer service definition and protocol specification 

 [5] 

ETG.1000.3: Data Link Layer service definition 

 [6] 

ETG.1000.4: Data Link Layer protocol specification 

 [7] 

ETG.1000.5: Application Layer service definition 

 [8] 

ETG.1000.6: Application Layer protocol specification 

 [9] 

ETG.1020: EtherCAT Protocol Enhancements 

 [10] 

ETG.2000: EtherCAT Slave Information 

 [11] 

ETG.5001.1: Modular Device Profile – Part 1: General MDP Device 
Model 

 [12] 

ETG.5003.1: Semiconductor Device profile – Part 1: Common Device 
Profile (CDP) 

 [13] 

ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific 
Device Profile (SDP): Vacuum Pressure Gauge 

 [14] 

IEC 61158-x-12 (all parts for type 12): Industrial communication 
networks – Fieldbus specifications 

 [15] 

IEC 61784-2: Industrial communication networks – Profiles – Part 2: 
Additional fieldbus profiles for real-time networks based on ISO/IEC 
8802-3 

 [16] 

SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR 
NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE 
GAUGES 

 [17] 

SEMI E52: Practice for referencing gases, gas mixtures and vaporizable 
materials used in digital mass flow controllers 

 
 

A: Literature 

Содержание CDG045D

Страница 1: ...Communication Protocol tira68e1 2013 05 1 EtherCAT for Capacitance Diaphragm Gauges CDG045D CDG045D2 CDG100D CDG100D2 CDG160D CDG200D ...

Страница 2: ...m gauges refer to the appropriate documents 1 2 3 The following description of the EtherCAT interface is compliant to the EtherCAT specification of the EtherCAT Technology Group ETG and to the EtherCAT Semiconductor Device Profile This manual describes the functionality of a EtherCAT slave and supports ETG 5003 Part 1 Common Device Profile CDP V0 9 0 12 and ETG 5003 Part 2080 Specific Device Profi...

Страница 3: ... 160 F 200 3 0 1 4 0 25 5 0 5 6 1 7 2 8 5 9 10 A 20 B 50 C 100 D 200 E 500 F 1000 Torr only G 1100 mbar only 5 Torr x 133 Pa x 1 3 mbar 6 mbar x 100 Pa Measurement range F S Unit Sensor temperature Flange The part number PN can be taken from the product nameplate If not indicated otherwise in the legends the illustrations in this document corres pond to CDG045D gauges with the DN 16 ISO KF vacuum ...

Страница 4: ...mmon 16 4 4 4 Input Piezo 16 4 4 5 Input Trip Point 1 16 4 5 Configuration Area 0x8000 0x8FFF 17 4 5 1 Configuration Capacitance Diaphragm 17 4 5 2 Configuration Trip Point 1 17 4 5 3 Configuration Trip Point 2 19 4 6 Information Area 0x9000 0x9FFF 20 4 6 1 Information Capacitance Diaphragm 21 4 6 2 Information Common 21 4 6 3 Information Piezo 21 4 6 4 Information Trip Point 1 2 22 4 7 Device Are...

Страница 5: ...tira68e1 2013 05 CDGxxxD cp 5 Appendix 32 A Literature 32 For cross references within this document the symbol XY is used for cross references to further documents listed under literature the symbol Z ...

Страница 6: ... 2 RJ45 8 pin socket IN EtherCAT input OUT EtherCAT output Cable shielded special Ethernet Patch Cable or Crossover Cable CAT5e quality or higher Cable length 100 m Process data Fixed PDO mapping and configurable PDO mapping Mailbox CoE SDO requests responses and information 31 5 short 8 VCR female 54 1 long 82 110 4 3 8 114 2 DN 16 ISO KF 31 5 OD tube 13 31 5 DN 16 CF R 31 5 DIAG SP ZERO 2 4 0 6 ...

Страница 7: ...escription 1 TD Transmission Data 2 TD Transmission Data 3 RD Receive Data 4 nu not used 5 nu not used 6 RD Receive Data 7 nu not used 8 nu not used Pin assignment of the D Sub 15 pin sensor connector according to the respective operating manual 1 2 3 Plug the EtherCAT and sensor cables connector into the gauge From the previous device the cable connected to OUT port has to be connected to the CDG...

Страница 8: ...face or the diagnostic port may result in incorrect data and data transmission errors Therefore it is inadmissible to simultaneously operate the gauge via the RS232C Serial Interface and EtherCAT interface or the diagnostic port 5 6 4 7 3 9 2 8 1 10 Position Label Function 1 IN EtherCAT IN connector 2 ERR Error LED 3 x100 Address Switch 100 hexadecimal 4 LA Link activity EtherCAT IN 5 x10 Address ...

Страница 9: ...mously due to local error see error parameter double flash 200 ms on 200 ms off 200 ms on 1000 ms off An application watchdog timeout has occurred Sync Manager Watchdog timeout or communication timeout occurred red on A critical communication or application controller error has occurred Application controller is not responding any more PDI Watchdog Timeout detected by ESC Displays the input status...

Страница 10: ...This device address is supported to the master as Explicit Device Identification Example Value of the Explicit Device ID 0xDDD dec 3549 0x100 0xD dec 3328 0x10 0xD dec 208 0x1 0xD dec 13 2 4 0 6 8 A E x100 x10 2 4 0 6 8 A E x1 2 4 0 6 8 A E 3 3 5 Device Address Switch 2 4 0 6 8 A E x100 x10 2 4 0 6 8 A E x1 2 4 0 6 8 A E ...

Страница 11: ...ject can be both read and written by the SDO service CoE CAN application protocol over EtherCAT Index Object Index hex address of an object NV Nonvolatile attribute value is maintained through power cycles Object Abstract representation of a particular component within a device which consists of data parameters and methods PDO Process Data Object Structure described by mapping parameters containin...

Страница 12: ...tored to non volatile memory of the slave 1011 0x01 UDINT RW Restore Default Parameters Read Bit 0 1 slave supports the restoring of backup entries with the default values when writing 0x1011 01 with 0x64616F6C Bit 1 31 0 Write With the value 0x64616F6C the backup entries will be restored with the default values 1018 RO Identity Object 0x01 UDINT RO Vendor ID 0x02 UDINT RO Product Code 0x03 UDINT ...

Страница 13: ...urer specific profile objects contain the manufacturer s model number and device configuration data status and diagnostic data The objects are described in the following tables Index SI DataType NV Access PM Name 2001 V_STRING RO Manufacturer s Model Number 2002 V_STRING RO Device Configuration Index SI DataType NV Access PM Name 2600 0x01 BYTE RO Status Alarm and Warning State of Module 1 Bit 0 B...

Страница 14: ...Warning Enable Enables the setting of the Warning Status Bits Alarm Trip Point High Determines the value above which an Alarm Condition will occur Alarm Trip Point Low Determines the value below which an Alarm Condition will occur Alarm Hysteresis Determines the amount by which the value must recover to clear an Alarm Condition Warning Trip Point High Determines the value above which a Waning Cond...

Страница 15: ...nvalid Valid The corrected converted calibrated final analog input value of the sensor Index SI DataType NV Access PM Name 6001 0x01 BOOL RO tx Reading Valid 0x02 BOOL RO tx Overrange Exceeded 0x03 BOOL RO tx Underrange Exceeded Indicates whether the Value parameter contains a valid value within the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter con...

Страница 16: ...3 BOOL RO tx Underrange Exceeded Indicates whether the Value parameter contains a valid value within the specified accuracy or not Reading Valid 0 Invalid 1 Valid Indicates whether the Value parameter contains a value in over range Reading Valid 0 No Overrange Exceeded 1 Overrange Exceeded Indicates whether the Value parameter contains a value in under range Reading Valid 0 No Underrange Exceeded ...

Страница 17: ...0 SI 0x11 Accumulated Zero Offset I 0x9000 SI 0x01 Offset Customer Specified I 0x8001 SI 0x12 The High Trip Point is calculated by High Trip Point Value Percentage Value from Piezo Sensor I 0x6010 SI 0x11 Percentage High Trip Source I 0x800E F SI 0x13 In this case the High Trip Point value is automatically updated by the device itself Any user written value to the parameter High Trip will be refus...

Страница 18: ... x RW Low Trip Hysteresis 0x1A UDINT x RO Source Index High Trip Point 0 1 Disable Enable Low Trip Point 0 1 Disable Enable High Trip Point Limit High limit to trigger trip point condition if Input Value I 0x900E SI 0x01 is above this limit Percentage of High Trip Source Percentage of Piezo Sensor Value I 0x6010 SI 0x11 in Low Trip Point Limit Low limit to trigger trip point condition if Input Val...

Страница 19: ...ble Enable Low Trip Point 0 1 Disable Enable High Trip Point limit High limit to trigger trip point condition if Input Value I 0x900F SI 0x01 is above this limit Percentage of High Trip Source Percentage of Piezo Sensor Value I 0x60010 SI 0x11 in Low Trip Point Limit Low limit to trigger trip point condition if Input Value I 0x900F SI 0x01 is below this limit High Trip Hysteresis Hysteresis value ...

Страница 20: ...urement value 4 Highest informational measurement value Index SI DataType NV Access PM Name 9000 0x01 REAL x RO Accumulated Zero Offset 0x02 REAL x RO Highest Informational Measurement Value 0x03 REAL x RO Highest Precision Measurement Value 0x04 REAL x RO Lowest Precision Measurement Value Accumulated Zero Offset An amount added prior to Gain to derive Value Result of Zero Adjust Command accumula...

Страница 21: ...to Gain to derive Value Result of Zero Adjust Command accumulated value Highest Informational Measurement Value Highest value that the gauge can measure without a specified accuracy Highest Precision Measurement Value Highest valid value at which the gauge is specified with an accuracy value Above that value the parameter Reading Valid is set to invalid Lowest Precision Measurement Value Lowest va...

Страница 22: ...A device can support less then this This entry described the supported number of modules Index SI DataType NV Access PM Name F010 0x01 UDINT RO Profile Number Module 1 0x02 UDINT RO Profile Number Module 2 Each sub index lists the profile number of the corresponding module Each sub index lists the profile number of the corresponding module Index SI DataType NV Access PM Name F380 USINT RO tx Activ...

Страница 23: ...ning Exception Bit 15 High Warning Exception Bit 16 31 0 Active Device Warning Details Module 2 Index F381 Bit 0 31 0 Active Manufacturer Warning Details Index F382 Bit 0 Internal Communication Exception between EtherCAT Protocol and Device Application Bit 1 Atmosphere Pressure out of Range Exception only as Warning 0 for Error Bit 2 31 0 The active device error details parameter describes the err...

Страница 24: ... Access PM Name F390 USINT RO tx Latched Exceptions Status F391 0x01 UDINT RO tx Latched Device Warning Details Device 0x02 UDINT RO tx Latched Device Warning Details Module 1 0x03 UDINT RO tx Latched Device Warning Details Module 2 F392 0x01 UDINT RO tx Latched Manufacturer Warning Details Latched version of 0xF380 Latched Device Warning Details Device Latched version of 0xF381 01 Latched Device ...

Страница 25: ... RW Manufacturer Warning Mask Device Warning Mask Device Mask bits for 0xF381 01 and 0xF391 01 Device Warning Mask Module 1 Mask bits for 0xF381 02 and 0xF391 02 Device Warning Mask Module 2 Mask bits for 0xF381 03 and 0xF391 03 Manufacturer Warning Mask Mask bits for 0xF382 01 and 0xF392 01 Index SI DataType NV Access PM Name F3A3 0x01 UDINT x RW Device Error Mask Device 0x02 UDINT x RW Device Er...

Страница 26: ...controller time corresponding to the input latch time in microseconds It starts at zero on device power up Mandatory if device has inputs If device has no inputs defined this corresponds the time immediately prior to writing to input SM Local controller time corresponding to the input latch time in microseconds It starts at zero on device power up Mandatory if device has inputs If device has no in...

Страница 27: ...F9F5 0x01 USINT RW Data stamp Module 1 0x02 USINT RW Data stamp Module 2 F9F6 UDINT RO Time since power on F9F7 UDINT x RO Total time powered F9F8 0x01 UDINT RO Firmware Update Functional Generation Number Module 1 F9F8 0x02 UDINT RO Firmware Update Functional Generation Number Module 2 Measurement principle assigned to the object instance The most significant nibble of the parameter represents th...

Страница 28: ... target offset Byte 1 Index of the Sub Sensor Instance 1 Byte 2 5 Offset value Data format REAL always 0 Status supported values 0 1 2 3 255 Last command completed no errors no reply available Last command completed no errors reply available Last command completed errors present no reply available Last command completed errors present reply available Command is executing Response Byte 0 See Subind...

Страница 29: ...s an ESC reset An SDP may limit some behavior of the power cycle emulation but shall not exclude the EtherCAT interface As consequence of an ESC reset all following devices are disconnected from the network There are two versions of this command Standard reset as described above Factory reset as described above but additionally all parameters are restored to as shipped defaults Index SI DataType N...

Страница 30: ...ommand completed error no response Reserved Command is executing Response Byte 0 See Subindex 0x02 Byte 1 Unused Byte 2 n Unused Execution of this command will store all parameters to non volatile memory If a device automatically saves all non volatile parameters at the time they are set this command will not take any action Index SI DataType NV Access PM Name FBF2 0x01 V_STRING RW Command 0x02 BY...

Страница 31: ...pported values 0 1 2 3 255 Last command completed no error no response Reserved Last command completed error no response Reserved Command is executing Response Byte 0 See Subindex 0x02 Byte 1 Unused Byte 2 n Unused Subindex 0x02 Subindex 0x03 ...

Страница 32: ... Layer protocol specification 9 ETG 1020 EtherCAT Protocol Enhancements 10 ETG 2000 EtherCAT Slave Information 11 ETG 5001 1 Modular Device Profile Part 1 General MDP Device Model 12 ETG 5003 1 Semiconductor Device profile Part 1 Common Device Profile CDP 13 ETG 5003 2080 Semiconductor Device profile Part 2080 Specific Device Profile SDP Vacuum Pressure Gauge 14 IEC 61158 x 12 all parts for type 1...

Страница 33: ...tira68e1 2013 05 CDGxxxD cp 33 Notes ...

Страница 34: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 Original English tira68e1 2013 05 reachus inficon com t i r a68e1 www inficon com ...

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