Specifications
8
4
IMT Analytics AG
4.1.1
Measuring instrument values
1
Flow Low
Range
Accuracy
-20 – 20 nL/min
± 1.75% of reading or ± 0.04 nL/min
Flow High
Range
Accuracy
-300 – 300 nL/min
± 1.75% of reading or ± 0.1 nL/min
Volume
Range
Accuracy
-100 – 100 nL
± 2% of reading ± 0.02 nL (Flow
High) or ± 0.01 nL (Flow Low)
Pressure (at high flow)
Range
Accuracy
0 – 150 mbar
± 0.75% of reading or ± 0.1 mbar
Differential pressure
Range
Accuracy
-150 – 150 mbar
± 0.75% of reading or ± 0.1 mbar
High pressure
Range
Accuracy
0 – 10 bar
± 1% of reading or ± 10 mbar
Ambient pressure
Range
Accuracy
0 – 1150 mbar
± 1% of reading or ± 5 mbar
Oxygen
Range
Accuracy
0 – 100 vol%
± 1 vol%
Humidity
Range
Accuracy
0 – 100% RH (non-condensing)
± 3% RH
Temperature
Range
Accuracy
0 – 50°C
± 1.75% of reading or ± 0.5°C
Dew point temperature
Range
Accuracy
-10 – 50°C
± 2% of reading or ± 1°C
Additional pressure sensors
For details please refer to the sections
5.3.6 Low pres-
sure (PF-302 LOW)
and
5.3.7 Pressure sensor ±1bar
(PF-301 VAC)
.
1
Standard litres per minute (converted to STP conditions of 21.1°C and 1013 mbar)
4 Specifications
4.1 Measurement parameters
