Ideal Vacuum XactGauge XGC-320 Скачать руководство пользователя страница 7

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V100 (2019-11)

Doc. Ref. XGC-320-100119

Analog Output

7.1

Log 1-8; Log-Linear Analog Output Equation &
Table - Torr

7.2

Log 1-8; Log-Linear Analog Output Equation &
Table - mbar

7.3

Log 0-7; Log-Linear Analog Output Equation &
Table - Torr

7.4

Log 0-7; Log-Linear Analog Output Equation &
Table - mbar

7.5

NONLIN 6V; Non-Linear Analog Output Equations

7.6

NONLIN 6V; Non-Linear Analog Output Table - Torr

7.7

NONLIN 6V; Non-Linear Analog Output Table - mbar

7.8

NONLIN 9V; Non-Linear Analog Output Equations &
Table

7.9

LINEAR ANALOG OUTPUT

RS485 / RS232 serial communications

8.1

Device Specific Serial Communication Info

8.2

RS485 / RS232 Command Protocol Summary

Service

9.1

Calibration

9.1

Maintenance

9.3

Troubleshooting

Factory Service and Support

Storage

Disposal

EU Declaration of Conformity

For cross-references within this document, the symbol (





XY)

is used.

Содержание XactGauge XGC-320

Страница 1: ...V100 2019 11 Doc Ref XGC 320 100119 1 XactGaugeTM Convection Enhanced Pirani Gauge Controller XGC 320 Operating Manual Incl EU Declaration of Conformity...

Страница 2: ...does not work as described in this document please check that it is equipped with the above firmware version 30 We reserve the right to make technical changes without prior notice Important User Info...

Страница 3: ...ity is assumed by Ideal Vacuum Products with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply inter nationall...

Страница 4: ...2019 11 Identifies information that is critical for successful application and understanding of the product Labels may be located on or inside the device to alert people that dangerous voltages may b...

Страница 5: ...fety instructions in this document Before beginning to work find out whether any vacuum com ponents are contaminated Adhere to the relevant regulations and take the necessary precautions when handling...

Страница 6: ...nd Operation 14 2 3 Electrical Conditions 15 2 3 1 Proper Equipment Grounding 16 2 3 2 Electrical Interface and Control 16 2 4 Overpressure and use with hazardous gases 17 2 5 Gases other than Nitroge...

Страница 7: ...NONLIN 6V Non Linear Analog Output Table Torr 68 7 7 NONLIN 6V Non Linear Analog Output Table mbar 72 7 8 NONLIN 9V Non Linear Analog Output Equations Table 76 7 9 LINEAR ANALOG OUTPUT 79 8 RS485 RS23...

Страница 8: ...auges maintain a sensor usually a wire at some constant tem perature and measure the current or power required to maintain that temperature A standard Pirani gauge has a useful measur ing range of abo...

Страница 9: ...tude up to 12500 m 41000 ft Housing 1 8 DIN panel mount enclosure aluminum extrusion Connections Gauge 9 pin D sub female mating connector provided as part of the gauge cable Analog output and serial...

Страница 10: ...485 Protocol ASCII Analog output Log linear 0 to 7 V dc or 1 to 8 V dc 1 V decade Linear 0 to 10 V dc Non linear S curve 0 375 to 5 659 V dc Non linear S curve 0 to 9 V dc Switching function relays tw...

Страница 11: ...V100 2019 11 Doc Ref XGC 320 100119 11 1 3 Dimensions mm inch Weight 250 g 9 oz...

Страница 12: ...ccessories Ordering No Power supply for XGC 320 P1010265 Input 100 240 V ac 50 60 Hz Output 24 V dc Cable length 2 m 6 ft The conventional IEC60320 AC power entry receptacle allows use with any user s...

Страница 13: ...of this instrument Ideal Vacuum Products disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possi ble installati...

Страница 14: ...shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moistur...

Страница 15: ...he unit has been dropped or the enclosure has been damaged Contact Ideal Vacuum Products for return authorization and instructions for returning the product to Ideal Vacuum Products for evaluation 2 3...

Страница 16: ...ood quality earth ground Use a ground lug on the XGS 321 gauge vacuum connection flange if necessary WARNING In order to protect personnel from electric shock and bodily harm shield all conductors whi...

Страница 17: ...higher pressures you should install an isolation valve or pressure relief device to pro tect the gauge tube from overpressure conditions With some fit tings actual safe overpressure conditions may be...

Страница 18: ...sed Refer to sections titled Using the gauge with different gases Display and Analog Output for a more complete discussion WARNING Do not use the convection gauge connected to this device in an explos...

Страница 19: ...an instrument control panel To mount the XGC 320 in a panel 1 Make a cutout in your instrument control panel as shown in the drawing above Be sure to allow clearance behind the panel for the instrume...

Страница 20: ...acuum system are properly grounded to protect personnel from shock and injury Be aware that some vacuum fittings especially those with O rings may not produce a good electrical connection between the...

Страница 21: ...e Phoenix p n 1803578 Pin no Pin description 1 12 28 V dc 2 Power ground Remote I O Interface Connector The 9 Pin D sub connector is used for analog output and serial communications Please note the fo...

Страница 22: ...cally con nected to pin 3 of your PC serial port 9 pin D sub con nector RS232 RX When using RS232 serial comm this pin is typically con nected to pin 3 of your PC serial port 9 pin D sub con nector 7...

Страница 23: ...69 and P1010270 are custom cable assemblies provided in different lengths from Ideal Vacuum Products for connecting the XGC 320 controller to Ideal Vacuum Products XGS 321 Pirani Gauge Enhanced or MKS...

Страница 24: ...orientation used at the factory As such it is very important to perform your own initial setup and calibration by setting zero and atmosphere with the gauge installed in your actual system Please not...

Страница 25: ...4 Torr it is always a good practice to check and set zero if necessary See SET VAC in section 4 3 Note Setting zero and atmosphere is normally required only once during the initial setup and maybe che...

Страница 26: ...parameter 4 3 Programming SET VAC When operating in units of either mbar or pascals Pa you must perform SET ATM before setting the vacuum reading SET VAC See SET ATM below Failure to do so will resul...

Страница 27: ...e is stable adjust the displayed pressure reading on the XGC 320 to the known value using the INCR increase or DECR de crease keys Press the SAVE EXIT key to save the new at mospheric span pressure va...

Страница 28: ...5 device address Assuming the address offset ADDR OFFSET is equal to 0 set ting the ADDR to a 5 will make the address be 0x05 in hexadeci mal A 15 will set the ADDR to 0x0F in hexadecimal Note that th...

Страница 29: ...0 for details a LOG 1 8 This selection provides a 1 to 8 V dc log linear analog output with 1 V decade b LOG 0 7 This selection provides a 0 to 7 V dc log linear analog output with 1 V decade c NONLIN...

Страница 30: ...on the XGC 320 and the resulting pressure calculation from the analog output do not match closely To perform this adjustment connect the gauge to the XGC 320 and connect the XGC 320 analog output to...

Страница 31: ...d will then switch to a back lit background color for the next 12 hours If you like to have the 12 hour period for the normal display mode to start at a specific time of the day simply access the SCRE...

Страница 32: ...ring pressures of gases other than N2 air For N2 the calibration shows excellent agreement between in dicated and true pressure throughout the range from 10 4 to 1000 Torr At pressures below 1 Torr th...

Страница 33: ...xplode Thermal conductivity gauges like the Ideal Vacuum Products convection gauges are not recommended for use with flammable or explosive gases Moisture water vapor In some processes lyophilization...

Страница 34: ...ts convection gauge XGS 321 and Granville Phillips Convectron gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable CAUTION Do not as...

Страница 35: ...rate gas conversion data and other proper precautions could result in injury to per sonnel and or damage to equipment Suggested precautions when using gases other than nitrogen N2 Install a pressure r...

Страница 36: ...1 0 2 0 5 1 5 3 1 7 6 14 7 29 9 72 5 143 KR 0 0 0 1 0 2 0 5 0 4 1 0 2 3 4 8 9 5 23 5 46 8 CO 2 0 0 0 1 0 2 0 5 1 1 2 3 4 4 11 0 22 2 54 9 107 O 2 0 0 0 1 0 2 0 5 1 0 2 0 5 0 9 7 19 8 49 2 97 2 He 0 0...

Страница 37: ...62 3 39 3 72 4 14 4 91 6 42 Freon 12 275 611 1 05 1 62 2 45 2 96 3 32 3 79 4 68 5 99 KR 91 1 217 400 700 1 28 1 78 2 29 2 57 2 74 3 32 CO 2 210 489 950 1 71 3 34 4 97 6 59 8 22 9 25 12 3 O 2 194 486...

Страница 38: ...7 11 1 11 4 12 0 12 7 Freon 12 6 89 7 63 8 28 8 86 9 42 9 76 9 95 10 5 11 1 KR 3 59 3 94 4 21 4 44 4 65 4 75 4 84 4 99 5 08 CO 2 16 9 22 4 28 7 36 4 46 1 53 9 59 4 79 5 111 O 2 380 485 604 730 859 94...

Страница 39: ...Torr 2 Gas used is argon Ar Display shows pressure measure ement of 600 mTorr True pressure of argon is 1 Torr 3 Gas used is oxygen O2 Display shows pressure measurement of 486 mTorr True pressure of...

Страница 40: ...Freon 12 0 0 0001 0003 0006 0020 0041 0101 0195 0398 0966 0 190 KR 0 0 0001 0003 0004 0005 0013 0031 0064 0126 0313 0 0623 CO 2 0 0 0001 0003 0006 0015 0031 0059 0146 0295 0731 0 140 O 2 0 0 0001 000...

Страница 41: ...38 2 21 3 49 4 51 4 95 5 51 6 54 8 55 Freon 12 0 360 0 810 1 39 2 15 3 26 3 94 4 42 5 05 6 23 7 98 KR 0 120 0 280 0 530 0 930 1 70 2 37 3 05 3 42 3 65 4 42 CO 2 0 270 0 650 1 26 2 27 4 45 6 62 8 78 1...

Страница 42: ...P OP OP OP OP Freon 22 10 0 11 2 12 2 13 2 14 2 14 7 15 1 16 0 16 9 Freon 12 9 18 10 1 11 0 11 8 12 5 13 0 13 2 13 9 14 7 KR 4 78 5 25 5 61 5 91 6 19 6 33 6 45 6 65 6 77 CO 2 22 5 29 8 38 2 48 5 61 4...

Страница 43: ...1 Gas used is nitrogen Display shows pressure measurement of 13 3 mbar True pressure of nitrogen is 13 3 mbar 2 Gas used is argon Display shows pressure measurement of 11 7 mbar True pressure of argo...

Страница 44: ...s 375 475 and the original 1 4 DN 275 Analog Convectron Gauge Controllers Please read this section in its entirety to de termine which one of the five analog output types to select from LOG 1 8 Log Li...

Страница 45: ...he LOG 0 7 setting selected from the ANALOG TYPE menu produces a log linear analog output signal of 0 to 7 V dc for 1 0E 4 to 1000 Torr of N2 This output shown below is a 1 Volt per decade signal that...

Страница 46: ...an S curve as shown below Selecting the NONLIN 6V setting from the Ideal Vacuum Products XGC 320 ANALOG TYPE menu duplicates the Granville Phillips Mini Convectron modules original S curve of 0 375 t...

Страница 47: ...curve as shown below Selecting the NONLIN 9V setting from the Ideal Vacuum Products XGC 320 ANALOG TYPE menu duplicates the analog outputs S Curve of the Granville Phillips Convectron gauge controller...

Страница 48: ...e selected is 1 mTorr 1 00 10 3 Torr with a corresponding minimum volt age output of 0 01 volts then maximum pressure selected to correspond to a maximum voltage output of 10 volts should not exceed 1...

Страница 49: ...176 2 491 2 881 3 167 3 476 3 860 4 155 4 439 KR 1 000 1 301 1 477 1 602 2 000 2 362 2 681 2 978 3 371 3 670 3 960 CO 2 1 000 1 301 1 699 2 041 2 362 2 643 3 041 3 346 3 740 4 029 4 322 O 2 1 000 1 3...

Страница 50: ...8 5 876 Freon 12 4 786 5 021 5 210 5 389 5 471 5 521 5 579 5 670 5 777 5 838 KR 4 336 4 602 4 845 5 107 5 250 5 360 5 410 5 438 5 521 5 555 CO 2 4 689 4 978 5 233 5 524 5 696 5 819 5 915 5 966 6 090 6...

Страница 51: ...41 8 041 8 041 8 041 8 041 8 041 D 2 8 041 8 041 8 041 8 041 8 041 8 041 8 041 8 041 Freon 22 5 925 5 964 5 998 6 029 6 045 6 057 6 079 6 104 Freon 12 5 883 5 918 5 947 5 974 5 989 5 998 6 021 6 045 K...

Страница 52: ...when using the units of pascals and LOG 1 8 is selected the same equation of P 10 V 5 listed above applies This re sults in a log linear analog output range of about 3 00 V dc at 01 pascals Pa and 10...

Страница 53: ...2 125 2 487 2 883 3 172 3 473 3 863 4 157 4 445 KR 1 000 1 301 1 699 1 668 1 970 2 370 2 675 2 979 3 372 3 671 3 963 CO 2 1 000 1 301 1 523 2 028 2 355 2 672 3 012 3 345 3 741 4 033 4 325 O 2 1 000 1...

Страница 54: ...5 877 5 950 Freon 12 4 798 5 044 5 250 5 447 5 556 5 621 5 680 5 751 5 851 5 918 KR 4 341 4 614 4 865 5 141 5 309 5 433 5 514 5 548 5 606 5 654 CO 2 4 696 4 982 5 249 5 550 5 743 5 886 6 002 6 065 6...

Страница 55: ...6 204 Freon 12 5 962 5 996 6 025 6 050 6 063 6 072 6 092 6 111 6 128 6 146 KR 5 679 5 710 5 734 5 754 5 765 5 772 5 787 5 799 5 812 5 822 CO 2 6 353 6 448 6 532 6 611 6 658 6 687 6 766 6 847 6 936 7 0...

Страница 56: ...gnal in volts An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable The chart on the following page shows the graphical results of the table and formulas given abov...

Страница 57: ...inear analog output range of about 3 00 V dc at 01 pascals Pa and 10 12 V dc at 133 kPa Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from...

Страница 58: ...176 1 491 1 881 2 167 2 476 2 860 3 155 3 439 KR 0 000 0 301 0 477 0 602 1 000 1 362 1 681 1 978 2 371 2 670 2 960 CO 2 0 000 0 301 0 699 1 041 1 362 1 643 2 041 2 346 2 740 3 029 3 322 O 2 0 000 0 3...

Страница 59: ...8 4 876 Freon 12 3 786 4 021 4 210 4 389 4 471 4 521 4 579 4 670 4 777 4 838 KR 3 336 3 602 3 845 4 107 4 250 4 360 4 410 4 438 4 521 4 555 CO 2 3 689 3 978 4 233 4 524 4 696 4 819 4 915 4 966 5 090 5...

Страница 60: ...41 7 041 7 041 7 041 7 041 7 041 D 2 7 041 7 041 7 041 7 041 7 041 7 041 7 041 7 041 Freon 22 4 925 4 964 4 998 5 029 5 045 5 057 5 079 5 104 Freon 12 4 883 4 918 4 947 4 974 4 989 4 998 5 021 5 045 K...

Страница 61: ...when using the units of pascals and LOG 0 7 is selected the same equation of P 10 V 4 listed above applies This re sults in a log linear analog output range of about 2 00 V dc at 01 pascals Pa and 9...

Страница 62: ...1 125 1 487 1 883 2 172 2 473 2 863 3 157 3 445 KR 0 000 0 301 0 699 0 668 0 970 1 370 1 675 1 979 2 372 2 671 2 963 CO 2 1 000 0 301 0 523 1 028 1 355 1 672 2 012 2 345 2 741 3 033 3 325 O 2 0 000 0...

Страница 63: ...4 877 4 950 Freon 12 3 798 4 044 4 250 4 447 4 556 4 621 4 680 4 751 4 851 4 918 KR 3 341 3 614 3 865 4 141 4 309 4 433 4 514 4 548 4 606 4 654 CO 2 3 696 3 982 4 249 4 550 4 743 4 886 5 002 5 065 5...

Страница 64: ...5 204 Freon 12 4 962 4 996 5 025 5 050 5 063 5 072 5 092 5 111 5 128 5 146 KR 4 679 4 710 4 734 4 754 4 765 4 772 4 787 4 799 4 812 4 822 CO 2 5 353 5 448 5 532 5 611 5 658 5 687 5 766 5 847 5 936 6 0...

Страница 65: ...signal in volts An analog output of 10 volts indicates a faulty convection gauge or unplugged gauge cable The chart on the following page shows the graphical results of the table and formulas given a...

Страница 66: ...ted pressures using the formulas and data for the log linear output signal for nitrogen from the previous page 7 5 NONLIN 6V Non Linear Analog Output Equations You may calculate the N2 air pressure re...

Страница 67: ...3 d 0 1151 e 0 04158 f 0 008738 For Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table Coefficients for a 0 1031 b 0 3986 c 0 02322 d 0 07438 e 0 07229 f 0 006866 For Non Li...

Страница 68: ...008738 y x Pressure 1 0E 03 Torr The equations listed above are used to calculate the non linear voltage outputs for N2 air shown in tables of section 7 6 and section 7 7 below Non linear voltage outp...

Страница 69: ...880 0 5810 0 7780 1 0090 KR 0 3750 0 3755 0 3768 0 3772 0 3790 0 3840 0 3950 0 4150 0 4510 0 5440 0 6680 CO 2 0 3750 0 3760 0 3770 0 3810 0 3850 0 3950 0 4120 0 4620 0 5360 0 7050 0 9000 O 2 0 3750 0...

Страница 70: ...2 1 3150 1 8260 2 2570 2 6470 3 0290 3 2040 3 3080 3 4300 3 6180 3 8270 KR 0 8470 1 1940 1 5360 1 9210 2 4290 2 7340 2 9660 3 0750 3 1340 3 2690 CO 2 1 1790 1 6680 2 1720 2 6950 3 3160 3 6700 3 9030 4...

Страница 71: ...0 4 3540 Freon 12 3 9380 4 0160 4 0760 4 1240 4 1660 4 1900 4 2030 4 2370 4 2700 KR 3 3840 3 4660 3 5260 3 5730 3 6130 3 6320 3 6450 3 6740 3 6900 CO 2 4 5020 4 6210 4 7080 4 7750 4 8300 4 8600 4 8770...

Страница 72: ...n modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of 10 volts indicates a faulty convection gauge or unplugged g...

Страница 73: ...6 0 378 0 382 0 388 0 401 0 437 0 488 0 581 0 778 1 009 KR 0 375 0 376 0 377 0 381 0 379 0 384 0 395 0 415 0 451 0 544 0 668 CO 2 0 375 0 376 0 377 0 381 0 385 0 395 0 412 0 462 0 536 0 705 0 9 O 2 0...

Страница 74: ...3 3 414 3 509 3 66 3 883 Freon 12 1 315 1 826 2 257 2 647 3 029 3 204 3 308 3 43 3 618 3 827 KR 0 847 1 194 1 536 1 921 2 429 2 735 2 966 3 075 3 134 3 269 CO 2 1 179 1 668 2 172 2 695 3 316 3 67 3 90...

Страница 75: ...88 4 151 4 203 4 247 4 271 4 286 4 321 4 354 Freon 12 3 938 4 016 4 076 4 124 4 166 4 19 4 203 4 237 4 270 KR 3 384 3 466 3 526 3 573 3 613 3 632 3 645 3 674 3 69 CO 2 4 502 4 621 4 708 4 775 4 83 4 8...

Страница 76: ...ate the N2 air pressure represented by the NONLIN 9V 0 to 9 V non linear analog output voltage for the S curve using a multi segment nth order polynomial function calculation Use the coefficients list...

Страница 77: ...495931E 02 K2 K2 2 652588E 05 K3 K3 4 526774E 09 Coefficients for voltage segment range of 6 54785 to 7 3828 volts K0 K0 7 184400E 03 K1 K1 7 117083E 00 K2 K2 2 354167E 03 K3 K3 2 604167E 07 Coefficie...

Страница 78: ...voltage is V1 5 6243 V Since analog output in this example is 5 6243 V use the Coefficients from the fourth table shown in the previous page K0 3 777930E 01 K1 5 495931E 02 K2 2 652588E 05 K3 4 526774...

Страница 79: ...1531 9 0E 02 8 9193 1 0E 02 0 1385 5 0E 01 7 6145 1 0E 03 9 0000 2 0E 02 0 2536 1 0E 02 7 7804 5 0E 02 0 5260 2 0E 02 7 9102 1 0E 01 0 8583 3 0E 02 8 0743 An analog output of 10 volts indicates a fau...

Страница 80: ...00E 00 It is recommended that the Linear output signal be setup such that the range covers at most 3 decades of pressure change For example if the minimum pressure selected is 1 mtorr 1 00E 03 torr wi...

Страница 81: ...ront panel push but tons 3 The parity can be changed only through the serial interface command set and the number of data bits will change ac cording to the parity selected 4 The stop bit is always 1...

Страница 82: ...00E 02 CR eg 01SH 5 00E 02 CR xxRLz CR eg 01RL CR eg 01RL CR BRIEF DESCRIPTION Read the current pressure in Torr Set the communications RS485 address offset upper nibble and Address 1 Set the span or...

Страница 83: ...R eg 01SPO CR BRIEF DESCRIPTION Read the turns on below pressure point for relay 2 and read the turns off above pressure point for relay 2 Read the revision number of the firmware Force unit to return...

Страница 84: ...ol was designed to be 100 compatible with the Granville Phillips Mini Convectron 2 Commands marked with a 2 under the BRIEF DESCRIPTION column will not take effect until after ADDR OFFSET ADDRESS comm...

Страница 85: ...minimum operating pressure is higher than 1 00 10 3 Torr it is not nor mally necessary to perform calibration at zero and thus span calibration should be adequate If you are able to evacuate your syst...

Страница 86: ...for possible cleaning Ensure gauge is not mounted where excessive vibration is present Return the XGS 321 to factory for possible cleaning Replace the XGS 321 continued Possible Cause No power The pro...

Страница 87: ...ace the XGS 321 Return the XGS 321 to factory for possible cleaning Possible Cause Incorrect setup Sensor wire damaged System pressure over 1000 Torr Faulty electronics Contamination Sensor wire damag...

Страница 88: ...the module for diagnosis please contact us during normal business hours 8 00 am to 5 00 pm Mountain time Monday through Friday at 505 872 0037 Or e mail us at info idealvac com 11 Storage Electronic c...

Страница 89: ...ing fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate it...

Страница 90: ...n hazard ous substances in electrical and electronic equipment Vacuum Gauge Controller XGC 320 Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC gener...

Страница 91: ...V100 2019 11 Doc Ref XGC 320 100119 91 Notes...

Страница 92: ...New Mexico 87109 Phone 505 872 0037 Fax 505 872 9001 Original English info idealvac com www idealvac com...

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