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9
3-1-2 Inspection criteria
z
Positional relationship between chart and mask
1.
When a vertical line mask is used:
No right and left parts of the chart must be visible (when viewed from the correct position).
(Chart symbols must virtually align with the center of the mask.)
C
C
C
0.2
0.4
0.3
No adjoining parts of the
chart must be visible.
< Fig E4 >
2.
When a horizontal line mask is used:
No upper and lower parts of the chart must be visible (when viewed from the correct position).
(Chart symbols must virtually align with the center of the mask.)
3.
When a single isolation mask is used:
Only a single symbol must be visible with any other part of the chart staying invisible (when viewed from
the correct position).
(Chart symbol must virtually align with the center of the mask.)
4.
When a red & green mask is used:
Boundary between the red and green parts of the mask must look straight with no tilt (when viewed from
the correct position).
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