6
6. How to use
1)
Connect a gas line in the arrow direction given on the main body.
2)
Make electrical connection in accordance with the Connector Pin Connections List. For
the DC power, use the following capacity:
+15V , 50mA and –15V , 200mA or more
3)
After turning on the power, stop the gas and warm up the apparatus for about 5 minutes.
4)
Start a gas supply a set voltage. Flow rate control will start according to the set voltage.
5)
The set voltage to obtain a required flow rate value can be calculated by linear
conversion.
Required flow rate
Set voltage =
×
5.000V
Full-scale flow rate
6)
Forced full opening(purging) / closing of the SEC-E400X main body control valve: The
valve is fully opened by connecting the supply voltage of +15V to the No.1 pin(valve
opening / closing input) of the main body connector, and fully closed by connecting the
supply voltage of –15V.
※
In the normal state, open the No.1 pin(nothing connected).
Otherwise, flow rate control may fail if a certain signal is input.
7)
Full closing function
The control valve of the SEC-E400X is fully closed by setting the voltage to 0(50mV or
less). Control is resumed by applying the set voltage of 200mV or more.
※
An input from the No.1 pin has the highest priority.
8) Valve Test Point ( Valve Voltage Monitor)
The voltage applied to the control valve of the mass flow controller is output to between
the No.8 and No.5 pins of the connectors. Note that the minus(-) side of the valve voltage
monitor has the potential of –15V with respect to the power COMMON terminal.
An output voltage range is 0V(fully closed) to +15V(fully opened).
If the No.8 pin is monitored, referencing the power COMMON terminal, the difference
b15V and the valve applied voltage will be output in terms of negative polarity.
An output voltage range is –15V(fully closed) to 0V(fully opened).
Since this voltage differs depending on the pressure or temperature used, monitor it as
just a guideline. A monitor output is not linear to a flow rate since the control valve has
hysterisis characteristics.
The voltage does not show an absolute amount. Assume that 0 to 15V correspond to 0 to
100% of the voltage applied to the control valve.
Note: Description 4) to 8) are not applied to SEF-E431X/E441X.
Valve Test Point
8
−
15V
5
4
Power COMMON
Control Valve
Valve Voltage Monitor
(+)
(-)
-15V Valve
Applied Voltage
