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horiba SEC-E431X, Инструкция по эксплуатации

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MASS FLOW CONTROLLER 
MASS FLOW METER 
SEC/SEF-E431X/E441X  (PTFE TYPE) 

 

Instruction Manual 

CODE: I031150800 

 

Содержание SEC-E431X

Страница 1: ...MASS FLOW CONTROLLER MASS FLOW METER SEC SEF E431X E441X PTFE TYPE Instruction Manual CODE I031150800...

Страница 2: ...Jun 2012 2007 2012 HORIBA STEC Co Ltd...

Страница 3: ...CATIONS 3 PRINCIPLE OF FUNCTIONING 4 EXTERNAL DIMENSIONS 5 CONNECTOR 6 HOW TO USE 7 CONNECTIONS 8 PRECAUTIONS FOR HANDLING 9 PRODUCT WARRANTY 10 CHEMICAL CONTENT INFORMATION THE SIX CHINA RoHS RESTRIC...

Страница 4: ...0 kPa G Pressure resistance 6 1000 kPa G Leak integrity 8 1 10 9 Pa m3 sec He or less Setting signal 0 25 5V DC Input impedance 1 M or more Output signal 0 5V DC Minimum load resistance 2k Power sourc...

Страница 5: ...uracy linearity and repeatability are guaranteed for the calibration gas 4 Temperature for accuracy guarantee is in accordance with SEMI standard E56 1296 5 D indicates differential pressure G indicat...

Страница 6: ...4 4 External Dimensions SEC SEF E431X E441X Top Connector Type Side Connector Type...

Страница 7: ...est point 1 3 9 N C 4 1 N C no connection for SEF E431X E441X 2 In order to prevent COMMON voltage fluctuations due to a valve drive current the power COMMON terminal Pin No 4 and signal COMMON termin...

Страница 8: ...by setting the voltage to 0 50mV or less Control is resumed by applying the set voltage of 200mV or more An input from the No 1 pin has the highest priority 8 Valve Test Point Valve Voltage Monitor Th...

Страница 9: ...ired A control valve driving current max 200mA flows to the power COMMON line In order to prevent a voltage drop due to wiring be sure to wire the power COMMON line and signal COMMON line separately a...

Страница 10: ...trouble 8 Do not apply an excessive force to the main body or cable 9 Do not apply an excessive pressure to the main body 10 The withstand voltage for the set input is 15V Never apply a voltage beyond...

Страница 11: ...from the irresistible forces such as natural disasters and so on Troubles resulting from wrong handling When the apparatus is used or stored in an inadequate environment When the apparatus is used be...

Страница 12: ...ine parts SJ T11363 2006 Denotes that the amount of the toxic or hazardous substance contained in all of the homogeneous materials used in the component is below the limit on the acceptable amount sti...

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