Chapter 1. Introduction
EQ-77X LDLS® Operation Manual
5
of
31
Chapter 1. Introduction
The EQ-77X
Laser-Driven Light Source (LDLS®) is a broadband lamp system for use in a wide variety of applications.
The lamp produces high brightness, broadband light from DUV wavelengths through visible and beyond. The output is
very stable, and has a long lifetime before any service is required. A simple control interface ensures ease of use.
Some of the advantages of the EQ-77X
system include:
The EQ-77X
system consists of a power supply controller unit, lamp head unit, and interconnecting cable. Connection
to AC power is required for operation. Connection to cooling fluid is required. Connection to nitrogen purge gas is
strongly recommended for best performance.
For additional information, contact Energetiq
Technology Technical Support Services at +1-781-939-0763 x111 or
email:
.
•
◦
Very high brightness across complete spectrum
190nm through visible and beyond
•
◦
Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
Simplified optical system
•
◦
Excellent spatial stability
Repeatable measurements
•
◦
Superior short and long term power stability
Repeatable measurements
•
◦
◦
Electrodeless operation for long life
Reduced consumable costs
Minimal recalibration of instrument
