
5
Contents
Table of Contents
Software Usage Agreement ...........................................................................
Symbols Used in This Manual .......................................................................
Screen Images Used in This Manual .............................................................
1. Introduction to the Controller
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Nomenclature (Main Screen) .........................................................................
2. Setting Tool Conditions [CONDITION]
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Advanced Control of Tool Behavior ..............................................................
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5. Setting Area Parameters [AREA]
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Settings in the [Registration Mark Settings] Screen ....................................
Settings in the [ARMS Setting] Screen ........................................................
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Nomenclature (Main Screen: Simple mode) ................................................
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