10
APPENDIX A - SPECIFICATIONS
A.1. MEMS Tilt Sensor
Model: 6160
6161
Range:
15°
Full Scale Output:
+/- 4 Volts
Frequency Response:
-3db @ 8-28 Hz
Resolution:
1
+/-4 arc seconds, (+/- 0.01mm/m)
Accuracy:
2
+/- 10 arc seconds
Linearity:
3
+/- 0.07%FS
Thermal Zero Shift:
0.0003 volt/
C rise
Operating Temperature
-20 to +80° C
-4 to 176° F
Power Requirements
4
:
Uniaxial: +12V (nom) @ 30mA
Biaxial: +12V (nom) @ 45mA
Diameter/Width: 1.250", 32 mm
Length/Height: 7.375", 187 mm
Depth
Weight: 1.5 lbs., 0.7 kg.
Materials: 304 Stainless Steel
Electrical Cable:
3 twisted pair (6 conductor) 24 AWG
Foil shield, Polyurethane jacket, nominal OD = 6.3 mm
Or
6 twisted pair (12 conductor) 24 AWG
Foil shield, Polyurethane jacket, nominal OD = 7.9 mm
Table A-1 Model 6160 and 6161 Tilt Sensor Specifications
Notes:
1
Depends on readout equipment.
For best results requires a 4 ½ digit digital voltmeter.
Averaging will yield resolution on the order of 2 arc seconds
2
Based upon the use of a second order polynomial
3
The output of the MEMS sensor is proportional to the sine of the angle of tilt
4
Voltages in excess of 18V will damage the circuitry and are to be avoided
A.2. Thermistor (see Appendix B also)
Range: -80 to +150° C
Accuracy: ±0.5° C
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