Gamma Vacuum Digitel MPC 635941 Скачать руководство пользователя страница 52 | Manualshive

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IV. Service

If the DIGITEL™ Multiple Pump Control (MPC) fails to perform specified functions, either
seek the services of qualified personnel or contact customer service as follows:

By mail:

Gamma Vacuum, LLC

12912 Ventura Court No. 28

Shakopee, MN 55379

USA

By e-mail:

[email protected]

By telephone:

1-952-445-7597

By fax:

1-952-445-7615

WARNING: Performing any service tasks other than those described in this section without
the assistance of Gamma Vacuum, LLC Customer Service could result in serious injury, could
damage equipment, and may nullify applicable equipment warranties.

WARNING: Service procedures are for use by qualified and authorized personnel who have
experience working with voltages greater than 50 volts. To avoid personal injury, do not
perform any installation or service procedures unless qualified to do so.

WARNING: Voltages up to 7000V are present. An interlock is provided to shut off power
when the cover is removed. Do not defeat this interlock.

Digitel MPC Manual

Page 52 of 72

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Содержание Digitel MPC 635941

Страница 1: ...Digitel MPC Technician s Manual Part Number 500000 Revision J Gamma Vacuum LLC Copyright 2003 Gamma Vacuum LLC 12912 Ventura Court No 28 Shakopee MN 55379 USA...

Страница 2: ...Control Option 11 Required Items 12 Procedure 12 SAFE CONN Installation on an Ion Pump 13 Required Items 13 Procedure 13 III Operation 15 Front Panel Description 15 Rear Panel Description 17 Operating...

Страница 3: ...57 PROM Change Procedure 58 Rear Panel Connector Pinouts 60 Connector J104 Set Point and Analog Output Signals 60 Connector J505 Remote TSP NEG Control Signals 61 Connector J112 Serial Interface Sign...

Страница 4: ...4 Keypad 20 Figure III 5 Menu key 20 Figure III 6 Program Mode Select keys 21 Figure III 7 Setting pump size 31 Figure III 8 Reaching PREFRENCES Submenu 31 Figure III 9 Reaching the Configuration Sub...

Страница 5: ...ion 48 Table III 9 RS 232 422 485 Commands PHI Standard Serial Interface 49 Table III 10 CRC Checksum Calculation 51 Table IV 1 MPC Component Parts List 54 Table IV 2 Routine Maintenance Schedule 55 T...

Страница 6: ...vides direct readout of the ion pump voltage current or pressure Ranging is automatic within the selected display mode Figure I 1 Photograph of the Digitel MPC MPC Configurations The DIGITEL MPC comes...

Страница 7: ...tional protection from possible shock hazard AUTORUN AUTORUN determines optimum starting and operating conditions based the pump size entered and then starts and monitors the pump down without assista...

Страница 8: ...ontrol Option High Voltage TSP Filament Interlock Option The remote interlock allows disabling of either the high voltage outputs or TSP filament firing The interlock is installed at J506 on the back...

Страница 9: ...P parameters are measured at least every 320 milliseconds Assuming a set point decision is handled right after measurement is made response time is 320 milliseconds Assuming a set point decision is ma...

Страница 10: ...isconnecting electrical equipment Do not operate the control without a proper electrical ground or near water The control may be damaged and its safety reduced if it is operated outside of its specifi...

Страница 11: ...l connector is part of the HV connector Connect it to the appropriate SAFE CONN jack See Figure II 1 and Table II 1 5 Verify correct input voltage requirements Connect the AC input power cable to inpu...

Страница 12: ...2 Remote TSP NEG Control unit 3 high current cable 4 AC input power cable Procedure 1 Mount the Remote TSP NEG Control unit using the holes provided on the mounting bracket see Figure II 3 2 Turn off...

Страница 13: ...2 Tools 2 1 two flat head screwdrivers 2 2 an SS installation tool and a plastic cylinder Procedure 1 Place SS ring 1 on the 10 kV HVFT Figure II 5 2 Install the PEEK cylinder over the 10 kV HVFT with...

Страница 14: ...nt steady pressure on the SS ring while keeping the installation tool SS ring and plastic cylinder assembly together 4 3 Raise the assembly to the HVFT and with a light tap on the plastic cylinder sli...

Страница 15: ...escription in a table format of the status messages that can appear on the display Analog Outputs describes the monitor outputs for voltage and current Serial Interface provides detailed information c...

Страница 16: ...pad operation press 1 four times in succession 3 6 9 or key selects one of the following four program modes Set Points During normal mode press 3 to select the Set Points program mode The Set Points s...

Страница 17: ...Unused 2 500 mA 28V max NC 29 GND2 3 NO 30 Analog HV Supply 1 Output 4 Set Point 2 Relay Common 31 GND2 5 500 mA 28V max NC 32 Analog Current Output 1 6 NO 33 GND2 7 Set Point 3 Relay Common 34 Analog...

Страница 18: ...to UHV to improve system ultimate pressure and to give the most accurate readings To Evacuate the Pump Before you run an ion pump it must be evacuated to a minimum vacuum of 1 x 10 3 Torr Details are...

Страница 19: ...displays show either voltage current or pressure Press the Display Select key Figure III 3 next to each supply to cycle through these choices Voltage is the default upon power up but you can change i...

Страница 20: ...ure III 4 Keypad The Menu key Figure III 5 and Table III 3 which is the blank key is a hierarchical system for setting unit parameters and preferences Refer to section 3 Menu Key page 29 for informati...

Страница 21: ...The High Voltage Operate section page 24 following this table provides detailed information on this key Press the key to select TSP Press to select TSP following this table provides detailed informati...

Страница 22: ...the options DISABLED SUPPLY 1 SUPPLY 2 BAKE S1 and BAKE S2 SPT Supply 1 2 3 4 5 6 7 8 Set Point Set Point DISABLED Supply 1 Supply 2 4 When you reach the desired option press ENTER 5 The next paramet...

Страница 23: ...ld monitor BAKE S1 supply 1 or BAKE S2 supply 2 and the on off pressure values For more information refer to Set Points Procedure 1 Press Bake the 6 key 2 Press the lower Supply 2 Display Select key t...

Страница 24: ...ress the Display Select key to toggle to DISABLE 3 press ENTER and press ENTER again to confirm High Voltage Operate If the MPC is in manual restart High Voltage Operate the 9 key allows you to enable...

Страница 25: ...ng this operating mode it could blow a fuse in the Remote TSP NEG Control unit ALL STOP OFF mode turns the TSP off It is the default operating mode when the MPC powers up DEGAS DEGAS is a maintenance...

Страница 26: ...n the TIMED mode when the ion pump pressure is above this value IF PRESS 1 2 3 4 5 6 7 8 Set Point Set Point 0 1E 09 Supply 1 Supply 2 Display Select Display Select Number flashes 6 Press ENTER to ena...

Страница 27: ...enable degassing ATTENTION Degas pressure should be less than 1 x 10 2 Torr While in degas mode the display shows which filament is degassing and at what value When DEGAS is complete the display retu...

Страница 28: ...s the on firing time of a filament for TIMED and DEGAS operating modes For example if you specify 30 sec ON TIME in TIMED mode then the TSP operates for 30 sec before it shuts off TSP SETUP 1 2 3 4 5...

Страница 29: ...o 75 amps 0 to 500 watts 4 Press ENTER to save your changes AUTO ADVNC AUTO ADVNC when set to YES automatically switches to the next filament if an open filament is detected TSP SETUP 1 2 3 4 5 6 7 8...

Страница 30: ...ial address to use for the Physical Electronics Serial Communications Protocol Default is 5 BAUD RATE Baud rate of 9600 is available SET CLOCK Allows you to set the time and date of the real time cloc...

Страница 31: ...TSP Menu Display Select Display Select 2 Press ENTER 3 Use backspace key to overwrite and enter pump size using numerical keys 4 Press ENTER to save PUMP 2 SIZE Supply 1 Display Select 5 Press MENU t...

Страница 32: ...e your selection PUMP DSPLY DFAULT VAL You can specify the default display in voltage current or pressure for Supply 1 and Supply 2 displays 1 Press the Menu key to cycle through the menu until you re...

Страница 33: ...ching the Configuration Submenu FAN ON OFF Use the following procedure to set the fan to off or full speed If you set the fan to off the next pump start up sequence turns it back on If the pump draws...

Страница 34: ...ENTER to step to the submenu and press the Menu key to cycle to SERIAL ADR 3 Press ENTER The bottom display shows the current address followed by a flashing sign to indicate that you may key in a new...

Страница 35: ...ash the battery status 3 Press ENTER The bottom display shows the hour setting followed by a flashing sign to indicate that you may enter the desired hour 0 23 using the backspace and numerical keys 4...

Страница 36: ...between 0 00 and 9 99 Use the following procedure 1 Press the Menu key to cycle through the menu until you reach CONFIG 2 Press ENTER to step to the submenu and press the Menu key to cycle to PUMP 1...

Страница 37: ...4 An arrow points to the bottom Display Select key to show it is active Press it to toggle between 120 and 240 PRM FACTOR 1 2 3 4 5 6 7 8 Set Point Set Point 120 Supply 1 Supply 2 Display Select Disp...

Страница 38: ...EY CALIBRATION RST DFLTS LINE FREQ REVISION Supply 1 Display Select 1 Press MENU until you reach DIAGNOSTCS Top menu Sub menu Figure III 10 Reaching the DIAGNOSTCS Submenu REVISION The first diagnosti...

Страница 39: ...cool down the code will be 05 06 or 07 to let you know the reason for cool down 05 Pump power Cool down was entered because pump power exceeded a safe value 06 Supply current Cool down was entered bec...

Страница 40: ...in test EVEN LEDs 9 Press ESC to return to the DISPLY KEY submenu Press ESC again to step up to DIAGNOSTICS CALIBRATION For the calibration procedure remove the HV cables from the rear panel of the DI...

Страница 41: ...the set point option High voltage is shut off SAFE CONN The SAFE CON cable is not connected properly COOL DOWN The DIGITEL MPC has entered cool down mode As long as it is in cool down this message rem...

Страница 42: ...is month dd is day yy is year that the event occurred hh mm ss hh is hour mm is minute ss is second that the event occurred 3 nnnn V nnnn is the high voltage when the event occurred n nn ee A current...

Страница 43: ...mputer allows selection of eight output modes via the front panel keypad PREFERENCES menu or through serial port commands Jumpers on the internal CPU board assembly allow selecting positive or negativ...

Страница 44: ...e allowing multiple devices to be connected to the same serial port on a computer The standard does not set up or address any software protocols A carefully planned protocol for use between the remote...

Страница 45: ...Table IV 8 page 61 protruding from the chassis rear RS 485 allows communications over greater distances but most personal computers are equipped with 9 or 25 pin RS 232 serial connectors RS 485 cable...

Страница 46: ...signer to keep practicality in mind when determining these fields A data field is not required for all commands SPACE 5 CHECKSUM 2 hex characters Computed checksum of packet The calculated checksum mu...

Страница 47: ...that the last command was successful it sends a command to the unit requesting status feedback Response packet The response packet is made up of at least five fields and contains information to let th...

Страница 48: ...s needed ASCII printable characters only Data field s are used to respond to commands requesting data For example a command requesting the current voltage setting in a unit would have the reading plac...

Страница 49: ...is 0 00 9 99 1E SET CAL FACTOR Sets calibration factor Parameters 1 n nn or 2 n nn n nn is 0 00 9 99 20 GET HV STRAPPING Reads the supplies high voltage strapping Parameters 1 or 21 Response 5600 or 7...

Страница 50: ...pply 2 3 bake supply 1 and 4 bake supply 2 X XE XX on pressure Y YE YY off pressure 3E SETUP BAKE Arms the bake Parameters hhh HH MM hhh is bake duration 0 255 hours HH MM is the start time in hours a...

Страница 51: ...of the response 3 Add all values in Table III 10 to get 4DCh1 4 Divide by 100h 256d 4DCh 100h 4h with a remainder of DCh 5 The remainder DCh is the CRC Table III 10 CRC Checksum Calculation Response...

Страница 52: ...in this section without the assistance of Gamma Vacuum LLC Customer Service could result in serious injury could damage equipment and may nullify applicable equipment warranties WARNING Service proce...

Страница 53: ...ircuit boards may be destroyed by a small static discharge To avoid damaging the boards use the following precautions Handle boards at approved ESD workstation Do not touch any electrical contacts Do...

Страница 54: ...HV Board 635465 Fan Filter 622775 Cable Assemblies Part Number Fan 635932 SAFECONN to CPU 636051 AC Power Board 640690 CPU to HV Board 636052 Fuses see Table IV 3 AC Power to Display and CPU 636053 In...

Страница 55: ...45 kPa 50 psi maximum 4 Clean all high voltage wiring and connections they are susceptible to arcing 5 Inspect the HV insulation for cracks If you find any contact your service representative Cleaning...

Страница 56: ...cover for F1 through F4 is p n 638170 Input and Output Voltage Selection Use the following Input Voltage Selection Procedure to change input voltage to 115 or 230 VAC The voltage shown on the rear pan...

Страница 57: ...Output Voltage Selection Procedure 1 Disconnect power and remove the top cover 2 Move the spade lug jumper Figure IV 3 located on the secondary tap of the high voltage transformer to appropriate conne...

Страница 58: ...te CR1 180 and shift it to the next series of holes so that CR1 exposes the desired polarity 7 Re solder CR1 at the desired location 8 Next unsolder the two polarity jumpers on the bottom center of th...

Страница 59: ...top cover 4 Disconnect any cables connected to the CPU board and remove the CPU board from its slot 5 Remove the old PROM NOTE Each PROM contains a label indicating its revision level Do not use this...

Страница 60: ...t signals and 4 voltage current analog output signals Table IV 6 Connector J104 Pinouts Pin Setpoint Signal Pin Analog Output Signal 1 Set Point 1 Relay Common 20 28 Unused 2 NC 29 GND2 3 NO 30 Analog...

Страница 61: ...ot Used 3 K4 Coil 8 15V Return 13 Current XFMR 4 15V to TSP 9 Current XFMR 14 Sync Signal GND 5 Voltage Sense 10 Sync Signal from TSP 15 K1 Coil Connector J112 Serial Interface Signals J112 SER INTFC...

Страница 62: ...the MPC RS 232 Operation RS 485 Operation RS 422 Operation and PHI Operation Set DIP switches SW1 and SW2 on the CPU board Figure IV 7 to select a serial interface Table IV 9 shows the DIP switch sett...

Страница 63: ...2 J112 SER INTFC Close 1 2 and 4 Signal Pin No Signal Pin No Open all others Open all TX 2 RX 3 For terminator close 7 TX 8 RX 7 GND 5 RS 422 SW1 SW2 J112 SER INTFC Close 1 3 and 4 Close 1 and 2 Signa...

Страница 64: ...s before servicing Figure IV 8 Remote TSP NEG Control Location of Components Removing the Panels of the Remote TSP NEG Control The Remote TSP NEG Control has a top panel and two end panels 1 Remove th...

Страница 65: ...ect it to appropriate voltage 3 1 For 120 VAC connect to J4 3 2 For 240 VAC connect to J5 4 Replace the panel and install the appropriate power cord Connecting a High Current Cable to the Remote TSP N...

Страница 66: ...th 2 Million Series and older Pumps 1001514 10 bakeable 200 ion pump HV cable 1000438 15 bakeable 200 ion pump HV cable 1001515 20 bakeable 200 ion pump HV cable 1001516 30 bakeable 200 ion pump HV ca...

Страница 67: ...card drawing followed by parts lists 4 641458 HV 100 mA circuit card drawing followed by parts lists 5 641459 HV 500 mA circuit card drawing followed by parts lists 6 635464 High Voltage PCB drawing 7...

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