15-3
15
15.1 Sub-tank Section
Removal
1. Shut down the system by performing the post-
operational checks and turn OFF the built-in
circuit breaker and the main power supply.
2. Open the replenisher box door.
3. Open the water supply port door.
4. Remove the circulation filter tray.
5. Loosen the screw and remove the water supply
port inner cover.
6. Remove the processing solution cooling air filter
holder.
7. Remove the screw and then the splash-prevention
cover.
8. Remove the five screws and then the processor
front cover.
Reinstallation
Reinstallation is essentially in the reverse order of
removal.
Removal
1. Remove the processor front cover
.
2. Loosen the two screws and remove the upper
connector cover.
Reinstallation
Reinstallation is essentially in the reverse order of
removal.
15.1.1
Processor Front Cover Removal/Reinstallation
LII324
Replenisher Box Door
Water Supply Port Doo
Circulation Filter Tray
Water Supply Port Inner Cover
LII325
Processing Solution Cooling
Air Filter Holder
Splash-prevention Cover
Screws (5)
Processor Front Cover
Screws
15.1.2
Upper Connector Cover Removal/Reinstallation
LII643
Screws (2)
Upper Connector Cover