NOWPAK LINER-BASED CANISTER SYSTEM
5
User Manual | Entegris, Inc.
SECTION 4: CANISTER SYSTEM COMPONENTS
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This section of the guide provides a description of the
main components used in the NOWPak liner-based
canister system.
A complete liner-based canister system, Figure 2,
consists of a filled canister with an installed
cleanroom-manufactured liner, diptube, retainer,
and closure. At the point of use, the closure cap is
removed and an Entegris chemical dispense
connector is attached to the canister for
chemical dispensing.
One-piece plastic
closure (only used on
20-liter canisters)
Aluminum
closure cap
Closure base (with
breakseal installed
inside)
Fitment adapter
(only used on
200-liter canisters)
Retainer
Overpack (stainless
steel canister)
Liner
Diptube
Figure 2. Stainless steel canister with installed components
(cutaway view).
During chemical dispense, gas pressure from the user’s
system is applied through the dispense connector to
the outside of the liner. The gas pressure squeezes the
liner, forcing chemicals up through the diptube to the
dispense connector. As the chemicals is dispensed, the
liner collapses.
Once the canister is empty, the end user sends it back
to the chemical supplier who removes the old liner,
refurbishes, and refills the canister.
NOTE: See Appendix A: Required Tools, page 28, for
descriptions and item numbers of specialized tools
needed to handle canister system components and
to refurbish empty canisters.
NOTE: See Appendix B: Canister Compatibility Matrix, page
32, for item numbers and descriptions of canister compo-
nents, replacement parts, and for additional accessories
that can be purchased for use with the canister system.
LINER-BASED CANISTERS
The stainless-steel canisters are available in the
following sizes:
• 4-liters
• 10-liters
• 18-liters
• 19-liters
• 20-liters
• 40-liters
• 200-liters
NOTE: See Appendix B: Canister Compatibility Matrix,
page 32, for canister model numbers and item numbers
of the components to be used with each canister.
NOTE: Each canister size requires the use of a specific liner,
diptube, and closure. All 4- to 40-liter canisters have a 2.5”
diameter neck opening and 200-liter canisters have a 4.75”
diameter neck opening. Some canister sizes have different
thread sizes than others. Be sure to use the correct
components for each canister size and type.
REPLACEMENT LINERS
The chemical inside the canister is contained within
a pre cleaned, single-use, collapsible liner, Figure 3,
which the chemical supplier installs and inflates inside
the canister. The liner is sealed in the canister using a
retainer and a closure.
Different liner materials are available for a wide range
of chemicals and are available as particle certified.
Particle certified liners are manufactured and packaged
within a Class 5 cleanroom as per International Standard
ISO 14644-1:1999 cleanrooms and associated controlled
environments – Part 1: classification of air cleanliness.
A certificate of analysis stating lot specific particle count
data can be obtained from a web-based database.
Replacement liners for 200-liter canisters include the
fitment adapter needed to reduce the fitment opening
for diptube insertion. Each liner is pre folded and
sealed within a plastic sleeve along with a retainer.
The liners, retainers, and fitment adapters (200-liter
only) are packaged in equal quantities.
