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Model EQ-99X

LDLS

™

Laser-Driven Light Source

Operation and Maintenance Manual

Revision 2 September 30, 2015

Part Number DOC-6521

Содержание EQ-99X LDLS

Страница 1: ...Model EQ 99X LDLS Laser Driven Light Source Operation and Maintenance Manual Revision 2 September 30 2015 Part Number DOC 6521...

Страница 2: ...specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to...

Страница 3: ...charge Immunity IEC61000 4 3 2010 Radiated Electromagnetic Field Immunity IEC61000 4 4 2012 Electrical Fast Transient Burst Immunity IEC61000 4 6 2008 Radio Frequency Common Mode Immunity IEC61000 4 8...

Страница 4: ......

Страница 5: ...ower Supply Controller 12 Lamp House 13 Chapter 3 16 Installation 16 Unpacking 16 Connections 16 Installation Procedure 22 Water Cooling Installation for EQ 99 CAL 23 Chapter 4 25 Operation 25 Startin...

Страница 6: ......

Страница 7: ...perating source should wear protective eyewear clothing and gloves Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure This unit emits ultraviolet UV...

Страница 8: ...ly and connected to a socket with a protective earth ground prior to operation Refer to the Installation section of this manual in Chapter 3 for details of the facilities connections Other than a bulb...

Страница 9: ...S Patent 7435982 7786455 7989786 others pending laser drive system to excite a plasma that radiates in the UV as well as the visible bands A class 4 laser is located in the Power Supply Controller en...

Страница 10: ...mRad Transverse Beam Mode Diffuse Table 1 Embedded Laser Parameters No regular service is required for the EQ 99X Any service to the system must be performed only by factory authorized and trained tec...

Страница 11: ...anufacturer s identification label gives the manufacturer s name and address and the model serial number and date of manufacture of the equipment Explanatory label states the classification of the las...

Страница 12: ...rlock External interlock pins are provided for the customer s use see Chapter 3 for connection details Any suitable normally open contact or solid state switch can operate the interlock circuit The in...

Страница 13: ...EQ 99X Operation Manual Rev 2 7...

Страница 14: ...oss complete spectrum 170nm through visible and beyond Eliminates need for multiple lamps replaces D2 Tungsten Xenon Arc Simplified optical system Excellent spatial stability Repeatable measurements S...

Страница 15: ...trum Physical Specifications Dimensions H x W x D Lamp House 82 x 86 x 76 mm 3 2 x 3 4 x 3 0 in Power Supply Controller 113 x 111 x 299 mm 4 4 x 4 4 x 11 8 in Weight Lamp House 0 7 kg 1 5 lbs Power Su...

Страница 16: ...s Type Open collector to ground digital common Logic Active Low Voltage 30VDC max Sink current 30mA max User Power Voltage 5VDC referenced to digital common Current 50mA maximum Environmental Requirem...

Страница 17: ...d by the user The following sections provide descriptions of the system components and controls and gives an overview of their functions Refer to the Installation section of this manual Chapter 3 for...

Страница 18: ...connected to the EQ 99X Power Supply Controller LAMP ON UV Light is on LASER ON Laser power is ON and laser light is being delivered to the Lamp House CONTROLLER FAULT One of the following has occurr...

Страница 19: ...Signal Connector mini D sub 9 pin Provides various power and control signals to from the Lamp House module No other connector or cable may be used with the EQ 99X other than the one supplied Armored L...

Страница 20: ...p Window The lamp window at the optical output provides protection from the high pressure bulb inside the Lamp House An internally threaded SM1 adapter is provided for easy connection of optical hardw...

Страница 21: ...ing for the purge nitrogen The purge flow normally escapes within the Lamp House enclosure and then to atmosphere Laser Input This is the inlet connector for the armored fiber from the Power Supply Co...

Страница 22: ...care when unpacking to avoid damaging the armored fiber optic cable If any part is missing or appears damaged contact Energetiq immediately Do not attempt to substitute any parts There are no user ser...

Страница 23: ...ype sized for 4 mm tubing Clean and dry nitrogen from either a dewar or research grade N2 bottle is recommended Do not use any other purge gas Grade 6 or better gas purity is recommended to maintain c...

Страница 24: ...18 EQ 99X Operation Manual Rev 2 Figure 5 Lamp House mechanical layout...

Страница 25: ...EQ 99X Operation Manual Rev 2 19 Figure 6 Power Supply Controller mechanical layout...

Страница 26: ...shows connection schematics for both configurations Description Pin Details Commands Inputs LAMP OPERATE 12 OPERATE REQUEST apply 5V referenced to digital common to initiate ignition EXTERNAL INTERLOC...

Страница 27: ...9 Pin 5 499 Pins 11 12 13 Pins 6 7 8 9 499 0 1uF 0 1uF Pins 11 12 13 Pin 5 100 0 1uF Pins 1 2 3 4 Inputs Outputs Isolated 5VDC supply 5V Power 5V Return Contact or Load solid state switch Outputs Inpu...

Страница 28: ...this will result in slight misalignment and a resulting drop in output power 3 Setup the Lamp House unit with appropriate ultraviolet safety measures and laser light safety measures in place It is re...

Страница 29: ...r EQ 99 CAL The following only applies to the EQ 99 CAL model If your system is EQ 99 CAL the following instructions will show how to connect the water cooling components that come packaged with the u...

Страница 30: ...order to complete the attachment 2 The 3 8 end of the Swagelok fitting will connect to the two 3 8 OD Tubing as shown in Figure 9 a A 5 8 and an 11 16 wrench will be required in order to complete the...

Страница 31: ...switch in UP position 3 Within several seconds the LASER ON LED will light Laser light is now present in the Lamp House 4 In approximately 20 150 seconds the igniter will be turned on automatically a...

Страница 32: ...ual Rev 2 To minimize wear on the ignition components it is best to avoid frequently starting and stopping the lamp It is recommended to run the lamp continuously rather than turn the lamp off and on...

Страница 33: ...Figure 10 before making a laser fiber SMA connection As shown in the figure inspecting and cleaning is an iterative process The final step of the cleaning should always be a successful inspection Som...

Страница 34: ...end with Clean Dry Air Is fiber end Install Laser SMA Connector Clean Fiber end with Cleto p Is fiber end Connector Isopropyl Alcoho l Yes No Yes No Inspect Fiber end Is fiber end contaminated Connec...

Страница 35: ...his custom adapter allows the scope to be used with the EQ 99 laser fiber and integral interlock ring The custom adapter may not be compatible with other fiber inspection equipment The following fiber...

Страница 36: ...sed air 3 Cletop www cletop com 4 Lint Free Wipe with Isopropyl Alcohol Figure 11 Cletop Fiber Cleaning Tool To Clean with the Cletop or Wipe gently press the fiber end face into the cleaning cloth or...

Страница 37: ...ble Not Connected Plasma Extinguished after ignition Controller Fault Asserted pin 4 on remote Laser Overtemp 66C Controller PCB Overtemp 82C Laser Current Regulation Error External Interlock Open Las...

Страница 38: ...ber are properly connected at the Lamp House unit To reset or clear a Fault condition the actuate the Operate switch from the ON position to the OFF position If a fault was generated while the Operate...

Страница 39: ...specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to...

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