multi EA 5100
Function and design
25
m
a
in
in
le
t
d
ry
e
r
s
e
a
l
b
y
p
a
s
s
A
r
O
2
1
2
5
6
7
9
1
0
1
4
1
5
1
3
A
B
D
3
4
8
1
1
1
2
Membrane dryer
Rotary bearing
Rotary bearing
Combustion furnace
Coupling
Gas box
Filter
Exhaust
Pump
to the N/S/C detector
N/S/C
outlet
MFM
Cl system tightness
test
to the Cl detector
Figure 11 Hose diagram for vertical operation