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MT-49E-101-G

SCU-800 Control Unit

Instruction Manual (C)

STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):

STP pump generic Instruction Manual

Instruction Manual (B):

STP pump specific information

Instruction Manual (C):
(This Instruction Manual)

STP control unit Instruction Manual

Содержание SCU-800

Страница 1: ...olumed Instruction Manuals Instruction Manual A STP pump generic Instruction Manual Instruction Manual B STP pump specific information Instruction Manual C This Instruction Manual STP control unit Instruction Manual Copyright 2016 Edwards Japan Limited All rights reserved Printed in Japan ...

Страница 2: ...romagnetic compatibility EMC Generic standards Immunity for industrial environments EN55011 2009 A1 2010 Industrial scientific and medical equipment Radio frequency disturbance characteristics Group1 Class A EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances and fulfils all the relevant provisions of...

Страница 3: ...P control unit Operation Safety functions Maintenance and inspection Storage and disposal Service Spares and accessories Instruction Manual B STP pump specific information Technical data How to Secure the STP pump Temperature Management System TMS Instruction Manual C STP control unit Instruction Manual Introduction Technical data Installation Operation Serial communication protocol STP Link Maint...

Страница 4: ...This page intentionally blank ...

Страница 5: ...3 Rear panel 16 3 4 Precautions before installation 17 3 4 1 Operating environment 17 3 4 2 Insulation test 17 3 4 3 Installation area 18 3 5 Attaching the SCU 800 to a rack 19 3 6 Cable connection 20 3 6 1 STP connection cable 21 3 6 2 TMS connection cable 22 3 6 3 Power cable 23 3 7 Connecting to semiconductor equipment 25 3 7 1 Connecting to power 25 3 7 2 Emergency off circuit EMO circuit 25 3...

Страница 6: ...re starting the STP pump 43 4 1 1 Confirmation before starting 43 4 1 2 Confirmation of vacuum system 43 4 2 Powering ON 44 4 2 1 Self test 44 4 2 2 CAUTION message in the self test state 44 4 3 How to start stop the STP pump 45 4 4 Manual start stop the STP pump 45 4 4 1 Starting the STP pump 45 4 4 2 Stopping the STP pump 45 4 4 3 Starting the STP pump after stopping 45 4 5 Remote operation 47 4...

Страница 7: ...the RS232 RS485 single point connection 69 5 3 5 Transmission data format 70 5 3 6 Frame control checksum 70 5 3 7 Error control 71 5 3 8 Transmission frame in the RS485 multi point connection 72 5 3 9 Control command in the RS485 multi point connection 73 5 3 10 Query command in the RS485 multi point connection 75 5 3 11 Broadcasting command in the RS485 multi point connection 76 5 3 12 Applicati...

Страница 8: ...First damage limit 108 7 3 3 Second damage limit 108 7 3 4 Imbalance X_H X_B Z 109 7 3 5 Pump run time over 109 7 3 6 Pump overload 109 7 3 7 Low RTC battery 109 7 4 WARNING function setting 110 7 5 Error at self test state 111 7 5 1 Error after self test 112 7 5 2 Error messages 112 7 5 3 Troubleshooting immediately after power failure occurs 112 7 5 4 Troubleshooting immediately after other abno...

Страница 9: ...Control Unit for Turbomolecular Pump MT 49E 101 G Page v PAGE v CONTENTS CONTINUED Section Title Page 9 SERVICE SPARES AND ACCESSORIES 127 9 1 Introduction 127 9 2 Service 127 9 3 Spares 127 9 4 Accessories 128 ...

Страница 10: ...4 Parameter setting method continued 38 25 Parameter setting method continued 39 26 Parameter setting method continued 41 27 Manual operation method 42 28 Operational procedures 46 29 REMOTE X7 input signal pins 49 30 REMOTE X7 output signal pins 51 31 Serial communication 57 32 Connector X3A X3B D sub 9 58 33 Connector X6 D sub 9 59 34 RS485 connections 60 35 FAILSAFE bias resistance 61 36 Ground...

Страница 11: ...ds 76 20 Command list 81 21 Pump operation commands 83 22 Error message values 85 23 Error message values continued 86 24 Pump operation mode 87 25 Remote mode 92 26 Warning value bit assign 96 27 Functions of STP Link 101 28 Backup rotational speed 103 29 States of LCD LEDs and REMOTE output signals at a power failure 104 30 Accumulated damage point and warning message 108 31 Default setting of W...

Страница 12: ...SCU 800 Control Unit for Turbomolecular Pump MT 49E 101 G Page viii PAGE viii This page intentionally blank ...

Страница 13: ... death to people CAUTION Cautions are given where failure to observe the instruction could result minor personal injury in damage to the equipment associated equipment and or process Note Items you must follow during operation and maintenance Throughout this manual page figure and table numbers are sequential The units used throughout this manual conform to the SI international system of units of ...

Страница 14: ...61326 and a group 1 class A product according to EN55011 This means that this product does not generate and or use intentionally radio frequency energy in the form of electromagnetic radiation inductive and or capacitive coupling for the treatment of material or inspection analysis purpose and that it is suitable for use in all establishments other than domestic and those directly connected to a l...

Страница 15: ...e have disassembled reconditioned or tampered the product 5 Defect resulting from the not specified use of the product 6 When the product is used under special conditions without obtaining the written consent of Edwards strong magnetic field and the radiation are added to the product 7 Defect resulting from the installation of the product exclude the installation by authorized personnel 8 Deterior...

Страница 16: ... device caution label The SCU 800 is equipped with a high voltage device This label warns operators to pay attention to the high voltage device at the maintenance and inspection Figure 1 High voltage device caution label 2 Voltage caution label This label describes precautions for operating the TMS unit Use the specified heater and valve when connecting the TMS unit to the STP pump Figure 2 Voltag...

Страница 17: ...he connector The label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation Figure 4 Connector caution label 5 Voltage rating label This label describes the rated voltage of the SCU 800 Use voltage specified in this label Some pumps can be operated in the input voltage between 100 120V inclusive Confirm the specific pumps in Section 2 TECHNICAL D...

Страница 18: ...ons Refer to Section 1 4 for the details of the labels 1 to 5 Figure 6 Label affixing positions 1 High voltage device caution label 2 Voltage caution label 3 Safety instruction label 4 Connector caution label 5 a Voltage rating label 5 b Voltage rating label 6 Name plate 7 Parts number 5 b 7 6 4 1 3 2 5 a ...

Страница 19: ...ns It operates the magnetic bearing system It operates the optional Temperature Management System TMS Figure 7 SCU 800 control unit The following series of turbomolecular pumps can be used in conjunction with the SCU 800 Model Name Specification STP 603 1003 series Ultra high vacuum type STP H301 H451 series High throughput type STP H803 H1303 series High throughput type STP A803 A1303 series Adva...

Страница 20: ...ble SCU 800 to power supply Note Figure 8 shows a typical TMS system installation System connections and cables differ according to the type of pump connected to the SCU 800 Refer to the STP pump Instruction Manual A and B for full details of connection cables and system connections 1 SCU 800 control unit 5 TMS valve cable 2 STP connection cable 6 TMS connection cable 3 TMS sensor cable 7 Power ca...

Страница 21: ... 850 VA maximum With TMS unit 1200 VA maximum Input frequency 50 60 2 Hz Leakage current 3 5 mA maximum Input phase Single phase Main breaker specification Rated current 15 A Ampere Interrupting Capacity AIC 1000 A 240 Va c 50 60 Hz Motor driving system 3 phase d c brushless motor driver Output voltage under normal operation 92 Va c maximum Output frequency under normal operation 800 Hz maximum Al...

Страница 22: ...ED NORMAL Green LED BRAKE Green LED TEMP CTRL Green LED POWER Green LED FAILURE Red LED REMOTE Green LED Panel display LCD 2 lines of 20 characters Input Output terminal AC POWER X2 3 pins P CONNECTOR X1 60 pins TMS X5 26 pins REMOTE X7 37 pins COM1 X3A X3B 9 pins 2 COM2 X6 9 pins STP LINK X8 8 pins Safety function Electromagnetic bearing failure detection STP pump overheat detection Motor driver ...

Страница 23: ...T R O L U N I T S T O P S T A R T BRAKE ACCEL NORMAL X8 STP LINK ON 80 4 230 34 200 139 X 1 P CO N N E C T OR X 3 A X6 AC POWER OFF MA IN P OW ER PE L L1 L2 N X2 F1 4A F F2 4A F X7 REM OTE ON X 3 B X5 TMS X 3 B 210 35 35 30 30 5 5 25 36 A 380 1 6 122 5 132 5 110 5 11 11 4 A Figure 9 SCU 800 dimensions mm Screw stopper Note The size of the attached screws for the rubber feet is M3 12 ...

Страница 24: ...SCU 800 Control Unit for Turbomolecular Pump MT 49E 101 G Page 12 2 TECHNICAL DATA This page intentionally blank ...

Страница 25: ...tainer and cushioning material for possible re use 3 2 Front panel 1 LCD panel 10 BRAKE LED 2 FAILURE LED 11 STOP switch 3 RESET switch 12 START switch 4 REMOTE LED 13 ACCEL LED 5 UP switch 14 NORMAL LED 6 MANUAL REMOTE changeover switch 15 STP LINK X8 7 SELECT switch 16 TEMP CTRL LED 8 ENTER switch 17 POWER LED 9 DOWN switch Figure 10 SCU 800 front panel Note Refer to Table 2 for front panel func...

Страница 26: ...Flat panel switch grey Valid in MANUAL and REMOTE LCD display function Confirmation mode change and parameter set mode change Press SELECT and UP switches simultaneously to enter the setting mode 8 ENTER switch Flat panel switch grey Valid in MANUAL and REMOTE Setting content determination function Warning message display function 9 DOWN switch Flat panel switch grey Valid in MANUAL and REMOTE Abn...

Страница 27: ...al communication with the PC Monitors the operating condition of the STP pump with the dedicated monitor software STP Link optional accessory on the PC screen 16 TEMP CTRL LED Green LED illuminates when the TMS unit is optional accessory operational 17 POWER LED Green LED Illuminates when power is on Extinguishes when backup power is being supplied Table 3 SCU 800 front panel functions continued ...

Страница 28: ...ing disconnecting the connecter always power off the SCU 800 turn the MAIN POWER OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment Item Description Function 1 AC POWER X2 Main power connection 240 Va c maximum 2 MAIN POWER breaker Main power circuit breaker 3 Ground terminal Ground Earth connection terminal 4 Serial Port COM2...

Страница 29: ... 30 to 95 non condensing Environment An area free of exposure to direct sunlight high humidity dust salty air dripping water explosive or flammable gas corrosive gas radiation strong magnetic and electric fields excessive vibration and sources of electric noise Installation condition Install and anchor the SCU 800 horizontally within 10 degrees 3 4 2 Insulation test CAUTION The varistor for the po...

Страница 30: ...leave enough space to install other cables without bending them excessively When installing the SCU 800 leave enough space for the following refer to Figure 12 Space for maintenance and inspection Space for inlet and outlet cooling air Top and side 50 mm 1 97 or more Bottom 14 5 mm 0 57 or more height of the rubber feet Space for connecting the cables Rear 350 mm 14 or more A A A C A B A 50 mm 1 9...

Страница 31: ...re this panel can be attached to any type of commercially available rack Attach the SCU 800 as follows Note For the dimensions of the front panel and positions of the screw holes for the rubber feet refer to Figure 10 and Figure 13 Attach the front panel to the rack using the 4 screws Figure 13 1 Support the SCU 800 from the bottom using a support angle Figure 13 2 or a similar tool When attaching...

Страница 32: ...failure CAUTION Use the STP connection cable and the power cable that Edwards has specified The use of other cables may result in product damage Align the position of the guide key of the connectors and insert vertically so as not to bend the pins If a pin is bent not only may the connector not function normally but it may make the pins contact resulting in a malfunction Lock and securely tighten ...

Страница 33: ...Figure 14 STP pump connection cable CAUTION The STP connection cable has the different specification according to the presence of a blue label When operating the STP A1603 series with the TMS unit using the STP connection cable without a blue label the TMS unit does not operate see Table 5 STP connection cable TMS unit Available STP pump With blue label Not use STP 603 1003 series STP H301 H451 se...

Страница 34: ...al TMS cable For details of the TMS cable used with the connected pump module refer to the STP Pump Instruction Manual B 45 20 107 98 φ31 φ10 61 6 103 97 5 76 85 90 4 φ4 SCU 800 side STP pump side 1 SCU 800 connection 3 TMS heater cable connection 2 TMS valve cable connection 4 TMS sensor cable connection Figure 15 TMS connection cable standard 65 3 17 1 8 2 1 7 98 φ31 100 200 57 φ30 φ10 SCU 800 s...

Страница 35: ...e power cable to the AC POWER X2 connector on the SCU 800 Connect the power cable for the SCU 800 side to the AC POWER X2 on the SCU 800 rear panel as shown in Table 6 Connect the suitable connector to the power supply as shown in Table 6 Connect the power cable to the main power of the vacuum equipment via a circuit breaker Connect the primary power to the UL recognized terminal block of the vacu...

Страница 36: ...N C Unused Table 6 Power cable L N G SCU 800 side Power side Primary 1 Black1 5 M4 bolt fixing screw 2 Black2 6 Crimp type terminal M4 3 Yellow Green 7 Cover 1 4 Clearance min 1 5 mm 8 Terminal block 2 1 Use material flammability UL 94V 0 2 Use the UL recognized terminal block satisfying with the following conditions a Clearance between each terminal 1 5 mm or more b Material flammability UL 94V 0...

Страница 37: ...en the power is shut off the STP pump performs the same as a power failure After backup operation of a power failure the rotor lands on the touch down bearing Consider the following when establishing the EMO circuit CAUTION Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates example shut the valve When atmosphere is introduced in...

Страница 38: ...onnector is M2 6 Note This D Sub type connector is not supplied Procure the connector for remote connection at your company Figure 19 REMOTE X7 connector 3 8 2 Serial communication The SCU 800 is fitted with a remote communication port Connector X3A X3B X6 refer to Figure 20 to allow remote input and output signal control by serial protocol This connector is a D Sub type 9 pins socket that conform...

Страница 39: ... is performed The error message CAUTION Pump Type is Changed is displayed upon performing the self test 3 9 2 Tuning method Refer to Figure 21 1 Ensure all cables are connected 2 Turn ON the MAIN POWER on the SCU 800 rear panel 3 After the STP pump completes the self test and Levitation is displayed set the MANUAL REMOTE changeover switch to the MANUAL and press the RESET switch on the front panel...

Страница 40: ...noise during tuning this is not an indication of abnormality A Press RESET switch B Press UP or DOWN switch C Press ENTER switch D Press RESET switch for approximately 3 seconds Figure 21 Tuning procedures CAUTION Coupling is Changed Autotest 2002 MAY 20 15 40 CAUTION Pump Type is Changed STP 603 1003 DATA COPY No STP 603 1003 DATA COPY Yes Press RESET 3sec to Update Data Updating Data from Pump t...

Страница 41: ...method see Section 3 11 Parameter set mode Items Factory setting reference Remarks Remote mode I O Remote Rotational speed Rated speed Varies according to STP pump type TMS function DISABLE ENABLE in the case of the TMS specification Inhibit function DISABLE Emergency vent valve DISABLE Second damage limit ENABLE Pump air cooling fan DISABLE Warning function Damage point ENABLE Imbalance ENABLE Pu...

Страница 42: ...d pump overload warning function 5 Error record The control unit can store information about up to 10 of the most recent errors 1 n denotes the most recent error While pressing ENTER switch the time of errors occurrence is displayed 3 10 1 Confirmation method Refer to Figure 22 1 Press the SELECT switch to enter the Confirmation mode The available menu groups Section 3 10 steps 1 through 5 are dis...

Страница 43: ...essage Error Record n n n failure message A B C D NORM rpm Pump Hour Counter xxxxx H Start Counter xxxxx Ctrl Hour Counter xxxxx H MOTOR CURRENT xxx UP DOWN SELECT Pump Serial Number xxxxx Software Version Ver 49 xxxxxx E F Date Time 2002 AUG xxxxxx Warning Pump Overload DISABLE Warning Pump Runtime DISABLE Warning Imbalance ENABLE Digital AMB Version AM 49 xxxxxx AMB Parameter Ver xxxxxx Cooling ...

Страница 44: ...1 2 Rotational speed setting The rotational speed can be changed in units of 500 rpm in the NORMAL state The variable range is from half of the rated speed to the rated speed The rated speed is different according to the connected pump 3 11 3 TMS setting Enable Disable the TMS control function When the TMS control function is set to enable the setting of the pump air cooling fan output is disabled...

Страница 45: ...o DISABLE Second Damage Limit is displayed though the rotational operation can be performed 3 11 7 Pump air cooling fan output setting When the output voltage of the air cooling fan of the STP pump is set to ENABLE the input power supply voltage is output to the output terminal of the TMS connector X5 in the ACCEL state or NORMAL state The air cooling fan can be used as a replacement of the TMS he...

Страница 46: ...oint Enable Disable warning function of the pump operating hours in units of 100 hours up to 30 million hours 5 Warning Pump Overload Enable Disable overload warning function of the pump When setting ENABLE and the state for the motor current of the STP pump continues exceeding or dropping below the setting value the warning message is displayed 6 Current Ceiling Rate Sets the motor current of the...

Страница 47: ... check In the case of presence select even number or odd number 5 Driver type Set to either the RS232 RS485 Single or RS485 Multi 6 RS485ID Set the identification number in the RS485 Multi 1 to 127 3 11 10 Serial port COM2 setting Refer to 1 to 4 and 6 5 Driver type Set the one of the RS485 Single or RS485 Multi 3 11 11 Serial port COM3 setting An optionally available serial port 3 11 12 Date Time...

Страница 48: ...ever the storage fails STORAGE NOT OK is displayed 7 When pressing the SELECT switch in the state of STORAGE NOT OK displayed the preservation is displayed In this case try to store it again 8 Press the SELECT switch when the state STORAGE OK is displayed to enter the date time setting menu It is displayed as 2002 AUG 08 11 08 ENTER to adjust on the LCD Press ENTER switch to enter to the year sett...

Страница 49: ...nd ENABLE LEAK VALVE Option DISABLE LEAK VALVE Option ENABLE A B C D UP DOWN ENTER SELECT E F SELECT UP Remote Mode COM3 RS485 Lon D Net I Second Damage Limit DISABLE Second Damage Limit ENABLE Cooling Fan Option DISABLE Cooling Fan Option ENABLE G H Figure 23 Parameter setting method A Operation mode F Emergency vent valve setting B Select remote mode G Second Damage Limit setting C Rated speed s...

Страница 50: ...BLE Warning Pump Runtime DISABLE Warning Pump Runtime ENABLE PumpRuntime Setpoint XXXXXXX H PumpRuntime Setpoint XXXXXXX H L J Warning PumpOverload DISABLE Warning PumpOverload ENABLE Current Ceiling Rate XXX Current Ceiling Rate XXX Speed Floor Rate XXX Speed Floor Rate XXX K SELECT ENTER Figure 24 Parameter setting method continued J From Cooling fan setting K Warning function setting L To Seria...

Страница 51: ...Stop bit 1 COM1 Stop bit 2 COM1 Parity None COM1 Parity Even COM1 Parity Odd COM1 Driver Type RS232 COM1 Driver Type RS485 Single COM1 Driver Type RS485 Multi COM1 RS485 ID Serial Port COM2 set ENTER to modify COM1 Baud Rate COM1 RS485 ID N O Serial Port COM3 set ENTER to modify P M SELECT SELECT ENTER ENTER 1 2 Q SELECT ENTER 3 Figure 25 Parameter setting method continued ...

Страница 52: ...enu composition is the same as the Serial Port COM1 setting Only RS485 Single and RS485 Multi are selectable to Driver Type 3 The Serial Port COM3 setting menu composition is the same as the Serial Port COM1 setting Lon and D Net are added to Driver Type The Serial Port COM3 cannot be set without the option board M From Warning function setting N Serial port COM1 setting O Serial port COM2 setting...

Страница 53: ...e 00 2002 APR 01 12 00 ENTER to cancel 2002 APR 01 12 00 ENTER to apply R AA T S ENTER SELECT SELECT ENTER ENTER SELECT SELECT DOWN UP U V W X Y ENTER ENTER SELECT SELECT DOWN UP Z Figure 26 Parameter setting method continued R From Serial port COM3 setting W Press UP DOWN to change Day S Storing display X Press UP DOWN to change Hour T Date Time setting display Y Press UP DOWN to change Minute U ...

Страница 54: ...tput turns OFF 3 Press SELECT switch to display TMS Water Valve Close and the TMS water valve can be operated manually with UP and DOWN switches 4 Press SELECT switch to display Cooling Fan OFF Leak Valve Close 5 Press SELECT switch in the Emergency vent valve operation to return to the Operation Mode Levitaion NORM rpm Manual Operation TMS Heater OFF Manual Operation TMS Heater ON Manual Operatio...

Страница 55: ...Tuning 4 1 2 Confirmation of vacuum system 1 Starting backing pump Start the backing pump before or simultaneously with the start of the STP pump Open the vacuum valve located at the outlet port flange side after starting the backing pump Note DO NOT open the vacuum valve without operating the backing pump Depending upon the type of the backing pump doing so may cause a reverse flow of oil which c...

Страница 56: ... SCU 800 after the tuning is performed Pump Type is Changed Connecting the different model of the STP pump to the SCU 800 after the tuning is performed Pump Type is Mismatch Using the different series of the STP pump with the SCU 800 Use the specific control unit Table 8 Causes of CAUTION at the self test state Perform as follows when CAUTION Coupling is Changed or CAUTION Pump Type is Changed is ...

Страница 57: ...RT switch on the front panel to start refer to Figure 9 and accelerate the STP pump The ACCEL LED illuminates The LCD displays the current rotational speed in ACCEL 00rpm in 500 rpm intervals ACCELERATION state 2 When the STP pump attains the rated speed of rotation the ACCEL LED extinguishes and the NORMAL LED illuminates The LCD displays NORM 00rpm NORMAL OPERATION state 4 4 2 Stopping the STP p...

Страница 58: ...mpleted upper only H Normal Operation State Upper Normal operation state Lower TMS actual temp for only with TMS unit B Version C Self test Upper Autotest Lower Date F Levitation State Upper Levitation state Lower TMS actual temp for only with TMS unit I Break State Upper Brake state Lower TMS actual temp for only with TMS unit D Self test Upper Autotest Lower Model of connected pump G Acceleratio...

Страница 59: ...front panel to ON refer to Figure 9 The REMOTE LED illuminates 4 5 1 Input signal pins Use input signal pins according to Table 9 and Figure 29 Remote input signals are set to the parallel port in the remote setting and function during REMOTE operation only except pins for inputting the ROTATION INHIBIT Two abbreviations are used in Table 9 and Figure 29 COM Common Pin IN Input Pin ...

Страница 60: ... RESET signal When a safety function operates remove the cause of the abnormality error after confirming the STP pump has stopped When the cause of the abnormality error is removed short the circuits between 1 22 for 0 3 seconds or more to extinguish the FAILURE LED Pins for inputting the rotation INHIBIT signal valid in both MANUAL and REMOTE operations When pins 1 5 are set to open the STP pump ...

Страница 61: ...REMOTE X7 input signal pins Note 1 pin 0V is insulated from the frame ground Note The input current of remote input signal is approximately 5 mA Make sure the minimum applicable load of the relay contact when the remote operation with the relay Note It is recommended to use a remote cable with shield type and connect both terminals to the ground 4 5 2 Output signal pins Use output signal pins acco...

Страница 62: ...losed and the pins between 12 30 are opened Pins for outputting the BRAKE state signal These pins are closed when the STP pump is in brake Pins for outputting the ALARM signal When an abnormality error is detected under the POWER ON state the pins between 14 33 are closed and the pins between 15 33 are opened Pins for the TMS unit rated state signal output When the actual temperature of the TMS un...

Страница 63: ...UT N C OUT COM G 24 6 25 CR9 CR9 WARNING N O OUT N C OUT COM H 36 18 37 CR10 CR10 OPT 1 N O OUT N C OUT COM J A REMOTE selection state signal output pins E BRAKE state signal output pins H WARNING state signal output pins B POWER ON state signal output pins F ALARM state signal output pins I Emergency vent valve open signal output pins C ACCELERATION state signal output pins G TMS unit rated state...

Страница 64: ...on 3 11 Setting Mode for information and methods This section details the operating method using the parallel port REMOTE X7 refer to Figure 20 X7 REMOTE connector for details of pin location For the operating method using the serial port refer to Section 5 and Section 7 4 5 4 Starting Stopping the STP pump There are two methods for the starting stopping operation with the parallel port REMOTE X7 ...

Страница 65: ...tion A the rotation INHIBIT input signal is short circuited B INHIBIT IN Close Open START operation MANUAL operation mode The pump does not accelerate REMOTE operation mode The pump does not accelerate when the START operation is performed A The pump accelerates when the rotation INHIBIT input signal is short circuited B The rotation INHIBIT input signal is opened A during acceleration or normal o...

Страница 66: ...pump remove the cause of the abnormality error after the BRAKE LED extinguishes and perform the operation shown in Table 14 The FAILURE LED extinguishes and the safety function is released RESET operation Restart the STP pump For the safety functions and troubleshooting refer to Section 6 Method Reset Operation 1 Short the circuit between 1 22 for 0 3 seconds or more Table 14 Reset operation durin...

Страница 67: ...TRL LED illuminates on the SCU 800 When STP pump is in the power ON state the TMS unit operates regardless of the status of the SCU 800 When the STP pump is the cause of the malfunction the TMS unit is stopped 4 8 3 Setting the TMS unit function When the TEMP CTRL LED does not illuminate on the SCU 800 after switching MAIN POWER ON the TMS function may be set to DISABLE Confirm and reset the TMS f...

Страница 68: ...SCU 800 Control Unit for Turbomolecular Pump MT 49E 101 G Page 56 4 OPERATION This page intentionally blank ...

Страница 69: ...repare the user application software according to this instruction manual Operation instructions and information such as the running state and setting values of the STP pump information which appears on the LCD of the SCU 800 can be obtained with the software The serial ports located on the SCU 800 rear panel are called Serial Interface Module SIM Refer to Figure 31 PC SIM Figure 31 Serial communi...

Страница 70: ... to Figure 32 DO NOT connect other pins which are reserved as optional use DO NOT use a commercially available straight cable which all lines are connected X3A D Sub9 pin socket X3B D Sub9 pin socket RS232 2 TxD 3 RxD 5 GND RS485 7 D 7 D 8 D 8 D Reserved 1 4 6 9 1 2 3 4 5 6 9 Table 15 X3A X3B pin position Figure 32 Connector X3A X3B D sub 9 Note The connectors X3A and X3B are fitted using M2 6 scr...

Страница 71: ...put Output remote function accordingly there is no connection to these pins Refer to Section 5 2 2 X6 D Sub 9 pin socket RS485 7 D 8 D Unused 1 2 3 4 5 6 9 Table 16 X6 pin position 5 4 3 2 1 9 8 7 6 Figure 33 Connector X6 D sub 9 Note The connector X6 is fitted using M2 6 screws 3 Serial Port STP Link exclusively used in the RS232 Connect signal transmitted from the PC to connector X8 on the front...

Страница 72: ...se the PC of which transmit receive switch time is 5 msec or less Use twisted pair wire in communication cable The extended communication cables should be 1 2 km or less Connect the terminator to the communication devises at both ends of the transmission line The terminator 120 Ω 0 25 W is required for connection SCU 800 does not have terminator setting function PC 7 D 8 D 120Ω 120Ω SIM connector ...

Страница 73: ...stance Rd should be of equal value Vcc SIM Ra GND Rc Rd Rb Vfsb PC Figure 35 FAILSAFE bias resistance Example computation The FAIL SAFE bias can be expressed with the pull up resistance Ra the pull down resistance Rd and the equivalent resistance of termination Rb Rc on the simply voltage divider as below Vfsb Vcc x Rb Rc Ra Rb Rc Rd When the impedance characteristic of a cable Zo is 120 ohm and t...

Страница 74: ...r switch on the SCU 800 to ON and set a port to use the Remote mode refer to Figure 9 When the MANUAL REMOTE changeover switch is OFF or a port which is not set as Remote mode commands other than the operation commands can be used Communication parameter SCU 800 PC setting example Remote mode I O Remote I O Remote COM1 COM2 STP Link Baud rate 9 600 bps 110 to 19 200 bps Bit length 8 bit 7 8 bit St...

Страница 75: ...field emitted from a power supply line Shield both ends are grounded by all the cables of connected communication device Clamp the STP pump side shield on a connector hood A ground loop will be made up through both ends grounding Connect between GND of a STP pump and PC with low impedance to prevent ground potential difference SIM Signal line GND PC Signal line GND Low impedance connection to prev...

Страница 76: ...ication attaching ring ferrite cores to the cable is effective to reduce communication failure Figure 38 Example of ring ferrite core installation Locate and secure the cables It may be difficult to measure the reproducibility of the communication failure without securing the cables Avoid installing a power line and a communication line in the same metallic duct When unavoidable separate a line wi...

Страница 77: ...al difference of communication interfaces or static electricity is applied to communication line Communication failure occurs frequently by broken communication interface circuit RS485 is available with communication interface circuit according to the environment but it gets failure easily Check the waveform of the differential signal is normal with measuring instruments such as an oscilloscope D ...

Страница 78: ...of STP pump operation mode and so forth 1 Communication command 2 Response Figure 41 PC to SIM communication Table 18 shows ASCII characters being used in the transmission control error control and handshake in the application layer Note that the transmission frame form differs depending upon the RS232 RS485 single point connection and RS485 multi point connection refer to Section 5 3 8 ASCII char...

Страница 79: ... Cn Transmission frame when a message is below 255 characters n 255 1 2 3 4 5 5 n 5 n 1 5 n 2 ASCII Stx 0 0 1 C1 Cn Etx LRC Stx and Etx are used as a start and an end character of the transmission frame respectively Transmission frame when a message exceeds 255 characters n 255 m 255 k the number of transmission blocks First 1 2 3 4 5 5 n 5 n 1 5 n 2 Block ASCII Stx 0 0 1 C11 C1n Etb LRC Second 1 ...

Страница 80: ...to the second and succeeding transmission blocks The SIM returns the acknowledgment response character when the control command is processed normally If not the SIM returns the non acknowledgment response character and 3 characters of the non acknowledgment code are added to Transmission frame when data is transmitted to one block a message is less than 256 characters Designate the control command...

Страница 81: ...in the RS232 RS485 single point connection is HEX code 3F and succeeding characters are ASCII characters corresponding to the respective function code and parameter CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input...

Страница 82: ...0 2 C254 Cn Etx LRC The PC transmits Ack or Nak then transmits the next command if necessary 5 3 5 Transmission data format Data value is always 16 bits signed hexadecimal value coded ASCII text Example 12090 on a decimal basis equals to 2F3A on a hexadecimal basis 5 3 6 Frame control checksum The transmission frame is controlled by the odd number parity check First initialize LRC as FFhex Next ca...

Страница 83: ...repeatedly from the PC when the SIM transmits Nak parity check error When the SIM receives Nak from the PC the transmission frame is transmitted again This operation is repeated up to 5 times 2 The SIM transmits Ack or Nak to the PC after the completion of communication command reception When the PC cannot receive Ack or NaK after 2 second retransmit the transmission frame from the PC When these c...

Страница 84: ...gle block or multiple transmission blocks Each transmission block consists of a network frame ID character a network frame number a start control character data block number 3 digits a message up to 255 characters an end control character and a checksum LRC The following shows the transmission frame when the message transmission character string is Cn Transmission frame when a message is below 255...

Страница 85: ...a message a space character a function code and parameter exceeds 255 characters input Sp and CHR to the top transmission block only the first transmission block of the transmission frame It is not necessary to input them to the second and succeeding transmission blocks The SIM returns the acknowledgment response character when the control command is processed normally If not the SIM returns the n...

Страница 86: ... F2 Next the preceding SIM PC character is Ack the PC continues instructing the control command the 2nd block PC SIM F1 F2 Stx 0 0 2 C254 Cn Etx LRC SIM PC Ack or Nak F1 F2 Always assign less than 510 characters n 510 to the parameter so that the message is less than 512 characters Then the preceding SIM PC character is Ack the instructed control command is executed and the SIM returns the followi...

Страница 87: ...mission blocks The SIM returns the acknowledgment response character when the query command is processed normally If not the SIM returns the non acknowledgment response character and 3 characters of the non acknowledgment code are added to Transmission frame when data is transmitted from one block and returned to two blocks Designate a query command on the PC Less than 256 chr PC SIM F1 F2 Stx 0 0...

Страница 88: ...e concurrently instructed to all the multi connected SIMs Always assign 0 HEX code 30 30 to network frame number Note that there is no response from the respective SIM PC SIM 0 0 Stx 0 0 1 Sp E Parameter 1 Etx LRC SIM PC No response Parameter Item Data Format Remark 1 Pump operation command 8 bits hexadecimal coded ASCII Refer to Table 19 Pump operation command Value START 1 STOP 2 Table 19 Pump o...

Страница 89: ...munication process example The SIM will reply ACK or NAK within approximately 2 seconds after receiving command When there is no reply the SIM may not have received the command In this case resend the command from the tool application before recognizing the process of the communication failure If the problem cannot solve after resending several times make the process of the communication failure o...

Страница 90: ...s by NAK sent when LRC is incorrect value Figure 43 Example of answer resending process When sending the following command before receiving the answer data from the SIM the contents of the answer data and sent command from the SIM will not match In this case stop the communication about approximately 5 seconds to clear all the receiving buffer of the tool application and then start the communicati...

Страница 91: ...ss Address selection First TMP RS485 multipoint connection Address selection Next TMP Communication cycle end Command sending process Succeeded Answer receiving process Yes This procedure is not necessary if TMP connection number 1 No Yes Yes Yes Yes No No No No RS485 multipoint connection Address check Last TMP Figure 46 Example of communication cycle process ...

Страница 92: ... failure No 2 Yes No Yes No Yes Block check k N 1 Acknowledge received ACK received Figure 47 Example of command sending process This procedure is not necessary if N 1 1 When using RS485 multipoint connection also an address is incorrect 2 When using RS485 to communicate send after 1 msec or more progress from block data received 3 When using RS485 multipoint connection send with address data Rece...

Страница 93: ... the speed set point and the TMS temperature e ReadMotorTemp Reads the measured motor temperature f ReadStatus Reads the various settings Remote mode TMS function INHIBIT and emergency vent valve g ReadEvents Reads the error record Sp h SetSpeedSetPoint Changes the speed set point 1 h ReadSpeedSetPoint Reads the speed set point m ReadModFonctWithWarning Reads the pump operation mode the errors and...

Страница 94: ...speed Unit Hz 16 bits hexadecimal coded ASCII Example Measured rotational speed 02DChex 732 Hz 43 920 rpm Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 2 D C HEX 30 32 44 43 1 System reservation 5 4 3 Command Function Sends the pump operation commands START STOP and RESET These commands function in the same way as when each switch of the SCU 800 is pressed They are valid when MANUAL REMOTE cha...

Страница 95: ... START 1 STOP 2 RESET 4 Table 21 Pump operation commands Example Pump operation command RESET operation 4 04hex Parameter 1 ASCII 0 4 HEX 30 34 5 4 4 ReadFailMess Function Reads the errors being detected This data is the same data as that of ReadModFonct parameter 2 to 79 or ReadModFonctWithWarning parameter 3 to 80 Transmission frame PC SIM Stx 0 0 1 F Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0...

Страница 96: ... Table 23 The most recent error has the largest parameter number When the number of errors being detected is under the maximum number the value of parameter that is larger than the number of errors being detected is set to 0 Example The number of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 77 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10...

Страница 97: ... X_H 13 Tuning Error 6 46 Disturbance Y_H 14 Tuning Error 7 47 Disturbance X_B 15 Tuning Error 8 48 Disturbance Y_B 16 Tuning Error 9 49 Disturbance Z 17 Driver Failure 50 Motor Overheat 18 R Unit Failure 51 CAUTION CNT Heat 2 19 1 Motor Resistor Lost 52 CNT Overheat 2 20 Driver PWM Trouble 53 T Cable Disconnected 21 Driver FAN Failure 54 P Cable Disconnected 22 Driver CPU Error 55 E Valve Disconn...

Страница 98: ...The data of errors being detected reads the same data as that of ReadFailMess Transmission frame PC SIM Stx 0 0 1 M Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp M Parameter 1 to 79 1 Etx LRC Parameter Item Data format Remarks 1 Pump operation mode 8 bits hexadecimal coded ASCII Refer to Table 24 2 The number of error 8 bits hexadecimal coded ASCII Up to 77 errors 1 3 to 79 1 Error 1 8 bits he...

Страница 99: ...ump operation mode 01hex 1 Levitation The number of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 77 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 11 ASCII 0 1 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 12 13 Omitted 68 69 70 71 72 73 74 75 ASCII 0 0 0 0 0 0 0 0 0...

Страница 100: ...SCII character Ver 1 2 0120 21 to 24 AMB parameter version Digital control loop 4 bits ASCII character Ver 33 1 0 3310 1 1 SCU 800 uses a digital control loop Example Control unit software version 34395F4120312E302020202020202020hex 49_A 1 0 Motor driver software version 0120hex 1 2 AMB parameter version 3310hex 33 1 0 Parameter 1 2 3 4 5 6 7 8 9 10 4 9 _ A 1 0 ASCII 3 4 3 9 5 F 4 1 2 0 3 1 2 E 3 ...

Страница 101: ...bits hexadecimal coded ASCII 22 Control unit running time Unit minute 32 bits hexadecimal coded ASCII 23 Start counter 32 bits hexadecimal coded ASCII Example Control unit serial number 12345 Pump serial number 6789A Pump running time 0000003Chex 60 minutes 1 hour Control unit running time 0000028Chex 652 minutes 10 hours and 52 minutes Start counter 00000064hex 100 times Parameter 1 2 3 4 5 6 7 8...

Страница 102: ... PC Stx 0 0 1 Sp d Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks 1 Speed Set Point Unit Hz 16 bits hexadecimal coded ASCII 2 TMS temperature setting Unit ºC 16 bits hexadecimal coded ASCII Example Speed Set Point 01F4hex 500 Hz 30 000 rpm TMS temperature setting 003Chex 60 ºC 140 ºF Parameter 1 2 ASCII 0 1 F 4 0 0 3 C HEX 30 31 46 34 30 30 33 43 5 4 9 ReadMotorTemp Function Reads the...

Страница 103: ...de TMS function INHIBIT Emergency vent valve Transmission frame PC SIM Stx 0 0 1 f Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp f Parameter 1 to 4 Etx LRC Parameter Item Data format Remarks 1 Remote mode setting 8 bits hexadecimal coded ASCII Refer to Table 25 2 TMS function setting 8 bits hexadecimal coded ASCII 00hex ENABLE Excluding 00hex DISABLE 3 INHIBIT setting 8 bits hexadecimal coded ...

Страница 104: ...setting 01hex I O Remote TMS function setting 00hex ENABLE INHIBIT setting FFhex DISABLE Emergency vent valve setting FFhex DISABLE Parameter 1 2 3 4 ASCII 0 1 0 0 F F F F HEX 30 31 30 30 46 46 46 46 5 4 11 ReadEvents Function Reads the Error Record It has the most recent 10 errors that have been detected Transmission frame PC SIM Stx 0 0 1 g Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp g Par...

Страница 105: ... Error Record 1 0Fhex 15 Disturbance Xb Error Record 2 0Dhex 13 Disturbance Xh Error Record 3 15hex 21 T Cable Disconnected Error Record 4 to 10 00hex No error recorded Parameter 1 2 3 4 5 6 7 8 9 10 11 ASCII 0 3 0 F 0 D 1 5 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 33 30 46 30 44 31 35 30 30 30 30 30 30 30 30 30 30 30 30 30 30 5 4 12 SetSpeedSetPoint Function Changes the Speed Set Point value This value...

Страница 106: ...ated rotational speed The value of Speed Set Point displayed in LCD of SCU 800 is in increments of 500 rpm Example Speed Set Point 01F4hex 500 Hz 30 000 rpm Parameter 1 ASCII 0 1 F 4 HEX 30 31 46 34 5 4 13 ReadSpeedSetPoint Function Reads the Speed Set Point value This value is the same as ReadSetPoint parameter 1 Speed Set Point Transmission frame PC SIM Stx 0 0 1 h Etx LRC SIM PC Ack PC SIM Ack ...

Страница 107: ... WARNING being detected 16 bits hexadecimal coded ASCII See Table 26 3 The number of errors detected 8 bits hexadecimal coded ASCII Up to 77 errors 1 4 to 80 1 Error 1 8 bits hexadecimal coded ASCII 2 Error 77 1 8 bits hexadecimal coded ASCII 1 The maximum number of errors may differ depending upon the software version of the SCU 800 It is recommended that an application be designed as variable le...

Страница 108: ...WARNING Imbalance X_B 0010 see 7 3 4 5 WARNING Imbalance Z 0020 see 7 3 4 6 WARNING Pump Run Time Over 0040 see 7 3 5 7 WARNING Pump Overload 0080 see 7 3 6 8 WARNING Pump record bungle 0100 System reservation 9 WARNING PCB record bungle 0200 System reservation 10 WARNING Low RTC Battery 0400 see 7 3 7 11 WARNING Clock Data is Lost 0800 System reservation 12 WARNING Recover by AUX Data 1000 System...

Страница 109: ...2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 77 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 ASCII 0 1 0 0 9 8 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 30 39 38 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 Parameter 11 12 13 Omitted 68 69 70 71 72 73 74 ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 2 0 D 0 F HEX 30 30 30 30 30 30 30 30 30 30 30 30 30 3...

Страница 110: ... rotational speed Transmission frame 1 PC SIM Stx 0 0 1 Etx LRC SIM PC Ack PC SIM 1 Ack SIM PC Stx 0 0 1 Sp Parameter 1 to 6 Etx LRC 1 The HEX code of ASCII character is 5B Parameter Item Data format Remark 1 System reservation 120 bits hexadecimal coded ASCII 2 TMS temperature Unit ºC 16 bits hexadecimal coded ASCII 3 Motor temperature Unit ºC 16 bits hexadecimal coded ASCII 4 System reservation ...

Страница 111: ...e 0014hex 20 ºC 68ºF Measured rotational speed 02DChex 732 Hz 43 920 rpm Parameter 1 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 HEX Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 0 0 3 C HEX 30 30 33 43 Parameter 3 4 5 ASCII 0 0 1 4 1 1 1 1 1 1 1 1 1 1 0 2 D C HEX 30 30 31 34 30 32 44 43 Parameter 6 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 HEX 1 System reservation ...

Страница 112: ...SCU 800 Control Unit for Turbomolecular Pump MT 49E 101 G Page 100 5 SERIAL COMMUNICATION PROTOCOL This page intentionally blank ...

Страница 113: ...are version Pump serial No Control unit serial No STP pump model Communication specification setting function Remote operation mode setting Each serial port setting Option setting function Rotational speed setting TMS setting Rotation inhibit signal setting Emergency vent valve setting Pump air cooling fan setting Warning function setting History confirmation function Confirmation of pump operatio...

Страница 114: ...SCU 800 Control Unit for Turbomolecular Pump MT 49E 101 G Page 102 6 STP LINK This page intentionally blank ...

Страница 115: ...ational speeds vary according to the model of STP pump used refer to Table 28 1 When the rotational speed is at backup rotational speed or more at a power failure The SCU 800 detects any power failure of 2 seconds or more and the STP pump decelerates At this time the POWER LED extinguishes and the FAILURE LED illuminates The LCD displays Mains Failure An alarm signal is output from REMOTE X7 pins ...

Страница 116: ...pins 14 33 and 15 33 of the X7 REMOTE connector 2 When the START operation is performed after a power recovery the STP pump reaccelerates even while it is in BRAKE state However the SCU 800 may detect excessive vibration when power is recovered after the rotor lands on the touch down bearing see Section 7 1 4 In this case the STP pump once stops and cannot reaccelerate until the RESET operation co...

Страница 117: ...verheating inside the STP pump When the motor inside the STP pump overheats due to an abnormal high temperature or overload operation the STP pump decelerates and stops The FAILURE LED illuminates and the LCD displays error message Motor Overheat 7 1 7 Overheating inside the SCU 800 The temperature in the SCU 800 increases when the ventilating duct is blocked or the ambient temperature is high The...

Страница 118: ... lower than the setting value by 10 ºC 18 ºF or more due to the occurrence of an abnormality error in the TMS heater or other fault the FAILURE LED illuminates and the LCD displays the error message TMS Lower Temp The heater and the cooling water valve are switched OFF and the STP pump decelerates and stops Note TMS Lower Temp is not detected for a certain time when the STP pump starts When an abn...

Страница 119: ...the remote connector X7 while the alert message is displayed see Table 10 Overhaul the STP pump when WARNING message is displayed Example WARNING Levitation The upper line of the LCD displays the operational status of the STP pump The WARNING is displayed in each state acceleration normal operation and deceleration of the STP pump WARNING display changes W WA WAR WARNING W Press the ENTER switch W...

Страница 120: ...303 series STP A1603 series 120 or more 150 or more Table 30 Accumulated damage point and warning message 7 3 2 First damage limit First Damage Limit is displayed when the accumulation point attains the setting value shown in Table 30 The rotating operation can be performed though WARNING message is displayed It is recommended to have the STP pump overhauled as soon as possible 7 3 3 Second damage...

Страница 121: ...o Section 3 11 Parameter Set Mode for the setting method Pump Run Time Over warning can be reset by setting the warning function to disable after it is occurred see Section 3 11 Parameter Set Mode 7 3 6 Pump overload Pump Overload is displayed when the state that the motor current exceeding the setting value continues during the fixed time The state that the STP pump rotational speed drops below t...

Страница 122: ...B Imbalance Z Enable Enable Disable WARNING Pump Run Time Over Disable Enable Enable WARNING Pump Overload Disable Enable Enable WARNING Low RTC Battery Enable Disable Disable Table 31 Default setting of WARNING function Message Default setting User setting User setting change threshold WARNING Pump Run Time Over 0 hour 0 to 30 million hours It can be set in units of 100 hours 0 is not counted WAR...

Страница 123: ...P pump Contact Service office CAUTION PCB is Initialized Failure of the SCU 800 Contact Service office CAUTION Pump is Initialized Failure of the SCU 800 or STP pump Contact Service office CAUTION Pump Type is Changed The STP pump of a different model is used after the tuning is performed Perform tuning Section 4 2 2 Section 3 9 1 CAUTION Pump PCB are Initialized Failure of the SCU 800 or STP pump...

Страница 124: ...der of detected errors the earliest error is number 1 and the second number shows the number of errors that have occurred Thus a 1 3 would denote the earliest error of 3 errors Press the UP or DOWN switch to scroll through the LCD display menu to view the contents of the next or previous error message The UP or DOWN switch can also be used in REMOTE mode Example Note The upper message on the LCD s...

Страница 125: ...ation of the STP pump which may result in an accident an electric shock or damage to equipment Moreover an accident caused by water leaks or gas leak may occur CAUTION If the RESET operation does not extinguish the FAILURE LED confirm that the STP pump has stopped turn OFF the primary power Switch the MAIN POWER OFF then turn ON the primary power again turn the MAIN POWER ON Refer to Section 4 4 4...

Страница 126: ...mospheric air flows the STP pump Failure of the SCU 800 1 Malfunction by external noise 2 Failure of the SCU 800 Short circuit or ground fault in the connection cable or at connector part 1 High ambient temperature 2 Insufficient cooling of the SCU 800 1 High ambient temperature 2 Insufficient cooling of the SCU 800 Pump operation Decelerate and stop then Touch down The magnetic bearing output sto...

Страница 127: ...bable causes Abnormal magnetic bearing 1 Change of the cable length 2 Disconnection of the STP connection cable or control circuit error Excessive vibration applied externally to the STP pump 1 External vibration impact 2 Atmospheric air flows into the STP pump 3 Foreign matter falls into the STP pump Failure of the SCU 800 Failure of the SCU 800 Failure of the SCU 800 1 Wear out of the cooling wa...

Страница 128: ...t the cable correctly If the cable is not locked lock it securely 2 Set Leak Valve Option to DISABLE Probable causes 1 High pressure at the inlet port 2 High pressure at the outlet port 3 Leakage of the piping system 4 Failure of the backing pump Failure of the SCU 800 Failure of the SCU 800 Failure of the SCU 800 Failure of the SCU 800 1 Disconnection of the emergency vent valve cable 2 Incorrect...

Страница 129: ...P pump 2 Failure of the SCU 800 Incorrect connection of the input power supply Failure of the STP pump 1 Power failure 2 Incorrect connection of the power cable 3 Failure of the power cable 4 Insufficient power supply voltage 1 Overheating during baking 2 Insufficient cooling 3 Leakage of the vacuum piping system 4 Repetition start stop operations Pump operation Touch down The magnetic bearing out...

Страница 130: ...0 Frequency of Disturbance or Mains Failure error Pump operation Stop rotation is inoperative Breaker OFF Decelerate and stop Touch down The magnetic bearing output stops and the rotor is descended on the touch down bearing Decelerate and stop Decelerate and stop Decelerate and stop Decelerate and stop Decelerate and stop Decelerate and stop Decelerate and stop Decelerate and stop Occurrence condi...

Страница 131: ...office 3 When the TMS function is not in use set the TMS function to DISABLE 1 Connect the electromagnetic cooling water valve correctly Check the volume of water and water temperature 2 Contact Service office Probable causes 1 STP pump failure 2 Failure of the SCU 800 Frequency of Disturbance or Mains Failure error 1 Disconnection of the TMS connection cable 2 Failure of the TMS connection cable ...

Страница 132: ... 1 Failure of the TMS heater 2 Failure of the TMS unit 1 Disconnection of the TMS sensor 2 Incorrect setting of the TMS function 3 Disconnection of the TMS connection cable 4 Failure of the TMS connection cable 1 Failure of the STP pump 2 Failure of the SCU 800 Pump operation Decelerate and stop Decelerate and stop Touch down The magnetic bearing output stops and the rotor is descended on the touc...

Страница 133: ...ck if a power failure has occurred Section 7 1 1 Table 41 Troubleshooting when powering ON 7 6 2 Abnormalities when performing rotational operation No Symptom Probable causes Countermeasures Referred section 1 The ACCEL LED does not illuminate The MANUAL REMOTE changeover switch is not in the correct position Slide the MANUAL REMOTE changeover switch to the correct position Section 3 2 Section 4 4...

Страница 134: ...ion 3 11 Table 43 Troubleshooting while the STP pump is rotating 7 7 Error Record message display function The SCU 800 can display the contents of up to the last 10 errors on the LCD To view the error record press the SELECT switch several times refer to Section 3 10 The error number of up to the last 10 errors is displayed on the upper line of the LCD in the form Error Record n and the error mess...

Страница 135: ...tput to connector according to the rotational speed and it causes the electric shock or the failure CAUTION DO NOT touch any place other those specified when performing maintenance or inspecting the pump and NEVER open any panel because it could cause shock malfunction or short circuit Power OFF the peripheral equipments such as a baking heater before performing maintenance and inspections Only Ed...

Страница 136: ...and proper use of STP control unit This overhaul includes inspection and cleaning Internal components of the STP control unit will deteriorate after long term use To prevent unexpected failure by deteriorated parts replacement of the main parts is recommended along with an overhaul Refer to the following list as recommended maintenance intervals for main parts Part name Recommended maintenance int...

Страница 137: ...ve dust Areas with insufficient ventilation Areas subjected to strong magnetic and electric fields or radiation Areas subjected to electric noise and vibration 8 1 1 Transporting for repair or overhaul WARNING Ensure you follow the Return Procedure to prevent an accident during the transportation repair or overhaul CAUTION Edwards will not be responsible for any damage or problems that may occur w...

Страница 138: ... G Page 126 8 STORAGE TRANSPORTATION AND DISPOSAL 8 2 Disposal Dispose of the SCU 800 as industrial waste in accordance with all local and national safety and environmental standards Note Edwards will not be responsible for problems during or after disposal ...

Страница 139: ...wide network of Edwards Service office Each Service office offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service office can also provide Edwards engineers to support on site maintenance service or repair of your...

Страница 140: ...ual STP pump STP pump Refer to the STP pump Instruction Manual B for the applicable STP control unit Power cable Primary input power Standard cable length is 5 m 10 m and 20 m versions are available Contact Edwards for further information STP connection cable Connection cable between the STP pump and the STP control unit Standard cable length is 5m 10 m and 20 m versions are available Contact Edwa...

Страница 141: ...r more information contact the nearest Service Office Manufacturer Edwards Japan Limited 1078 1 Yoshihashi Yachiyo shi Chiba 276 8523 JAPAN Telephone Domestic 047 458 8853 International 81 47 458 8853 Facsimile Domestic 047 458 8048 International 81 47 458 8048 ...

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