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D396-20-880

Issue H

Original Instructions

Instruction Manual

EXC100E and EXC100L Turbomolecular

Pump Controllers

Description

Item Number

EXC100E Turbomolecular Pump Controller

D396-20-000

EXC100L Turbomolecular Pump Controller

D396-22-000

Содержание EXC 100E

Страница 1: ...H Original Instructions Instruction Manual EXC100E and EXC100L Turbomolecular Pump Controllers Description Item Number EXC100E Turbomolecular Pump Controller D396 20 000 EXC100L Turbomolecular Pump Controller D396 22 000 ...

Страница 2: ...mity with the following standard s or other normative document s EN61010 1 2010 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use General Requirements EN61326 1 2013 Electrical equipment for measurement control and laboratory Class B Emissions Use EMC requirements General requirements Basic Immunity and fulfils all the relevant provisions of 2014 35 EU Low Vol...

Страница 3: ... interface 10 2 6 Factory settings 11 2 7 Electrical connectors 11 3 Installation 13 3 1 Unpack and inspect 13 3 2 Configure the Controller 13 3 2 1 Introduction 13 3 2 2 Select speed or power analogue output 13 3 2 3 Enable disable the Internal Timer to monitor low pump speed 14 3 2 4 Vent options 14 3 3 Fit the Controller 16 3 4 Introduction to Controller electrical connections 16 3 5 Connect th...

Страница 4: ... 6 2 Disposal 27 7 Service and accessories 29 7 1 Introduction 29 7 2 Service 29 7 3 Accessories 29 7 3 1 Electrical supply cable 29 7 3 2 Pump to controller cable 30 7 3 3 BX bakeout band 30 7 3 4 TAV vent valve 30 7 3 5 ACX air cooler 31 7 3 6 Active vacuum gauges 31 8 Engineering diagrams 33 For return of equipment complete the HS Forms at the end of this manual Illustrations Figure Page 1 Rear...

Страница 5: ...l output data 10 5 Logic interface data 10 6 Factory settings 11 7 Electrical connectors 11 8 Configuration links 13 9 Selection of vent valve control options 14 10 Logic interface pins 16 11 Electrical supply cable wires 18 12 APG to logic interface connections 19 Associated publications Publication title Publication number EXT Pump Accessories B580 66 880 EXT70 and EXT250 Turbomolecular Pumps B7...

Страница 7: ...n is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process The units used throughout this manual conform to the SI international system of units of measurement The following warning ...

Страница 8: ...ed the Controller may trip into Fail condition this depends on how you have configured the Controller see Section 1 6 2 If the Controller detects that its temperature or the pump temperature is too high it reduces the power supplied to the pump motor the pump may not therefore be able to maintain full rotational speed if it is too hot If the pump speed falls to below 50 of its full rotational spee...

Страница 9: ...ooler Control inputs These are switch type input signals which are used to control the operation of the EXT pump Status outputs These output signals identify the status of the pump and the Controller Analogue output The Controller can be configured to provide a speed output or a power output This output gives an indication of the EXT pump speed or power consumption Vent valve supply This electrica...

Страница 10: ...gs for vent options are shown in Table 9 If the Controller electrical supply fails the Controller maintains the electrical supply to the vent valve until the pump speed falls to below 50 of full rotational speed then the Controller switches off the vent valve electrical supply This feature of the Controller cannot be reconfigured However you can use the configuration links in the Controller refer ...

Страница 11: ...switches the vent valve electrical supply off approximately two seconds after the Fail condition is detected If you have not selected Vent on Stop the EXT pump will decelerate and the vent valve electrical supply will remain on until the pump speed falls to below 50 of full rotational speed the vent valve electrical supply will then be switched off If you have not selected Vent on Fail the electri...

Страница 12: ...an configure the Controller to enable or disable the Internal Timer if the pump speed falls during pump operation If you disable the Internal Timer the Controller will trip into Fail condition as soon as the pump speed falls to below 50 of full rotational speed If you enable the Internal Timer the Internal Timer will start as soon as the pump speed falls to below 50 of full rotational speed the Co...

Страница 13: ...ds Limited Introduction D396 20 880 Issue H Figure 1 Rear panel of the Controller EXC100E shown 1 Electrical supply connector 2 Earth ground stud 3 EXT pump connector 1 1 EXC100E only the EXC100L has an integral pump to controller cable 4 Logic interface connector 5 Active gauge connector 6 Normal LED ...

Страница 15: ...e range 20 to 70 C Maximum ambient operating humidity 10 to 95 RH non condensing to DIN 40040 Maximum operating altitude 3000 m Cooling Natural convection Table 2 Mechanical data Dimensions See Figure 2 Mass EXC100E 0 8 kg EXC100L 1 0 kg Enclosure protection IP20 Pollution degree EN61010 category 2 Table 3 Electrical data Electrical supply Voltage 90 to 264 V a c single phase Frequency 47 to 63 Hz...

Страница 16: ...ls Control voltage low close 0 8 V d c Control voltage high open 4 to 24 V d c Maximum input current at 24 V 80 A Maximum output current at 0 V d c 160 A Air cooler electrical supply Voltage range 20 to 26 V d c Maximum output current 150 mA Vent valve electrical supply Voltage range 16 to 26 V d c Maximum output current 80 mA Analogue output Output voltage 0 to 10 V d c proportional to speed or p...

Страница 17: ...with the low voltage safety recommendations of IEC 1010 Table 6 Factory settings Normal speed 80 Internal Timer 8 min enabled Vent options See Table 9 Analogue output Speed output Table 7 Electrical connectors Electrical supply connector socket type CEE IEC 320 Earth ground stud on rear panel M4 Active gauge connector Signals on the connector pins See Figure 6 and Table 11 Socket type FCC68 8 way ...

Страница 18: ...5 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 2 Dimensions mm EXC100E shown A Rear view B Top view C Side view 1 Clearance for ventilation 2 Clearance for cables 3 Optional mounting plate ...

Страница 19: ...ller for your application see Table 8 Each link can be in one of two positions as shown in Figure 3 and described in Sections 3 2 2 and 3 2 4 If you want to reconfigure the Controller undo and remove the two screws Figure 3 items 1 and remove the top cover 2 of the Controller to access the links Use the links as described in the following sections 3 2 2 Select speed or power analogue output Note T...

Страница 20: ...me the Controller will trip into the Fail condition Insert link LK4 in the not active position Figure 3 item 11 to disable the Timer The Controller will then trip into the Fail condition as soon as the pump rotational speed falls to below 50 of full rotational speed 3 2 4 Vent options Links LK5 and LK6 are used to select the vent valve control options refer to Section 1 5 Each of the links can be ...

Страница 21: ...XC100L shown 1 Screw 2 Top cover 3 Fuse holder 4 Speed power link LK1 5 Link LK1 in speed configuration 6 Link LK1 in power configuration 7 Link LK6 not active Vent On Fail not selected 8 Link LK6 active Vent On Fail selected 9 Link LK5 not active Vent On Stop not selected 10 Link LK5 active Vent On Stop selected 11 Link LK4 not active Timer disabled 12 Link LK4 active Timer enabled ...

Страница 22: ...o the Controller described in the following sections refer to Table 10 for full details of the logic interface connections and refer to Figure 4 which shows a schematic diagram of the electrical connections You must provide suitable strain relief on the cables which you fit to the Controller WARNING The Controller contains electrolytic capacitors and under certain fault conditions may emit dangero...

Страница 23: ...M active gauge 5 Active gauge connector 6 Logic interface connector 7 Vent valve control normally open 1 8 TMP Fail normally closed 9 TMP Normal output normally open 1 10 Remote indicator equipment 11 Air cooler 12 Vent valve 13 External Standby switch 14 External Start Stop switch 15 Speed power indicator 1 These are solid state switches in the Controller A Vacuum and control system B EXC Control...

Страница 24: ...bility of the system to RFI Connect the Controller the EXT pump and the vacuum chamber to a common earth ground point on the pumping system this star earth ground is typically in the electrical power distribution box Clamp the Controller earthing grounding terminal between the two lock nuts provided on the earth ground stud on the rear panel of the Controller Use suitable heavy duty cable or braid...

Страница 25: ...s to the Controller as described in the previous sections and as shown in Table 10 and Figure 4 We recommend that you use wire of 0 24 mm2 or smaller cross sectional area Alternatively if you do not connect the Controller to your control equipment link pins 3 and 4 in the mating plug The EXT pump will then start to operate as soon as the electrical supply to the Controller is switched on and the p...

Страница 26: ...just the Normal speed use a small screwdriver to turn the SETPOINT potentiometer A Figure 5 also shows the approximate Normal speed settings for different potentiometer adjustments 3 11 Adjust the Internal Timer The Internal Timer can be adjusted between approximately 1 and 30 minutes The Controller is supplied with the Internal Timer adjusted to eight minutes see Section 1 6 2 To adjust the Inter...

Страница 27: ...All rights reserved Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited Installation D396 20 880 Issue H Figure 5 Reconfigure the Controller EXC100L shown A Normal speed potentiometer B Timer potentiometer ...

Страница 29: ...ppropriate pins are linked see Section 1 4 3 If you select Standby when the pump is operating the speed of the pump will be reduced to the Standby speed If you select Standby before you switch the pump on the pump will run up to Standby speed not up to full speed 4 3 Operation with high inlet pressure If the EXT pump inlet pressure rises the power supplied by the Controller to the pump motor will ...

Страница 30: ...to Fail condition see Section 1 6 The operation of the vent valve in all Fail conditions depends on how you have configured the Controller refer to sections 1 6 and 3 2 4 7 Reset the Controller after Fail condition To reset a Fail condition open the Start Stop input on the logic interface for at least 300 ms and then close the input 4 8 Electrical supply failure If the electrical supply to the Con...

Страница 31: ... the top cover 2 of the Controller 2 Remove the fuse holder 3 remove and discard the failed fuse 3 Insert a new fuse of the correct rating refer to Section 2 3 and refit the fuse holder 4 Refit the top cover 2 and secure with the two screws 1 5 3 Clean the Controller If necessary use a soft dry cloth to clean the exterior of the Controller If you need to clean the interior of the Controller we rec...

Страница 33: ...until required When required for use prepare and install the Controller as described in Section 3 of this manual 6 2 Disposal Dispose of the Controller and any components safely in accordance with all local and national safety and environmental requirements Do not incinerate the Controller If the Controller is heated to very high temperatures dangerous gases may be emitted and internal components ...

Страница 35: ... number Item Number and description of part 7 2 Service Edwards products are supported by a world wide network of Edwards Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service...

Страница 36: ...oller 7 3 4 TAV vent valve A solenoid operated vent valve is available for system venting The valve is 24 V d c 2 W normally open and can be operated automatically from the EXC Controller The solenoid valve is fitted in place of the manual vent valve or alternatively can be fitted with an adaptor supplied with the valve and used with any suitable NW10 flanged port on your vacuum system Cable Item ...

Страница 37: ...Note that you can only connect an AIM gauge directly to the active gauge connector on the Controller you must connect other gauges through the logic interface refer to Section 3 9 Air cooler Item Number ACX70 B580 53 050 ACX250 B580 53 150 ACX350 500 B580 53 200 Description Item Number AIM S NW25 Active Inverted Magnetron Gauge D145 45 000 AIM SL NW25 Active Inverted Magnetron Gauge D145 48 000 AP...

Страница 39: ...of Edwards Limited Engineering diagrams D396 20 880 Issue H 8 Engineering diagrams To assist in fault finding refer to Section 5 4 the connections between the Controller and the EXT pump are shown in Figure 6 The Active Gauge connector which is specific to the EXC Controller is shown in Figure 7 ...

Страница 40: ...ngineering diagrams Figure 6 EXC Controller to EXT pump connections A EXT pump B EXT connector on cable C EXC connector on cable 1 D EXC Controller 1 EXC100E controller only the EXC100L has an integral cable 1 DC motor 2 Speed set resistor 3 Hall effect device 1 4 Hall effect device 2 5 Hall effect device 3 6 Pump temperature sensor ...

Страница 41: ...s of Edwards Limited Engineering diagrams D396 20 880 Issue H Figure 7 Active gauge connector pins Table 13 Active gauge connector pins Pin Signal 1 Power supply 24 V d c 2 Power supply 0 V d c 3 Not used 4 Gauge identification signal 5 Not used 6 Not used 7 TMP Normal status output 8 Not used ...

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