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D397-01-880 Issue E

Page 24

© Edwards Limited 2016. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Operation

4.8.4

Active Linear Pirani Gauge (APGX)

The Active Linear Pirani Gauge (APGX) is a gas-dependent, high-pressure thermal conductivity gauge. The measuring
range of the APGX-M and the corrosion resistant APGX-MP is 100 mbar to 10

-3

mbar (75 to 7.5 x 10

-4

Torr); the range

of the APGX-L is 10 mbar to 10

-4

mbar (7.5 to 7.5 x 10

-5

Torr). All of the gauges will indicate pressure up to 1000 mbar

(750 Torr) at reduced accuracy.

The Linear Convection Gauges (APGX-H) are gas-dependent, high pressure thermal conductivity and convection
gauges. The measuring range of the APGX-H is 1333 to 3 x 10

-4

mbar (1000 to 2.3 x 10

-4

Torr). At pressures above

10 mbar, pressure measurement is by convection, which provides consistent sensitivity and accuracy to the top of
the measuring range.

APG(X)s are permanently enabled and hence give an output as soon as they are recognised.

The APGX is set up as per the default gauge setup instructions shown in

APGX has menu options in addition to those shown. Refer to Default setup options (all gauges)

to

).

Figure 19 - Gauge setup screen APGX-M

APGX has an built-in error monitoring capability. (Refer to

).

Table 14 - Setup options APGX

Menu option

Description

Calibrate

Allows the user to adjust the APGX at atmosphere and vacuum.
Connect the APGX to TIC and allow it to operate at atmospheric pressure for at
least 10 minutes.
'Scroll' to 'Calibrate' and press 'Select'.
'Command Sent' appears for 1 s to confirm instruction has been carried out.
Reduce the system pressure to 1 x 10

-4

mbar (7.5 x 10

-5

Torr) or below for the

APGX-M or APGX-MP, or 1 x 10

-5

mbar

(7.5 x 10

-6

Torr) or below for the APGX-L and APGX-H.

Press ‘Select’. ‘Command Sent’ appears after 1 second to confirm instruction
has been carried out.
Press ‘menu’ (

) button to return to the display screen.

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Содержание D397-01-000

Страница 1: ...ue E Instruction Manual TIC Instrument Controller 6 Gauge Description Item Number TIC Instrument Controller 6 Gauge D397 01 000 TIC Instrument Controller 6 Gauge Capacitance Manometer D397 02 000 Original Instructions ...

Страница 2: ...This page has been intentionally left blank ...

Страница 3: ...1326 1 2013 Electrical Equipment for Measurement Control and Laboratory Class B Emissions Use EMC Requirements General requirements Industrial Immunity CAN CSA C22 2 Safety requirements for electrical equipment for No 61010 1 04 measurement Control and laboratory use Part 1 General requirements UL61010 1 2nd Edition Safety requirements for electrical equipment for measurement Control and laborator...

Страница 4: ...X O O O O O 机械部件 Mechanical Components X O O O O O O 表示该有害物质在该部件的所有均质材料中的含量低于 GB T 26572 标准规定的限量要求 O Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB T 26572 X 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB T26572 标准规定的限量要求 X Indicates that the hazardous substance contained in at least one of the h...

Страница 5: ...rial interface 15 4 Operation 17 4 1 Front panel description 17 4 2 Menu structure 18 4 3 Navigating the menu 19 4 4 The view screen 20 4 5 Turning gauges and relays ON OFF 20 4 6 Changing list items 21 4 7 Changing numerical values 21 4 7 1 Entering negative components e g 5 00E 03 21 4 8 Gauge setup 22 4 8 1 Default setup options all gauges 22 4 8 2 Gauge status messages 23 4 8 3 Active Pirani G...

Страница 6: ...r an 8 way FCC RJ45 4 2 Pin connections for a 15 way sub miniature D type socket 4 3 Pin connections for a 9 way sub miniature D type socket 6 4 Pin connection for 4 way analogue output connector 7 5 Bench mounted TIC dimensions mm 10 6 Front panel removal 11 7 Rack mounting of a TIC 11 8 Panel cutout drawing 12 9 Rear panel connections 12 10 IBM PC RS232 interface 9 way 15 11 IBM PC RS232 interfa...

Страница 7: ...ols and their functions 17 11 Default setup options all gauges 22 12 Gauge status messages 23 13 Error diagnostic monitoring APG 23 14 Setup options APGX 24 15 Error diagnostic monitoring APGX 25 16 ATC D and ATC M gauge tubes 25 17 Error diagnostic monitoring ATC E 26 18 Setup options ASG 26 19 Error diagnostic monitoring ASG 27 20 Error diagnostic monitoring AIM 27 21 Setup options AIGX 28 22 Er...

Страница 8: ...This page has been intentionally left blank D397 01 880 Issue E Page iv Edwards Limited 2016 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ...

Страница 9: ...anual conform to the SI international system of units of measurement The following warning labels are on the controller 1 2 Product description The TIC Instrument Controller 6 Gauge is provided with a large clear graphics display easy to use control interface via a keypad an RS232 485 interface for control and data monitoring on a remote PC and a logic interface for interface with associated syste...

Страница 10: ...atible equipment for the TIC Instrument Controller 6 Gauge TIC variant Compatibility TIC Instrument Controller 6 Gauge Up to 6 active gauges including APG APGX ATC ASG AIM WRG AIGX and IGC TIC Instrument Controller 6 Gauge Capacitance Manometer Up to 6 active gauges including APG APGX ATC ASG AIM WRG AIGX IGC and Capacitance Manometers 600 622 655 and 658 ...

Страница 11: ...ble fuse The unit will recover once any overload is removed Overvoltage category 2 Earth stud M4 Ambient operating temperature range 0 C to 40 C measured underneath TIC Ambient storage temperature range 30 C to 70 C Maximum ambient operating humidity Max 90 RH non condensing at 40 C Maximum operating altitude 3000 m max IP rating 20 Pollution degree 2 Indoor use only Weight 1 7 kg Connector type F...

Страница 12: ...upply positive 2 Power supply common 3 Signal input 4 Identification 5 Signal common 6 Control line 1 7 Control line 2 8 Power supply negative for Capacitance Manometer N C for all other versions Connector type 25 way sub miniature D type socket refer to Figure 2 Power supply 24 V d c Maximum output power See Section 3 3 Control output active 1 1 V d c Iout 20 mA 0 8 V d c Iout 2 mA inactive open ...

Страница 13: ... not connect 5 Setpoint 5 output 6 Setpoint 4 output 7 Power supply common 8 Do not connect 9 Gauge 1 enable input 10 Power supply common 11 Power supply positive 12 Power supply common 13 Power supply common 14 Analogue output common 15 Setpoint 2 output 16 Setpoint 3 output 17 Do not connect 18 Alarm output 19 Setpoint 6 output 20 Gauge 2 enable input 21 Gauge 3 enable input 22 Do not connect 23...

Страница 14: ... V Iout max 8 mA Space 8 V Iout max 8 mA RS232 receive Mark 1 0 V Iin max 2 0 mA Space 2 0 V Iin max 2 0 mA Maximum input 12 V RS232 protocol 9600 baud 1 stop bit 8 data bits no parity RS485 Output differential 1 5 V Iout max 25 mA Input differential threshold 0 2 V Iin max 1 mA Maximum input 7 0 V to 12 V Bus load The TIC applies one unit load to the RS485 bus Table 4 Serial communications connec...

Страница 15: ... MC 0 5 4 ST 2 5 available from Edwards as 5000 17005 Short circuit protection All signals Max load Gauge signals 1 mA Common 3 mA Output voltages Gauge connected Gauge signal voltage 2 15 mv when in range 0 to 10 V Gauge disconnected 12 V 1 3 V Table 5 Pin allocation for analogue outputs Pin Allocation Gauges 1 3 Top Ports Gauges 4 6 Lower Ports 1 Gauge 1 signal Gauge 4 signal 2 Gauge 2 signal Ga...

Страница 16: ...D397 01 880 Issue E Page 8 Edwards Limited 2016 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 17: ...cribed in Section 6 1 3 2 Fitting the controller CAUTION Rubber feet must be fitted Figure 5 item 1 so that there are correct clearances for air circulation If not the performance of the controller may be affected at high operating temperatures The controller can be used on a bench top or can be fitted in a rack or cabinet Figure 5 shows the dimensions of the TIC that are required for bench top us...

Страница 18: ...en in Figure 6 7 and 8 CAUTION Allow 150 mm at the rear for cables Allow 50 mm top and bottom and 15 mm to the sides for sufficient air circulation Do not cover any of the ventilation holes CAUTION This unit is IP20 rated Please ensure that the unit is not installed where fluids can enter into the controller CAUTION The unit must be supported at the rear WARNING Ensure that all electrical wiring i...

Страница 19: ...e 6 item 2 Slide the controller into the 19 rack or panel cut out The use of 19 rack guide rails Figure 7 item 2 and support at the rear of the controller is recommended as shown in Figure 7 The panel cut out information is defined in Figure 8 Fix the controller in place using the four screws removed previously Figure 7 item 1 Figure 7 Rack mounting of a TIC 1 Bench top adaptor 2 Fixing screw and ...

Страница 20: ...ectrical connections Note IGC Controllers are supported by both TIC 6 Gauge Controllers using gauge channels 4 6 Capacitance Manometers are only supported by TIC 6 Gauge Controller D39702000 using gauge channels 4 6 Figure 9 Rear panel connections 1 Gauge inputs 1 3 2 Logic interface 3 Serial communications port 4 Earth stud 5 Mains input 6 Mains on off 7 Gauge inputs 4 6 8 Analogue outputs ...

Страница 21: ... are supported by both TIC 6 Gauge Controllers using gauge connectors 4 6 Capacitance manometers are only supported by TIC 6 Gauge Controller D39702000 using gauge connectors 4 6 Up to six compatible active gauges can be fitted to the gauge connectors on the rear panel Connect the gauges using Edwards active gauge cables to each of the six gauge sockets on the rear of the TIC CAUTION Total user ou...

Страница 22: ...he vacuum system and to control certain aspects of its operation These signals can be broadly divided into two groups control inputs and status outputs 3 3 4 2 Using control inputs Control inputs provide a means of controlling the operation of the TIC and the associated vacuum system from external sources Gauge 1 2 3 Enable Pins 9 20 21 The gauge enable inputs can be used to control the operation ...

Страница 23: ... This output is normally active and will become inactive in the event of an alarm condition To drive a relay connect the coil of a suitable 24 V d c relay between Alarm Output negative and Power Supply Positive positive 3 3 5 Connecting the serial interface The TIC has two serial communications protocols built in RS232 and RS485 RS232 is the simpler interface and can be used to allow a host PC to ...

Страница 24: ...the ground connections are tied together If differences exist in the local ground voltage damage could occur If the TICs being networked are liable to experience different ground potentials a suitable RS485 isolator should be connected between them Use shielded cable for the interface to reduce interference problems and limit the length of the RS485 link to less than 1000 metres Long links may req...

Страница 25: ... Cycle a selected list item upwards DOWN Move down through a menu Cycle selected numerical values down Cycle a selected list item downwards SELECT Enter the highlighted sub menu Edit the highlighted list or numerical item Move to the next digit of a numerical value Jump to the setup screen for the highlighted gauge MENU Switch between the default view screen and the main menu Exit the current sub ...

Страница 26: ...nd the Edwards logo are trademarks of Edwards Limited Operation 4 2 Menu structure Figure 14 and 15 show the view screen shortcuts and menu structure for the TIC They also give an indication as to what buttons will lead where within the menu layout Figure 14 View screen shortcuts ...

Страница 27: ...3 Navigating the menu This section summarises the display navigation method for the TIC There are 4 buttons for menu navigation and configuration tasks A fifth button is used for switching gauges ON and OFF In most configuration tasks there are no more than three menu levels Refer to Table 10 for a description of the functions that the buttons on the front panel perform ...

Страница 28: ...automatically display an output 4 5 Turning gauges and relays ON OFF Pressing the Cycle button with view screen items selected will turn the items on off Low pressure gauges AIGX and AIM default to OFF as they should not be operated at pressures greater than their upper range limit Low pressure gauges may be switched on manually by scrolling to the display line and pressing the Cycle button or the...

Страница 29: ...er to be entered Pressing the Select button with the last digit selected will accept the adjustment and return the highlight to the row item allowing another item to be selected for adjustment At any time mistakes can be corrected by pressing the Menu button This will move the highlight to the previous digit with each successive button press allowing corrections to be made Pressing the Menu button...

Страница 30: ...e example below shows the APGM as the connected gauge Figure 18 Gauge setup screen Note Active Strain Gauges ASG are gas independent Selection of any gas type will give the same pressure output Table 11 Default setup options all gauges Menu option Description Gauge Indicates type of gauge connected Gas type Allows the user to select the gas type Choice of N2 He Ar CO2 Ne Kr or Volts Note For gas d...

Страница 31: ...p options all gauges Section 4 8 1 There are no error diagnostic messages specific to APG Refer to Table 13 Table 12 Gauge status messages Diagnostic messages Description Not Connected Indicates that no gauge has been connected to TIC or if a cable has been connected the gauge may not be connected to the other end Disconnected The gauge connection has been removed intentionally or accidentally New...

Страница 32: ...f the measuring range APG X s are permanently enabled and hence give an output as soon as they are recognised The APGX is set up as per the default gauge setup instructions shown in Section 4 8 1 Refer to Figure 19 APGX has menu options in addition to those shown Refer to Default setup options all gauges Section 4 8 1 Refer to Table 14 Figure 19 Gauge setup screen APGX M APGX has an built in error...

Страница 33: ... Refer to Default setup options all gauges Section 4 8 1 Please refer to Table 17 for the error and diagnostic information for the ATC E gauge Table 15 Error diagnostic monitoring APGX Diagnostic messages Description Over Range Gauge output 9 750 V Indicates that there is a fault with the gauge and it should be replaced Under Range Gauge output 0 300 V Indicates that there is a fault with the gaug...

Страница 34: ...tic monitoring ATC E Diagnostic messages Description Over Range Gauge output 11 000 V Indicates that either the measured gas pressure is outside the range of the gauge or that there is a fault with the gauge Clear the error message reduce the process pressure to within the range of the gauge scroll to the gauge display line and press Cycle If the gauge fails to give a pressure readout it should be...

Страница 35: ... pressure to within the range of the gauge scroll to the gauge display line and press Cycle If the gauge fails to give a pressure readout it should be replaced ASG Cant Zero Indicates that the gauge output is outside the range 100 mV to 100 mV The most likely cause of this error is either attempting to zero the gauge at too high a pressure or a gauge fault Attempt to zero the gauge again and if th...

Страница 36: ...so includes a comprehensive range of diagnostic outputs which are displayed on TIC AIGX has menu options in addition to those shown Refer to Default setup options all gauges Section 4 8 1 Refer to Table 21 and Figure 21 Figure 21 Gauge setup screen AIGX Table 21 Setup options AIGX Menu option Description Degas Allows the user to degas the gauge Scroll to Degas and press Select Command Sent appears...

Страница 37: ...ndicates that there is a fault with the gauge and the electronics module should be replaced Over Pressure Gauge output 9 700 V Indicates that the gauge has automatically shut down because of pressure rising above 6 6 x 10 2 mbar 5 x 10 2 Torr Reduce pressure and re enable the gauge Emission Error Gauge output 9 500 V Indicates that either the filament is broken switch over or gauge was enabled at ...

Страница 38: ...k The gauge tube should be inspected for signs of contamination or debris If the anode and cathode are not bright the gauge should be cleaned as described in the WRG instruction manual Striker Fail Gauge output 1 200 V Indicates that the striker filament has broken The electrode assembly D147 01 802 should be replaced as described in the WRG instruction manual Mag Fail Gauge output 1 100 V Indicat...

Страница 39: ...egas if the pressure is too high and Degas will resume once the pressure reduces Degas status is displayed with gauge signal If the gauge display is voltage the units will change from V to either VDG or VDI for either Degas or Degas Inhibited If the display is pressure the x10 part of the display will change to either DG or DI for Degas or Degas Inhibited With a head sensitivity of 10 mbar the pre...

Страница 40: ...alue will be quoted in the document accompanying the gauge same for both filaments A gauge head received from a calibration laboratory will come with a precise sensitivity value for each filament This sensitivity figure needs to be entered into the TIC Scroll to Fil 1 Const and press select Amend the sensitivity value See Section 4 7 changing numerical values Note Gauge sensitivity has units mbar ...

Страница 41: ...rnal pressure limit is based upon output signal voltage at 9 84 V 0 11 V If the gauge head sensitivity is 10 mbar this means pressure will need to be below 5 4 x 10 3 mbar to guarantee emission but as a pressure the value will vary with head sensitivity Table 27 Setup options Capacitance Manometer Menu option Description Range It is essential the correct range is selected otherwise the pressure re...

Страница 42: ... and the possible solutions for clearing the alarm 4 10 The main menu The main menu can be accessed by pressing the Menu button on the view screen Figure 13 From here the following sub menus can be accessed 4 11 Linking gauges When the Link Gauges option is selected from the main menu a list of controllable items gauges is displayed along with the item that is currently controlling each of them By...

Страница 43: ...ill be altered to match the newly entered one Note When entering a pressure the sign of the exponent can only be changed when the exponent is non zero To set a negative exponent the exponent value should be set first and then the Menu button used to move back to alter the sign See Section 4 7 1 4 Enable the setpoint Once configured the setpoint should be enabled by changing the bottom Setpoint lin...

Страница 44: ...are used to set up what gauges and in what order the gauges are shown on the view screen In the following example the user wants to set the order below Position 1 The gauge plugged into the gauge 1 connection Position 2 The gauge plugged into the gauge 5 connection Position 3 The gauge plugged into the gauge 2 connection Position 4 The gauge plugged into the gauge 3 connection Position 5 A gauge i...

Страница 45: ...he following information Software Issue This is the issue of the currently installed software This will change when new software is downloaded to the TIC in the future Serial Number The Serial number of the TIC is used when contacting Edwards about the product Analogue O P The analogue output value internal units is used when contacting Edwards about the product Reset TIC Resets the TIC to its fac...

Страница 46: ...D397 01 880 Issue E Page 38 Edwards Limited 2016 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 47: ... Table 22 Emission Error Refer to Table 22 Over Pressure Refer to Table 22 ASG Cant Zero Refer to Table 19 General SYSI Inhibit The system interlock has been disconnected Please check that the logic interface plug is connected correctly or check the status of the system interlocks Ext Inhibit Enable lines have been disconnected please check external inhibit lines No Reading An object has not recei...

Страница 48: ...ller and the TIC PC monitor program will be updated as part of Edwards on going development program The updates and associated instruction manual can be found by visiting www upgrades edwardsvacuum com 5 5 Factory defaults The following is a list of factory default settings for the TIC Table 29 Factory default settings Menu option Default Gauge and relay slaving not slaved Gas type Nitrogen Gauge ...

Страница 49: ...ontroller and any components safely in accordance with all local and national safety and environmental requirements Alternatively the controller and or cables may be able to be recycled Contact Edwards or the supplier for advice The controller and associated cables are within the scope of the European Directive on Waste Electrical and Electronic Equipment 2002 96 EC Edwards offer European customer...

Страница 50: ...D397 01 880 Issue E Page 42 Edwards Limited 2016 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 51: ... Service Centres Each Service Centre offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Local Service Centres can also provide Edwards engineers to support on site maintenance service or repair of the equipment For more informa...

Страница 52: ... 01 100 15 m active gauge cable D400 01 150 15 m active gauge cable 24 AWG D400 05 150 25 m active gauge cable D400 01 250 30 m active gauge cable 24 AWG D400 05 300 50 m active gauge cable D400 01 500 100 m active gauge cable D400 01 999 ASG adaptor cable D400 03 060 Barocel 600 655 658 659 series adaptor cable D400 03 050 Barocel 622 series adaptor cable D400 03 030 Relay boxes TIC Relay box 3 x...

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Страница 54: ...This page has been intentionally left blank ...

Страница 55: ...n of Vacuum equipment and Components Procedure HS1 If you are returning a vacuum pump note the following If a pump is configured to suit the application make a record of the configuration before returning the pump All replacement pumps will be supplied with default factory settings Do not return a pump with accessories fitted Remove all accessories and retain them for future use The instruction in...

Страница 56: ...P800 80 000 Issue T edwardsvacuum com ...

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