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D397-53-880 Issue C

Page 20

© Edwards Limited 2016. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Operation

4.7.13

Module 699 - DP Speed Demand

This module should only be used on inverter driven pumps.
Output Bytes: 2 Bytes which are a 16-bit unsigned number for DP speed demand in 0.1% of configured full speed.
Input Bytes:

None

4.7.14

Module 55 - DP Body Temperature

On the PDT this temperature is called “TCS REF”.
Output Bytes: None
Input Bytes:

Bytes 1 & 2 are a 16-bit signed number for DP temperature in °C.
Byte 3 is condition byte (see

4.7.15

Module 63 - Pump Internal Temperature

On the PDT this temperature is called “DP Temp”.
Output Bytes: None
Input Bytes:

Bytes 1 & 2 are a 16-bit signed number for temperature in °C.
Byte 3 is condition byte (see

4.7.16

Module 12 - MB Override

This module provides MB state feedback. It can also be used to override the control of Module 11 (as normally MB
operation would follow DP) to stop a booster. It can further start a booster, but only if the Profibus module has
control of the pump. (See

). Use this command with caution as if the Profibus module does not have

control it will be possible to stop the booster but not restart it. It is also not recommended to run the MB with the
DP stopped.

Output Byte:

Single byte is MB override.
Values: 1=On
2=Off
Other values - ignored.

Note:

Demand value is only sent from the Profibus module to the pump on change of state.

Input Bytes:

Byte 1 reports the state (feedback) specifically of the Booster.
Values: 0=Off
   1=Off going On
   2=On going off fast
   3=On going off slow
   4=on.
2nd input byte is condition byte (see

4.7.17

Module 46 - Gas Ballast

This module provides Control of the Gas Ballast valve and feedback of its actual state. Normally Gas Ballast valve
operation is controlled by the main DP control function (module 11) and use of this module can override the
(automatic) Gas Ballast valve control from that module.

WARNING

Configuring this module contains significant risk as if the pump is stopped with the valve open the
vacuum system may over-pressurise.

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Содержание CXS

Страница 1: ...D397 53 880 Issue C Original Instructions Instruction Manual GXS CXS Profibus Module Description Item Number GXS CXS Profibus Module D397 53 000 ...

Страница 2: ... s or other normative document s EN61326 1 2013 Electrical equipment for measurement control and Class B Emissions laboratory Use EMC requirements General requirements Industrial Immunity and fulfils all the relevant provisions of 2014 30 EU Electromagnetic Compatibility EMC Directive 2011 65 EU Restriction of Certain Hazardous Substances RoHS Directive 16 08 2016 Eastbourne Larry Marini Senior Te...

Страница 3: ...t the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB T 26572 X 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB T26572 标准规定的限量要求 X Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement of GB T26572 NOTE These products are EU RoHS compliant the following Exemp...

Страница 4: ...This page has been intentionally left blank ...

Страница 5: ...ons 9 4 3 Front panel display 9 4 4 Address set up 10 4 5 Baud rate 12 4 6 Software format 12 4 6 1 Parameterisation 13 4 6 2 Configuration 13 4 6 3 Diagnostics description 14 4 6 4 Data exchange values 14 4 7 Software modules 15 4 7 1 Module 990 Pump Family 17 4 7 2 Module 991 Pump Serial Number 17 4 7 3 Module 110 Remote Local State 17 4 7 4 Module 992 Alert Status 17 4 7 5 Module 11 Pump Contro...

Страница 6: ...4 7 45 Module 14 pXH Run Hours 25 4 7 46 Module 818 pXH Number of Starts 26 4 7 47 Module 820 pXH Current 26 4 7 48 Module 821 pXH Power 26 4 7 49 Module 823 pXH Speed Absolute 26 4 7 50 Module 996 pXH Speed Relative 26 4 7 51 Module 697 pXH Speed Demand 26 4 7 52 Module 813 pXH Body Temperature 26 4 7 53 Module 268 CXS P2 or EMS 26 4 7 54 Module 270 CXS Exhaust Valve 26 4 7 55 Module 271 CXS Exha...

Страница 7: ...igure Page 1 Pin connections for the 2 way Power Connector 3 2 Pin connections for 9 way D type socket 4 3 Pin connections for 9 way D type plug 5 4 Profibus mounted on pump rear 7 5 Profibus module rear connections 8 6 Profibus front panel display 9 Tables Table Page 1 Pin connections for 9 way D type socket 4 2 Pin connections for 9 way D type plug 5 3 Component checklist 7 4 Front panel symbols...

Страница 8: ...This page has been intentionally left blank D397 53 880 Issue C Page iv Edwards Limited 2016 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ...

Страница 9: ...mportant safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process Throughout this manual page figure or title numbers are sequential The following labels appear on...

Страница 10: ...k when requested The pumps provide the DC power for the module The front panel of the module has four LEDs which indicate the status of the module and the Profibus network The Profibus slave address is set using rotary switches The back panel of the module has a 9 way D connector for the Profibus network a 9 way D connector for the RS232 link to the pump and a power connector WARNING Edwards take ...

Страница 11: ...mperature 0 C to 40 C Humidity Max 90 RH non condensing Maximum altitude 2000 m IP rating IP30 indoor use only Ambient storage temperature 30 C to 70 C WARNING Do not exceed the maximum supply voltage Excessive supply voltage will cause permanent damage to the control electronics and may result in a mechanical hazard in some failure conditions Electrical supply 9 V d c to 52 V d c Power consumptio...

Страница 12: ...om chassis Profibus Power Supply 10 mA supply protected for external terminator resistors if required Chassis For Profibus cable screen connection Repeater control signal Digital signal nominally 0 5 V but with series 340 ohm resistor High module transmitting Low Receiving or Idle Table 1 Pin connections for 9 way D type socket Pin Allocation 1 2 3 4 5 6 7 8 9 Shell Chassis box Not connected Profi...

Страница 13: ...ont panel USB connector Connector type 9 way D type Plug Refer to Figure 3 For connection to serial comms port of SCU 750 1500 Controller only RS232 protocol 9600 baud 1 stop bit 8 data bits no parity Pin Allocation 1 2 3 4 5 6 7 8 9 Shell Not connected RS232 receive RS232 transmit Not connected RS232 common Not connected Not connected Not connected Not connected Chassis box Connector type USB Mic...

Страница 14: ...D397 53 880 Issue C Page 6 Edwards Limited 2016 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 15: ...ays If the Module is not to be used immediately store the Module in suitable conditions as described in Section 6 1 3 2 Fitting the module to a GXS pump Fit the Mounting Bracket to the M5 captive nuts in the rear of the pump using the M5 combined bolts and washers provided The bracket fits upright essentially above the exhaust with the mounting holes separated by 125 mm vertically Fit the Profibus...

Страница 16: ...wer Use the cable provided in the kit to connect the 9 way D type free socket and the DC power connector to the Profibus module Connect the 5 way XLR plug to the pump rear system PDT port Figure 5 Profibus module rear connections 3 5 Profibus network connection Standard Profibus network cables and connectors compliant to EN50170 should be used to connect the Edwards Profibus Module to your system ...

Страница 17: ...nd the unit s description will be Edwards_GXS CXS_Pump Note The GSD file should not be altered 4 2 Quick start set up instructions 1 Install the module and connect the cables as described in Section 3 2 Set the address switches on the Profibus module See Section 4 4 3 Apply power or power cycle the Profibus Module for example by disconnecting then reconnecting the power connector 4 Load the GSD fi...

Страница 18: ...ing table may assist Table 4 Front panel symbols and their functions Symbol Name Function Data exchange Module is in data exchange as defined by the Profibus standard Off line Module is not in data exchange as defined by the Profibus standard Error ON at the same as Offline LED Configuration or parameterisation error Flashing at 1 Hz Invalid address selected Power Internal 5 V supply is operating ...

Страница 19: ...4 5 4 22 1 6 85 5 5 23 1 7 86 5 6 24 1 8 87 5 7 25 1 9 88 5 8 26 1 A 89 5 9 27 1 B 90 5 A 28 1 C 91 5 B 29 1 D 92 5 C 30 1 E 93 5 D 31 1 F 94 5 E 32 2 0 95 5 F 33 2 1 96 6 0 34 2 2 97 6 1 35 2 3 98 6 2 36 2 4 99 6 3 37 2 5 100 6 4 38 2 6 101 6 5 39 2 7 102 6 6 40 2 8 103 6 7 41 2 9 104 6 8 42 2 A 105 6 9 43 2 B 106 6 A 44 2 C 107 6 B 45 2 D 108 6 C 46 2 E 109 6 D Table 5 Address switch settings Ad...

Страница 20: ...rchitecture so the user has considerable control of the contents of the Data exchange messages The software modules defined in the GSD files relate to the controller serial communications objects When the unit is linked onto the Profibus it will be parameterised and then configured before entering data exchange The configuration choices are in the GSD file and its comments describe the data conten...

Страница 21: ...out Ao1 Module Mod_B 2 bytes in Bi1 Bi2 2 bytes out Bo1 Bo2 A Configure Mod_A Mod_B gives Output map Input map B Configure Mod_B Mod_A gives Output map Input map Data is always referred to the Master so output is Control data from Master to Slave and Input data is feedback from Slave to Master There are many software modules and many bytes of data Care must be taken in correctly selecting and alig...

Страница 22: ...any configuration and enter data exchange very quickly However at the start of data exchange this means almost no data will actually be available to the Profibus unit and thus not to the Profibus user Instead a CONDITION BYTE is appended to most of the configurable modules The condition byte indicates whether the data in that module is both present and valid The condition byte uses bits as status ...

Страница 23: ...top 0 3 s GXS CXS 3 DP Current 0 3 0 1A GXS CXS 4 DP Power 0 3 0 1kW GXS CXS 184 DP Speed Absolute 0 3 0 1Hz GXS CXS 994 DP Speed Relative 0 3 0 1 GXS CXS 699 DP Speed Demand 2 0 0 1 GXS CXS 55 DP Body Temperature 0 3 C GXS CXS 63 Pump Internal Temperature 0 3 C GXS CXS 12 MB Override 1 2 GXS CXS 46 Gas ballast 1 2 GXS CXS 47 Inlet Purge 1 2 GXS CXS 7 MB Current 0 3 0 1A GXS only 8 MB Power 0 3 0 ...

Страница 24: ... OR EMS 0 2 CXS only 270 CXS Exhaust Valve 0 2 CXS only 271 CXS Exhaust Temperature Warning 0 2 CXS only 272 CXS Exhaust Temperature Alarm 0 2 CXS only 273 CXS Exhaust Pressure Warning 0 2 CXS only 274 CXS Exhaust Pressure Alarm 0 2 CXS only 275 CXS Body Thermal Switch 0 2 CXS only 276 CXS Motor Thermal Switch 0 2 CXS only 277 CXS Flame Arrester 0 2 CXS only 279 CXS MB Motor Running 0 2 CXS only 2...

Страница 25: ...trol before another control device can turn ON any item However in some cases a control device can turn OFF an item without having control The Profibus module only takes control of the pump when it receives a run command from the tool using Module 11 and no other control device has control Output Bytes None Input Bytes Bytes 1 2 form a 16 bit unsigned number which is the object number of the unit ...

Страница 26: ...te 3 Bit 2 Warning Mechanical Booster Temperature Byte 3 Bit 1 Warning Proximity Booster Temperature Byte 3 Bit 0 Warning Exhaust Temperature Byte 4 Bit 7 Warning Exhaust Pressure Byte 4 Bit 6 Warning Gas Byte 4 Bit 5 Warning Gate Valve Byte 4 Bit 4 Warning Water Flow Byte 4 Bit 3 Warning Service Due Byte 4 Bit 2 Warning System Controller System Byte 4 Bit 1 Warning System Controller Device Byte 4...

Страница 27: ...tes 1 2 form a 16 bit unsigned number for number of seconds it will take the pump to stop If pump is not in the process of stopping the value will be zero Byte 3 is condition byte see Section 4 6 4 4 7 9 Module 3 DP Current Output Bytes None Input Bytes Bytes 1 2 form a 16 bit signed number for DP current in 0 1A Byte 3 is condition byte see Section 4 6 4 4 7 10 Module 4 DP Power Output Bytes None...

Страница 28: ...n would follow DP to stop a booster It can further start a booster but only if the Profibus module has control of the pump See Section 4 7 3 Use this command with caution as if the Profibus module does not have control it will be possible to stop the booster but not restart it It is also not recommended to run the MB with the DP stopped Output Byte Single byte is MB override Values 1 On 2 Off Othe...

Страница 29: ...yte is Inlet Purge valve control Values 1 Open 2 Closed 3 Return to normal behavior other values ignored Input Bytes Valve state Values 0 Off Closed 4 On Open 2nd input byte is condition byte see Section 4 6 4 4 7 19 Module 7 MB Current Output Bytes None Input Bytes Bytes 1 2 form a 16 bit signed number for MB current in 0 1 A Byte 3 is condition byte see Section 4 6 4 4 7 20 Module 8 MB Power Out...

Страница 30: ...ng Output Bytes None Input Bytes Byte 1 Nitrogen Flow state 0 Inadequate flow 1 Adequate flow Byte 2 is condition byte see Section 4 6 4 4 7 26 Module 68 Active Utility Control Active Utility Control also called Green Mode is used to reduce pump speed saving energy and Nitrogen flow when the chamber is not processing The Drypump may need to be set up to operate in this mode The Profibus module mus...

Страница 31: ...dule has control of the pump See Section 4 7 3 Use this command with caution as if the Profibus module does not have control it may be possible to turn off the valve but not turn it back on Output Byte Single byte is gate valve control Values 1 On 2 Off Other values ignored Note Demand value is only sent from the Profibus module to the pump on change of state Input Bytes Byte1 valve demand state V...

Страница 32: ...ure This function requires a 4 20ma Temperature sensor almost always a PT100 type to be fitted to the manifold between the MB and DP On the PDT this signal is called PT100_1 Output Bytes None Input Bytes Bytes 1 2 form 16 bit signed number for temperature in C Byte 3 is condition byte see Section 4 6 4 4 7 36 Module 334 Process Pressure This function requires a 4 20ma Pressure sensor to be fitted ...

Страница 33: ...ssure demand for use with module 316 above Output Bytes Form 16 bit unsigned number for pressure setpoint absolute in 0 1 mbar 4 7 43 Module 313 MB 2nd Speed Reference Not applicable to CXS fixed booster speed To operate this module must first be configured in the pump software for example using the PDT sequences menu Output Bytes Byte1 2nd speed control Values 1 On go to 2nd speed 2 Off use norma...

Страница 34: ...tive Not applicable to CXS fixed booster speed Input Bytes Bytes 1 2 form 16 bit unsigned number for actual pXH speed in 0 1 of configured full speed Byte 3 is condition byte see Section 4 6 4 4 7 51 Module 697 pXH Speed Demand Not applicable to CXS fixed booster speed Output Bytes 2 Bytes which are a 16 bit unsigned number for pXH speed demand in 0 1 of configured full speed 4 7 52 Module 813 pXH...

Страница 35: ...59 Module 275 CXS Body Thermal Snap Switch Input Bytes Byte 1 is status Values 1 Good 0 Bad Hot Byte 2 is condition byte see Section 4 6 4 4 7 60 Module 276 CXS Motor Thermal Snap Switch Input Bytes Byte 1 is status Values 1 Good 0 Bad Hot Byte 2 is condition byte see Section 4 6 4 4 7 61 Module 277 CXS Flame Arrestor Input Bytes Byte 1 is status Values 1 Good 0 Bad Byte 2 is condition byte see Se...

Страница 36: ...Spare This signal is not normally used but provides a status signal to the control system Input Bytes Byte 1 is status Values 1 Good 0 Bad Byte 2 is condition byte see Section 4 6 4 4 7 71 Module 267 CXS DP Body This signal provides the status of the DP body thermal snapswitch Input Bytes Byte 1 is status Values 1 Good 0 Bad Byte 2 is condition byte see Section 4 6 4 4 7 72 Module 289 CXS Bypass V...

Страница 37: ...Process even if the pump is in a Warning state Output Byte Values 1 True allows pump to go on Process despite Warning 2 False sets normal state which inhibits pump going On process if a warning exists Other values ignored 4 7 74 Module 1012 CXS On Process Cold CAUTION To avoid premature controller failure this parameter is should not be changed more than 100 times day Normally a pump will not go O...

Страница 38: ...ng Address selection is above 125 or 0 correct the address and re power unit Off line LED is lit and Error LED is lit Unsuitable parameterisation or configuration check extended diagnostics for module number Off line LED is lit and Error LED is not lit Check unit s address matches that being used by the master Check Profibus cable connected Check Profibus master is on line Power LED is lit and all...

Страница 39: ...and national safety and environmental requirements Alternatively you may be able to recycle the Profibus Module and or cables contact Edwards or your supplier for advice also see below The Profibus Module and associated cables are within the scope of the European Directive on Waste Electrical and Electronic Equipment 2002 96 EC Edwards offer European customers a recycling service for the Profibus ...

Страница 40: ...ium Brazil Canada France Germany Hong Kong Italy Japan Korea Switzerland United Kingdom U S A and a world wide network of distributors The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses Order spare parts and accessories from your nearest Edwards company or distributor When you order please state for each part required Model and Item Num...

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