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B777-50-880 Issue D

Page 6

© Edwards Limited 2013. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical Data

2.6

Materials exposed to gases pumped

The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels, 
fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, rare earth magnets, silicon nitride, phenolic resin and 
carbon fibre epoxy resin.

Table 5 - Technical data

Parameter

EXT556H

Notes

Mass EXT556H DN160ISO-K

13.4 kg

Mass EXT556H DN160CF

21.2 kg

Mass EXT556HF DN160ISO-K

19.3 kg

Mass EXT556HF DN160CF

20.5 kg

Main inlet flange

DN160ISO-K/DN160CF

Outlet flange

DN25NW

Vent port

1/8 inch BSP

Purge port

1/8 inch BSP

Inlet pumping speed 

*

N

2

540 l s

-1

He

580 l s

-1

H

2

500 l s

-1

Ar

510 l s

-1

Inlet compression ratio 

†

N

2

>10

10

Pb < 20 mbar

He

10

8

Pb < 12 mbar

H

2

10

6

Pb < 7 mbar

Ar

>10

10

Pb < 20 mbar

Ultimate pressure 

‡

CF

<10

-10

 mbar

ISO

<2 x 10

-9

 mbar

Minimum backing pump 
displacement

12 m

3 

h

-1

Recommended backing pump

RV12

Maximum continuous inlet pressure 
(light gas pumping) 

**

These pressures relate to the 
aluminium envelope variant 
B777-51-000. Performance will vary 
for other pump variants when 
air cooled.

Forced air cooled, 30 °C ambient

1.5 x 10

-3

 mbar

Forced air cooled, 35 °C ambient

1.0 x 10

-3

 mbar

Water cooling at 15 °C

2.0 x 10

-3

 mbar

Содержание B777-51-000

Страница 1: ...nual EXT Compound Turbomolecular Pumps EXT556H and EXT556HF Description Item Number EXT556H DN160ISO K B777 51 000 EXT556H DN160CF B777 52 000 EXT556H DN160ISO K fine inlet B777 61 000 EXT556HF DN160ISO K B777 57 000 EXT556HF DN160CF B777 58 000 ...

Страница 2: ...UL61010 1 2nd Edition Safety requirements for electrical equipment for measurement Control and laboratory use Part 1 General requirements EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances Pumps only comply with the Canadian Standards Authority and Underwriters Laboratory when used with EXDC 80V fami...

Страница 3: ...ion to the vacuum system 11 3 3 1 The inlet screen supplied fitted 13 3 3 2 Inlet connection 13 3 3 3 Backing connection 15 3 4 Vent options vent valve connection and control 15 3 5 Purge gas connection 17 3 5 1 Connect the purge gas 17 3 5 2 Recommended purge gas flow 17 3 6 Electrical installation 17 3 7 Cooling 19 3 7 1 Introduction 19 3 7 2 Forced air cooling 19 3 7 3 Water cooling 19 3 8 Magn...

Страница 4: ...2 7 4 6 FL20K foreline trap 32 7 4 7 TAV vent valve and vent port adaptor 32 7 4 8 ACX air cooler 32 7 4 9 WCX water cooler 33 7 4 10 Vibration isolators 33 7 4 11 PRX purge restrictor 33 7 4 12 VRX vent restrictor 33 For return of equipment complete the HS Forms at the end of this manual Illustrations Figure Page 1 Mounting attitude of the EXT556H pump 9 2 Typical pumping system 12 3 Diagram of i...

Страница 5: ...nlet 15 8 Fault finding 24 9 ISX inlet screen 29 10 Inlet flange seals 29 11 EXC controller 30 12 Pump to controller cable 30 13 EXDC drive modules 30 14 BX bakeout band 32 15 FL20K foreline trap 32 16 TAV vent valve and vent port adaptor 32 17 ACX air cooler 32 18 WCX water cooler 33 19 Vibration isolators 33 20 PRX purge restrictor 33 21 VRX vent restrictor 33 Associated publications Publication...

Страница 6: ...This page has been intentionally left blank B777 50 880 Issue D Page iv Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited ...

Страница 7: ...NINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment or process In accordance with the recommendations of EN61010 the following warning symbols may appear on the pump or its accessories The units used throughout this manual conform to the SI system of units of measurement Also throughout...

Страница 8: ...B777 50 880 Issue D Page 2 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 9: ...F 3 mT horizontal 5 mT vertical EXT556H DN160ISO K 2 5 mT horizontal 5 mT vertical EXT556HF ISO and CF variants 50 mT in any orientation Installation category EN61010 part 1 category 1 Pollution degree CAN CSA UL EN61010 part 1 category 2 Equipment type Fixed equipment for indoor use only Operating altitude up to 2000 m Ambient operating temperature range 5 C 35 C air cooled 5 C 40 C water cooled ...

Страница 10: ...and water vapour subject to the following conditions Oxygen The oxygen concentration must be less than 20 by volume unless a bearing purge is applied as detailed in Section 2 2 2 Water vapour Ensure that vapour does not condense inside the pump refer to Section 3 7 3 If pumping a gas not previously listed contact the supplier for advice If not contact the supplier as the warranty on the pump may b...

Страница 11: ...eed to reach 50 15 seconds Maximum allowed rate of pressure rise see Figure 4 Table 3 Purge gas specification Purge gas system items Reference data Purge gas Dry nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 micron Maximum concentration of oil 0 1 parts per million Allowable purge gas flow when required 20 to 150 sccm 0 33 to 2 48...

Страница 12: ...60ISO K 19 3 kg Mass EXT556HF DN160CF 20 5 kg Main inlet flange DN160ISO K DN160CF Outlet flange DN25NW Vent port 1 8 inch BSP Purge port 1 8 inch BSP Inlet pumping speed N2 540 l s 1 He 580 l s 1 H2 500 l s 1 Ar 510 l s 1 Inlet compression ratio N2 1010 Pb 20 mbar He 108 Pb 12 mbar H2 106 Pb 7 mbar Ar 1010 Pb 20 mbar Ultimate pressure CF 10 10 mbar ISO 2 x 10 9 mbar Minimum backing pump displacem...

Страница 13: ...000 Performance will vary for other pump variants when air cooled Forced air cooled 30 C ambient 10 mbar Forced air cooled 35 C ambient 6 mbar Water cooling at 15 C 7 5 mbar Maximum continuous backing pressure argon pumping These pressures relate to the aluminium envelope variant B777 51 000 Performance will vary for other pump variants when air cooled Forced air cooled 30 C ambient 2 9 mbar Force...

Страница 14: ...C300 EXDC160 Quiescent power consumption 35 W Pumping speeds are without inlet screen The coarse and fine inlet screen reduces the pumping speed by 11 and 17 respectively Pb backing pressure Ultimate pressure is measured 48 hours after bakeout with a 2 stage rotary pump Above this pressure the rotational speed of the pump drops below nominal Heavy gas for example an atomic mass greater than 28 AMU...

Страница 15: ...s Limited 2013 All rights reserved Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited Technical Data B777 50 880 Issue D Figure 1 Mounting attitude of the EXT556H pump 1 Inlet 2 Backing port ...

Страница 16: ...B777 50 880 Issue D Page 10 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 17: ...inspection Do not use the pump if it is damaged Check that the package contains the items listed in Table 6 If any of these items is missing notify the supplier in writing within three days If the pump is not to be used immediately store the pump in suitable conditions as described in Section 6 1 Retain all packing materials for use if the pump is returned for service 3 2 Typical installation A ty...

Страница 18: ...pumping system 1 Alternative position for vent valve 2 Vacuum system 3 High vacuum gauge 4 Inlet screen supplied fitted 5 EXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 Mist filter 12 Cooling water connectors 13 EXC controller 14 Air cooler 15 PRX10 purge restrictor 16 Regulated purge gas supply 17 Vent valve ...

Страница 19: ...an the pump down time may be increased Use the vacuum seal provided with the pump When using an EXT556H ISO160 pump connect it to the vacuum system using an ISO160 rotatable flange with a full complement of bolts Alternatively use at least 8 claw clamps When using an EXT556H DN160CF use a full complement of 20 M8 bolts to attach the pump to the vacuum system If the inlet flange of the EXT556H is n...

Страница 20: ...14 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Installation Figure 3 Diagram of inlet screen remove screws A in order to remove the inlet screen Do not remove screws B ...

Страница 21: ...l speed At and above 50 of full rotational speed the rotor spins fast enough to suppress any hydrocarbon oil from the backing pump Venting may be accomplished by one of the following methods Use a TAV5 or TAV6 solenoid vent valve accessory see Section 7 in place of the manual vent valve Use a TAV5 or TAV6 solenoid vent valve connected to a convenient flange on the vacuum system upstream of the tur...

Страница 22: ...nt valve control it using an EXC controller or by other methods Table 7 gives an indication of the appropriate size of orifice to be fitted to the vent valve for given vacuum system volumes in order that the vent rate is kept within the limits given in Figure 4 Refer to Section 2 for information on vent gas specification Figure 4 Maximum rate of pressure rise when venting ...

Страница 23: ...nnections to the pump after the pump has been installed on the vacuum system The EXC controller provides the electrical supply to the EXT556H pump through the pump to controller cable Connect and lock the bayonet connectors at the ends of the cable to the mating connectors on the pump and the EXC controller if applicable The EXC controller is designed to allow a pumping system to be configured in ...

Страница 24: ...2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Installation Figure 5 Dimensions and features of EXT556H pumps 1 Vent valve 2 Electrical supply connector 3 Backing port NW25 4 Purge plug 5 Earth bond point ...

Страница 25: ...ter cooling accessory and the turbo pump body CAUTION Whilst pumping gases with rmm s 28amu or in the event that baking the pump is required ensure that the inlet and backing pressure is at the limit according to the values given in Table 5 A water cooling accessory is available for the EXT556H pump see Section 7 Fit the water cooler as described in the instructions supplied with it The cooling wa...

Страница 26: ...lers can operate a solenoid valve for this purpose Refer to the controller manual for details If removing the pump for maintenance but do not want to break the cooling water circuit unscrew the fixing screws and remove the water cooler from the pump 3 8 Magnetic Fields WARNING The EXT556HF variant will experience large attractive forces whilst in or near magnetic fields Ensure that the pump is fir...

Страница 27: ...ts a particular process However do not run the pump in this mode for long periods of time as the pump is not designed to be run at this speed for its lifetime 4 3 Shut down Use the procedure below to shut down a basic manually controlled pumping system with a manual vent valve and an EXC controller Refer to the EXC controller instruction manual if the backing pump and accessories are controlled by...

Страница 28: ...off the backing pump immediately and vent the EXT pump Once the EXT pump has stopped rectify the cause of the failure refer to Section 5 5 press the EXC Controller Start Stop button to reset the Fail condition and restart the EXT pump according to the guidelines in Section 4 1 If the pump is hot allow sufficient time for it to cool before restarting it 4 5 Bakeout conflat only CAUTION If baking th...

Страница 29: ...ng EXT556H pumps to Edwards Service Centres please use the procedure included at the end of this manual 5 3 Rotor life CAUTION The fatigue life of EXT Turbo pump rotors is typically 40 000 to 50 000 cycles As a precautionary measure Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of rest to full speed and back to rest or after 10 years use which...

Страница 30: ... Controller or EXDC Pump Drive Module for further fault finding information Table 8 Fault finding Symptom Check Action The pump does not rotate After pressing start Fail LED not lit Is the EXC Controller power LED lit If not check that the electrical supply is on check that the switch at the rear of the EXC Controller is on check the fuse in the rear of the EXC Controller If all of the above are O...

Страница 31: ...et incorrectly Increase the timer setting refer to the instruction manual supplied with the EXC Controller If the EXC Controller still trips into Fail consult Edwards or the supplier The EXC Controller trips into Fail after 50 speed has been reached the first two speed LEDs are lit Is the pressure too high If so reduce the pumping load or check for a gross leak into the system If the high gas load...

Страница 32: ...ve the pump from the system and test the ultimate pressure of the pump alone see Section 3 for specification If poor check the pump for contamination and if necessary clean as described in Section 5 4 Leak check the pump If the leak rate 10 8 mbar l s 1 10 6 Pa l s 1 consult Edwards or the supplier The EXT is very noisy or there is excessive vibration or both Is the pump rotational speed the same ...

Страница 33: ...long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the EXT556H Turbomolecular Pump and any components and accessories safely in accordance with all local and national safety and environmental requirements Particular care must be taken with any components which have been contaminated with dangerous process substances Do...

Страница 34: ...B777 50 880 Issue D Page 28 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Страница 35: ...re can also provide Edwards engineers to support on site maintenance service or repair of the equipment Please ensure that all accessories i e water air cooler are removed prior to returning the pump for service For more information about service options contact the nearest Service Centre or other Edwards company 7 3 Spares 7 3 1 ISX inlet screen An inlet screen is fitted to the pump as supplied t...

Страница 36: ... in Table 11 7 4 3 Pump to controller cable A pump to controller cable must be fitted between an EXC Controller and the EXT pump A cable is not supplied with the EXT Pump or the EXC Controller except EXC250L The following cables are available 7 4 4 EXDC drive modules Fit an EXDC Drive Module as an alternative to an EXC Controller and pump to controller cable Table 11 EXC controller Controller Volt...

Страница 37: ...s and spares 1 Vibration isolator 2 Bakeout band 3 Inlet flange seal supplied 4 Inlet screen fitted 5 EXT556H pump 6 TAV solenoid vent valve 7 DN10NW adaptor 8 Manual vent valve fitted 9 VRX vent restrictor 10 Vent port supplied with manual vent valve fitted 11 WCX water cooling accessory 12 Purge port 13 Purge plug fitted 14 DN10NW adaptor 15 PRX purge restrictor 16 Bakeout band position 17 ACX a...

Страница 38: ...ly open and can be driven automatically from the EXC Controller The solenoid valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and be used with any suitable NW10 flanged port on the vacuum system The vent port adaptor allows the vent port or the purge port to be used with any suitable NW10 fitting refer to Figure 6 7 4 8 ACX air coo...

Страница 39: ...ng ring is available to filter the purge gas and restrict its flow rate to the recommended flow of 25 sccm The restrictor is suitable for all EXT pumps fitted with a purge port 7 4 12 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict the flow of vent gas into the EXT pump Refer to Section 3 4 for information on the selection of the correct VRX vent restrictor Table 18 WCX wat...

Страница 40: ...B777 50 880 Issue D Page 34 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

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