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EBARA Multi-Stage Dry Vacuum Pumps

Pump Maintenance

930601-P

30

service representative for assistance in determining the appropriate inspection and
cleaning interval.

Process

Recommended Interval

Metal Etch

3 - 6 Months (a function of chemistry)

SiN (PECVD)

2 - 3 Months

SiN (LPCVD)

2 Months

TEOS /SiO2

Cooler Cleaning normally not required

Asher

Cooler Cleaning normally not Required.

Cleaning

Cooler cleaning involves removing the coolers from the pump and soaking the coolers
in water or weak acid solutions (depending on the process) to dissolve away any
chemical deposits.  Down-time can be minimized by having a set of exchange coolers
available.  Coolers can be removed and reinstalled in about 2-3 hours.

After soaking, the coolers need to be leak-checked using either a Helium leak test,
Hydrostatic leak test using 10.5 kgf/cm

2

 (150 psi pressure), or immersion in water with

compressed air to the cooler tubes.  After the soundness of the cooler tubes is
confirmed, the coolers should be dried in an oven.

The following list summarizes the recommended cooler cleaning procedures for several
common semiconductor processes.  If not listed below, please contact the local Ebara
service representative for assistance in determining the appropriate cleaning procedure.

Aluminum Etch Processes: Clean the coolers by soaking them in water for 2-3 hours.

PECVD Processes: Cooler cleaning can be accomplished without removing the coolers
form the pump.  Remove both end caps from each cooler and remove the loose
powdery chemical build-up using a vacuum cleaner.

!

WARNING

 

Wear protective gloves when performing maintenance on the coolers.  Review
safety precautions to be taken when using HF Acid before attempting to clean the
coolers.

Nitride LPCVD: For Nitride LPCVD service, the coolers should be examined after two
months of service.  Clean the coolers by dipping them briefly in a 5-10% solution of HF
acid and then rinsing them in water.  Continue this process until the process chemicals
have been completely removed.

The coolers can be damaged if they are left in the solution for any extended
length of time.

Содержание 80?25

Страница 1: ...nnovators in Technology Multi Stage Dry Vacuum Pumps Installation Operation Maintenance Manual Pump Model 80x25 EBARA Technologies Incorporated 51 Main Avenue Sacramento CA 95838 916 920 5451 Fax 916...

Страница 2: ...Copyright 1993 by EBARA Technologies Inc...

Страница 3: ...g or operation could affect performance and could result in accidents causing injury to personnel This manual has been prepared to illustrate how to properly install operate and maintain the pump A st...

Страница 4: ...rent prices for parts labor and transportation Supplier assumes no responsibilities for damages caused by improper installation or by operation in violation of the equipment s rated operation conditio...

Страница 5: ...or nonconformity in the Product In all cases Supplier has responsibility for determining the cause and nature of failure and Supplier s determination with regard thereto shall be final If it is found...

Страница 6: ...Record of changes Rev Date Pag e Position Contents Reason A 12 12 97 New Release per ECO 2905...

Страница 7: ...allation 12 3 1 Unpacking and Initial Positioning 12 3 1 1 Pump Location 12 3 1 2 Leveling Pads 12 3 1 3 Shipping Hardware 12 3 1 4 Lubricating Fluid Reservoirs 12 3 2 Vacuum Piping 13 3 3 Water Pipin...

Страница 8: ...Current 26 5 7 Nitrogen Purge Flow 27 5 7 1 Nitrogen Supply Requirements 27 5 8 Cooling Water Flow Rate 27 5 8 1 Cooling Water Requirements 27 5 9 Ultimate Pressure 28 5 10 Cooler Inspection and Clean...

Страница 9: ...he improper operation or service of the equipment 1 1 1 Electrical Grounding All electrical connections must be properly grounded in accordance with equipment specifications and in compliance with all...

Страница 10: ...aintain proper oil level is an example of where a Caution label would appear Safety Instructions SAFETY INSTRUCTIONS Safety Instruction notices provide specific instructions about avoiding or preventi...

Страница 11: ...is icon indicates potential harm due to extreme heat Warning indicates that severe injury could occur Mechanical Damage CAUTION This icon indicates potential mechanical damage Caution indicates that d...

Страница 12: ...low meter wide open Flow will stabilize around 5 8 lpm 2 1 2 Cooling Water The purpose of the cooling water is to cool motors gears and gas coolers interstage coolers Pressure must be less than 4 kgf...

Страница 13: ...ierta J60 may be used if supplied with pump There are four lubricating fluid reservoirs on each pump module Two primary and two secondary reservoirs A secondary lubricating fluid reservoir is provided...

Страница 14: ...e During overhaul service all bearings labyrinth seal rings and O rings are replaced coolers are cleaned or exchanged and the pump internals area cleaned wet bead finished and vacuum baked The overhau...

Страница 15: ...CURRENT FULL LOAD VOLTAGE RPM INLET OUTLET Flanging INLET EXHAUST PRESSURE QUANTITY C O O L I N G INLET PRESSURE PRIMARY SECONDARY QUANTITY LUBRICATING FLUID WEIGHT APPROX REMARKS N2 P U R G E 2 2 kW...

Страница 16: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 8 2 2 2 80x25 Side View Typical Configuration Refer to Attachments for Specific Information...

Страница 17: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 9 2 2 3 80x25 Gear End Typical Configuration Refer to Attachments for Specific Information...

Страница 18: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 10 2 2 4 80x25 Motor End Typical Configuration Refer to Attachments for Specific Information...

Страница 19: ...EBARA Multi Stage Dry Vacuum Pumps Overview 930601 P 11 2 2 5 80x25 Top View Typical Configuration Refer to Attachments for Specific Information...

Страница 20: ...nt temperature 3 1 2 Leveling Pads Extend the leveling pads and level the pump Each castor includes an adjustable pad that extends making the pump immobile Adjust the pads to level the pump The pump m...

Страница 21: ...foreign particles from entering the pump Always cover the inlet of the pump when it is not connected to the vacuum piping This is to prevent the entry of any foreign materials Completely remove any we...

Страница 22: ...run blow out all water from the pumps with compressed air 3 3 1 Cooling Water Requirements Flow Motor and module 5 0 8 0 lpm 1 3 2 1 gpm Gas coolers 0 8 1 2 lpm 0 21 0 32 gpm Water flow less than 1 li...

Страница 23: ...or 208 volt 3 phase 4 wire service A main circuit breaker receives the incoming power conductors and provides over current protection The power to each motor is controlled by a contactor An overload r...

Страница 24: ...lay contact can be connected to terminals D1 and D2 When the relay contact is crossed the pump will run when the relay contact is open the pump will stop 3 6 Initial Check Check the cooling water and...

Страница 25: ...for a typical pump installation Documentation specific to this pump installation has been included in the Attachments section This section is located at the back of this manual Please refer to the At...

Страница 26: ...ion and is process dependent See Nitrogen Supply Requirements 4 3 Start Up Trial Run NOTICE It is preferred that the initial startup be performed by Ebara service personnel or their authorized represe...

Страница 27: ...1 6 1 6 1 6 2 3 7kW 19 4 19 4 19 6 19 6 20 0 9 7 9 7 9 8 9 8 Volts 190 200 208 210 215 220 230 380 400 415 420 440 460 480 1 5kW 8 2 8 2 8 1 8 0 8 0 8 0 8 0 4 1 4 1 4 2 4 0 4 0 4 0 4 0 60Hz 2 2kW 11 2...

Страница 28: ...ubricating fluid port plug is removed while the pump is in operation or not at atmosphere NOTICE The descriptions and instructions included in this manual are for a typical pump installation Documenta...

Страница 29: ...ed coolers are cleaned or exchanged and the pump internals are cleaned wet bead finished and vacuum baked The overhaul requires 1 2 weeks to complete not including shipping to and from the service cen...

Страница 30: ...perating the lubricating fluid level in all sight glasses should be at or above the lower limit line and no higher than the upper limit line With the pump off the lubricating fluid level should be at...

Страница 31: ...hanging or replenishing lubricating fluid be sure to stop the pump and allow the pump to return to atmospheric pressure Because the lubricating fluid reservoir is under vacuum the pump can be severely...

Страница 32: ...ain for several minutes to ensure sufficient drainage 9 Check and clean the O ring on the drain plug Replace the O ring if it is worn or damaged 10 Replace and tighten the drain plug 11 Remove the use...

Страница 33: ...he used lubricating fluid Be sure to dispose of this lubricating fluid properly The pump is now ready for fresh lubricating fluid 8 Pour the lubricating fluid into the fill port while viewing the leve...

Страница 34: ...is for comparison Check for any unusual or excessive vibration or noise If any abnormality is found 1 Check that the pump is level 2 Check the piping fittings and support 3 Check the lubricating fluid...

Страница 35: ...in 10 of the specified value See 50x20 Specifications NOTICE The nitrogen purge rate has been adjusted at the factory to the required level do not adjust the needle valves located at the purge ports 5...

Страница 36: ...t initial start up For initial values See Start Up Trial Run For pump specifications See 80x25 Specifications If the ultimate pressure is above the rated value or above the value obtained at start up...

Страница 37: ...jacket Inspection Solid matter gradually builds up on the inside of the gas coolers when the pump is run with process gases The rate of build up is dependent on the process and wafer throughput There...

Страница 38: ...is confirmed the coolers should be dried in an oven The following list summarizes the recommended cooler cleaning procedures for several common semiconductor processes If not listed below please cont...

Страница 39: ...inlet side of cooler 3 This is the area that plugs first and it can be used to determine the amount of deposits in the other coolers If the 3 cooler shows heavy deposits the other coolers should be in...

Страница 40: ...lace the end cap being careful not to pinch or damage the O ring Replace the centering O ring if necessary 8 Apply graphite anti seize Permatex 133A to each of the bolts to prevent galling or the tran...

Страница 41: ...rapped in the pump 2 Mark the cooler bodies and end caps designating third fourth or fifth with an indelible ink pen 3 After 15 minutes turn off the Nitrogen If removing the plumbing disconnect the Ni...

Страница 42: ...the bolt back and forth This will usually loosen the bolt and prevent twisting off the bolt head 6 Remove the O ring and set it aside 7 Write down the amount of build up in the coolers Photocopy and u...

Страница 43: ...When finished continue to the next step 16 Use two 36 bungie cord tie downs to support the coolers on the pump 17 Connect all vacuum lines and reinstall all NW 40 and NW 25 connections and piping betw...

Страница 44: ...y products that may be present upon separating the gas coolers from the pump module The Safety Representative can guide you as to the necessary safety precautions that you should take Always obtain a...

Страница 45: ...te valve to the process chamber 5 After 15 minutes turn off the Nitrogen supply and the cooling water supply WARNING The coolers will still be warm and the pump s exhaust manifold will be very hot Use...

Страница 46: ...d pipes and clean them If it is necessary to remove and clean the manifold pipes be sure to replace the centering rings and O rings Use ScotchBrite if the canisters need cleaning 13 Vacuum out any par...

Страница 47: ...it is important to minimize the potential for gross leaks A leak into the pump package could allow moisture to react with process gasses This could cause severe damage to the pump A leak out of the pu...

Страница 48: ...xamined after months of service to gauge the level of chemical build up A pressure gauge is provided to monitor increases in the exhaust line pressure the section of pipe between the final cooler and...

Страница 49: ...tactor 2hp 208V 916031 Motor Contactor 3hp 208V 980754 Motor Contactor 5hp 308V 989079 Lubricant 980595 Water Flow Switch 980085 Cooler G 90 O Ring 989169 Cooler G 140 O Ring 923043 40x20 1 1 1 1 40x2...

Страница 50: ...due to overcurrent Exhaust valve stuck Examine the exhaust check valve and clean if necessary or replace the exhaust valve Pump tolerances clogged with particulate Remove material by vacuuming out th...

Страница 51: ...ve Pump is causing excessive vibration Pump is not level Level the pump Pump is not on rubber cushions Ensure that the pump is on the rubber cushions provided Pump package has shut down and the troubl...

Страница 52: ...exhaust line or both Water found in the coolers Water leak in the coolers Change the defective cooler Water entering from the fab exhaust line Redesign the dry pump exhaust into the fab exhaust so tha...

Страница 53: ...0 7404 CENTRAL REGION Ebara Technologies Inc 3019 Alvin DeVane Boulevard Bldg 3 Suite 350 Austin TX 78741 Phone 512 389 3993 Fax 512 389 3995 WESTERN REGION EBARA Technologies Inc Silicon Valley Opera...

Страница 54: ...SCOTLAND EBARA Technologies Incorporated 3 Adam Square Brucefield Industrial Estate Livingston West Lothian EH 54 9DE United Kingdom Phone 44 1506 460232 Fax 44 1506 460222 6 2 3 ASIA PACIFIC RIM JAPA...

Страница 55: ...hone 886 02 2560 1166 Fax 886 02 2560 1177 SINGAPORE EBARA Engineering Singapore EES No 1 Tuas Link2 Singapore 639550 Phone 65 862 3536 Fax 65 861 0589 KOREA EBARA Precision Machinery Korea Inc 15 FL...

Страница 56: ...e Dry Vacuum Pumps Attachments 930601 P 48 7 0 Attachments One or more of the following items are included to cover areas specific to your pump Please refer to these attachments for further pump speci...

Страница 57: ...EBARA Multi Stage Dry Vacuum Pumps Attachments 930601 P 49...

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