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DUNIWAY Stockroom T-752A-F110, Инструкция по эксплуатации

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EMAIL:

 

[email protected]

FAX:

 

(650) 965•0764

TOLL-FREE [US/CA]:

 (800) 446•8811

TELEPHONE:

 

(650) 969•8811

48501 Milmont Drive • Fremont, CA 94538

DUNIWAY STOCKROOM CORP.

Page 5

Figure 2. 

Terranova® 752A rear panel view

Ion Pump Connections

1. 

HIGH VOLTAGE

 1: Channel #1 ion pump connection

2.  ION PUMP GROUND SENSE 1: Channel #1 safety interlock connection
3. 

HIGH VOLTAGE

 2: Channel #2 ion pump connection

4.  ION PUMP GROUND SENSE 2: Channel #2 safety interlock connection

Other Connections

1.  SAFETY GROUND: Earth ground connection
2.  RS-232 SERIAL I/O: 9-pin D-sub connector used for RS-232, RS-422, and RS-485 

serial communication. See 

Table 10

 on page 35  for pin assignment.

3.  MISC I/O: 15-pin D-sub connector used for analog output, set point relay output, 

and other voltage signals. See 

Table 1

 for pin assignment.

4.  AUXILIARY I/O: 25-pin  D-sub  connector used for analog output,  set point relay 

output, and other voltage signals. See 

Table 2

 for pin assignment.

5.  AC Power Module: Power cord socket and fuse holder

Rear Panel Connections

Содержание T-752A-F110

Страница 1: ...A 94538 DUNIWAY STOCKROOM CORP REV 0720NC Terranova 752A Dual Ion Pump Power Supply Instructions Manual Part No Description T 752A K110 Two 10kV Kings HV connectors 110 VAC T 752A K220 Two 10kV Kings...

Страница 2: ...ree If this product is returned to DSC for warranty service the Buyer will prepay shipping charges and pay all duties and taxes for products returned to DSC DSC will pay for the return of products to...

Страница 3: ...of Conformity 2003309 EMC EN 61000 6 1 2019 EN 61000 6 3 2007 A1 2011 EN 61326 1 2012RLV LVD EN 61010 1 2010 A1 2019 Product Name Terranova 751A Medium Ion Pump Power Supply Terranova 752A Dual Ion P...

Страница 4: ...eturnMerchandise Authorization RMA number to return the Terranova 752A Contacting Duniway Stockroom Duniway Stockroom customer and technical service representatives are available via both telephone an...

Страница 5: ...onnel if proper safety protocols are not followed The note symbol is used to emphasize helpful information from the manual NOTE Since 1976 General Manual Information This manual contains important inf...

Страница 6: ...start Disabling the Speaker Installation 19 Installing the Terranova 752A Connecting the Ion Pump s Safety Interlock Power up 21 Channel Settings 23 Channel Parameters Ion Pump Operation 25 Start Phas...

Страница 7: ...output 13 Figure 5 4 pin header and HV diode diagram 14 Figure 6 Ribbon cable above pin headers 15 Figure 7 JP8 and JP13 pin header location 15 Figure 8 Terranova 752A power vs current graph 27 Figur...

Страница 8: ...parameter ranges 23 Table 6 Recommended ion pump starting pressures 25 Table 7 Linear current monitor voltage output 32 Table 8 Logarithmic output and calculated current values 33 Table 9 Serial I O p...

Страница 9: ...EMAIL info duniway com FAX 650 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page ix Page Left Intentionally Blank...

Страница 10: ...load Protection Fuse for input power Automatic power adjustment during Start Phase Automatic shutdown for shorted output Display Voltage 4 Red LEDs 3 digits polarity symbol X XX Current 4 Red LEDs 3 d...

Страница 11: ...pin D sub connector One unterminated male 15 pin D sub connector One unterminated male 25 pin D sub connector Optional Sold separately RS232 TN751A RS 232 serial communication cable 10 ft 8000 0934 00...

Страница 12: ...or disable voltage operation button must be depressed for more than 2 seconds to enable voltage output 3 SELECT Button to cycle through or select a parameter to modify LED for the selected parameter...

Страница 13: ...voltage operation is disabled or interrupted when LED is illuminated 3 mAMP Illuminates when CURRENT is in the milliampere mA range 4 AMP Illuminates when CURRENT is in the microampere A range 5 TORR...

Страница 14: ...ENSE 2 Channel 2 safety interlock connection Other Connections 1 SAFETY GROUND Earth ground connection 2 RS 232 SERIAL I O 9 pin D sub connector used for RS 232 RS 422 and RS 485 serial communication...

Страница 15: ...status 5 V See NOTE 3 12 CHANNEL 1 current monitor See Analog Output 13 CHANNEL 1 HV status 12 V See NOTE 4 14 CHANNEL 1 HV monitor See Analog Output 15 CHANNEL 1 HV status 12 V See NOTE 5 NOTES 1 PIN...

Страница 16: ...CHANNEL 1 SET POINT relay Normally open NO See Set Point Operation 15 Earth ground 16 Digital ground 17 CHANNEL 2 SET POINT relay Normally open NO See Set Point Operation 18 CHANNEL 2 SET POINT status...

Страница 17: ...EMAIL info duniway com FAX 650 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page 8 Page Left Intentionally Blank...

Страница 18: ...ways to exchange information the Terranova 752A s versatility allows its use in a number of applications Legacy Terranova 752 The legacy Terranova 752 model has been discontinued and replaced by the...

Страница 19: ...ough serial communication However high voltage output is dependent on a secondary interlock in addition to the safety interlock circuit see Safety Interlock on page 20 of the channel The secondary int...

Страница 20: ...nterrupted at a falling edge immediately after a LOW level TTL signal or switch closure is applied The TTL signal or switch is input between PIN 8 PIN 3 of the MISCELLANEOUS port or PIN 13 PIN 15 on t...

Страница 21: ...ter turning OFF the Terranova 752A before removing the power cord WARNING To change the mode of operation 1 Turn unit OFF via the POWER switch 2 Remove power cord and ion pump cable s 3 Remove the six...

Страница 22: ...752A before removing the power cord WARNING Figure 4 Component position for positive voltage output To change the output polarity 1 Turn unit OFF via the POWER switch 2 Remove power cord and ion pump...

Страница 23: ...headers labeled as J2 NEG and J2 POS 10 Remove the header connector 11 Re install header connector onto proper 4 pin header Positive polarity J3 POS J2 POS on previous models Negative polarity J2 NEG...

Страница 24: ...m FAX 650 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page 15 Figure 6 Ribbon cable above pin headers Figure 7 JP8 and JP13...

Страница 25: ...ure 7 Locate the JP13 pin header for CHANNEL 2 17 Remove the 2 pin shunt jumper from respective jumper block 18 Re install 2 pin shunt jumper to the proper position Positive polarity Connect PIN 1 PIN...

Страница 26: ...h S1 has eight individual ON OFF switches labeled 1 through 8 only switch S1 2 is utilized The automatic restart function is by default disabled User should wait at least 15 seconds after turning OFF...

Страница 27: ...ing the power cord WARNING To disable the speaker 1 Turn unit OFF via the POWER switch 2 Remove power cord and ion pump cable s 3 Remove the six 6 32 screws along the edge of the top cover 4 Carefully...

Страница 28: ...either two 10 kV Kings or Fischer style high voltage connectors The connectors are located on the back of the unit labeled HIGH VOLTAGE OUT see Figure 2 on page 5 To connect and operate the ion pump...

Страница 29: ...is open To restart high voltage operation user must correct the grounding issue Table 3 lists various ground sense connection conditions and respective effects on high voltage operation A redundant g...

Страница 30: ...OPEN become illuminated 3 Steps 1 and 2 repeat for CHANNEL 2 4 CHANNEL 1 CURRENT display reads DIP switch hexadecimal code e g 0FC0 See Internal DIP Switch Setup on page 45 CHANNEL 1 PRESSURE display...

Страница 31: ...EMAIL info duniway com FAX 650 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page 22 Page Left Intentionally Blank...

Страница 32: ...annel to control external devices The set point function is by default disabled i e OFF and is enabled and its value set via the respective SET POINT parameter See Set Point Operation on page 31 for d...

Страница 33: ...isplay CURRENT display mAMP LED and MAX CURRENT LED will flash during adjustment 4 Press the SELECT button a fourth time to set or adjust the pump speed Use the RAISE and LOWER button to increase or d...

Страница 34: ...rCell and Galaxy triode require negative polarity See Changing the Output Polarity to modify the high voltage output polarity Pumping Speed L s Pressure Torr 400 500 5 10 5 220 270 1 10 4 110 140 3 10...

Страница 35: ...put increases or remains constant as current decreases user should isolate the ion pump and chamber from the roughing system to help start the ion pump If this isolation leads to an increase in curren...

Страница 36: ...0 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page 27 Figure 8 Terranova 752A power vs current graph Figure 9 Terranova 752...

Страница 37: ...info duniway com FAX 650 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page 28 Figure 10 Terranova 752A voltage vs current g...

Страница 38: ...gauge such as an ionization gauge is strongly recommended for more accurate pressure measurements Cool down Mode If the ion pump current is at or near the MAXIMUM CURRENT value the Terranova 752A will...

Страница 39: ...hen high voltage output is shorted to ground or power output remains relatively high for the respective channel Over current can be due to a malfunction of either the ion pump or ion pump cable Code S...

Страница 40: ...Figure 11 Relay operation graph The corresponding relay will activate once the pressure reading is less than or equal to the respective SET POINT value The corresponding SET POINT LED will become illu...

Страница 41: ...malized value i e divided by 1000 of 1 V per 1 kV for the high voltage output For example an output of 7 5 V corresponds to 7 5 kV Current Monitor Three different user selectable analog output voltage...

Страница 42: ...rent I as a function of the analog output V can be approximated by where V is in volts and I is in amperes For example if V is equal to 4 903 V I rounded to the nearest one is approximately 8 0 10 4 A...

Страница 43: ...Turn unit OFF via the POWER switch 2 Remove power cord and ion pump cable s 3 Remove the six 6 32 screws along the edge of the top cover 4 Carefully lift the top cover and disconnect the fan plug 5 Re...

Страница 44: ...ilable for data transmission RS 232 default RS 422 and RS 485 See Table 9 for pin configuration A separate cable and program such as PuTTY are required to remotely communicate with the Terranova 752A...

Страница 45: ...t OFF via the POWER switch 2 Remove power cord and ion pump cable s 3 Remove the six 6 32 screws along the edge of the top cover 4 Carefully lift the top cover and disconnect the fan plug 5 Remove top...

Страница 46: ...s is 00000101 in binary notation or 5 in decimal notation Figure 12 DIP Switch S2 diagram To change the Terranova 752A RS 485 address 1 Turn unit OFF via the POWER switch 2 Remove power cord and ion p...

Страница 47: ...selected pressure unit MV1 MV2 MAX VOLTAGE value XX00 V MC1 MC2 MAX CURRENT value X XX e XX A PS1 PS2 PUMP SIZE value XXX X L s UN1 UN2 PRESSURE UNITS value TORR mBAR PASCAL NOTES 1 X is a non negati...

Страница 48: ...al address is only necessary when the unit is configured for RS 485 serial communication See Setting the RS 485 Address on page 37 The checksum value is a two digit value used to conduct checksums wit...

Страница 49: ...sage is output when proper command format is not sent Command Characters The following input format is used by the Terranova 752A to modify parameters or operate the high voltage function Hexadecimal...

Страница 50: ...unction is disabled see Checksum Function on page 42 However the Terranova 752A will always output a checksum value regardless of checksum function state Command strings to modify parameters may be se...

Страница 51: ...a the POWER switch 2 Remove power cord and ion pump cable s 3 Remove the six 6 32 screws along the edge of the top cover 4 Carefully lift the top cover and disconnect the fan plug 5 Remove top cover 6...

Страница 52: ...is not working properly Reset control unit see Restoring Default Parameters if problem persists return unit to Duniway Stockroom Unit powers ON but only outputs long continuous BEEP sound No high vol...

Страница 53: ...parameters However resetting the Terranova 752A does not affect any changes done via the internal DIP switches To restore default parameters 1 Turn the unit OFF via the POWER switch 2 Simultaneously d...

Страница 54: ...p pressure readings should only be taken as an approximation and not a reliable indication of system pressure A separate pressure gauge such as an ionization gauge is strongly recommended for more acc...

Страница 55: ...t S1 3 OFF Mode of operation Mode 0 see Setting the Mode of Operation S1 4 OFF S1 7 ON CHANNEL 1 Current monitor scale 2 mA V see Setting the Current Monitor S1 8 ON CHANNEL 2 Current monitor scale 2...

Страница 56: ...d Littelfuse 218 002 To change the fuse 1 Turn unit OFF via the POWER switch 2 Remove power cord and ion pump cable s 3 Locate the fuse block immediately below the power cord socket see Figure 14 4 Pr...

Страница 57: ...EMAIL info duniway com FAX 650 965 0764 TOLL FREE US CA 800 446 8811 TELEPHONE 650 969 8811 48501 Milmont Drive Fremont CA 94538 DUNIWAY STOCKROOM CORP Page 48 Page Left Intentionally Blank...

Страница 58: ...0 4 A at 150 V DC or 300 V AC Protective Circuits for Inductive Loads A protective circuit or component is recommended when switching inductive loads to suppress sudden voltage spikes One method to s...

Страница 59: ...le if Figure II shows a 0 1 A LOAD with a 110 V AC source connected in series with the Terranova relay I 0 1 A and E 110 V AC Therefore Equation 1 provides a capacitance value of 0 001 F Equation 2 pr...

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