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user guide

eon-LT

pc-based monitor

for vers. 3.0.11 software

Содержание Eon-LT

Страница 1: ...user guide eon LT pc based monitor for vers 3 0 11 software TM ...

Страница 2: ...am Control Program Control Screen Process List Layer List Layer Properties List Layer Properties Defined Chapter 4 Settings Settings Screen Backup Restore Sensor Alerts Log Restore Defaults Period Control Relay Control Sensor Zeroing Chapter 5 Vertical Tool Bar Aborting a Process Logging Eon LT Status Zeroing the Sensors Activating Relay 1 and Relay 2 Exiting Eon LT Software Contents 2 Contents ...

Страница 3: ...l Sensors Chapter 7 Green Status Bar Status Indicators and Remote Process Control Chapter 8 Graphs Graph Screen Adjusting Y Values Graphs Color Key Chapter 9 Screen Lock Password Protect Eon LT Screens Screen Lock Button Locking a Screen Setting a New Password Resetting the Password Chapter 10 Troubleshooting Chapter 11 Specifications Process Display Communications Inputs and Outputs Contents 3 Co...

Страница 4: ...e Rate and Thickness of a Process Adding a Layer to a Process Copy a Layer Re ordering the Layers Changing Properties of a Layer Layer Properties List Removing a Layer Deleting a Layer Changing the Material for a Layer Vertical Tool Bar Settings Appendix C Safety Handling Support About Eon LT LabVIEW Interface Software Updates Inspection Initial Setup Warranty Appendix D Tooling Factor Appendix E ...

Страница 5: ...ce Type K Thermocouple Inputs Measures temperature using thermocouples BNC Sensor Inputs Connects to sensor head via external oscillator Outputs For relay and source outputs Eon LT Front Eon LT Back Eon LT Connectors Power Input Connects to 24 VDC power input RS 232 Connects Eon LT to PC Always use the provided USB to RS232 cable LED Indicator Displays status ...

Страница 6: ...ts See proper setup procedures in this manual and in the Phoenix Eon LT quick reference guide Warning Only the provided power supply should be used with Eon LT Not doing so will damage product and void warranty Make sure power supply has a 24 VDC 6 Chapter 1 Eon LT at a Glance ...

Страница 7: ...er 1 Eon LT at a Glance Power supply and cable Input 100 200 VAC 50 60Hz 2 A Output 24V 3 75 A 90W Max system includes one geographically suitable power plug USB to RS 232 adapter Connects RS 232 cable and PC RS 232 extension cable Male to female serial cable Euro US ...

Страница 8: ...8 Chapter 1 Eon LT at a Glance External oscillator optional Replaces the Eon LT internal oscillator Software CD Contains Eon software suite ...

Страница 9: ...nnecting to QCM Connect SMA Coaxial Cable to QCM Spin cable in place using cable shaft until resistance is felt Twisting cable shaft past point of resistance may damage cable Roll fingertip over connector to tighten 2 Connecting to Eon LT Connect QCM to Eon LT Connect BNC extension cable to SMA which then connects to the BNC adapter cable using the provided BNC union Then connect the other end of ...

Страница 10: ...ighten integrated screws Connecting Eon LT to PC 1 Install Eon LT Software onto PC Insert the accompanying Eon LT software CD into disc drive Follow prompts to install software onto PC 3 RS 232 cable to USB Adapter Plug the other end of the RS 232 cable into the USB to RS 232 adapter Tighten integrated screws ...

Страница 11: ... into PC 11 Chapter 2 Getting Started 5 Connect Power to Eon LT Plug Eon LT power adapter into AC outlet Then plug DC connector into the Eon LT 6 Start Eon LT Software Start Eon LT software and navigate to the Program Control screen to begin creating your processes see Chapter 3 ...

Страница 12: ... are already installed simply update the drivers when installing software Use only the provided USB cable Ensure that the software has been fully installed before connecting Eon LT to your PC Reboot PC following Eon LT software installation ...

Страница 13: ... or delete an existing process as well as add or remove layers and layer properties Process List Create a new process Selecting the New button located below the Process List allows you to create and name a new process Process List Layers List Layer Properties List Create new or delete existing process Permanently delete layer Screen Selection Tool Bar Vertical Tool bar Create new or delete existin...

Страница 14: ...Renaming a process Double click a process in the Process Layers List Copy Layer Select an existing layer and press Copy to produce a copy in the list Change order of layers On the Layers List click and hold a layer drag the layer up or down the list and release the layer where desired Remove Layer On the Layers List click and hold a layer drag the layer up or down the list and release the layer wh...

Страница 15: ...change values for layers The Layer Property Value window allows you to enter or change the value of a layer property Note Material Source and Sensor operate differently than the other items listed on the Layer Properties List Open Layer Property Value window Double click a layer property at any time even during a process run Create new layer Select New button located below the Layers List You can ...

Страница 16: ...d click on the Material row to open the Materials List Select the applicable material and double click a material or click OK The correct density and Z Factor is automatically set Layer Properties Defined The following is a list of settings that defines the parameters of the deposition All settings must be set correctly for the software to function properly If the material being applied in your pr...

Страница 17: ...perform numerous tasks such as backing up and restoring settings opening the log folder adjusting period and managing relays and sensor zeroing settings Backup Restore The Backup and Restore commands enable the user to save deposition processes heating cycles and general settings in Eon LT software Selecting Backup brings up the Backup screen Vertical Tool bar Screen Selection Tool Bar Settings Sc...

Страница 18: ...er can disable the notifications in the instance that the crystal is being used in a testing environment 18 Chapter 4 Settings On the Backup screen click on the item you wish to save Restoring backed up settings Selecting the Restore button opens the Restore screen The user can now restore deposition processes heating cycles and general settings by clicking on the appropriate button Note The resto...

Страница 19: ...lts button reinstates all of the settings to default values This command is often used if the current settings are producing undesired results Opening saved log files Selecting the Open Log Folder opens the folder to which the logs are currently being saved By default this location is Public Documents EON_LOGS Period Control The Period control tuner is used to adjust data collection frequency in i...

Страница 20: ...tures two relays with independent settings Manual When Manual is selected the relay remains in its present state The user can close turn on or open turn off the relay at will Sensor Zeroing With the Sensor Zeroing panel the user can select when to zero Sensor 1 or Sensor 2 Settings for each sensor are identical ...

Страница 21: ...rt a process record a log zero the sensors activate the relays or exit Eon LT software Zeroing the Sensors The sensors can be zeroed from any screen Pressing the Zero All Thickness button zeros Sensor 1 and Sensor 2 at once Logging Eon LT Status Eon LT status can be logged to a monitor log from any screen Pressing the Log button saves a monitor log to the monitor log save folder Public eon_logs mo...

Страница 22: ...Activating Relay 1 and Relay 2 The Relay 1 and Relay 2 buttons permit manual control of the relays Exiting Eon LT Software Eon LT software can be exited from any screen Simply press the Exit button and when prompted press Exit again ...

Страница 23: ... real time information on the progress of the process Data for each sensor is represented health layer frequency material rate thickness and percentage complete Important information such as source power and temperature is also displayed Zero Sensor Health Layer Material Frequency Rate Thickness Temperatures Status Bar Vertical Tool bar Screen Selection Tool Bar ...

Страница 24: ...l the indicator will flash red informing the user that the sensor is being used to control the selected source for the material being applied During this process the material being applied is also displayed Frequency Sensor frequency Rate Rate of deposition Thickness Thickness of deposition applied to sensor Zero Sensor The Zero Sensor buttons zero corresponding sensor thickness to zero ...

Страница 25: ...tures TC1 The current temperature of the sensor body which is connected through TC1 TC2 Axillary thermocouple connection Manually Zeroing Individual Sensors Click the Zero Sensor button that corresponds to the sensor to be zeroed ...

Страница 26: ...T is currently performing Information updates in real time as Eon LT performs each task Time Indicator Displays the run time of the current active process The Time Indicator also retains the run time of the last completed or aborted process Remote Process Control When a process is selected the Status screen will display the first material to run on each sensor If no materials are selected to be me...

Страница 27: ...lick on Graphs in the Screen Selection tool bar The Graphs screen features line graphs for frequency temperature rate power and thickness Unlike real time data data in graph form can provide the user with a comprehensive historical perspective on a developing deposition process Frequency Temperature Color Key Rate Thickness Vertical Tool bar Screen Selection Tool Bar ...

Страница 28: ...Hz Rate Displays the rate of the material application over time in Å s Thickness Displays the thickness of material application over time in kÅ Temperature Displays the temperature over time in C Power Displays the power of the sources and heater over time in percentages in Color Key The Color Key displays the color values representing the various devices being depicted on each graph ...

Страница 29: ...en Selection tool bar Locking a screen helps ensure that the controls and settings on each screen remain secure and under password protection Screen Lock Button To access the Screen Lock controls click on the Screen Lock button If a password is already in place the password prompt appears Entering the correct password will exit to the Screen Lock screen ...

Страница 30: ...and Re Type Password fields must contain the same password Click OK to save new Screen Lock screen settings or Cancel to return to original settings If a password is NOT already in place the Screen Lock screen appears Use these controls to lock and unlock screens and change the Screen Lock password 30 Chapter 9 Lock Screen important Leaving password fields empty DOES NOT disable the Screen Lock At...

Страница 31: ...ssword settings Resetting Password To reset the Screen Lock controls password click on the Screen Lock button and enter the following code into password prompt 45647kyswx94272fyshq When the Screen Lock screen appears enter a new password into the password fields ...

Страница 32: ...ensor not detected Check sensor connection No information displayed Wrong COM port selected Restart and select the correct ComPort Rate reads 1 Improper settings Restart software and Eon LT If you cannot resolve an issue please contact Colnatec support at support colnatec com or call 480 634 1449 ...

Страница 33: ... 9 KÅ Frequency 3 00 to 6 500 000 Hz Run Time Hh mm ss Temperature 0 to 999 9 C Health 0 00 to 100 Communications Factory Set RS 232 PC version Inputs and Outputs Voltage input 24 VDC RS232 Input One Half Duplex Sensor Input Two BNC Connector TC Output 2 Type K Connectors 0 5 VDC Control Output One DB9 Connector Dual Relay Output ...

Страница 34: ...enix Eon LT System Appendix Phoenix Eon LT System Configuration Rendering illustrates basic connections of Phoenix Eon LT system Eon LT Monitor substrate source shutter QCM Eon software installed on your PC Remote oscillator optional TC cable ...

Страница 35: ...k OK 6 This process is now selectable through the Process List or the Remote Process Control panel on the Green Status bar Note In order for the program to update the source power the user must enter a new value and then click away from the Source Power indicator Renaming a process 1 Press the Program button on the Screen Selection tool bar 2 Double click the process you wish to rename 3 In the ne...

Страница 36: ...rical order from top to bottom Changing properties of a layer 1 Press the Program button on the bottom of the screen 2 Select the process in the Process List containing the layer that requires editing 3 From the Process Layers list select the layer to be edited 4 Double click on the Property to be edited 5 In the new window that opens enter the new value for the property 6 Press OK Note If an inco...

Страница 37: ...the material and the material values Removing a Layer 1 Press the Program button in the Screen Selection tool bar 2 From the process list select the Process with the layer that needs to be removed 3 In the Process Layers list select the layer that needs to be removed 4 Press Remove directly beneath the Process Layers list Note Removing the layer only removes the layer from the Process Layers list ...

Страница 38: ... monitor log save folder PublicDocuments eon_ logs monitoring Zeroing Both Sensors Manually 1 Press the Zero All Thickness button on the Screen Selection tool bar Activating Relays Manually 1 The relays can be activated from any screen 2 On the Screen Selection tool bar toggle the Relay button to activate the relays Exiting Eon LT Software 1 Eon LT software can be exited from any screen 2 Press th...

Страница 39: ...bar 2 Select General tab 3 Select the desired thickness measurement units Disable Enable Sensor Failure Alerts 1 Press the Settings button on the Screen Selection tool bar 2 Select Alerts tab 3 Check or uncheck the checkmark box of the corresponding sensor to enable or disable failure alerts Checked Shows sensor failure alerts Unchecked Hides sensor failure alerts Append a Log Name to Log files 1 ...

Страница 40: ... Relay button Start At the start of each layer material in the process the relay will activate and will deactivate at the end of each material Predeposit The relay will activate during the predeposit phase of the deposition process for each layer material The relay will then shutoff at the end of the deposition process Auto Deposition The relay will activate during the dwell phase just before the ...

Страница 41: ...e for any injury resulting from product misuse modification or disassembly Warranty Label If the warranty label has been tampered with VOID will appear where the warranty label was originally placed If this is visible at the time of arrival it is important that you contact Colnatec immediately after receiving the product 41 Appendix C Safety Handling Support ...

Страница 42: ...s a simple LabVIEW interface that provides an operating environment that is intuitive efficient and impressive The Eon LT is easy to set up right out of the box Software Updates The Eon LT interface software can be upgraded on site to provide software improvements There will be notifications when these updates become available Inspection Initial Setup Examine Eon LT for any signs of physical damag...

Страница 43: ...625 N Gilbert Road Suite 205 Gilbert AZ 85234 480 634 1449 support colnatec com www colnatec com 43 Appendix C Safety Handling Support Contact Colnatec Support ...

Страница 44: ...Tooling Factor D Appendix 44 Appendix D Tooling Factor Crystal Source ...

Страница 45: ...equation modified Sauerbrey equation modified Mass to Frequency Correlation Formula Nat Frequency Constant 166100 Hz cm dq Density of Quartz 2 649 gm cm3 df Density of film gm cm3 Fc Coated Frequency Hz Fq Uncoated Frequency Hz Z Z ratio ...

Страница 46: ...erties of a layer 36 Changing the material for a layer 37 Color Key 27 28 Communications 33 COM port 32 Connector 33 Connectors 5 33 Copyright 50 D Delete Layer 37 Deleting a Process 35 Density 16 37 Display 5 26 28 Drivers 12 E Eon LT 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 Exiting 22 38 F Frequency 18 19 23 24 27 28 Index...

Страница 47: ...nterface 42 Layer 13 14 15 23 24 36 37 40 Layer Properties Defined 16 Layer Properties List 13 15 16 Layers 13 14 15 36 37 Locking a Screen 30 Log 19 20 21 38 39 40 Log files 19 39 Logging Eon LT Status 21 M Manually Zeroing Individual Sensors 25 Material 15 16 23 24 26 28 33 37 40 Mass to Frequency Correlation Formula Sauerbrey equation modified 45 N New layer 15 36 40 ...

Страница 48: ...37 Restore 17 18 19 40 Restore Defaults 19 40 S Safety 41 42 43 Sauerbrey equation modified 45 Screen Lock 29 30 31 Screen Lock Button 29 Screen Selection Tool Bar 13 17 23 27 35 Sensor 5 15 18 20 21 23 24 25 32 33 39 40 Sensor Alerts 18 Sensor Zeroing 17 20 40 Setting a New Password 30 Settings 17 18 19 20 35 39 40 Setup 42 46 Software Updates 42 Source 5 23 24 35 Source Power 35 Status 19 21 23 ...

Страница 49: ...ture 27 28 33 Thermocouple 25 Thickness 14 23 24 27 28 36 39 40 Time 15 23 26 27 28 39 40 41 Troubleshooting 32 U Units 39 Updates 42 USB 5 7 10 11 12 V Vertical Tool Bar 21 22 W Warranty 41 42 Z Zeroing the Sensors 21 Zero Sensor 23 24 25 Z Factor 16 37 ...

Страница 50: ...s no condition or warranty expressed or implied about the fitness of this technical manual or accompanying hardware product Colnatec reserves the right to make changes to this technical manual or accompanying hardware or design without notice to any person or company Colnatec shall not be liable for any indirect special consequential or incidental damages resulting from the use of this technical m...

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