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SLA7900 Series

Installation and Operation Manual

X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009

Section 1 Introduction

RATINGS:

Pressure Equipment Directive (PED) 97/23/EC

See Table 1

Mounting Attitude Sensitivity

0.2% of FS maximum deviation after rezeroing

Valve Leak-By:

< 0.5% F.S.

Leak Integrity

Inboard to Outboard: less than 1x10

-10

atm scc/sec Helium max.

Ambient Temperature Limits

Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)

Maximum Operating Pressure Range

1500 psig (10,342 kPa) maximum
150 psig (106.2 kPa) and below recommended for
best performance.

Differential Pressure Range

5 - 50 psid (broader depending on customer conditions;
consult factory for details.)***
(34.5 - 344.7 kPa)
(259 - 2586 torr)

Particulate

Zero particles per cubic foot greater than 0.1 microns under process
conditions. Less than 4 particles per cubic foot greater than 0.02 microns
under process conditions.

PHYSICAL:

Materials of Construction

316L Vacuum Arc Remelt (VAR), 316L
and high-alloy ferritic stainless steel.
External/internal seals:

Nickel

Valve seat: 17-7PH stainless steel - standard

Process Connections

Integral 1/4" male VCR

CS Seal (SEMI 2787.5 or SEMI F82-0304 R1-1)
C Seal (SEMI 2787.1 or SEMI F82-0304 R1-2)
W Seal (SEMI 2787.3 or SEMI F82-0304 R1-3)

Table 1 PED Rating

Mass Flow

Flow Ranges

Pressure

PED Module H

Controller

N2 Equivalent Ratings

Category

Models

Min. f.s. Max f.s.

Unit

Bar

SLA7950/

3.0

50,000

sccm

100 Bar

SEP

SLA7960

Содержание SLA7950

Страница 1: ...MFC eng Part Number 541B022AAG August 2009 Brooks Models SLA7950 SLA7960 Mass Flow Controllers Meters Model SLA7950D Digital I O DeviceNet Downport Model SLA7950S Analog I O 15 pin D Connector VCR Fit...

Страница 2: ...titutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualif...

Страница 3: ...d chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performan...

Страница 4: ...Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 SLA7900 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 5: ...trical Interface Analog I O 2 5 2 11 Operation Check Procedure Analog I O 2 9 2 12 Electrical Interface DeviceNet I O 2 10 2 13 Operation Check Procedure DeviceNet I O 2 11 2 14 DeviceNet Features 2 1...

Страница 6: ...I O Version 2 6 2 2 Common Electrical Hookups for 15 pin D Connector Voltage I O Version 2 6 2 3 Recommended Wiring Configuration for Current Signals Non Isolated Power Supply 2 7 2 4 Recommended Wir...

Страница 7: ...ow measurement and control instrument which offers unparalleled flexibility and performance The SLA7900 Series MFC is designed for use in advanced gas handling systems The result is the most accurate...

Страница 8: ...uring no flow conditions and then utilizes the alarms to notify the user when an out of limits condition has been detected Zero drift can be accurately detected because Brooks MFCs have the ability to...

Страница 9: ...ge 5 50 psid broader depending on customer conditions consult factory for details 34 5 344 7 kPa 259 2586 torr Particulate Zero particles per cubic foot greater than 0 1 microns under process conditio...

Страница 10: ...9 pin D conn Valve Override Input 1 Flow Signal 0 5 volt Output 2 Power Supply 13 5 Vdc to 27 Vdc 3 Power Supply Common 4 Not Connected 5 Setpoint 0 5 Vdc Input 6 Flow Signal Common Output 7 Setpoint...

Страница 11: ...IBM compatible PC s are not equipped with RS 485 ports as standard An RS 232 to RS 485 converter or RS 485 interface board is therefore required to connect an RS 485 network to a standard pc The RS 48...

Страница 12: ...nnected on the same network Baud rate selections for DeviceNet products are 125K 250K and 500K and can be selected via MAC ID switches mounted on the device The DeviceNet communication link also provi...

Страница 13: ...Introduction Figure 1 2 Model SLA7950S MFC Analog I O 9 pin D Connector with VCR Fittings Figure 1 3 Model SLA7950S MFC Analog I O 9 pin D Connector with Downport Connections C seal MFM Outline drawin...

Страница 14: ...ntroduction Figure 1 4 Model SLA7950S MFC Analog I O 15 pin D Connector with VCR Fittings Figure 1 5 Model SLA7950S MFC Analog I O 15 pin D Connector with Downport Connections C seal MFM Outline drawi...

Страница 15: ...tion 1 Introduction Figure 1 6 Model SLA7950D MFC DeviceNet Digital I O with Downport Connections C seal Figure 1 7 Model SLA7950D MFC DeviceNet Digital I O with VCR Fittings MFM Outline drawing is id...

Страница 16: ...ual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 1 Introduction Figure 1 8 Model SLA7950S MFC 15 pin D Connector Analog I O with 1 5 Downport Connections W seal MFM Outline drawing...

Страница 17: ...81 0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Remove the envelope con...

Страница 18: ...low instruments returned to Brooks requires completion of Form RPR003 1 Brooks Instrument Decontamination Statement along with a Material Safety Data Sheet MSDS for the fluid s used in the instrument...

Страница 19: ...filter be installed upstream from the mass flow controller to prevent the possibility of any foreign material entering the flow sensor or control valve The filtering element should be replaced periodi...

Страница 20: ...n see calibration data sheet supplied with the instrument can result in a 0 2 maximum full scale shift after rezeroing e When installing a mass flow controller with 1 4 m VCR end fittings and with ful...

Страница 21: ...to a setpoint input signal The 0 4 20 mA setpoint signal should be driven into the MFC input by a controlled current source Reference Brook s device specifications for the setpoint input impedance Th...

Страница 22: ...SIDE SUB D 15 PIN PIN COLOR 6 1 Setpoint Common Input BLACK 10 2 Flow Signal 0 1 5 volt Output WHITE 9 3 TTL Alarm Open Collector Output RED 2 4 Flow Signal 0 4 20 mA Output GREEN 13 5 Power Supply 13...

Страница 23: ...TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 2 Installation Figure 2 3 Recommended Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 4 Recommended Wiring C...

Страница 24: ...9 pin D conn Valve Override Input 1 Flow Signal 0 5 volt Output 2 Power Supply 13 5 Vdc to 27 Vdc 3 Power Supply Common 4 Not Connected 5 Setpoint 0 5 Vdc Input 6 Flow Signal Common Output 7 Setpoint...

Страница 25: ...low signal output 0 5 FS g If flow signal at 0 setpoint is 0 5 then there is too much leak through across valve seat and orifice MFC would need to be reworked to adjust valve shutoff h Supply a setpoi...

Страница 26: ...r and network signals are interfaced to the MFC through the standard 5 pin Micro connector on the device This connector is specified in the DeviceNet Specification Vol 1 Section 9 3 6 3 and is defined...

Страница 27: ...much leak through across valve seat and orifice MFC would need to be reworked to adjust valve shutoff h Provide the proper UOM setpoint beween 20 and 100 FS to the MFC i Check the MFC output signal UO...

Страница 28: ...2 12 SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 2 Installation THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 29: ...he pressure difference caused by the restrictor varies linearly with total flow rate The sensor has the same linear pressure difference versus flow relationship The ratio of sensor flow to the flow th...

Страница 30: ...s valve performance data and information about the calibration conditions The Model SLA7950 can contain calibrations for different gases or for the same gas at multiple conditions pressures full scale...

Страница 31: ...e operating the SLA7900 Series apply power and warm up the instrument for approximately one hour After warm up apply gas pressure then proceed by following the instructions in the following sections B...

Страница 32: ...tablished across the device If there is pressure across the instrument during the zero process any detected flow through the sensor will be misinterpreted as the zero flow reading This will result in...

Страница 33: ...3 5 SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 3 Operation Figure 3 3 Flow Control System Block Diagram...

Страница 34: ...3 6 SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 Section 3 Operation THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 35: ...on 4 Maintenance Troubleshooting 4 1 Overview No routine maintenance is required on the SLA7900 Series devices If an in line filter is used the filtering elements should be periodically replaced This...

Страница 36: ...fficient pressure drop across the SLA7900 series MFC low or no pressure If there is not enough pressure differential across the MFC it is impossible for the MFC s orifice to pass the full scale flow r...

Страница 37: ...signal unstable 7 Model SLA7950 Series MFC performance is tuned during calibration at the conditions specified on the order If the conditions in use inlet and outlet pressure temperature attitude gas...

Страница 38: ...urpose of the Rotary Switchess on top of the SLA7900 Series MFC Two of the rotary switches are labeled ADDRESS These two switches are used to configure the MAC ID of MFC when used on the DeviceNet net...

Страница 39: ...stream 2 Temperature Sensor Su Downstream 3 Temperature Sensor Sd 4 Sensor Common 5 Heater Common 6 Thermistor 7 Thermistor Table 4 1 Sensor Troubleshooting 4 3 Gas Conversion Factors If a mass flow c...

Страница 40: ...desired gas is 20 Helium He and 80 Chlorine Cl by volume The desired full scale flow rate of the mixture is 20 slpm Sensor conversion factor for the mixture is Nitrogen equivalent flow 20 945 21 16 s...

Страница 41: ...have different pressure drops and produce controllers with different full scale flow rates For a discussion of the interaction of the various parts of the controller you are urged to review Section 3...

Страница 42: ...0 Series MFC uses two types of restrictor assemblies depending on full scale flowrate and expected service conditions 1 Wire mesh for Nitrogen equivalent flow rates above 3 4 slpm These restrictor ass...

Страница 43: ...anual Med venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 199...

Страница 44: ...guration Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de lo...

Страница 45: ...Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez...

Страница 46: ...ekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend It...

Страница 47: ...elektrisk jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 40...

Страница 48: ...on oltava maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Ma...

Страница 49: ...e Now Brooks is the first MFC supplier to prove their stability Zero Drift Diagnostic on Brooks Model SLA7950S A configuration tool application is provided that allows the user to customize the Zero D...

Страница 50: ...Limit Setpoint Flow Signal Flow Alarm Anunciated Alarm Delay 0 Figure B 2 ZDD Interlock Timing The user may specify the error limit that the Zero Drift Diagnostic will allow before notifying the user...

Страница 51: ...When drift is detected thealarmLEDwillflashtheZeroDriftDiagnostic alarm flash code 13 unless changed by the user The alarm contact will also be closed if the option is enabled Transitioning the MFC to...

Страница 52: ...over upwards 3 Plug the converter onto the desired communications port of your PC 4 Plug the 9 pin D connector on the cable to the converter 5 Plug the cable onto the service port as shown in Figure B...

Страница 53: ...ort The ZDDCT automatically detects all available COM ports and displays them in the Select Communications Port pull down box Select the COM port that the SLA7950S MFC to be configured is connected to...

Страница 54: ...that control the functionality of the ZDD features The effect of each configuration parameter on the functionality of the Zero Drift Diagnostic along withtherangeofvalidvaluesisdetailedbelow Enable En...

Страница 55: ...The range of valid values is 0 5 to 100 The default value for Error Limit is 1 0 Adjust Error Limit for Temperature When enabled the Error Limit will be adjusted to the device s Zero Temperature Drif...

Страница 56: ...evice TheparametersintheSLA7950S will be updated with the values as configured during step 3 When the parameters have all been successfully written and verified the following dialog box will appear Er...

Страница 57: ...SLA7900 Series Installation and Operation Manual X TMF SLA7900 MFC eng Part Number 541B022AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 58: ...inety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUP...

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