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Installation and Operation Manual

X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009

Model SLA7840

Brooks

Model SLA7840 Remote Transducer

Pressure/Flow Controller

Model SLA7840D

Digital I/O DeviceNet

Model SLA7840A

Analog I/O

Содержание SLA7840

Страница 1: ...Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 Model SLA7840 5 Brooks Model SLA7840 Remote Transducer Pressure Flow Controller Model SLA7840D Digital I O DeviceNetTM Model SLA...

Страница 2: ...itutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualifi...

Страница 3: ...chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performanc...

Страница 4: ...Model SLA7840 Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 5: ...10 Electrical Interface Analog I O 2 4 2 11 Operation Check Procedure Analog I O 2 5 2 12 Electrical Interface DeviceNet I O 2 6 2 13 Electrical Interface Analog I O 2 6 Section 3 Operation 3 1 Overvi...

Страница 6: ...nnector Shielded Cable Hookup Diagram Voltage I O Version 2 6 2 3 Common Electrical Hookups for 15 Pin D Connector Voltage I O Version 2 6 3 1 Flow sensor Operational Diagram 3 2 3 2 Model SLA7840 Sys...

Страница 7: ...egral PID control electronics and a control valve maintains a desired set pressure In addition to the pressure function the Model SLA7840 provides a 0 5 V signal that is linear with mass flow rate The...

Страница 8: ...i range capabilities to reduce customer inventory Storage and pre programming of up to 10 gas calibrations easily permits users to switch between different gases and ranges on a single device Also the...

Страница 9: ...ansducer maximum 500 psig External Sensor Input Suitable for pressure sensors with maximum 0 10 Vdc output signals Pressure Control Range 20 1 Pressure Settling Time Less than 1 second typical for a 2...

Страница 10: ...seals Nickel Valve seat 316L stainless steel standard Internal Wetted Surface Finish 32 Ra maximum Dimensions Refer to Figures 1 1 and 1 2 Process Connections 1 4 male VCRTM standard Electrical Chara...

Страница 11: ...valve to command setpoint Connected to signal at or above 5 0 Volts maximum 16 Vdc valve is forced open Connected to signal at or below 0 0 Volts minimum 1 Vdc valve is forced closed 5 Volt Reference...

Страница 12: ...stallation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 Figure 1 1 Model SLA7840A Analog I O Controller with 1 4 VCR Connections Figure 1 2 Model SLA7840D Digital I O De...

Страница 13: ...0 3 5633 7100 6710 BK Ede Netherlands Fax 81 0 3 5633 7101 Tel 31 0 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 0 318 549 309 E mail BrooksEu BrooksInstrument com Remove the envelope conta...

Страница 14: ...of form RPR003 1 Brooks Instrument Decontamination Statement A copy of this form can be downloaded from the Brooks website www brooksinstrument com or is available from any Brooks Instrument location...

Страница 15: ...w sensor or control valve The filtering element should be replaced periodically or ultrasonically cleaned Table 2 1 Recommended Filter Size Maximum Flow Rate Recommended Filter 100 sccm 1 micron 500 s...

Страница 16: ...trolled using analog 0 5 Vdc signals The minimum set of connections which must be made to the Model SLA7840 RT includes 15 Vdc supply common and a setpoint signal The setpoint signal is supplied as a...

Страница 17: ...If flow output signal does not match setpoint and pressure settings are correct this could indicate a problem in the RT A secondary issue could be the gas type When checking with a surrogate gas ensu...

Страница 18: ...his connector is specified in the DeviceNet Specification Vol 1 Section 9 3 6 3 and is defined as a male sealed micro style connector The figure below illustrates the electrical connections to the dev...

Страница 19: ...linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the RT A B constant The full scale flow rate of the...

Страница 20: ...lve A system block diagram is shown in Figure 3 1 The integration of mass flow sensor control electronics and control valve into one unit results in a compact size The mounting dimensions are comparab...

Страница 21: ...Section 3 Operation Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 Figure 3 2 Model SLA7840 System Block Diagram Figure 3 3 Model Typical Application of Down...

Страница 22: ...user to establish the RT setpoint The usable range of this input is from 0 to 5 5 Vdc which corresponds to 0 to 110 of the RT full scale flow rate Setpoints below 50 mV will be treated as 0 volt setpo...

Страница 23: ...mode then returns to normal operation Typical time required to change modes is approximately 0 5 seconds NOTE It is recommended to change operating modes during no flow conditions F Zeroing the RT Sel...

Страница 24: ...mode the user must use the Brooks Service ToolTM to switch between the various active gas calibration data sets For more information about the Brooks Service Tool please contact your nearest Brooks s...

Страница 25: ...rovides the following information Troubleshooting Application Information 4 2 Troubleshooting If it becomes necessary to remove the controller from the system after exposure to toxic pyrophoric flamma...

Страница 26: ...1 Restore the conditions to the values as they appear on the order This section contains suggestions to help diagnose RT related problems in the gas distribution system and answers commonly asked ques...

Страница 27: ...about its environment Adaptive valve control helps to match the valve performance to the gas pressure and temperature of actual use The RT must be returned to the factory or a trained field service te...

Страница 28: ...either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmmeter reading will be obtained Pin 4 to Pin 2 Nominal 1100 ohms reading depending on Pin 4 to Pin 3 Pin 5 to Pin 1 Nomina...

Страница 29: ...gas is Carbon Dioxide CO2 The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 740 55 5 sccm of CO2 In order to calculate the conversion factor for a gas mixture the following form...

Страница 30: ...estrictor assembly has been contaminated with foreign matter the pressure drop versus flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the re...

Страница 31: ...110 Z 290 BMG W 2451 3471 S 110 Z 292 BMG 1 6724 9523 S 110 Z 317 BMG 3 13176 30060 S 110 Z 226 BMG Materials BMG 316 Stainless Steel Electropolished NOTES If two sizes are allowed because of overlap...

Страница 32: ...4 8 Model SLA7840 Section 4 Maintenance Troubleshooting Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 THIS PAGE INTENTIONALLY LEFT BLANK...

Страница 33: ...lig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolg...

Страница 34: ...se refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de...

Страница 35: ...le des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c...

Страница 36: ...van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks...

Страница 37: ...rd p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine S...

Страница 38: ...doitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Referenc...

Страница 39: ...Model SLA7840 Installation and Operation Manual X PR SLA7800 RT eng Part Number 541B048AAG August 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 40: ...is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customer...

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