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Содержание SLA7810 Series

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...r 2008 Model SLA7810 SLA7820 Brooks Metal Sealed Pressure Controllers Model SLA7810D SLA7820D Digital I O DeviceNetTM Pressure Controller Model SLA7810A SLA7820A Analog I O Pressure Controller Artisan...

Страница 3: ...zards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock an...

Страница 4: ...instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is...

Страница 5: ...tion Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Model SLA7810 SLA7820 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Страница 6: ...on 3 1 Overview 3 1 3 2 Proportional Band and Integration Time Constant Adjustment 3 2 Section 4 Maintenance 4 1 Overview 4 1 4 2 Troubleshooting 4 2 Section A CE Certification CE Certification of Mas...

Страница 7: ...A7820 Installation and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guaranteed 888...

Страница 8: ...nd responsive controllers on the market today Superior Valve Technology The co planar valve offers unmatched performance Due to its simplified construction the valve exhibits superior repeatability st...

Страница 9: ...pressure A system block diagram is shown in Figure 1 3 The integration of pressure transducer control electronics and control valve into one unit results in a compact size The mounting dimensions are...

Страница 10: ...on Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Figure 1 2 Model SLA7810 SLA7820 Silicon Chip Configuration Figure 1 3 Model SLA7810 SLA7820 System Block Diagram Artisan Technology...

Страница 11: ...Part Number 541B047AAG December 2008 Figure 1 4 Model SLA7810A SLA7820A Analog I O Controller with 1 4 VCR Connections Figure 1 5 Model SLA7810D SLA7820D Digital I O DeviceNet Controller with 1 4 VCR...

Страница 12: ...ed quantity of process gas flows In this figure the mass flow controllers will supply the desired quantity and mixture of process gas while the pressure controller will maintain the desired reactor pr...

Страница 13: ...Downstream Controller Mode The controller is set to maintain the downstream process pressure constant independent of upstream pressure or flow variations This is factory configured Normally Open Norma...

Страница 14: ...Accuracy 0 5 F S including linearity and hysteresis for precision control Repeatability 0 1 full scale Control Range 20 1 Zero Stability 0 1 full scale per 30 days Ambient Temperature Limits Operating...

Страница 15: ...and I settings Input Output Offset 0 2 full scale voltage Proportional Gain User adjustable via Service port or over DeviceNet interface Integration Time User adjustable via Service port or over Devic...

Страница 16: ...5 5 Vdc 110 F S 5 Volt Reference Output 5 Volts 0 2 min Load 1 Kohms Pressure Setpoint Signals Command Setpoint Input Analog I O option only 0 5 Vdc Input will accept signals to 5 5 Vdc 110 F S Input...

Страница 17: ...A7810 SLA7820 Installation and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guarant...

Страница 18: ...etherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Remove the envelope containing the packing list Outside...

Страница 19: ...nce with the following Completion of form RPR003 1 Brooks Instrument Decontamination Statement A copy of this form can be downloaded from the Brooks website www brooksinstrument com or is available fr...

Страница 20: ...f positive shut off is required it is recommended that a separate shut off valve be installed in line 2 7 Gas Connections Standard inlet and outlet connections supplied on the Model SLA7810 and Model...

Страница 21: ...tallation however it is recommended that the minimum porosity that does not restrict the flow rate being used The filtering element should be periodically replaced or cleaned 2 10 Electrical Interface...

Страница 22: ...erface in DeviceNet mode is covered in the DeviceNetTM Supplemental Instruction Manual for Brooks Models SLA7810 and SLA7820 X DeviceNet PC eng 2 11 Remote Setpoint Command Input Analog Mode If the pr...

Страница 23: ...tion and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Model SLA7800 SLA7820 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guarant...

Страница 24: ...parameters in the intended application by the user The tuning of the P and I constants does not affect the calibration of the instrument Definitions Both proportional and integral control actions are...

Страница 25: ...es are interactive the P I controller is somewhat more difficult to tune Tuning the P I control Using the Brooks Service tool read the current values of P and I It is highly recommended that the P and...

Страница 26: ...1 Overview N o Routine maintenance is required on the Models SLA7810 and SLA7820 If an in line filter is used the filtering element should be periodically replaced This section provides the Following...

Страница 27: ...e controller appears to be functioning but cannot achieve setpoint verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow 4 Verify correct...

Страница 28: ...brated to 1000 torr full scale b 100 output equals 1000 torr c When the pressure controller is open to atmosphere the actual output signal from the pressure controller is 78 Atmospheric pressure is no...

Страница 29: ...ion and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Model SLA7810 SLA7820 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guarante...

Страница 30: ...West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschifte...

Страница 31: ...al Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipo...

Страница 32: ...rooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 Les connecteurs D ou de ty...

Страница 33: ...ring Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks Instrument 407 West Vine St Hatfield PA...

Страница 34: ...ertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda...

Страница 35: ...een oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment...

Страница 36: ...Installation and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Страница 37: ...only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application...

Страница 38: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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