Brooks On-Board 8, Инструкция по установке и обслуживанию

Страница: 24 / 56

1-14 ©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541
Figure 1-6:
ST
AT
U
S
R
S
-232
RE
LA
YS 24V
, 1
A
RS-2
3
2
RE
M
O
T
E
AU
X
TC
NE
T
W
O
R
K
1
2
3 4
5 6
13 15 16
18
7
8
11 10
9
LEGEND
1. Power Conditioning Module (PCM)
2. On-Board Network Connector
3. On-Board Network Pump Identification Switch
4. Auxiliary Thermocouple Gauge Connector
5. Remote Keypad Connector
6. Helium Return Connector
7. Helium Supply Connector
8. Rough Pump Connection
9. Air Supply Connection (60 - 80 psi, 1/8 NPT)
10. Purge Gas Connection (10 - 25 psig or 40 - 80 psig) 1/8 NPT
11. Exhaust Purge Valve Vent
19
17 12 14
Typical Flat On-Board 8 GLE Cryopump Component Identification