4-11
Brooks
®
Model 5860
i
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Table 4-4 Model 5860
i
Standard Restrictors
Range
Part Number
sccm Air Equivalent Flow
Size
Low
High
ACLFE
Wire Mesh
D
8.038
11.38
S110Z275*
E
11.25
15.93
S110Z276
F
15.75
22.30
S110Z277
G
22.05
31.23
S110Z278
H
30.88
43.73
S110Z279
J
43.23
61.21
S110Z280
K
60.52
85.70
S110Z281
L
84.73
119.9
S110Z282
M
118.6
167.9
S110Z283
N
166.0
235.2
S110Z284
P
232.5
329.3
S110Z285
Q
325.4
460.9
S110Z286
R
455.7
645.3
S110Z287
S
638.0
903.4
S110Z288
T
893.2
1265.
S110Z289
U
1250.
1771.
S110Z290
V
1750.
2479.
S110Z291
W
2451.
3471.
S110Z292
X
3431.
4859.
S110Z319*
Y
4804.
6802.
S110Z321
1
6724.
9523.
S110Z317
2
9388.
13337.
S110Z228
3
13176.
18667.
S110Z226
4
18457.
30060.
S110Z224
*Materials: BMT = 316 Stainless Steel (ACLFE only)
CVA = Hastelloy
®
C (ACLFE and Sintered)
DCA = Monel
®
R (ACLFE and Sintered)
BMA = Sintered 316 Stainless Steel (Wire Mesh and Sintered)
NOTE: For flow rates less than 8 sccm use the low flow plug, P/N 618-K-020-BMT in place of a
restrictor assembly.
